CN106526900A - Phased array solid-state optical scanner - Google Patents
Phased array solid-state optical scanner Download PDFInfo
- Publication number
- CN106526900A CN106526900A CN201610939949.7A CN201610939949A CN106526900A CN 106526900 A CN106526900 A CN 106526900A CN 201610939949 A CN201610939949 A CN 201610939949A CN 106526900 A CN106526900 A CN 106526900A
- Authority
- CN
- China
- Prior art keywords
- phased array
- photoscanner
- state
- light
- deflectable material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
Abstract
The invention relates to a phased array solid-state optical scanner, in particular to a device for performing deflection and scanning on light beams by adopting a phase control heater array. The phased array solid-state optical scanner comprises a light deflection material, a phase control heater array and a control circuit; the first input end of the light deflection material is connected with an external light source; the second input end of the light deflection material is connected with the output end of the phase control heater array; the third input end of the light deflection material is connected with the external power source; the output end of the light deflection material is connected with an external scanning target; the input end of the phase control heater array is connected with the output end of the control circuit; the input end of the control circuit is connected with an external port. The phased array solid-state optical scanner has the advantages of being small in size, low in power consumption, simple in technology, low in cost, long in service life and the like.
Description
Technical field
The present invention relates to a kind of phased array solid-state photoscanner, especially with phase controlling heater array (Phased
Heater Array) enter horizontal deflection and the device for scanning to light beam.
Background technology
Phase controlling array (abbreviation phased array) technology has been widely used in the fields such as radar, ultrasound at present.Phased array
Radar is lined up array by many radiating elements and is constituted, by controlling the amplitude and phase place of each unit in array antenna, adjustment electricity
The radiation direction of magnetic wave, synthesizes the radar beam for flexibly quickly focusing on scanning in the range of certain space.Ultrasonic phase array is changed
Energy device constitutes array by multiple independent piezoelectric chips, excites each chip by certain rule and sequential electricity consumption subsystem controls
Unit, adjusts the position and the direction for focusing on of control focus.The core concept of phased-array technique is independently to excite as can be seen here
Many little transmitter units, equivalent to little wave source, many little wave sources can synthesize the wavefront of given shape to each little transmitter unit.
Thermo-optic effect, refers to the physical effect that the refractive index of optical medium changes with temperature change, is light
Learn a kind of optical property of material.In given temperature field, crystal, semi-conducting material, glass and other application are in difference
Optical material in optical device and system, its refractive index are not constant parameters.Under certain pressure, the refraction of material
Rate variation with temperature amount is referred to as thermo-optical coeffecient.It is defined as the refractive index and temperature that dn/dT, n and T are material respectively,
Unit is per degree Celsius or every Kelvin.For organic polymer, the Refractive Index of Material change master that temperature change causes
To be determined by density of material change, its thermo-optical coeffecient is 10-4Magnitude is higher relative to inorganic material such as silicon.
In order to thermo-optic effect is used for light beam steering and scanning, the accurate gradient for setting up change in light deflectable material is needed
Temperature field.Generally can be using the scheme for installing planar heater and planar refrigerator (optional) in light deflectable material both sides：Face
Shape heater is operated in change power rating, for producing the gradient temperature field of change, the isothermal level of the gradient temperature field and face
Shape heater is parallel；Planar refrigerator is operated in firm power state, for setting up one close to constant cold end.Light beam is inclined
The angle for turning is directly proportional to the cold end of gradient temperature field and the temperature difference in hot junction.For this scheme, due to incident ray need with
The isothermal level of gradient temperature field has certain angle, and no matter the profile of light deflectable material is cuboid or parallelepiped, then enter
Penetrate light and be required to oblique incidence.It is very unfavorable for this kind of device is integrated in micro-optical systems that light path is inclined.
Therefore, in order to realize that incident light axis is parallel with the side of cuboid under regular external form as cuboid, need to make
The isothermal level of gradient temperature field has certain angle with heater plane, so as to realize light beam steering.This is traditional planar
What heater cannot be realized.The present invention proposes a kind of phased array solid-state photoscanner, especially with phase controlling heater battle array
Row enter the device of horizontal deflection and scanning to light beam.
The content of the invention
It is an object of the invention to a kind of phased array solid-state photoscanner is proposed, especially with phase controlling heater battle array
Row enter the device of horizontal deflection and scanning to light beam, can make the isothermal level and phase controlling heater array plane of gradient temperature field
Certain angle is produced, so as to realize light beam steering and scanning.
