CN101053861A - Injection pump, base plate processing device and base plate processing method - Google Patents
Injection pump, base plate processing device and base plate processing method Download PDFInfo
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- CN101053861A CN101053861A CNA2007100886313A CN200710088631A CN101053861A CN 101053861 A CN101053861 A CN 101053861A CN A2007100886313 A CNA2007100886313 A CN A2007100886313A CN 200710088631 A CN200710088631 A CN 200710088631A CN 101053861 A CN101053861 A CN 101053861A
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- piston
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- room
- liquid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
- B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
- B05B9/04—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
- B05B9/0403—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material
- B05B9/0409—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material the pumps being driven by a hydraulic or a pneumatic fluid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/12—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain a coating with specific electrical properties
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
Abstract
The invention provides a syringe pump, substrate processing apparatus and substrate processing method using syringe pump. It can remove treating fluid and particles attached to the side of the piston, and keep the lubricity between the piston and sealing element. The syringe pump (8) of the substrate processing apparatus (1) is in the rear room (85) in the back of the cylinder body (81) and used to supply washing liquid to the side of the piston (82). So resist fluid and particles attached to the side of the piston are washed and removed from the side of the piston (82). Part of the washing liquid supplied to the rear room (85) is attached to the first sealing element (83b), the second sealing element (87b) and the surface of the piston (82) acting as a lubricant, thereby keeping the lubricity between the first sealing element (83b), the second sealing element (87b) and the piston (82).
Description
Technical field
The present invention relates to be used to carry and supply with the syringe pump of treatment fluid such as photoresist liquid, carry by this syringe pump and supply with treatment fluid and to the substrate board treatment and the substrate processing method using same of the surface of substrate coating treatment fluid.
Background technology
All the time, known have such substrate board treatment: liquid crystal indicator with glass substrate, semiconductor wafer, film liquid crystal with flexible base, board, base board for optical mask, the manufacturing process of coloured filter with various substrates such as substrates in, on the surface of substrate, supply with treatment fluids such as photoresist liquid.This substrate board treatment has the pump that is used to carry and supply with treatment fluid.As pump, though use syringe pump (piston pump), bellowspump (bellows pump), gear pump, membrane pump or tubing pump etc., wherein, the ejection response and the constant current amount of syringe pump are superior, so use more in substrate board treatment.
About having the existing substrate board treatment of syringe pump, for example be disclosed in the patent documentation 1.
Patent documentation 1:JP spy opens the 2005-246201 communique.
As patent documentation 1 record, syringe pump has cylinder body and piston, advances and retreat the side conveying downstream of the treatment fluid in the cylinder body by make piston in cylinder body.But, in this syringe pump, have such situation: when making piston retreat (drawing), be exposed at the outside of cylinder body with piston and solidify attached to the treatment fluid of piston side.And also have such situation: when making piston-advance (pushing away) once more, the particle that produces owing to the curing of treatment fluid is blended in the treatment fluid in the cylinder body.Though the sliding contacting part branch at cylinder body and piston is provided with seal member,, be difficult to prevent from fully to reveal the outside with piston attached to the treatment fluid of piston side.
In addition, in syringe pump, for the advance and retreat of carrying out piston in cylinder body are swimmingly moved, and for the seal member wearing and tearing that prevent to be provided with between cylinder body and piston worsen, requirement is always keeping the lubricity between piston and the seal member.
Summary of the invention
This law is bright to be proposed in view of this problem, its purpose is to provide a kind of syringe pump, has used the substrate board treatment and the substrate processing method using same of syringe pump, remove treatment fluid and particle, and can keep the lubricity between piston and the seal member attached to the piston side.
In order to solve above-mentioned problem, first invention is a kind of syringe pump that is used for transport process liquid, it is characterized in that having: the cylinder body of hollow, and it has attraction hole that attracts described treatment fluid and the squit hole that sprays described treatment fluid; Isolated part, its inner space with described cylinder body is divided into first Room and second Room, and has first through hole that on the fore-and-aft direction of described cylinder body, connects, wherein, this first Room is connected with described attraction hole and described squit hole, and this second Room is compared described first Room and is formed on the rear portion side of described cylinder body; Back-end component, the rearward end that it is configured in described cylinder body constitutes the part of the outer wall of described second Room, and has second through hole that connects on the fore-and-aft direction of described cylinder body; Piston, it is inserted in described first through hole and described second through hole, and the leading section of piston is configured in the inside of described first Room, and the end is compared the rearward end of described cylinder body and is configured in the outside of described cylinder body thereafter; Drive division, it makes described piston move back enterprising the advancing of the fore-and-aft direction of described cylinder body; First seal member seals between its side with the medial surface of described first through hole and described piston, and makes between the side of the medial surface of described first through hole and described piston and be free to slide contact; Second seal member seals between its side with the medial surface of described second through hole and described piston, and makes between the side of the medial surface of described second through hole and described piston and be free to slide contact; Fluid Supplying apparatus, it supplies with the liquid of regulation to the side of described piston in the inside of described second Room; Liquid discharge device, it discharges the liquid of described regulation from described second Room.
