JPH04181231A - Waveguide type electrooptical device - Google Patents

Abstract

PURPOSE:To easily form a thin film by interposing a transparent electrode and/or a buffer layer between electrodes consisting of an opaque insulating substance and acting as a function for the change of refractive index which is generated in an optical film in the case of impressing voltage on the electrode. CONSTITUTION:An organic non-linear type optical film 4 is the crystal of a light deflecting element and consists of a thin film whose thickness (d) is <=100mum. The electrodes 5 and 6 are formed on both sides of the optical film 4, and if the electrodes 5 and 6 are opaque to use light, the buffer layer consisting of the insulating substance which is transparent to the light is interposed to form the electrode. When the voltage is impressed between the electrodes 5 and 6, the refractive index of the optical film 4 is changed and light advancing straight is deflected by an angle theta. Since the organic non-linear type optical material is easily made into the thin film, the deflection angle thetais made large. Then, a scanning device is miniaturized and the device which is not provided with a movable part is realized, then the service life of the device is made longer, the assembling and the adjustment thereof are simplified.

Description

[Detailed Description of the Invention] (Summary) Regarding waveguide-type electro-optical devices, we have developed a high-performance waveguide-type electro-optical device that takes advantage of the features of organic nonlinear optical materials, which have a large electro-optic effect and can be easily made into thin films. The object of the present invention is to provide an electro-optical device using an organic nonlinear optical material as a waveguide, wherein the organic nonlinear optical material is an organic nonlinear optical film having a thickness of 100 cm or less, and the optical film is The sandwich structure is sandwiched on both sides by electrodes that are transparent to the light used and/or opaque electrodes that have an insulating buffer layer transparent to the light used on the side of the optical film. and the device is configured to operate as a function of the refractive index change generated in the optical film when a voltage is applied between the two electrodes.

[Industrial Field of Application] The present invention relates to a waveguide-type electro-optic device, and more specifically, to an electro-optic device using an organic nonlinear optical material as a waveguide. The invention inter alia comprises:
Waveguide-type organic optical deflection elements (herein also referred to as "optical deflectors") suitable for optical scanning, laser diodes (LD
), photodiodes (FD), organic E○ devices that are combined with semiconductor devices (semiconductor ICs), etc.
This invention relates to deflector type optical switches and other EO devices. Note that the EO device means an electro-optical device. The EO device according to the present invention can be advantageously used not only in the fields of optical communications and optical computers, but also in medical, consumer, and other fields.

[Prior Art] As is well known, a nonlinear optical material is a material that exhibits a second-order or third-order nonlinear optical effect when a voltage is applied or under a strong electric field of laser light. Since it performs many element functions such as switching and optical amplification, it is attracting attention as a core material in fields such as optical communications and optical computers. Typical conventional nonlinear optical materials are inorganic materials, such as KD2PO4 (KDP) and LiN.
Crystals such as b0z, KNbO3, and LiTa0z are known. Since around 1983, development and research on organic nonlinear optical materials has been actively conducted. Typical organic nonlinear optical materials are as follows: Recently, LiNb0:+ (abbreviated as LN) has an electro-optic effect (Pockels effect) that is about 10 to 100 times stronger. Organic nonlinear optical materials that can be easily made into thin films have also emerged and are attracting industry attention.

By the way, one of the main fields of application of nonlinear optical materials is optical scanning. For example, a laser printer device scans a laser beam to form a latent image on a photosensitive drum by rotating a polygon mirror or a hologram disk, and after developing this latent image, it is transferred onto plain paper, etc. However, nonlinear optical materials can be advantageously used for laser beam scanning. This is because the above-mentioned mechanical optical scanning device has moving parts, which poses problems in terms of lifespan, assembly, and adjustment, and also requires a predetermined optical path length, making the device large. It is. Therefore, in order to improve the performance of such an optical recording device, it is conceivable to use a non-mechanical optical scanning device without moving parts. Furthermore, if high-speed optical scanning becomes possible, the range of applications in the field of optical information processing can be expanded.

Conventionally, inorganic nonlinear optical materials have been used for non-mechanical optical scanning devices. As shown in Fig. 1, this conventional non-mechanical optical scanning device (although Fig. 1 shows the basic principle of the present invention, the basic principle of the conventional device also depends on the differences in nonlinear optical materials). It is composed of an inorganic nonlinear optical film 4 made of a single crystal of lithium niobate (LiNbO: It is something that Lithium niobate (LN) single crystal 4
When light is incident, it normally travels in a straight line as shown by arrow a, but when a voltage is applied between the picture electrodes 5 and 6, the refractive index of the area between the prismatic electrodes 5 and 6 changes.
The emitted light is deflected as shown in 2. The deflection angle θ at this time increases as the applied voltage increases (thus, by gradually increasing the voltage, optical scanning becomes theoretically possible.

However, as mentioned above, a light deflection element using an LN crystal (
With the optical scanning device), only a deflection angle θ of about 1° can be obtained with an applied voltage of 10 kV, and the performance is extremely low.
It lacks practicality as a light deflection element. To explain more specifically, the refractive index change Δn when a voltage is applied between the electrodes as described above is expressed by the following formula (1). Here, r is the electro-optical coefficient of the LN crystal, ■ is the applied voltage, and d is the thickness of the crystal part of the device. However, LN has an electro-optic coefficient r of 30 pm.
/V, and the crystal thickness d is also 1III.
It can only be made thinner to about 11. Therefore, as mentioned above, the deflection angle θ is extremely small, making it impractical as an optical deflection element for optical scanning.
It is desired to realize an optical deflection element that has a large deflection angle even when the applied voltage is low and can be put into practical use sufficiently.

Another electro-optic device that utilizes nonlinear optical materials is an optical switch. However, the conventional LiNb0z([,N)
Directional coupler type optical switches using As a result, defects such as loss and crosstalk increase, and the driving method and electrode extraction become complicated. Therefore, it is also desired to realize an improved optical switch.

Another electro-optical device using nonlinear optical materials is an optical modulator. This device, like the optical deflection element, optical switch, etc. described above, can be driven by providing an electrode and applying a voltage. Therefore, these related devices are referred to as "optical circuit devices using the Pockels effect." I can do it. Such optical circuit devices, however, have problems such as the electrode pattern being fixed, resulting in a loss of flexibility in device function, and the difficulty of drawing out the electrodes. Therefore, it is also desired to realize an improved optical writing type optical circuit device.

Furthermore, although the present invention does not utilize nonlinear optical materials, the present invention has made it possible to use organic nonlinear optical materials, and as a result, there have been some devices that have obtained unexpected effects. We will also briefly explain these devices.