For achieving the above object, the present invention using technical scheme is：It includes light deflectable material, phase controlling heater battle array
Row and control circuit；First input of light deflectable material is connected with external light source；Second input of light deflectable material
It is connected with the outfan of phase controlling heater array；3rd input of light deflectable material is connected with external power source；Light is inclined
The outfan for turning material is connected with external scan target；The input of phase controlling heater array and the outfan of control circuit
It is connected；The input of control circuit is connected with outside port；
Described light deflectable material is with high thermo-optical coeffecient, low thermal conductivity, high heat resisting temperature, conductive homogeneous material
Material, can be but be not limited to various high molecular polymers, such as polymethyl acrylate (PMMA), Merlon (PC), SU8
Deng；
The profile of described light deflectable material is cuboid, and the surface of its one group of relative rectangle plane has low coarse
Degree, optical clear, and high permeability plated film is coated with, the surface of its another group of relative rectangle plane has low roughness, point
Not closely coupled with phase controlling heater array and external power source, slight void therebetween adopts heat-conducting silicone grease to fill to improve
Heat conductivity；
Described phase controlling heater array has and is formed along one-dimensional square arrangement by multiple heating units, and each heating is single
Unit is resistance-type or the semiconductor-type heater based on Peltier (Peltier) effect；
Described control circuit is used for producing the multi-channel drive signal that can drive phase controlling heater array, with foot
Enough high voltage and sufficiently large electric current, are already belonging to prior art, therefore here of the present invention are not repeated.
The operation principle of the present invention is such：The profile of light deflectable material is cuboid, and one group of cuboid relative
The surface of rectangle plane has low roughness, optical clear, and is coated with high permeability plated film, another group of relative square of cuboid
The surface of shape plane has low roughness, closely coupled with phase controlling heater array and external power source respectively, therebetween micro-
Little space adopts heat-conducting silicone grease to fill to improve heat conductivity；Phase controlling heater array has by multiple heating units along one-dimensional
Direction arrangement is formed, and each heating unit is resistance-type or the semiconductor-type heater based on paltie effect；Light deflectable material
It is the homogeneous materialses with high thermo-optical coeffecient, high heat resisting temperature and conduction, can is various high molecular polymers；Below with poly- first
As a example by base acrylic acid methyl ester, thermo-optical coeffecient is -1.44x10-4K-1, heat conductivity is 0.17W/ (m K), under 832nm wavelength
Refractive index is about 20 DEG C of 1.5025@, 1.3581 12 DEG C of@, and maximum temperature is 120 DEG C；Cold junction temperature is set to 20 DEG C；Phase controlling adds
Hot device array makes hot-side temperature fluctuate between about 20 DEG C to 120 DEG C, and the temperature difference is 100 DEG C；In incident beam and gradient temperature field
The angle of isothermal level when being 70 degree, greatest optical deflection angle can be calculated for 70-arcsin (sin70 degree * 1.3581/
1.5025)=11.86 degree, light beam is deflected to the hot junction of heater side；Due to light beam in gradual change gradient temperature field it is continuous partially
Turn, therefore a lateral displacement can be superimposed in the outfan of light deflectable material；According to isothermal level and the heater of gradient temperature field
The parameter such as the number of angle, heating unit between array plane and resistance value, the heat conductivity of light deflectable material calculates phase
Drive signal phase contrast in position control heater arrays between two neighboring heating unit, by taking sawtooth waveforms drive signal as an example,
For the phase controlling heater array of 20 heating unit compositions, the drive signal phase contrast between two neighboring heating unit
For 360 degree/20=18 degree；Calculated drive signal phase contrast input control circuit is produced and is had between adjacent two stifled signals
There is the multi-channel drive signal of given reference phase difference, finally multi-channel drive signal is transmitted corresponding into phase controlling heater array
Heating unit.As light deflectable material can be conductive, heating unit of the electric current from phase controlling heater arrays is inclined by light
Turn the battery lead plate that material flow to light deflectable material opposite side.As the electric current density in heating unit is far longer than light deflectable material
In electric current density, therefore heating unit produces most heats.Obtain the heating unit elder generation work of the little drive signal of phase place
Make, temperature is high；Work after the heating unit for obtaining the big drive signal of phase place, temperature is low, therefore can be in light deflectable material
Inclined gradient temperature field is produced, so that solid-state photoscanner realizes light beam steering and scanning.
The present invention is had the advantage that as a result of above-mentioned technical proposal：
1st, the operation principle based on thermo-optic effect, with small volume, low in energy consumption, process is simple, low cost, life-span length etc. are excellent
Point；
2nd, phased-array technique, device profile rule is adopted to be easy to integrated with micro-optical systems.