Second invention is as the described syringe pump of first invention, it is characterized in that, described piston does not move back enterprising the advancing of the fore-and-aft direction of described cylinder body with the medial surface sliding-contact of described cylinder body, changes by the volume that makes described first Room, thereby described treatment fluid is sprayed from described squit hole.
The 3rd invention is as the syringe pump of second invention, it is characterized in that described fluid Supplying apparatus by the liquid in the described regulation of the described second indoor storage, supplies with to the side of described piston the liquid of described regulation.
The 4th invention is as the described syringe pump of second invention, it is characterized in that described fluid Supplying apparatus sprays the liquid of described regulation towards the side at the described piston of the described second indoor configuration.
The 5th invention is as the described syringe pump of the 3rd or the 4th invention, it is characterized in that the liquid of described regulation is the solvent or the described treatment fluid of described treatment fluid.
The 6th invention is as the described syringe pump of the 3rd or the 4th invention, it is characterized in that also having: gas supply device, and it supplies with the gas of regulation in the side of the described second indoor described piston to the liquid that has been supplied to described regulation; Gas exhausting device, it discharges the gas of described regulation from described second Room.
The 7th invention is as the described syringe pump of the 3rd or the 4th invention, it is characterized in that in the side of described piston, the part with described first seal member and the described second seal member sliding-contact is the plateau structured surface at least.
The 8th invention is as the described syringe pump of the 7th invention, it is characterized in that, the bearing length rate Rmr (c) of the profile of described plateau structured surface, under 50% the profile height c of the maximum height Rz of profile, be Rmr (c) 〉=70%, wherein, the bearing length rate Rmr (c) of this profile is the bearing length rate Rmr (c) of the profile stipulated in the JISB0601 corresponding with international standard ISO4287.
The 9th invention is as the described syringe pump of the 7th invention, it is characterized in that, the arithmetic average deviation Ra of described plateau structured surface and maximum peak height Rp, be Ra≤0.08 μ m and Rp≤0.3 μ m, wherein, this arithmetic average deviation Ra and maximum peak height Rp are arithmetic average deviation Ra and the maximum peak height Rp that stipulates in the JISB0601 corresponding with international standard ISO4287.
The tenth invention is the substrate board treatment that utilizes the treatment fluid treatment substrate, it is characterized in that having: syringe pump, and it sprays treatment fluid; The treatment fluid feedway, it will be supplied with to the surface of substrate from the described treatment fluid of described syringe pump ejection, and described syringe pump has: the cylinder body of hollow, it has attraction hole that attracts described treatment fluid and the squit hole that sprays described treatment fluid; Isolated part, its inner space with described cylinder body is divided into first Room and second Room, and has first through hole that on the fore-and-aft direction of described cylinder body, connects, wherein, this first Room is connected with described attraction hole and described squit hole, and this second Room is compared described first Room and is formed on the rear portion side of described cylinder body; Back-end component, the rearward end that it is configured in described cylinder body constitutes the part of the outer wall of described second Room, and has second through hole that connects on the fore-and-aft direction of described cylinder body; Piston, it is inserted in described first through hole and described second through hole, and the leading section of piston is configured in the inside of described first Room, and the end is compared the rearward end of described cylinder body and is configured in the outside of described cylinder body thereafter; Drive division, it makes described piston move back enterprising the advancing of the fore-and-aft direction of described cylinder body; First seal member seals between its side with the medial surface of described first through hole and described piston, and makes between the side of the medial surface of described first through hole and described piston and be free to slide contact; Second seal member seals between its side with the medial surface of described second through hole and described piston, and makes between the side of the medial surface of described second through hole and described piston and be free to slide contact; Fluid Supplying apparatus, it supplies with the liquid of regulation to the side of described piston in the inside of described second Room; Liquid discharge device, it discharges the liquid of described regulation from described second Room.
The 11 invention is as the described substrate board treatment of the tenth invention, it is characterized in that also having:
Setting device, it sets the timing of described fluid Supplying apparatus action; Control device, it makes described fluid Supplying apparatus action based on the timing of being set by described setting device.
The substrate processing method using same that utilizes the treatment fluid treatment substrate of the 12 invention is characterized in that having: first operation, advance and retreat by making the piston in the syringe pump, and via supplying with treatment fluid to the surface of substrate in first Room that in described syringe pump, forms; Second operation, the liquid of regulation is supplied with in second indoor in being formed at described syringe pump to the side of described piston.
According to first～the 11 invention, syringe pump has: fluid Supplying apparatus, and it supplies with the liquid of regulation in the inside of second Room that is formed at the cylinder body rear portion side to the side of piston; Liquid discharge device, it discharges the liquid of regulation from second Room.Therefore, at the treatment fluid and the particle of the side attachment of piston, the liquid wash that is prescribed is fallen and is removed.In addition, be fed on the surface of liquid attached to first seal member, second seal member and piston of regulation of second Room, play a part lubricant.Therefore, can keep lubricity between first seal member and second seal member and the piston.