First, there is a projection device using an optical writing type light valve. This type of projection device is TPT (Th
n Film Transistor) driven liquid crystal (L
C) Light bulbs using light bulbs have become popular recently.

However, in the case of such an LC light valve, the number of pixels is about 600 x 400"?: Ali, HD (
(High Definition) The resolution is lower than that of a TV or slide projector. On the other hand,
The resolution of the photoconductor/LC laminated type LC light valve is close to that of HDTV specifications (1000 x 1000 pixels), and in principle 50A/mm (300
It is possible to resolve up to a resolution of 0x3000). However, the scanning speed when writing with a laser beam is limited by conventionally used mechanical optical scanning means such as polygon mirrors and gal-pan mirrors, making it impossible to display moving images.

Second, there is an X-ray image reading device that uses stimulated luminescence. This device uses a stimulable phosphor to absorb X-rays that have passed through an object (r-X-rays in this specification refers to radiation in general) or X-rays emitted from an object. Then, by exciting this phosphor in a time-series manner with electromagnetic waves (excitation light) such as visible light and infrared rays, the chi-ray energy accumulated in the phosphor is released into fluorescence (photostimulated luminescence). It is used in a system that emits this fluorescent light photoelectrically to obtain an electrical signal and converts this electrical signal into an image.It has excellent sensitivity and gradation, so it can replace an X-ray device. It is expected as such. However, such an X-ray image reading device presents the problem that the reading optical system is too large.

Thirdly, there is an optical head for scanning light from a semiconductor laser in an optical disk device. Conventionally, when writing and/or reading information using an optical head, it was necessary to move the optical head as the disk rotated, which limited the speed of writing and reading. The optical head is equipped with a laser light source and an optical system for focusing light from the light source on the disk surface, and can be driven by an attached motor.

[Problem to be solved by the invention]

An object of the present invention is to provide a high-performance waveguide-type electro-optic device that takes advantage of the characteristics of organic nonlinear optical materials, such as having a large electro-optic effect and being easily made into a thin film.

Another object of the present invention is to provide an optical deflection element that has a large deflection angle even when applied voltage is low and can be put to practical use.

Yet another object of the present invention is to provide an optical switch that does not have the drawbacks of conventional directional coupler type optical switches.

Yet another object of the present invention is to provide a projection device that does not have the drawbacks of conventional projection devices using TPT driven LC light pulp or photoconductor/LC lamination type LC light valves.

Another object of the present invention is to provide an optical circuit device in which electrodes can be simply drawn out and has high functional flexibility.

Furthermore, another object of the present invention is to provide an X-ray image reading device in which the reading optical system is reduced in size and the reading speed is increased.

Furthermore, another object of the present invention is to provide an optical disc device that can write and read information at high speed.

Although the present invention has various other purposes,
These objectives will be readily understood from the detailed description below.

[Means for Solving the Problems] As a result of intensive research to achieve the various objects described above, the present inventors have discovered an electro-optical device using an organic non-linear optical material as a waveguide, which is an electro-optical device using an organic non-linear optical material as a waveguide. is an organic nonlinear optical film having a film thickness of 100 ina or less, and the optical film has an electrode transparent to the light used and/or an insulating buffer layer transparent to the light used, on both sides of the optical film. The device is sandwiched between opaque electrodes on the sides to form a sandwich structure, and the device operates as a function of the refractive index change caused in the optical film when a voltage is applied between the electrodes. It has been discovered that all of the desired objectives can be achieved by a waveguide type electro-optic device characterized by the following characteristics.

In one aspect, the waveguide type electro-optic device according to the present invention can take the form of an optical deflection element (or optical deflector), and in this case, the light incident on the optical deflection element is When applied, light is deflected by the refractive index change in the nonlinear optical film. The optical deflection element of the present invention can preferably have the following aspects: (1) At least one of the opposing electrodes has a prism shape.

(2) The organic nonlinear optical film has a prism shape.

(3) A waveguide lens is formed between the prism-shaped electrode or the prism-shaped organic nonlinear optical film and the light input and/or light output portion.

(4) In (3) above, the waveguide lens itself is also formed of a nonlinear optical material, and is configured to apply a voltage between electrodes disposed on both surfaces of the waveguide lens.

(5) The light emitting end face of the light deflection element is a gently curved surface.

(6) A cylindrical lens is formed along the light output end face of the optical deflection element.

(7) It has a main waveguide and a plurality of branch waveguides branched from the waveguide, and an optical switch or a waveguide diffraction grating is arranged between the main waveguide and each branch waveguide. and the optical deflection element described above is connected to the tip of each branch waveguide.

(8) In (7) above, only the optical switch and the optical deflection element are formed of a nonlinear optical material, and the other parts are formed of a linear optical material.

Another waveguide type electro-optic device according to the present invention is
On one surface, at least one of the opposing electrodes is patterned into an arbitrary shape such as a lens shape, a prism shape, a grating shape, or a stripe shape, and these electrode patterns are further formed into a plurality of small electrodes. It can take the form of a device (EO device) that is divided into The EO device of the present invention preferably has two (1) electrode patterns and divisions of the electrode pattern, which can have the following aspects: what is being done in

(2) A part of the waveguide is formed of an organic nonlinear material, and the other part is formed of another material.

(3) In (2) above, the organic nonlinear optical film is formed only in at least a portion of the area where the electrode pattern is not on the base, and the area where the electrode pattern is on the base is formed of another material. To be there.

(4) The organic nonlinear optical material is oriented perpendicularly or diagonally with respect to the substrate.

(5) The device is combined with elements such as LDs (laser diodes), PDs (photodiodes), and semiconductor ICs.

(6) The organic nonlinear waveguide is patterned, and other waveguide parts are formed of other materials.

Specific examples of such devices include an optical deflector, a deflector-type optical switch, a vertical optical switch, and an EO device on a semiconductor IC, although one example will be explained in the following embodiments.

Another waveguide type electro-optic device according to the present invention is
In one aspect, it can take the form of an optical switch composed of a plurality of optical deflection elements.

According to this optical switch, the optical path can be advantageously switched using a waveguide type solid state optical deflector using an organic nonlinear optical film.

Another waveguide type electro-optic device according to the present invention is
In one aspect, it can take the form of a solid-state optical deflection element (or solid-state optical deflector) for writing on a projection device using an optically written light valve. Writing can be performed by laser beam scanning using the optical deflection element and the rotating mirror.

In the projection device as described above, it is preferable to arrange a plurality of light valves for each color of projection light, and to arrange a plurality of solid-state light deflection elements corresponding to each light valve.

Another waveguide type electro-optic device according to the present invention is
In one aspect, an optical waveguide layer with Pockels effect (
It can take the form of an optical writing type optical circuit device having a laminated structure including an organic nonlinear optical film) and a photosensitive layer that functions as a photoconductor, photodiode, phototransistor, etc.

