CN111273467B - Terahertz wavefront phase control device based on liquid crystal and wire grid metasurface - Google Patents
Terahertz wavefront phase control device based on liquid crystal and wire grid metasurface Download PDFInfo
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- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G02F2203/00—Function characteristic
- G02F2203/13—Function characteristic involving THZ radiation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
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- G02F2203/50—Phase-only modulation
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Abstract
本发明提出了一种基于液晶和线栅形超构表面的太赫兹波前相位控制装置，包括由下至上依次层叠的衬底、反射镜、电介质隔离层、由在线栅形超构表面电极中相邻栅极间灌注液晶形成的超构表面结构层、以及透射介质层，p偏振方向设定频率的太赫兹电磁波束由透射介质层射入；当超构表面电极接入外加电压时，对液晶施加的电压方向与太赫兹电磁波束传输方向正交。其中，超构表面电极中的间隔栅极彼此串联，形成叉指阵列电极，各间隔栅极接入相同的外加电压；或者超构表面电极中的各栅极彼此独立，用于分别控制接入各栅极的外加电压。本发明通过对液晶施加与太赫兹电磁波束传输方向正交的电压，并在可观的调制速率下实现对太赫兹电磁波束的波前相位控制。
The invention proposes a terahertz wavefront phase control device based on liquid crystal and wire grid metasurface, which comprises a substrate, a mirror, a dielectric isolation layer which are sequentially stacked from bottom to top, and a wire grid metasurface electrode formed by The metasurface structure layer and the transmissive medium layer formed by perfusion of liquid crystals between adjacent gates, the terahertz electromagnetic beam with the frequency set in the p-polarization direction is injected from the transmissive medium layer; when the metasurface electrode is connected to an applied voltage, the The direction of the voltage applied by the liquid crystal is orthogonal to the transmission direction of the terahertz electromagnetic beam. Among them, the spaced gates in the metasurface electrodes are connected in series with each other to form an interdigitated array electrode, and each spaced gate is connected to the same applied voltage; or the gates in the metasurface electrodes are independent of each other and are used to control the access respectively. applied voltage to each gate. The invention realizes the wavefront phase control of the terahertz electromagnetic beam under a considerable modulation rate by applying a voltage orthogonal to the transmission direction of the terahertz electromagnetic beam to the liquid crystal.
Description
Technical Field
The invention can be applied to the field related to terahertz waveband electromagnetic wave phase modulation, and particularly relates to a terahertz wave front phase control device based on liquid crystal and a wire grid-shaped super-structure surface.
Background
In the field of application of terahertz wave technology, the method has great significance for rapidly and efficiently modulating information such as intensity, phase and the like of terahertz wave signals in micro-nano scale and applying a plurality of terahertz waves. A Metasurface (Metasurface) refers to an array of electromagnetic antennas made of sub-wavelength structures. On a mesoscopic scale, through reasonable design of the appearance and arrangement of the optical antenna, the ultrastructural surface can effectively regulate and control parameters such as amplitude, phase and polarization of electromagnetic waves in a two-dimensional plane, the limitation of the traditional electromagnetic law is broken through, and the electromagnetic waves can be effectively cut on a sub-wavelength scale. The liquid crystal is a dielectric anisotropic material, and under the action of an applied electric field, the arrangement direction of liquid crystal molecules changes along with the magnitude of the electric field, so that the dielectric constant of the liquid crystal is changed. Based on the electric control adjustable characteristic of the dielectric constant of the liquid crystal material, the liquid crystal material is combined with a super-structure surface, and can be widely applied to various terahertz wave phase modulation devices and intensity modulation devices. In 2019, a research scholars such as Yin reports an electro-optic terahertz wave intensity modulation device based on liquid crystal and metal plasma Metamaterial (Metamaterial), the electro-optic intensity modulation device utilizes liquid crystal to be poured into a designed double-layer Metamaterial to form a composite structure, and the optical property of the liquid crystal can be changed by applying voltage, so that the frequency corresponding to the resonance of the device is changed, and the intensity modulation of a reflected light beam with a specific frequency is realized. In 2020, the researchers of Fan Chang and the like report a terahertz phase modulator based on the liquid crystal and silicon medium ultrastructural surface, the electro-optical intensity modulation device utilizes the liquid crystal to be poured into the silicon ultrastructural surface to form a composite structure, and the optical property of the liquid crystal can be changed by applying voltage, so that the optical response of the device is changed, and further the modulation of the phase of a transmitted light beam is realized. The two electro-optical devices realize large-amplitude modulation on the intensity or phase of the electromagnetic wave beam in the terahertz wave band. However, the electrode spacing for applying a voltage to the liquid crystal is in the order of hundreds of micrometers. These problems bring about limitations such as slow modulation rate and high applied voltage of the device, and further limit their practical applications. The specific analysis is as follows:
the response time of the liquid crystal includes increasing the rise time tau of the electric fieldonAnd decreasing the fall time tau of the electric fieldoffWhich can be respectively expressed as:
wherein, tau0The time for the liquid crystal director to change to the original 1/e; gamma ray1Is the viscosity coefficient of the liquid crystal; k33Is the bending elastic constant; and d is the liquid crystal electrode spacing. V is an applied voltage; vthIs the threshold voltage of the applied voltage. It can be derived from the formula that the response time of the liquid crystal when the voltage rises and falls is seriously affected by the too large distance between the liquid crystal electrodes, and the response time when the voltage rises can be reduced by increasing the applied voltage.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a terahertz wave front phase modulation device based on liquid crystal and a wire grid-shaped metamaterial surface. The invention can realize the wave front phase modulation of the terahertz electromagnetic wave beam under a considerable modulation rate by externally adding voltage.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a terahertz wave front phase control device based on liquid crystal and a wire grid-shaped super-structure surface, which is characterized by comprising a substrate, a reflector, a dielectric isolation layer, a super-structure surface structure layer and a transmission dielectric layer, wherein the substrate, the reflector, the dielectric isolation layer, the super-structure surface structure layer and the transmission dielectric layer are sequentially stacked from bottom to top; when the super-structure surface electrode is connected with an external voltage, the direction of the voltage applied to the liquid crystal is orthogonal to the transmission direction of the terahertz electromagnetic wave beam.
Furthermore, the spaced grids in the super-structure surface electrode are connected in series to form an interdigital array electrode, and the spaced grids are connected with the same external voltage. Or the grids in the super-structure surface electrode are independent of each other and are used for respectively controlling the applied voltage connected to the grids.
Furthermore, the period of the super-structure surface electrode is in a sub-wavelength scale, and the distance between two adjacent grid electrodes is 1-50 microns; each grid electrode in the super-structure surface electrode is a single layer formed by materials which are transparent and conductive to terahertz electromagnetic wave beams, or is a composite layer formed by a conductive layer and the single layer; the thickness of the single layer is in a sub-wavelength scale, and the thickness of the conductive layer is 10 nanometers to 1 micrometer.
Furthermore, the set frequency of the terahertz electromagnetic wave beam is 0.1THz-5 THz.
The invention has the following remarkable advantages:
the invention designs a super-structure surface structure with strong response to terahertz wave phase based on the optical characteristics of liquid crystal. Through reasonable design, under the change of the liquid crystal refractive index, the structure can form phase change of more than 300 degrees for the terahertz wave in the p polarization direction in the frequency range of 0.1THz to 5 THz. Meanwhile, because the device applies voltage in the direction orthogonal to the transmission direction of the electromagnetic wave based on the wire grid-shaped super-structure surface electrode, the electrode spacing of the liquid crystal is controlled to be in the order of ten microns or micron (the size is reduced by about 10 times compared with the electrode spacing of the traditional terahertz waveband liquid crystal modulator), higher modulation rate can be realized, and the amplitude of the applied voltage can be effectively reduced. In addition, the voltage of each wire grid super-structure surface electrode can be independently controlled, so that the wave front phase distribution of the emergent terahertz waves can be effectively regulated and controlled; further, by applying voltages to different electrodes, the modulation functions of phase, wavefront (convergence, deflection, and the like), and polarization of the terahertz wave beam can be realized. Since the size of the structure is related to the wavelength of the applied electromagnetic wave, the device can be applied to microwave, infrared and visible light bands by changing materials and scaling.
Drawings
FIG. 1 is a cross-sectional view of a terahertz wave front phase control device based on liquid crystal and a wire grid-shaped metamaterial surface, wherein a single layer is adopted as a metamaterial surface electrode.