Description of the drawings
Fig. 1 is the structured flowchart of the present invention；
Fig. 2 is the structural representation of the present invention；
Schematic diagrams of the Fig. 3 for phase controlling heater array；
Fig. 4 is the one-dimensional cascade schematic diagram of the present invention；
Fig. 5 is the two dimensional cascade schematic diagram of the present invention.
Specific embodiment
The invention will be further described with reference to the accompanying drawings and examples：As depicted in figs. 1 and 2, it includes：Light is deflected
Material 1, phase controlling heater array 2 and control circuit 3；First input of light deflectable material 1 is connected with external light source；
Second input of light deflectable material 1 is connected with the outfan of phase controlling heater array 2；The 3rd of light deflectable material 1
Individual input is connected with external power source；The outfan of light deflectable material 1 is connected with external scan target；Phase controlling heater battle array
The input of row 2 is connected with the outfan of control circuit 3；The input of control circuit 3 is connected with outside port；
Described light deflectable material 1 is with high thermo-optical coeffecient, low thermal conductivity, high heat resisting temperature, conductive homogeneous material
Material, can be but be not limited to various high molecular polymers, such as polymethyl acrylate, Merlon, SU8 etc.；
The profile of described light deflectable material 1 is cuboid, and the surface of its one group of relative rectangle plane has low thick
Rugosity, optical clear, and high permeability plated film is coated with, the surface of its another group of relative rectangle plane has low roughness,
It is closely coupled with phase controlling heater array 2 and external power source respectively, slight void therebetween adopt heat-conducting silicone grease filling with
Improve heat conductivity；
Described phase controlling heater array 1 have by multiple heating units along one-dimensional square arrangement form, each heating
Unit is resistance-type or the semiconductor-type heater based on paltie effect；
Described control circuit 3 is used for producing the multi-channel drive signal that can drive phase controlling heater array 2, has
Sufficiently high voltage and sufficiently large electric current, are already belonging to prior art, therefore here of the present invention are not repeated.
The operation principle of the present invention is such：The profile of light deflectable material 1 is cuboid, and one group of cuboid relative
The surface of rectangle plane has low roughness, optical clear, and is coated with high permeability plated film, another group of relative square of cuboid
The surface of shape plane has low roughness, closely coupled with phase controlling heater array 2 and external power source respectively, therebetween micro-
Little space adopts heat-conducting silicone grease to fill to improve heat conductivity；Phase controlling heater array 2 has by multiple heating units along one
The arrangement of dimension direction is formed, and each heating unit is resistance-type or the semiconductor-type heater based on paltie effect；Light deflects material
Material 1 is the homogeneous materialses with high thermo-optical coeffecient, high heat resisting temperature and conduction, can be various high molecular polymers；Below with
As a example by polymethyl acrylate, thermo-optical coeffecient is -1.44x10-4K-1, heat conductivity is 0.17W/ (m K), in 832nm ripples
Long lower refractive index is about 20 DEG C of 1.5025@, 1.3581 12 DEG C of@, and maximum temperature is 120 DEG C；Cold junction temperature is set to 20 DEG C；Phase place control
Heater arrays processed make hot-side temperature fluctuate between about 20 DEG C to 120 DEG C, and the temperature difference is 100 DEG C；In incident beam and gradient temperature
When the angle of the isothermal level of degree field is 70 degree, greatest optical deflection angle can be calculated for 70-arcsin (sin70 degree *
1.3581/1.5025)=11.86 degree, light beam is deflected to the hot junction of heater side；As light beam is in gradual change gradient temperature field
It is continuous to deflect, therefore a lateral displacement can be superimposed in the outfan of light deflectable material 1；According to the isothermal level of gradient temperature field with
The parameter meter such as the number of angle, heating unit between heater arrays plane and resistance value, the heat conductivity of light deflectable material 1
The drive signal phase contrast between two neighboring heating unit in phase controlling heater array 2 is calculated, is driven with sawtooth waveforms and is believed
As a example by number, for the phase controlling heater array of 20 heating unit compositions, the driving letter between two neighboring heating unit
Number phase contrast is 360 degree/20=18 degree；Calculated drive signal phase contrast input control circuit is produced into adjacent two stifled letters
Between number, the multi-channel drive signal with given reference phase difference, finally transmits multi-channel drive signal to phase controlling heater array
Corresponding heating unit in 2.As light deflectable material 1 can be conductive, heating list of the electric current from phase controlling heater arrays 2
Unit flow to the battery lead plate of 1 opposite side of light deflectable material by light deflectable material.Due to the electric current density in heating unit it is much big
Electric current density in light deflectable material 1, therefore heating unit produces most heats.Obtain the little drive signal of phase place
Heating unit first works, and temperature is high；Work after the heating unit for obtaining the big drive signal of phase place, temperature is low, therefore can be
Inclined gradient temperature field is produced in light deflectable material 1, so that solid-state photoscanner realizes light beam steering and scanning.