The optical circuit device of the present invention can preferably have the following aspects: (1) A voltage is applied to the electrodes provided on the upper and lower surfaces of the laminated structure, and light is applied to the photosensitive layer. Controlling guided light by changing the voltage applied to the optical waveguide layer depending on the incidence.

(2) A small portion of the optical waveguide layer is made of a nonlinear optical material.

(3) In (1) above, optical writing is performed by laser beam scanning or pattern irradiation.

Another waveguide type electro-optic device according to the present invention is
In one aspect, it can take the form of a solid-state optical deflection element (or solid-state optical deflector) for scanning and reading light from a semiconductor laser in an X-ray image reading device using stimulated luminescence.

The solid-state optical deflection element of the present invention can preferably have the following aspects: (1) Optical scanning in an X-ray image reading device is performed using light deflected by the solid-state optical deflection element. Guide the X-ray image to the X-ray image conversion plate through multiple optical waveguides.

(2) Arranging a plurality of semiconductor lasers (LDs) and solid-state optical deflection elements and reading them in parallel.

(3) Laminating a light emitting layer (a layer that guides light from the LD solid-state optical deflection element) and a light collecting layer (a layer that guides light to the photodiode).

(4) In (3) above, a reading light cut filter is provided on the end face of the light collecting layer.

(5) In (3) above, a substance having a larger absorption coefficient for reading light than for stimulated light is added to the waveguide (layer).

(6) In (3) above, a microlens array is provided on the end face.

Another waveguide type electro-optic device according to the present invention is
In one aspect, it can take the form of a solid-state optical deflection element (or solid-state optical deflector) for an optical head for scanning light from a semiconductor laser in an optical disc device. When the solid-state optical deflection element of the present invention is used, a semiconductor laser (LD)
and a solid-state optical deflection element are arranged in an array, each LD light is deflected, and the light is irradiated onto the optical disk to write or read information. In addition, at that time, the photodiodes should also be arranged in an array to parallelize the reading.
Alternatively, as in the case of the solid-state light deflection element for an X-ray image reading device described above, a light emitting layer (a layer that guides light from the LD solid-state light deflection element) and a light collection layer (a layer that guides light from the LD solid-state light deflection element) to a photodiode or photomultiplier may be used. It is preferable to laminate the conductive layer).

Another waveguide type electro-optic device according to the present invention is
In one aspect, it can take the form of a device in which a waveguide made of an organic nonlinear optical material or a waveguide partially made of an organic nonlinear optical material is composited on a semiconductor element, semiconductor IC 1, or other semiconductor device. A preferred example of such a device is a device in which an optical switch is built on a semiconductor device.

In practicing the present invention, a wide variety of organic nonlinear optical materials known in the art can be used to form waveguides. For example, MNA, DAN, MNMA as shown in the prior art section.

NPP is one example, and pendant addition type polymer is another example. However, it is more preferable, for example, to have a conjugated main chain in the molecule, and a plurality of donor groups and acceptor groups A are added to the conjugated main chain, for example, as previously completed by the present inventors. organic nonlinear optical material (
Polymers of diacetylene type, polyene type, graphite type, polyphenyl type, polyacene type, etc.) can be advantageously used. For more details about such organic nonlinear optical materials, see, for example, Japanese Patent Application Laid-Open No. 1-16352 and Japanese Patent Application No. 1-66048 (March 20, 1999).
Patent Application No. 1-66046 (filed in March 1999)
(filed on April 20th), and the specification of Japanese Patent Application No. 2-8459 (
(filed on January 19, 1990), etc.

Other useful organic nonlinear optical materials include 4'-nitropenzylidene-3-acetylamino-4-
Methoxyaniline (?!NBA), 4'-nitropenzylidene-3-bromoacetylamino-4-methoxyaniline (MNBA-Br), 4'--1-trobenzylidene-3-chloro-4-hydroxyaniline (HN
BC) etc.

Furthermore, if it is desirable that the constituent molecules be oriented perpendicularly or obliquely to the substrate in the length direction during film formation, another application by the present inventor (filed on March/P., 1990)
As disclosed in and at least one of the hydrogen bond-forming groups is attached to a connecting conjugated chain at or near the longitudinal center of the molecule. It is recommended that Preferred examples of such materials include the following: In the above formula, hydrogen bond forming groups R, R' and Rrr may be the same or different, for example -NO□, -NH2゜- O
-Me (Me=methyl group; the same applies hereinafter), carboxyl group, -NHCOCH3, hydroxyl group-containing group, etc., and the donor group and acceptor group A are the following first groups, respectively.
Those listed in the table and others. Furthermore, a polymer obtained by polymerizing an epoxy monomer and a nonlinear optical molecule having an amino group can also be used.

The organic nonlinear optical film used as a waveguide in the electro-optic device of the present invention can be formed on a substrate or other substrate using various techniques from the above-mentioned nonlinear optical materials. It can be membraned. Suitable film forming methods include, for example, the Langmuir-Prodgett (LB) method, vacuum evaporation method, and epitaxial growth method.

- For example, when the organic nonlinear optical material is made of a conjugated polymer, the organic nonlinear optical film is prepared by depositing a monomer capable of forming such a conjugated polymer on a substrate and polymerizing the seven polymers by irradiating light. It can be produced by a method comprising: This film formation process is
Preferably, the method includes orienting and polymerizing monomers using an electric field. This film forming process can be carried out under various conditions, and is preferably carried out under the following conditions.

(1) Apply a vacuum, e.g. MBE (llolecu
larbea IIlepitaxy) or MBD (mo
regular beam deposition)
Film formation shall be performed by

(2) The starting monomer is caused to fly onto the substrate in a gaseous state and is deposited on the substrate, and the gaseous monomer in the Wm is derived from the raw material powder in a cell (Knudsen cell) placed in the reaction chamber. or introduced from outside the reaction chamber.

(3) The light irradiated to convert the monomer deposited on the substrate into a polymer is visible light or ultraviolet light.

(4) Light irradiation should be carried out simultaneously with the flying gaseous monomer, or intermittently, or alternatively, light irradiation and monomer flying should be carried out alternately.

(5) In making the gaseous monomer fly onto the substrate,
A single monomer gas or multiple types of monomer gases may be made to come in at the same time or alternately.

(6) After forming a film with monomers, a polymerization reaction is caused by a photoreaction.

[For production]

The action of the waveguide type electro-optic device according to the present invention is as follows.
The invention can be fully understood by referring to the basic principle of the waveguide type organic optical deflection element of the present invention shown in the figures.