Fig. 2 is a top view of the terahertz wavefront phase control apparatus shown in fig. 1.
FIG. 3 is a cross-sectional view of a terahertz wave front phase control device based on liquid crystal and a wire grid-shaped metamaterial surface, wherein a composite layer is adopted as a metamaterial surface electrode.
FIG. 4 is a top view of a terahertz wave front phase control device based on liquid crystal and a wire grid-shaped metamaterial surface, wherein an interdigital array is adopted as the metamaterial surface electrode.
Fig. 5 is a schematic view showing the alignment of liquid crystal molecules in the phase modulator according to embodiment 1 of the present invention when no external voltage is applied, wherein the incident direction of the terahertz wave is perpendicular to the plane of the paper.
Fig. 6 is a schematic view showing the alignment of liquid crystal molecules in the phase modulator according to example 1 of the present invention when an external voltage is applied, in which the incident direction of the terahertz wave is perpendicular to the plane of the paper.
Fig. 7 is a graph showing the variation of the reflection phase of the terahertz wave with the increase of the refractive index of the liquid crystal at normal incidence in embodiment example 1 of the present invention.
Fig. 8 is a graph showing the variation of the reflection energy of the terahertz wave with the increase of the refractive index of the liquid crystal at normal incidence in embodiment example 1 of the present invention.
Fig. 9 is a schematic diagram of the structure of the phased array in embodiment 2 of the present invention.
Fig. 10 is a schematic diagram of the phased array implementing directional deflection of reflected beams in embodiment 2 of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the detailed description and specific examples, while indicating the scope of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
In order to better understand the invention, an application example of the terahertz wave front phase control device based on the liquid crystal and the wire grid-shaped metamaterial surface is explained in detail below.
Fig. 1 to fig. 3 show structural schematic diagrams of a terahertz wave front phase control device based on liquid crystal and a wire grid-shaped metamaterial surface according to the present invention. The wave front phase control device comprises a substrate 5, a reflector 4, a dielectric isolation layer 3, a super-structure surface structure layer formed by pouring liquid crystal 1 between adjacent grids in a linear grid-shaped super-structure surface electrode 2 and a transmission dielectric layer 6 which are sequentially stacked from bottom to top, wherein a terahertz electromagnetic wave beam 7 with p polarization direction set frequency (the frequency range is 0.1THz-5 THz) is emitted into the wave front phase control device through the transmission dielectric layer 6; when the super-structure surface electrode 2 is connected with an external voltage, the direction of the voltage applied to the liquid crystal 1 is orthogonal to the transmission direction of the terahertz electromagnetic wave beam 7. The liquid crystal 1 (in the figure, the liquid crystal 1 and the super-structure surface electrode 2 are in contact with each other, or not in contact with each other) can flexibly select various liquid crystal materials which are transparent to the terahertz electromagnetic wave beam 7 and have a birefringence effect, such as 5CB and E7 or liquid crystal doped with organic macromolecules, and the liquid crystal 1 and the super-structure surface electrode 2 are equal in thickness. The super-structure surface electrode 2 has the functions of conducting electricity and generating electromagnetic resonance, and is a wire grid array composed of a plurality of independent grid electrodes as shown in fig. 2, and the distance between two adjacent grid electrodes is flexibly selected according to an application waveband (namely a terahertz waveband), and is generally 1-50 micrometers. The period of the wire grid array is on a sub-wavelength scale, typically in the range of one tenth of a wavelength to one wavelength scale. Since the gates are independent of each other, different voltages can be applied to each gate. The super-structure surface electrode 2 can be a single layer made of a material which is transparent (low loss) to the application wave band and can conduct electricity, such as doped silicon, and the doping concentration is flexibly selected according to the application wave band; a composite layer of the conductive layer 21 and the single layer 22 may be used, as shown in fig. 3. Because the doping concentration of the doped silicon transparent to terahertz waves is possibly low, the conductive effect is poor, and the conductive performance can be effectively improved by adopting the composite layer. When the super-structure surface electrode 2 adopts a single-layer scheme, the thickness is in a sub-wavelength scale, generally in a range from one tenth of one wavelength of an application waveband to one wavelength scale; with the composite layer