CN201044025Y - Optics phase array optical beam scanner based on lead zirconate titanate doping lanthanum - Google Patents
Optics phase array optical beam scanner based on lead zirconate titanate doping lanthanum Download PDFInfo
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- CN201044025Y CN201044025Y CNU2007200705582U CN200720070558U CN201044025Y CN 201044025 Y CN201044025 Y CN 201044025Y CN U2007200705582 U CNU2007200705582 U CN U2007200705582U CN 200720070558 U CN200720070558 U CN 200720070558U CN 201044025 Y CN201044025 Y CN 201044025Y
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Abstract
An optical phase array beam scanner based on lead lanthanum zironate titanate comprises a piece of lead lanthanum zironate titanate and is characterized in that the lower surface of the lead lanthanum zironate titanate is equipped with a lower electrode which is conductive; the lower electrode is directly connected with the cathode of a voltage drive or earthed; a phase-modulating array electrode consisting of a plurality of strip-shaped electrodes is arranged on the upper surface of the lead lanthanum zironate titanate and the width and internal of neighboring strip-shaped electrodes in the phase-modulating array are the same; the lengths of the strip-shaped electrodes are decreasing gradually or increasing with equal difference; the strip-shaped electrodes are connected with each other by wires and then connected with the anode of the voltage drive; the control electrode of the voltage drive is connected with a computer. The utility model greatly simplifies the drive system of beam scanner and is characterized by excellent stability, fast modulating speed and wide working wave length range.
Description
Technical field
The utility model relates to beam flying, is a kind of optical phased array optical beam scanner based on lead lanthanum zirconate titanate, and the light beam that is mainly used in the space scans fast.
Background technology
In many application of laser optoelectronic, need light beam at spacescan.Traditional method is to adopt a tilting mirror or galvanometer.The sweep velocity that method obtained and the ratio of precision of this employing mechanical motion are lower.In order to improve sweep velocity, reduce the volume weight of device, adapt to the needs that use in the space, people are apart from the optical phased array technology is being carried out deep research.Optical phased array is that a kind of light phase of beam wave surface that makes produces the optics of periodic modulation.Its ultimate principle as shown in Figure 1.When each unit of phase-modulator array 1 obtains one spatially during the time dependent phase place of linear distribution, beam wave surface will be deflected in the space, produce the effect of beam flying.In this technology, there is not mechanical moving element, therefore can obtain very high sweep velocity.The key of optical phased array technology is a phase-modulator array.People have utilized different materials and technology, have demonstrated the performance of optical phased array.
Formerly one of technology (P.F.Mcmanamon, et.al.Proceedings of the IEEE, 1996, Vol.84, No.2 pp268-298) adopts liquid crystal to make the phase-modulator array.It has, and driving voltage is low, little advantages such as (the beam flying angle are big) of array cycle, but modulating speed is low, poor heat stability, operating wavelength range are restricted.Two (E.Shekel of technology formerly, et.al., LEOS 2002, advantages such as paper WA2) employing AlGaAs semiconductor hetero-junction material is made waveguide type phase-modulator array, and this structure has the modulating speed height, and the array cycle is little, but light beam coupling efficient is low, array size small scale, luminous power is restricted, and operating wavelength range is little.Formerly three of technology (R.A.Meyer, APPLIED OPTICS, 1972, Vol.11, No.3 pp613-616) adopts electro-optic crystal to make phase-modulator, and it has advantages such as modulating speed is fast, but has shortcomings such as operating voltage height, material cost height.At crystalline material price height, the problem that volume is little.People and have developed the transparent ceramic material with electrooptical effect.Wherein lead lanthanum zirconate titanate (lead lanthanum zirconate titanate) is a kind of material of extremely paying attention to.Formerly four of technology (J.A.Thomas et.al.OPTICS LETTERS, 1995, Vol.20, No.13 pp1510-1512) utilizes the cross electro-optical effect of lead lanthanum zirconate titanate material to make phase-modulator array 1, and its structure is as shown in Figure 2.Owing to utilize cross electro-optical effect, the distance that has the phase modulation (PM) effect on light path is very short, and therefore the operating voltage that requires is very high.Simultaneously, owing to adopted the structure of interdigital electrode, the size of each unit of array is bigger, so the angle of beam deflection is smaller.Formerly five of technology (Q.W.Song et.al., APPLIED OPTICS, 1996, Vol.35, No.17, pp 3155-3162) adopt the longitudinal electro-optic effect of lead lanthanum zirconate titanate material to make phase-modulator array 1, and its structure as shown in Figure 3.This structure applies voltage with transparency electrode, and the material on light path all has electrooptical effect.But in this structure, also there are contradiction in the size of electrode and the length of light path, when promptly increasing optical path length, must increase the electrode dimension, otherwise crosstalking between the array unit can have a negative impact.Therefore the size of array unit can not lower, so that the angle of beam deflection is also smaller.Six (Dong Zuoren of technology formerly, Fang Zujie, Qu Ronghui, Liu Feng, Ye Qing, Qin Shibo, the electric light wave guidance optical phase modulator array, utility model patent, the patent No.: ZL200520041530.7), the scheme that proposes utilizes the waveguiding structure form to design electric light wave guidance optical phase modulator, with the scanning voltage in the reduction system.But, with the first technology four that adopts lead lanthanum zirconate titanate, May Day sample, all need introduce the combination that different driving voltage forms different linear phase faces at different array phase modulation unit, thereby realize the scanning of light beam, this has increased the complicacy of system architecture greatly.