In the perspective view of the device shown in FIG.
is a crystal of a light deflection element and is made of an organic nonlinear optical film. This organic nonlinear optical film 4 has a thickness d of 10 (b
It consists of a thin film of less than m.

Electrodes 5 and 6 are formed on both sides of this organic nonlinear optical film 4. The electrodes 5 and 6 may be formed directly on both sides of the linear optical film 4 as long as they are transparent to the light used, but if the electrodes 5 and 6 are opaque to the light used. If present, electrodes are formed through a buffer layer (not shown) made of an insulator that is transparent to the light used.

When no voltage is applied between the two electrodes 5 and 6, even if light enters the illustrated device, the light travels straight and exits as shown by the arrow a1, but when a voltage is applied between the picture electrodes 5 and 6, Since the refractive index of the linear optical film 4 between the two electrodes 5 and 6 changes, the light is deflected in the direction of the arrow a2.

Organic nonlinear optical materials can easily be made into thin crystal films, and the film thickness d
is LooI! Since the film can be formed as thin as WI or less, the deflection angle θ can be increased, as is clear from the above equation (1). Moreover, the organic nonlinear optical material is LiNb0:+1
Since it has a Pockels effect of 0 to 100 times, the electro-optic coefficient r mentioned above is large, and from this point as well, the deflection angle θ can be greatly expanded.

[Example] The accompanying drawings are schematic diagrams showing preferred examples of waveguide type electro-optic devices according to the present invention. Note that it should be understood in advance that the present invention is not limited only to these examples. Furthermore, in each figure, the same reference numbers refer to the same members.

First, how the waveguide type organic optical deflection element according to the present invention is actually implemented will be explained using the following first to fifth embodiments. FIG. 2 is a perspective view showing a first embodiment of the present invention. 7 is a quartz or Si wafer, on which
Electrode 6.5IXNyOz+TtOX, Ta205+
A dielectric buffer layer 8 made of Mac, Yz03+510x, etc., an organic nonlinear optical film 4, a buffer layer 9 having the same composition as the buffer layer 8, and an electrode 5 are formed in this order. As electrode 5.6, Aj! , Ti, etc. Also I
If a transparent electrode such as TO is used, a voltage can be effectively applied to the organic nonlinear waveguide 4 even if the buffer layer 8.9 is omitted.

As in this example, at least one side (upper side in this example)
The electrodes 5 are patterned 51 and 52 like two prisms facing each other, with +■ [■] on one side and -V on the other.
(V) is applied to the counter electrode 6.

Then, the refractive index of the 52 electrodes on one side becomes +Δn, and the refractive index of the 51 electrodes on the other side becomes -Δn, and the refractive index near the interface between the electrodes 51 and 52 is doubled. Therefore, the first
A larger deflection angle θ can be obtained than with a single element as shown in the figure.

Here, the patterning of the electrodes is as shown in the upper electrode 5.
The lower electrode 6 may be used in common, but it is also possible to use a divided pattern for both the upper and lower electrodes and apply a voltage to each electrode independently.

Furthermore, the number of prism-shaped electrodes is not limited to two, and may be one as shown in FIG. Alternatively, three or more cascades may be used. That is, by arranging the waveguide-type organic optical deflection elements shown in FIG. 2 in series in multiple stages, the
A large deflection angle can be obtained.

Note that the same effect can be obtained even if the nonlinear waveguide 4 itself is formed into a prism shape instead of providing the electrodes 51, 52.6.

FIG. 3 is a plan view showing a second embodiment of the present invention, and the cross-sectional structure is the same as that of the example shown in FIG. That is, 4 is a prism-shaped organic nonlinear waveguide, and electrodes are formed above and below with a buffer layer in between. A waveguide lens 10 also made of an organic nonlinear waveguide is disposed in front of the organic nonlinear waveguide 4. Therefore, the incident light enters the organic nonlinear waveguide 4 after being collimated by the waveguide lens 10.
By applying a voltage to both sides of the beam, the emitted light is deflected by an angle θ.

During manufacturing, the circumference P1 of the waveguide lens 10 is 5iO.
A linear material such as Z is laminated, and as the waveguide lens 10, TiO2 having a higher refractive index than SiO□ or the like is laminated. In the region P2 on the output side of the organic nonlinear waveguide 4, Ti,
A material having a refractive index close to that of the organic nonlinear waveguide 4, such as Si, O, etc., is used. Note that if the area of the waveguide lens 10 is formed into a concave lens pattern, the surrounding area P1
A material with a smaller refractive index may also be used.

The material of the waveguide lens 10 may be linear or nonlinear; however, if it is made nonlinear, the focal length can be changed by applying a voltage, making it possible to finely adjust the optical path.

In addition, in this embodiment, the prism portion 4 and the lens portion 10
Only one uses an organic nonlinear optical material, and the others use a linear waveguide (eg, the dielectric waveguide mentioned above).

FIGS. 4(A) and 4(B) show a third embodiment, in which, unlike the case of FIG. 3, a nonlinear waveguide 4 is formed on one surface,
Prism-like electrodes 5 (6) and oval electrodes 11 on both the upper and lower surfaces
is formed. Then, by applying a voltage between the upper and lower electrodes, a prism (deflection element) and a variable focus lens are formed depending on the shape of the electrodes. With such a configuration, light scattering and total reflection due to the difference in refractive index between the prism or lens portion and other regions can be avoided, and a good device can be realized.

Furthermore, by forming the output end face 12 into a curved surface, the quality of the output beam can be made uniform. That is, in the configuration as shown in FIG. 3, the emitted light is scattered at the corners and slopes of the emitting end face, and is emitted randomly. In contrast, by creating a gently curved surface as shown by reference number 12,
The emission direction can be controlled to be constant.

Furthermore, as shown in FIG. 4 (B) when viewed from the line segment IVB-IVB in FIG. It is possible to suppress the diffusion of the light beam to. This cylindrical lens 13 can be realized by using a polymer microlens or by micromachining the end face.

FIG. 5 is a perspective view showing a fourth embodiment, which has a configuration in which the prism facing type shown in FIG. 2 and the electrode lens shown in FIG. 4 are combined. That is, as in the embodiment shown in FIG. 4, an organic nonlinear waveguide 4 is formed on one surface, and prismatic electrodes 51 and 52, a counter electrode 6, and an oval electrode 11 are formed on both upper and lower surfaces thereof. In this embodiment, as in the case of FIG. In addition, the picture electrode 5
Since the refractive index near the interface between 1 and 52 is doubled, the deflection angle θ is doubled. Then, the electrode 1 of the waveguide lens
By controlling the voltage applied to 1, the focal length can be adjusted.

Note that even if the electrode 11 of the waveguide lens is formed into a concave lens shape and the applied voltage is reversed to reduce the refractive index,
A similar effect can be obtained.