The embodiment of phase controlling heater array 2, as shown in figure 3, can be but be not limited to the present embodiment：Phase controlling
Heater arrays 2 are realized using four layers of flexible printed circuit board (FPC), comprising four heating units；Each heating unit is by one
Individual current-carrying part and a heating part composition, the cross-sectional area of wherein current-carrying part and light deflectable material 1 are far longer than heating
Partial cross-sectional area, makes the electric current density in current-carrying part and light deflectable material 1 close well below the electric current in heating part
Degree, makes the power of most of drive signal be changed into the heat of heating part.Due to the drive signal of two neighboring heat-generating units
There is certain phase contrast, according to Huygen's principle, equivalent to a little wave source, multiple tools are dephased for each heat-generating units
The isothermal level of the wavefront composition of little wave source is inclined.
The extension of the expansion or two-dimensional scan of scanning angle can be realized by the cascade of multiple present invention；It is below one-dimensional
The embodiment of cascade：As shown in figure 4, it include two groups it is of the invention, two groups the present invention be connected along incident light axis in the same direction, make incident illumination
Same plane is in the deflection of two groups of present invention, makes beam deflection angle degree reach twice.
It is below the embodiment of two dimensional cascade：As shown in figure 5, it include two groups it is of the invention, two groups the present invention along incident illumination
Axle be rotated by 90 ° it is connected, make incident illumination two groups the present invention deflection planes differ 90 degree, formation X-Y two-dimensional scans.
Claims (10)
1. a kind of phased array solid-state photoscanner, it is characterised in that：It include light deflectable material, phase controlling heater array and
Control circuit；First input of light deflectable material is connected with external light source；Second input of light deflectable material and phase
The outfan of position control heater arrays is connected；3rd input of light deflectable material is connected with external power source；Light deflects material
The outfan of material is connected with external scan target；The outfan phase of the input of phase controlling heater array and control circuit
Even；The input of control circuit is connected with outside port.
2. phased array solid-state photoscanner as claimed in claim 1, it is characterised in that：Described light deflectable material is with height
Thermo-optical coeffecient, low thermal conductivity, high heat resisting temperature, conductive homogeneous materialses can be but be not limited to high molecular polymer, such as
Polymethyl acrylate or Merlon or silicone or SU8.
3. phased array solid-state photoscanner as claimed in claim 1, it is characterised in that：The profile of described light deflectable material is
Cuboid, the surface of its one group of relative rectangle plane have low roughness, optical clear, and are coated with high permeability plated film,
The surface of its another group of relative rectangle plane has low roughness, respectively with phase controlling heater array and external power source
Closely coupled, slight void therebetween adopts heat-conducting silicone grease to fill to improve heat conductivity.
4. phased array solid-state photoscanner as claimed in claim 1, it is characterised in that：Described phase controlling heater array
Formed along one-dimensional square arrangement by multiple heating units, each heating unit is resistance-type or the quasiconductor based on paltie effect
Formula heater.
5. phased array solid-state photoscanner as claimed in claim 1, it is characterised in that：The hot spectrum of described light deflectable material
Number is -1.0x10-4K-1To -1.0x10-3K-1。
6. phased array solid-state photoscanner as claimed in claim 1, it is characterised in that：The most senior engineer of described light deflectable material
Make temperature for 50 DEG C to 250 DEG C.
7. phased array solid-state photoscanner as claimed in claim 1, it is characterised in that：The profile of described light deflectable material is
Cuboid, the surface roughness of one group of relative rectangle plane of cuboid is 0.01 micron to 0.8 micron.
8. phased array solid-state photoscanner as claimed in claim 1, it is characterised in that：The profile of described light deflectable material is
Cuboid, the surface of one group of relative rectangle plane of cuboid are coated with high permeability plated film, and transmitance is 80% to 100%.
9. phased array solid-state photoscanner as claimed in claim 1, it is characterised in that：Described phase controlling heater array
Heating unit quantity be 2 to 2000.