Summary of the invention
At the problem of above-mentioned technology formerly, the utility model proposes a kind of optical phased array optical beam scanner based on lead lanthanum zirconate titanate, with the structure of the voltage driver of simplifying optical beam scanner, strengthen the practicality of optical beam scanner.
Technical solution of the present utility model is as follows:
A kind of optical phased array optical beam scanner based on lead lanthanum zirconate titanate comprises a sheet lead lanthanum zirconate titanate, it is characterized in that establishing at the lower surface of this lead lanthanum zirconate titanate the bottom electrode of conduction, and this bottom electrode directly links to each other with the negative pole of voltage driver; Form the phase modulation array electrode that many bar shaped electrodes are formed at the upper surface of this lead lanthanum zirconate titanate, each adjacent strip electrode has identical width and at interval in this phase modulation array electrode, and the length of described strip electrode successively equal difference successively decrease or equal difference increases progressively; These strip electrodes interconnect the back by lead-in wire and link to each other with the positive pole of described voltage driver, and described voltage driver links to each other with computer.
Described phase modulation array electrode is the cascade of trapezoidal array electrode or a plurality of trapezoidal array electrodes.
According to above-mentioned device architecture, no longer need the linear phase face that different voltage forms irradiating light beam that applies one by one between the strip electrode of the utility model phase modulation array electrode.It can apply identical single voltage to different strip electrodes, forms the light path of linear change then by the linear change of control electrode length, thereby obtains the phase face of outgoing beam linear change.
From document (J.A.Thomas, Optical phase array beam Deflection using Lead LanthanumZirconate Titanate, Doctoral Dissertation, 2001) can know that the deflection angle theta of phased array optical beam scanner can be expressed as:
In the formula:
Be the phase differential between the adjacent bar electrode,
λ is the wavelength of incident beam,
D is the cycle of phase modulation unit,
K is a wave vector,
Δ l is that the electrode length of adjacent phase modulation unit is poor,
n
0Be the refractive index of material,
R
12Be electrooptical coefficient,
V and t are respectively the voltage of application and the thickness of specimen material.
As shown from the above formula, Δ θ ∝ Δ l, because each strip electrode of phase modulation array electrode described in the utility model has identical width and interval, but its length equal difference is successively successively decreased or is increased progressively, be that each adjacent strip electrode has identical length difference, therefore the phase face of being made up of the outgoing beam of each strip electrode can form the distribution of a linearity, and no longer need to form the linear phase face of irradiating light beam by the voltage of adjusting each phase modulation unit one by one, structurally simplified the complicacy of system greatly.
Therefore, the utlity model has following advantage:
1, in the optical beam scanner of optical phased array phase modulation, an important techniques difficult problem is exactly the number of additional electrodes lead-in wire.Usually phased array N phase modulation unit of one pole need have N external driving voltage, the complicacy of visible this scanner.And the utility model only need be introduced a driving voltage in all phase modulation unit, and driving voltage is scanned the scanning that promptly can realize light beam, and this simplifies the drive system of whole scanner greatly.
2, electrode structure of the present utility model both can adopt the La-doped lead zirconate-titanate ceramics material of body piece, also can adopt film lead lanthanum zirconate titanate material; The phased array scanner that both can be used for one pole also can be used for the optical phased array scanner of multi-stage cascade.
3, adopt the electrooptic birefringence effect of lead lanthanum zirconate titanate, compare with semiconductor material, have advantages such as good stability, modulating speed is fast, operating wavelength range is big with liquid crystal.