Further, the lens section may also be provided between the emission section and the prism. In this case, the coupling distance of the output beam can be controlled.

FIG. 6 shows a fifth embodiment, in which optical deflection elements Di, D2. This is an example in which D3... are provided in parallel. 14 is a main waveguide, and a plurality of waveguides 15a and 15b are connected to the main waveguide 14.

15c... are branched, and each branch is provided with an optical switch 16a.

16b, 16c, . . . are arranged. At the tip of each branch waveguide 15a, 15b, 15c..., optical deflection elements DI, D2... D3... exists, and is arranged in an array.

Note that the main waveguide 14 and the branch waveguide 15a.

15b, 15c... are also composed of organic nonlinear waveguides, and by forming strip-shaped electrodes on both the upper and lower surfaces of the branch part and applying a voltage to change the refractive index of the organic nonlinear waveguide, Optical path can be switched.

Each optical deflection element D1. D2. By arranging the photosensitive drum 17 in front of D3..., a laser printer can be realized.

For example, the optical switch 16a is driven to direct the incident beam to the first optical deflection element DI, and the first 50 dots are scanned by the optical deflection element D1. Next, drive the optical switch 16b to guide the incident beam to the second optical deflection element D2,
The light deflection element D2 scans from the 51st dot to the 100th dot. Next, the optical switch 16c is driven to guide the incident beam to the third optical deflection element D3, and the optical deflection element D3 scans from the 101st dot to the 150th dot. In this way, each optical deflection element D1
．． D2. By sharing the scanning range with D3..., the optical deflection elements D1. D2. The scanning range can be expanded in proportion to the number of D3.... Moreover, each optical deflection element Di, D2.
Since the distance between D3 . . . and the photosensitive drum 17 can be shortened, the mounting can be significantly downsized. In other words, even if the deflection angle is expanded by arranging the prism-opposed optical deflection elements in multiple stages as shown in Fig. 2, the output beam will not reach one end of the photosensitive drum between the final stage optical deflection element and the photosensitive drum. A gap must be provided so that scanning can be performed from one end to the other end. Therefore, the device becomes very large, but in the embodiment shown in FIG.
Each optical deflection element Di, D2. By reducing the distance between D3, . . ., each of the optical deflection elements Di, D2, D3, .

In this embodiment, as in the embodiment of FIG. 3, the switch portion 16a requires nonlinear optical characteristics.

16b, 16c -... and deflection element portion DI,
Only D2, D3, . . . may be made of organic nonlinear waveguides, and the others may be made of ordinary linear waveguides.

Further, the optical switch may be a switching element that utilizes Bragg reflection by forming a waveguide diffraction grating using grating type electrodes.

In each of the above embodiments, a waveguide lens is also provided on the output side of the optical deflection element to narrow down the output light.

In addition, the waveguide in each example can be constructed by controlling the film thickness of the organic nonlinear waveguide or selecting the refractive index difference between the organic nonlinear waveguide and the buffer layer sandwiching the organic nonlinear waveguide.
A single mode waveguide is desirable from the viewpoint of operational efficiency. Assuming that the refractive index of the organic nonlinear waveguide is nr and the refractive index of the cladding layers on both sides thereof is n, it becomes a substantially single mode waveguide with n t n c ≦0.01.

Next, additional explanation will be given regarding the material of the organic nonlinear waveguide which has already been explained. As a nonlinear optical material, JP-A-63-1
LN
The electro-optic coefficient r can be increased by about 10 times compared to .

In addition, even a pendant addition type polymer subjected to poling treatment can be increased by about 10 times, and furthermore, if a conjugated polymer (for example, polydiacetylene) to which donor/acceptor groups are added as described in Japanese Patent Application No. 1-16352 is used,
r can be increased by about 100 times by substation.

Figure 7 shows the above MNBA or a conjugated polymer with donor/acceptor groups added (e.g. polydiacetylene).
This is an example in which the deflection angle was actually measured when a waveguide-type organic optical deflection element with a crystal film thickness of 5 mm was constructed using the above. Conventional LN
The electro-optic coefficient r is 30 pm/V, whereas in the case of the conjugated polymer with donor-acceptor groups added according to the present invention, r can be increased to 300-3000.

As is clear from this figure, in the conventional LN, a deflection angle of only about 1° can be obtained with an applied voltage of 1 (kV), whereas when using the crystal of the present invention, an applied voltage of 10 (V)
A deflection angle of nearly 10° can be obtained.

As described above, by taking advantage of the characteristics of organic nonlinear optical materials, such as having a large electro-optic effect and being able to be made into a thin film, we will realize a waveguide-type organic optical deflection element that can achieve a deflection angle of several tens of degrees at 100 V or less. be able to.

FIG. 8 illustrates a waveguide type solid-state optical deflector which is an example of a waveguide type electro-optic annular chair according to the present invention. As can be understood, this solid-state optical deflector is the optical deflector shown in FIG. 5 with a lens-shaped electrode 21 and a cylindrical lens 13 added thereto. That is, this device includes a substrate 7, a counter electrode 6 (if the substrate 7 is made of conductive silicon or the like, it can serve as a counter electrode), a buffer layer 8, a nonlinear optical waveguide 4,
Nofer layer 9 and electrodes 11.5 and 21 are laminated. A7 as an electrode material! , Ti, etc., and if transparent ITO etc. are used as the electrode material,
Buffer layer can be omitted. The electrodes 11 and 21 are patterned into a lens shape, and the electrode 5 (51, 52) is patterned into a prism shape. By patterning an electrode and applying a voltage to it, a refractive index change Δn corresponding to the shape of the electrode can be obtained. This allows the lens effect and prism effect to be electrically controlled on the waveguide. Furthermore, instead of patterning the electrodes, a portion made of a nonlinear optical material within the waveguide may be patterned. In addition to the exemplified lenses and prisms, the electrode pattern can be
It may be a grating, a stripe, etc.

In the electro-optical device of the present invention, the electrode used for voltage application may be patterned and divided, and it may be preferable to divide the electrode. FIG. 9 and FIG. 10 each show an example of dividing the electrode pattern. FIG. 9 shows a prism-shaped electrode 5 divided into small stripe-shaped electrode groups, and FIG. 1O shows a lens-shaped electrode 5 divided into striped small electrode groups. These divided small electrodes may be connected to each other so that voltages can be applied simultaneously, or they may be configured so that voltages can be applied independently to each other. The shape of the small electrode is not limited to a stripe, but can be arbitrarily selected such as a dot shape or an island shape. Further, although FIGS. 9 and 10 show an example in which only the upper electrode is divided, only the lower electrode or the upper and lower picture electrodes may be divided, if necessary.