approach, the thickness of the conductive layer 21 is about 10 nm to 1 μm, and the thickness of the single layer 22 is in the sub-wavelength scale, typically in the range of one tenth of one wavelength to one wavelength scale of the application band. The dielectric isolation layer 3 is used for keeping the insulation between the super-structure surface structure layer and the reflector 4, and various dielectric materials which are transparent to the application waveband can be flexibly selected, such as silicon dioxide, aluminum oxide and the like, and the thickness range of the dielectric isolation layer can be 5 nanometers to one half of the wavelength of the application waveband. The reflecting mirrors 4 may be respectively composed of various mirror surfaces with high reflectivity (the high reflectivity represents that the normal incidence reflectivity is greater than 50%), such as Distributed Bragg reflectors (Distributed Bragg reflectors), metal mirrors or Phonon polarization (Phonon polarization) reflecting layers, and the like, for reflecting terahertz waves. The substrate 5 and the transmission medium layer 6 can be made of common transparent dielectric materials such as silicon dioxide, silicon and the like; wherein the substrate 5 is used to provide physical support and electrical isolation for all structural layers thereon; the transmission medium layer 6 is used for packaging the super-structure surface structure layer and transmitting a terahertz electromagnetic wave beam 7 with a set frequency in an incident p-polarization direction.
In addition, the wire grid array shown in fig. 2 is replaced by a wire grid array through structural evolution, in which the spaced gates are connected in series with each other to form interdigital array electrodes, as shown in fig. 4.
To further illustrate the working principle of the device, two specific implementation examples are provided. The first embodiment is a phase modulator, and the second embodiment is a phased array.
In one embodiment, the operating frequency of the phase modulator is 0.5 THz. As shown in FIG. 3, the liquid crystal material selected for the liquid crystal 1 is E7, and when the applied voltage is 0-15V, the refractive index change in the terahertz waveband is about 1.55-1.7. The reflector 4 is made of gold and has a thickness of 100 nm. Alumina was selected as the material constituting the dielectric isolation layer 3, with a thickness of 200 nm. The super-structure surface electrode 2 selects silicon and gold as a composite layer of constituent materials, the gold thickness of the conductive layer 21 is 100 nanometers, the silicon doping concentration in the single layer 22 which is transparent to the applied wave band and can be formed by the conductive material is 1.4 multiplied by 1014The monolayer 22 is 130 microns thick per cubic centimeter. The wire grid type super-structured surface electrode 2 uses an interdigital array electrode as shown in fig. 4, the period d of the array electrode is designed to be 305 micrometers according to a set frequency (0.5THz), and the interdigital distance is 20 micrometers. Because the distance between the adjacent interdigital electrodes is 20 micrometers, compared with the traditional mode of arranging the electrodes along the electromagnetic wave propagation direction, the distance between the electrodes arranged on the two sides of the liquid crystal is effectively reduced. The substrate 5 and the transmission medium layer 6 for packaging are made of silicon dioxide, and the thickness of the silicon dioxide is 500 micrometers. The frequency of the incident p-polarized terahertz electromagnetic beam 7 is selected to be 0.5THz. As shown in fig. 5 (in order to more clearly show the orientation of the liquid crystal molecules in the liquid crystal 1, the gate widths of the liquid crystal 1 and the super-structured surface electrode 2 in fig. 5 and 6 are not drawn to scale and are only schematic diagrams), when no external voltage is applied, the orientation of the liquid crystal molecules in the liquid crystal 1 is influenced by the direction of the interdigital array structure, pointing to the interdigital extension direction, and the refractive index of the liquid crystal 1 for the incident terahertz electromagnetic beam 7 in the p-polarization direction is 1.55. When an external voltage is applied, as shown in fig. 6, the liquid crystal molecular orientation in the liquid crystal 1 is driven by the voltage difference between the adjacent gates of the interdigital, and the refractive index of the liquid crystal 1 in the direction tending to be perpendicular to the interdigital to the incident terahertz electromagnetic beam 7 in the p-polarization direction gradually increases from 1.55 to 1.7 with increasing voltage. In this process, the phase of the reflected beam of the terahertz electromagnetic beam 7 with the frequency of 0.5THz changes after passing through the phase modulator, and the phase change can reach 324 ° as shown in fig. 7. During this phase modulation change, the terahertz beam reflection efficiency at this frequency can be maintained above 90%, as shown in fig. 8.