Description of drawings
Fig. 1 is the ultimate principle of optical phased array;
Fig. 2 is the synoptic diagram that adopts the cross electro-optical effect structure;
Fig. 3 is the synoptic diagram that adopts the longitudinal electro-optic effect structure;
Fig. 4 is the structural representation of the utility model embodiment one;
Fig. 5 is the structural representation of the utility model embodiment two;
Fig. 6 is the structural representation of the utility model embodiment three;
Embodiment
The utility model is described in further detail below in conjunction with embodiment and accompanying drawing, but should not limit protection domain of the present utility model with this.
See also Fig. 4 earlier, Fig. 4 is the structural representation of the utility model embodiment one, as seen from the figure, the utility model is based on the optical phased array optical beam scanner of lead lanthanum zirconate titanate, comprise a sheet lead lanthanum zirconate titanate 1, it is characterized in that establishing at the lower surface of this lead lanthanum zirconate titanate 1 bottom electrode 2 of conduction, this bottom electrode 2 directly links to each other with the negative pole or the ground of voltage driver 4; Upper surface in this lead lanthanum zirconate titanate 1 forms the phase modulation array electrode 3 that many bar shaped electrodes are formed, each adjacent strip electrode has identical width and at interval in this phase modulation array electrode 3, and the length of described strip electrode successively equal difference successively decrease or equal difference increases progressively; These strip electrodes interconnect the back by lead-in wire and link to each other with the positive pole of described voltage driver 4, and the control utmost point of described voltage driver 4 links to each other with computer 5.The phase modulation array electrode 3 of present embodiment is the equal difference electrode structure of right-angled trapezium.1 is employed lead lanthanum zirconate titanate electrooptical material among the figure, and it can be a body piece electro-optic ceramics material, also can be the membraneous material of waveguiding structure.2 is the bottom electrode 2 of sputter or evaporation on lead lanthanum zirconate titanate electrooptical material 1, and its covers 1 whole lower surface, links to each other with ground by lead-in wire then.Computer 5 control voltage drivers 4 carry out voltage scanning.6 is incident beam; 7 is outgoing beam.
Fig. 5 is the structural representation of the utility model embodiment two, and the difference of embodiment two and embodiment one is that described phase modulation array electrode 3 is trapezoidal equal difference electrode structures, and it is poor still to have equal lengths between adjacent strip electrode.
Fig. 6 is the structural representation of the utility model embodiment three, embodiment three is that described phase modulation array electrode 3 is the cascade phased array array structures that are made of the equal difference electrode the cascade of two right-angled trapezium array electrodes that form at lead lanthanum zirconate titanate 1 upper surface with the difference of embodiment one, can control each sub-phase modulation array respectively by voltage driver 4 and computer 5 then and carry out the scanning of light beam.
Simplify the drive system of scanner greatly through the utility model that shows on probation, and had advantages such as good stability, modulating speed is fast, operating wavelength range is big.
Claims (2)
1. optical phased array optical beam scanner based on lead lanthanum zirconate titanate, comprise a slice lead lanthanum zirconate titanate (1), it is characterized in that establishing at the lower surface of this lead lanthanum zirconate titanate (1) bottom electrode (2) of conduction, this bottom electrode (2) directly links to each other with the negative pole of voltage driver (4); Upper surface in this lead lanthanum zirconate titanate (1) forms the phase modulation array electrode (3) that many bar shaped electrodes are formed, each adjacent strip electrode has identical width and at interval in this phase modulation array electrode (3), and the length of described strip electrode successively equal difference successively decrease or equal difference increases progressively; These strip electrodes interconnect the back by lead-in wire and link to each other with the positive pole of described voltage driver (4), and the control utmost point of described voltage driver (4) links to each other with computer (5).
2. optical phased array optical beam scanner according to claim 1 is characterized in that the cascade of described phase modulation array electrode (3) for trapezoidal array electrode, a plurality of trapezoidal array electrodes.
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| Application Number | Priority Date | Filing Date | Title |
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| CNU2007200705582U CN201044025Y (en) | 2007-06-01 | 2007-06-01 | Optics phase array optical beam scanner based on lead zirconate titanate doping lanthanum |
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| CNU2007200705582U CN201044025Y (en) | 2007-06-01 | 2007-06-01 | Optics phase array optical beam scanner based on lead zirconate titanate doping lanthanum |
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| CN201044025Y true CN201044025Y (en) | 2008-04-02 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109901263A (en) * | 2019-01-29 | 2019-06-18 | 浙江大学 | A kind of silicon substrate integrated optics phased array chip based on common electrode |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109901263A (en) * | 2019-01-29 | 2019-06-18 | 浙江大学 | A kind of silicon substrate integrated optics phased array chip based on common electrode |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080402 |