FIG. 11(A) is an example of a device in which only the lower electrode is patterned and an organic nonlinear optical material is placed in all or part of the part without the electrode. Figure 11 (B) is shown in Figure 11 (
It is a sectional view taken along the line XIB-XrB in A), and shows that the organic nonlinear optical film 4 is made of an organic nonlinear optical material 41 and a material 42 other than that. Here, when the β-axis (crystal axis with a large Pockels effect) of the nonlinear optical material is oriented perpendicularly or obliquely to the substrate, the device can be fabricated using the vertical component of the electrode or the obliquely component parallel to the β-axis. It can be made to work.

FIGS. 12(A) and 12(B) are examples in which the upper electrode 5 is also patterned in the device shown in FIG. 11. In this example, even if the β-axis of the film is horizontally oriented, the upper electrode 5 is formed asymmetrically, so the potential difference between the lower electrode 6 and the upper electrode 5 causes an asymmetrical change in the refractive index. be able to. As a result of configuring the electrode in this manner, it is possible to derive an effect equivalent to that of a prismatic electrode having a large area in a vertical alignment film.

Furthermore, by combining this device with a semiconductor device such as an LD, PD, or IC, a device with more advanced functions can be provided.

In the waveguide type electro-optic device of the present invention, it is desirable that the waveguide be a single mode waveguide from the viewpoint of operating efficiency. Examples of nonlinear optical materials include organic low-molecular single crystals typified by MNBA mentioned above, pendant addition type polymers subjected to poling treatment, and conjugated polymers with donor groups D and acceptor groups A added (e.g. polydiacetylene). can be used advantageously.

As described above, by taking advantage of the features of organic nonlinear optical materials that have a large electro-optic effect and can be made into thin films, it is possible to provide organic waveguide-type electro-optic devices with higher performance.

FIG. 13, FIG. 14, and FIG. 15 are examples of deflector type optical switches according to the present invention, respectively. As the waveguide type optical deflector used for switching the optical path, for example, a solid state optical deflector having the configuration shown in FIGS. 5 and 8 can be advantageously used.

In the NXN matrix optical switch, as shown in FIG. 13, N (six in the figure) optical deflectors are arranged in an array on both sides. Incoming light from an optical fiber or the like is deflected in a desired direction by applying a voltage to a deflector, and distributed to the optical fiber at the other end. In this method, the number of elements increases in proportion to the first power of the number of channels in the matrix switch, which simplifies the driving method and electrode extraction compared to conventional optical switches, which increase in proportion to the square of the number of channels. . Furthermore, since there are no cross points between waveguides unlike in conventional optical switches, cocoon talk and loss are improved. A waveguide lens is arranged to focus the beam. In addition, by operating the deflector on the light output side, the angle of light incidence on the optical fiber can be adjusted.
Coupling loss can be reduced. Furthermore, the coupling characteristics can be improved by adjusting the voltage applied to the waveguide lens.

Similarly, an IXN bypass/branch optical switch as shown in FIG. 14 can also be constructed.

In addition, it is not necessary to connect optical fibers to the input and output sides of the optical switch shown in the figure, and a semiconductor laser (
LD), photodiode (PD), etc. may be provided. An example of this is the transmission/reception switching module shown in FIG. In the figure, 22 is an LD, and 23 is a PD.

Bidirectional optical switching is also possible if the optical deflectors are on both sides of the device as shown in FIG. In other words, for optical switching in only one direction, it is not necessarily necessary to provide optical deflectors on both sides of the device.

Although the deflector used in the optical switch of the present invention has already been explained in other embodiments, MN
A, it can be produced by using an organic crystal film such as MNBA, a poling-treated polymer film, a polydiacetylene film to which donor groups D and acceptor groups A are added, and combining it with an electrode of an appropriate shape. . In particular, the membrane is vertically oriented, i.e.
It is desirable that the electric field direction β-axis, where the Pockels effect is large, be in a state where it is only with respect to the substrate. The deflector in this case is
It can be produced by sandwiching a nonlinear optical film between a prism-shaped electrode and a counter electrode as shown in FIG. Waveguide lenses can be obtained by etching waveguides in the form of concave or convex lenses or by laminating other materials in the form of concave or convex lenses. Otherwise, a portion of the waveguide may be replaced by another material in the form of a concave or convex lens by photolithography.

By forming electrodes on the waveguide lens thus obtained, the focal length of the lens can be controlled by applying a voltage.

In addition, in the optical switch of the present invention, the entire waveguide does not need to be made of a nonlinear optical film, and the active part may be made of a nonlinear optical film, and the other part may be a pensive waveguide made of glass, polymer, etc. good.

As described above, according to the present invention, it is possible to provide an optical switch with low loss and low crosstalk, and with a simple electrode configuration and driving method.

FIG. 16 is an example in which the solid-state optical deflector according to the present invention is used in a projection device, and the projection device is, as shown, an optical writing type LC light valve. The LC light valve 40 includes a stack of an aSi:H photoconductor 47, a dielectric reflector 46, and an LC (liquid crystal) 45, and two transparent electrodes (
(not shown), the size of which, in the example shown, is 6 am x 18C1!
(length x width). The light valve is divided into three areas corresponding to R (red), G (green), and B (blue) images, and is configured to perform optical writing. Vertical operation is possible by using the 12-sided mirror 30 and rotating it at 3000 rprrl. Here, if 3000
If a moving image of 3000 pixels is to be displayed, horizontal scanning must be performed at a frequency of 180 kHz (amplitude near 0 V) as shown in the figure. It should be noted that since such speeds are difficult to achieve with conventional mechanical scanners, the solid state optical deflector 20 of the present invention as previously described can be used to advantage. In the illustrated example, the solid state optical deflector 20 has R,
Three of them are arranged in parallel corresponding to G and B, and their structure is basically the same as the waveguide type solid state optical deflector shown in FIG. The solid-state optical deflectors 20 in FIG. 16 each have an LD 22 (modulation: 540 MHz) on the incident side end surface. Further, a cylindrical lens 13 is provided on the output side, and this is for narrowing down the light in a direction perpendicular to the waveguide surface. With the device configuration described above, it is possible to provide a projection display device (projection device) that can display moving images with high resolution.

FIG. 17 is a perspective view (A) and a cross-sectional view (B) showing an example of an optical writing type optical circuit device according to the present invention.

The optical circuit device, as shown in FIG. 17(A),
It has a laminated structure in which a lower electrode 6, a sofa layer 8, an organic nonlinear optical waveguide 4, a layer 9, a photoconductor layer 24, and an upper electrode 5 are sequentially formed on a substrate 7. After applying a voltage between the upper electrode 5 and the lower electrode 6, when light is irradiated to this device R4 in various patterns (in the illustrated example, a lens-type light pattern Ll, a prism-type light), a turn L2, a grating pattern light pattern L3,
and waveguide-type curved light pattern L,), the voltage to the organic nonlinear optical waveguide 4 changes accordingly, and the refractive index changes accordingly. As a result of such changes in the refractive index, it becomes possible to freely perform focusing, divergence, switching, etc. of light depending on the number of turns of light.