In the second embodiment, the operating frequency of the phased array is 0.5 THz. The basic structure is shown in fig. 2 and 3. The structure and the voltage applying manner of the wire grid type super-structured surface electrode 2 are as shown in fig. 9, the gates are independent of each other, the voltage difference between the adjacent gates can be independently controlled, and other configurations are consistent with the configuration of the phase modulator in the first embodiment. As shown in fig. 10, since the voltage difference between adjacent gates can be independently controlled, with the device of the present embodiment, the reflected terahertz beam 8 formed by the incident terahertz electromagnetic beam 7 with the p-polarization direction set frequency after being reflected by the device can have the same gradient phase difference between each pair of gates
So that the wave beams reflected by the adjacent grids generate wave path difference on the equiphase surface
λ is one wavelength of the terahertz band. The following geometrical relationship exists between the gate period d and the wave path difference Δ R: Δ R ═ d · sin θ, indicating terahertz waves reflected via the deviceA deflection of the angle theta occurs. Therefore, through external voltage control, the device can realize the wave front phase modulation of the terahertz wave band and realize the deflection of a set angle on normal incidence terahertz waves.
The preparation method of the phase modulator in the first embodiment and the second embodiment of the present invention can be referred to as follows:
And 2, evaporating a gold layer of about 50 nanometers (the thickness of a reflector is one-half of that of a reflector 4) on a quartz plate (a substrate 5) with the thickness of 500 micrometers.
And 3, carrying out gold bonding on the samples obtained in the steps 1 and 2 to form a reflector 4.
And 4, thinning and polishing the silicon wafer part in the sample formed in the step 3 to 130 micrometers to be used as the single layer 22 in the super-structure surface electrode 2.
And 5, evaporating a 100-nanometer gold film on the sample formed in the step 4 to form a conductive layer 21 in the super-structure surface electrode 2.
And 6, carrying out structured etching by utilizing a photoetching technology and an etching technology to form the super-structure surface electrode 2.
And 7, pouring liquid crystal 1 between the grids of the super-structure surface electrode 2 obtained in the step 6 and packaging by using a quartz plate (transmission medium layer 6).
In conclusion, the invention adopts the liquid crystal and the super-structure surface electrode structure which are arranged in a wire grid shape; a voltage applying mode which is orthogonal to the transmission direction of incident electromagnetic waves is adopted for liquid crystal; furthermore, the external voltage of each grid electrode can be independently controlled, and the device can realize different functions through different external voltage application modes; in addition, the structural design of the application example of the present invention is directed to terahertz waves, but can be applied to microwave, near infrared and visible light bands as well.
The present invention and its embodiments have been described above schematically, without limitation, and what is shown in the drawings is only one of the embodiments of the present invention and is not actually limited thereto. Therefore, if the person skilled in the art receives the teaching, it is within the scope of the present invention to design the similar manner and embodiments without departing from the spirit of the invention.
Claims (8)
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| CN112003021A (en) * | 2020-08-14 | 2020-11-27 | 上海交通大学 | Method and system for expanding liquid crystal tuning range by utilizing metamaterial characteristics |
| CN114609803B (en) * | 2020-12-04 | 2024-07-19 | 清华大学 | Dynamic super-structured surface based on liquid crystal material |
| CN112952392B (en) * | 2021-01-26 | 2022-12-20 | 东南大学 | Terahertz digital programmable super surface for liquid crystal regulation and control |
| CN113394647B (en) * | 2021-06-25 | 2022-03-18 | 重庆邮电大学 | A terahertz wave phase control system based on line bias position |
| CN117215105A (en) * | 2022-06-02 | 2023-12-12 | 华为技术有限公司 | Liquid crystal device, optical modulation device and system |
| CN115167026B (en) * | 2022-08-04 | 2023-07-14 | 兰州大学 | A tunable multi-mode dual-frequency high-efficiency reflective polarization conversion device |
| CN115513653B (en) * | 2022-10-24 | 2023-05-12 | 北京星英联微波科技有限责任公司 | Two-dimensional electrically tunable material-based encodable four-beam antenna, super-surface module and composite antenna structure |
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