10. phased array solid-state photoscanner as claimed in claim 1, it is characterised in that：Described phase controlling heater battle array
The thickness of the heating unit of row is 1 micron to 1000 millimeters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610939949.7A CN106526900A (en) | 2016-10-28 | 2016-10-28 | Phased array solid-state optical scanner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610939949.7A CN106526900A (en) | 2016-10-28 | 2016-10-28 | Phased array solid-state optical scanner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106526900A true CN106526900A (en) | 2017-03-22 |
Family
ID=58293327
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610939949.7A Pending CN106526900A (en) | 2016-10-28 | 2016-10-28 | Phased array solid-state optical scanner |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106526900A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59201024A (en) * | 1983-04-28 | 1984-11-14 | Canon Inc | Method and device for optical modulation |
| US4767170A (en) * | 1985-11-20 | 1988-08-30 | Brother Kogyo Kabushiki Kaisha | Optical deflector device |
| CN1688362A (en) * | 2002-09-03 | 2005-10-26 | 效思因公司 | Monopole phased array thermotherapy applicator for deep tumor therapy |
| CN101080122A (en) * | 2007-06-01 | 2007-11-28 | 中国科学院上海光学精密机械研究所 | Optical phase control array light beam scanner based on PLZT |
| CN102566193A (en) * | 2012-01-16 | 2012-07-11 | 华中科技大学 | Acousto-optic deflector with phase-controlled transducer array |
| US20150346394A1 (en) * | 2014-05-28 | 2015-12-03 | Fundació Institut De Ciències Fotòniques | Adaptive thermal micro lens |
-
2016
- 2016-10-28 CN CN201610939949.7A patent/CN106526900A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59201024A (en) * | 1983-04-28 | 1984-11-14 | Canon Inc | Method and device for optical modulation |
| US4767170A (en) * | 1985-11-20 | 1988-08-30 | Brother Kogyo Kabushiki Kaisha | Optical deflector device |
| CN1688362A (en) * | 2002-09-03 | 2005-10-26 | 效思因公司 | Monopole phased array thermotherapy applicator for deep tumor therapy |
| CN101080122A (en) * | 2007-06-01 | 2007-11-28 | 中国科学院上海光学精密机械研究所 | Optical phase control array light beam scanner based on PLZT |
| CN102566193A (en) * | 2012-01-16 | 2012-07-11 | 华中科技大学 | Acousto-optic deflector with phase-controlled transducer array |
| US20150346394A1 (en) * | 2014-05-28 | 2015-12-03 | Fundació Institut De Ciències Fotòniques | Adaptive thermal micro lens |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100654004B1 (en) | Beam deflector and scanner | |
| US20230075803A1 (en) | Beam-steering devices and methods for lidar applications | |
| US11209546B1 (en) | Solid state optical phased array lidar and method of using same | |
| CN108377344B (en) | Image pickup system | |
| CN106405971B (en) | One-dimension temperature field modulator approach | |
| US20180120422A1 (en) | Low cost and compact optical phased array with electro-optic beam steering | |
| Lee et al. | Thermal actuated solid tunable lens | |
| CN108627974A (en) | Photo-scanning system | |
| CN102036537A (en) | Cooling structure of electronic equipment | |
| US20220334451A1 (en) | Optical phased array structure and fabrication techniques | |
| JP2013545124A (en) | High filling ratio electron beam steering | |
| CN103094837B (en) | The controlled Optical Maser System in a kind of direction | |
| EP3783427B1 (en) | Light modulating device and electronic apparatus including the same | |
| CN102230841A (en) | Controlled infrared planar radiative heat source with high degree of homogeneity | |
| WO2019190577A2 (en) | Densely-packed optical phased arrays via k-vector mismatch and metamaterial rods | |
| CN109213231A (en) | temperature control system | |
| CN106526900A (en) | Phased array solid-state optical scanner | |
| CN110543010B (en) | Ultra-precise active optical modulation method and system | |
| Tao et al. | A large-range steering optical phased array chip and high-speed controlling system | |
| CN1285931A (en) | Optical system and method for changing the lengths of optical paths and the phases of light beams | |
| Huang et al. | Experimental investigation of the deformable mirror with bidirectional thermal actuators | |
| CN114994908B (en) | Lens-assisted two-dimensional light beam scanning device | |
| CN103984183A (en) | Laser coherent combination device adopting single-row liquid crystal optics phased arrays | |
| CN106291920B (en) | two-dimensional solid-state optical scanner | |
| CN208607541U (en) | Temperature control equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170322 |