FIG. 17(B) shows an example in which a nonlinear optical waveguide is used as a three-dimensional waveguide and light is switched by irradiating light onto matrix intersections. The number in the figure indicates the light pattern.

In the optical circuit device according to the present invention, although not shown and described, patterned fixed electrodes can also be used together. Further, if the electrode is transparent such as ITO, the buffer layer can be omitted. Furthermore, the photosensitive layer is not limited to a photoconductor, and a photodiode or the like may be used. The organic nonlinear optical materials constituting the organic nonlinear optical waveguide include various types of materials, such as MNA, MNBA, DAN, pentufted polymers, conjugated polymers, etc., as has already been stated repeatedly.

For organic nonlinear optical materials, it is preferable that the β axis (the direction of the electric field where the Pockels effect is large) is perpendicular to the substrate surface, and the nonlinear waveguide does not necessarily have to be on the entire surface of the device, depending on the configuration of the device. It only needs to be included in the essential parts.

Additionally, the various light patterns used can be written from a variety of exposure sources and using a variety of techniques, an example of which is laser beam scanning.

The pattern can be erased by reversing the voltage or shorting the upper and lower electrodes and irradiating the pattern with light.

As described above, according to the present invention, an optical circuit device with simple electrode extraction and high flexibility can be provided.

FIG. 18 is a perspective view showing an example of an X-ray image reading device according to the present invention. A solid-state optical deflector 20 is provided in the light output layer 35 of this X-ray image reading device, and the L
The light from D22 is deflected by adjusting the voltage, and the light from the waveguide 3
Divide into 3. The distributed light is guided to the X-ray image conversion plate 31 via the waveguide 33 and causes stimulated luminescence. The stimulated luminescence enters the light collecting layer 34 laminated on the light emitting layer 35, and is detected by a photodetector 23 such as a photodiode (PD) or a photomultiplier (PD in the illustrated example).
). Here, in order to cut off the reading light and extract only stimulated luminescence, a reading light cutting filter 32 is provided on the end face of the light collecting layer 34. Further, instead of using this reading light cut filter, a substance, for example, a dye, may be added to the light condensing layer 34, the absorption coefficient of which is larger for the reading light than the absorption coefficient for stimulated luminescence. Furthermore, microlenses or cylindrical lenses can be provided on the end faces of the light emitting layer and the light collecting layer in order to narrow down the reading light and improve light collection efficiency. Furthermore, in order to increase the reading speed, a plurality of combinations of LDs, solid-state optical deflectors, and photodetectors may be arranged.

In the X-ray image reading device of the invention, the solid state optical deflector and the waveguide lens can each be the same as those already described with reference to other examples, and the waveguide can be, for example, a glass guide. It can be a waveguide, a polymer waveguide. In carrying out the present invention, the waveguide used does not need to be single-mode, so there is also the advantage that the confinement of light can be strengthened and the radius of curvature of the bend of the waveguide can be increased.

As described above, according to the present invention, it is possible to provide a compact X-ray image reading device in which the light scanning optical system is reduced in size and the reading speed is increased.

FIG. 19 shows a preferred example of the optical head for an optical disc according to the present invention. As shown in the figure, this optical head has a plurality of sets of combinations of an LD 22 and a solid-state optical deflector arranged in parallel. That is, the design is such that the light emitted from each LD is scanned by a corresponding optical deflector. This optical head is placed on the optical disk 60 as shown in FIG. 20 to write and read information.

The optical head of the present invention preferably has a laminated structure of a light emitting layer 35 and a light collecting layer 34 as shown in FIG.
An LD 22 is provided on the end surface of the light emitting layer 35, and a photodetector 23 (PD is used in the illustrated example) is provided on the end surface of the light collecting layer 34. Further, it is desirable to attach a cylindrical lens to the end face of the device in order to narrow down the writing light and condense the reading light. - As an example, a cylindrical lens 13 is attached to the end surface of the condensing layer 34 of the optical head.
An example in which this is provided is shown in FIG.

In the optical end for an optical disc of the invention, the solid state optical deflector can be similar to that already detailed with reference to various embodiments of the invention. For example, the optical deflector is MN
A, An organic crystal film such as MNBA, a polymer film subjected to poling treatment, or a polydiacetylene film to which donor iD and acceptor groups A are added is used as a nonlinear optical film, and this optical film is sandwiched between a prism-shaped electrode and a counter electrode. This can be obtained by In particular, it is desirable that the organic nonlinear optical film be vertically aligned (the β-axis in the electric field direction, where the Pockels effect is large, is oriented with respect to the substrate). Waveguide lenses can be obtained by etching a waveguide in the shape of a concave or convex lens, or by laminating other materials into such a shape. In some cases, a part of the waveguide may be replaced by another material into a concave lens shape or a convex lens shape by photolithography. By forming an electrode on the waveguide lens obtained in this manner, the focal length of the lens can be corrected with a voltage, and thus the function as an optical head can be obtained. Here, the waveguide leading to the light does not need to be entirely made of a nonlinear optical film; the active part may be made of a nonlinear optical film, and the other part may be a passive waveguide made of glass or polymer.

If an optical head as shown in FIG. 20 is used, and the device length is 5 cm and the degree of parallelism of the LD-solid-state optical deflectors is 25, one LD-deflector has a resolution of 20 points.
If the performance is 0.00, an optical disk device with a fixed optical head can be realized. In this case, the information reading and writing speeds are about 25 times that of the conventional optical disk device, and real-time transfer of moving images compatible with HD TV becomes possible. Further, by parallelizing the solid-state optical deflectors, the optical power per unit bit can be increased, so it becomes possible to stably write and read information on phase-change optical disks, photochromic optical disks, and the like.

As described above, according to the present invention, LDs are arranged in parallel,
By scanning the light from each LD with solid-state optical deflectors arranged in parallel, parallelizing writing and reading, and fixing the optical head, it is possible to increase the speed of the optical disk device.

FIG. 22 shows a preferred example of the optical switch according to the present invention. To explain in more detail, Figure 22 (A
) is an example of an optical switch configured so that the output terminal of the switching element in the semiconductor IC is used as the lower electrode and voltage can be applied to the waveguide intersection, and FIG. 22 (B) is FIG. 22 is a cross-sectional view of the optical sinch of FIG. 22(A).

From these figures, it can be understood that the lower electrode 6, buffer layer 8, organic nonlinear optical waveguide 41 or cladding layer 43, buffer layer 9, and upper electrode 5 are formed in this order on the semiconductor IC 70. Probably. By building the optical switch on the semiconductor IC in this way, driving the matrix optical switch and wiring the electrodes can be simplified.

FIG. 23 shows an example in which an optical semiconductor LD and a Mann-Zehnder optical modulator are integrated.

In the figure, 80 is a ■-V group semiconductor substrate, 84 is a waveguide layer, and 8
5 is an upper electrode, 87 is an organic nonlinear waveguide, 88 and 89
is a buffer layer, and 22 is an LD. Here, the lower electrode may be the optical semiconductor itself, or may be an electrode formed thereon.

Further, the upper electrode can be disposed on both arms of the Matsuhatsu ender.

[Effects of the Invention] According to the present invention, various effects that could not be obtained with conventional electro-optical devices can be obtained. For example, according to the present invention, a large deflection angle can be obtained by constructing a waveguide type organic optical deflection element using an organic nonlinear optical material that can be formed thin and has a large electro-optic coefficient. . As a result, the scanning device can be miniaturized, and a non-mechanical scanning device having no moving parts can be realized, which makes it possible to extend the life of the device and simplify assembly and adjustment.

Other effects of the present invention will be easily understood from the description of the above-mentioned "Examples" and other sections.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing the basic principle of a waveguide type organic light deflection element according to the present invention, and FIGS. 2 to 6 are schematic diagrams showing preferred examples of the light deflection element according to the present invention. , FIG. 7 is a graph showing the deflection angle characteristics of the organic nonlinear optical material used in the present invention, FIG. 8 is a perspective view showing an example of a waveguide type solid-state optical deflector according to the present invention, and FIG. 9 and FIG. 10 are schematic diagrams showing patterning and division of electrodes according to the present invention, and FIG. 11 is a schematic diagram showing an example of a waveguide type electro-optic device according to the present invention. 13 is a cross-sectional view showing the distribution of the organic nonlinear optical material in the film according to the present invention, FIGS. 13 to 15 are schematic diagrams showing preferred examples of the optical switch according to the present invention, and FIG. FIG. 17 is a schematic diagram showing an example of an optical circuit device according to the present invention; FIG. 18 is an X-ray image reading device according to the present invention. FIG. 19 is a perspective view showing an example of the optical head for an optical disk device according to the present invention; FIG. 20 is a schematic view showing an example of the use of the optical head according to the present invention. 21 is a schematic diagram showing a modified example of the optical head according to the present invention, FIG. 22 is a schematic diagram showing an example of an optical switch according to the present invention, and FIG. 23 is a schematic diagram showing an example of an optical switch according to the present invention. 1 is a schematic diagram showing an example of an optical modulator according to the invention; FIG. In the figure, 4 is an organic nonlinear optical film, 5,51°52.
6 is an electrode, 7 is a quartz or Si substrate, 8°9 is a buffer layer, 10 is a waveguide lens, 11 is an electrode of the waveguide lens, 12 is a curved surface, 13 is a cylindrical lens, 14 is a main waveguide, 15a, 15b, 15c...
- Branch waveguides, 16a, 16b, 16c...
- Optical switch, DI, D2. D3... each indicates a light deflection element.

Claims (1)

[Scope of Claims] 1. An electro-optical device using an organic nonlinear optical material as a waveguide, wherein the organic nonlinear optical material has a film thickness of 10
An organic nonlinear optical film with a diameter of 0 μm or less, the optical film having an electrode transparent to the light used and/or an insulating buffer layer transparent to the light used on both sides of the optical film. opaque electrodes are sandwiched to form a sandwich structure, and the device is operated as a function of the refractive index change produced in the optical film when a voltage is applied between the electrodes. A waveguide-type electro-optical device featuring: 2. A light deflection element, and the light incident on the element is
2. The waveguide type electro-optical device according to claim 1, wherein light is deflected by a change in refractive index in an organic nonlinear optical film when a voltage is applied. 3. The waveguide type electro-optical device according to claim 2, wherein at least one of the opposing electrodes has a prism shape. 4. The waveguide type electro-optical device according to claim 2, wherein the organic nonlinear optical film has a prism shape. 5. A patent claim characterized in that a waveguide lens is formed between an electrode formed in a prism shape or an organic nonlinear optical film formed in a prism shape and a light input and/or light output portion. The waveguide type electro-optical device according to item 2. 6. The waveguide type according to claim 5, wherein the waveguide lens itself is also formed of a nonlinear optical material, and a voltage is applied between electrodes arranged on both surfaces of the waveguide lens. Electro-optical device. 7. The waveguide type electro-optical device according to claim 2, wherein the light emitting end face of the optical deflection element is a gently curved surface. 8. The waveguide type electro-optical device according to claim 2, wherein a cylindrical lens is formed along the light output end face of the optical deflection element. 9. It has a main waveguide and a plurality of branch waveguides branched from the waveguide, and an optical switch or a waveguide diffraction grating is disposed between the main waveguide and each branch waveguide. 3. The waveguide type electro-optical device according to claim 2, wherein the optical deflection element is connected to the tip of each branch waveguide. 10. The waveguide according to claim 9, wherein only the optical switch and the optical deflection element are made of a nonlinear optical material, and the other parts are made of a linear optical material. Type electro-optic device. 11. Claim 1, wherein at least one of the opposing electrodes is patterned into a predetermined shape, and the electrode pattern is further divided into a plurality of small electrodes. The waveguide type electro-optic device described above. 12. The waveguide type electro-optical device according to claim 11, wherein the electrode patterning and the division of the electrode pattern are performed on the lower electrode of the organic nonlinear optical film. 13. The waveguide type electro-optical device according to claim 12, wherein the organic nonlinear optical film is formed only in at least a portion of the area where the electrode pattern is not an underlying layer. 14. The waveguide type electro-optical device according to claim 1, which is an optical switch composed of a plurality of optical deflection elements. 15. The waveguide type electro-optical device according to claim 1, which is a solid-state optical deflection element for writing in a projection device using an optical writing type light valve. 16. The waveguide type electro-optical device according to claim 1, which is an optical writing type optical circuit device having a laminated structure including an organic nonlinear optical film and a photosensitive layer. 17. The waveguide-type electro-optical device according to claim 1, which is a solid-state optical deflection element for scanning light from a semiconductor laser in an X-ray image reading device using stimulated luminescence. . 18. The waveguide type electro-optic device according to claim 1, which is a solid-state optical deflection element for an optical head for scanning light from a semiconductor laser in an optical disk device. 19. The waveguide type electro-optical device according to claim 1, which is an optical switch built on a semiconductor device.