Particularly, according to second invention, piston does not move back enterprising the advancing of the fore-and-aft direction of cylinder body with the medial surface sliding-contact of cylinder body, changes by the volume that makes first Room, thereby treatment fluid is sprayed from squit hole.For this reason, there is no need the medial surface of cylinder body and the lateral surface of piston to be maintained high manufacturing accuracy in long distance.Therefore, become simultaneously easy, also can easily make jumbo syringe pump at the processing syringe pump.
Particularly, according to the 3rd invention, fluid Supplying apparatus, the liquid by in the second indoor storage regulation supplies with to the side of piston the liquid of regulation.Therefore, the liquid of regulation is fed into the side of piston reliably, and can remove well attached to treatment fluid on the side of piston and particle.
Particularly, according to the 4th invention, fluid Supplying apparatus is towards the liquid in the side of the piston of second indoor configuration ejection regulation.For this reason, the liquid of regulation is directly supplied to the side of piston, and can remove well attached to treatment fluid on the side of piston and particle.
Particularly, according to the 5th invention, the liquid of regulation is the solvent or the treatment fluid of treatment fluid.Therefore, even the liquid of regulation has been blended in the treatment fluid of first Room, bring bad influence can for the processing of first Room yet yet.
Particularly,, also have according to the 6th invention: gas supply device, it supplies with the gas of regulation in the second indoor side to the piston that has been supplied to the liquid of stipulating; Gas exhausting device is discharged the gas of stipulating from second Room.Therefore, excess liquid is forced to discharge to the outside of cylinder body, can reduce excess liquid enters first Room from second Room possibility.
Particularly, according to the 7th invention, in the side of piston, the part with first seal member and the second seal member sliding-contact is the plateau structured surface at least.Therefore, the possibility of first seal member and second seal member is damaged in the side that has reduced piston, prevents that the wearing and tearing of first seal member and second seal member from worsening.In addition, owing to the liquid of stipulating is remained on the side of piston well, thereby further improved the lubricity between first seal member and second seal member and the piston.
Particularly, according to the 8th invention, in the side of piston, become the bearing length rate Rmr (c) of profile of the part of plateau structured surface, under 50% the profile height c of the maximum height Rz of profile, be Rmr (c) 〉=70% that wherein, the bearing length rate Rmr (c) of profile is the bearing length rate Rmr (c) of the profile stipulated in the JISB0601 corresponding with international standard ISO4287.That is, the side of piston has the characteristic of plateau structure more significantly.Therefore, can prevent better that the wearing and tearing of first seal member and second seal member from worsening, thereby further improve the lubricity between first seal member and second seal member and the piston.
Particularly, according to the 9th invention, in the side of piston, become the arithmetic average deviation Ra and the largest contours peak height Rp of the part of plateau structured surface, be Ra≤0.08 μ m and Rp≤0.3 μ m, wherein, arithmetic average deviation Ra and largest contours peak height Rp are arithmetic average deviation Ra and the largest contours peak height Rp that stipulates in the JISB0601 corresponding with international standard: ISO4287.Therefore, in the side of piston, peak portion is by further planarization, thereby the wearing and tearing that prevent first seal member and second seal member better worsen.
Particularly, according to the tenth invention, substrate board treatment has: syringe pump, and it sprays treatment fluid; The treatment fluid feedway, it will be supplied with to the surface of substrate from the treatment fluid of syringe pump ejection, and syringe pump has: the cylinder body of hollow, it has attraction hole that attracts treatment fluid and the squit hole that sprays treatment fluid; Isolated part, its inner space with cylinder body is divided into first Room and second Room, and has first through hole that connects on the fore-and-aft direction of cylinder body, wherein, first Room is connected with attracting hole and squit hole, and second Room is compared described first Room and is formed on the rear portion side of cylinder body; Back-end component, the rearward end that it is configured in cylinder body constitutes the part of the outer wall of second Room, and has second through hole that connects on the fore-and-aft direction of cylinder body; Piston, it is inserted in first through hole and second through hole, and the leading section of piston is configured in the inside of first Room, and the rearward end of piston is compared the rearward end of cylinder body and is configured in the outside of cylinder body; Drive division, it makes piston move back enterprising the advancing of the fore-and-aft direction of cylinder body; First seal member seals between its side with the medial surface of first through hole and piston, and makes between the side of the medial surface of first through hole and piston and be free to slide contact; Second seal member seals between its side with the medial surface of second through hole and described piston, and makes between the side of the medial surface of second through hole and piston and be free to slide contact; Fluid Supplying apparatus, it supplies with the liquid of regulation to the side of piston in the inside of second Room; Liquid discharge device, it discharges the liquid of regulation from second Room.Therefore, supply with in the action, can prevent from the syringe pump of performance important role, to produce particle, and can keep the lubricity of syringe pump at the treatment fluid of substrate board treatment.
Particularly, according to the 11 invention, substrate board treatment also has: setting device, and it sets the timing of the action of fluid Supplying apparatus; Control device, it makes the fluid Supplying apparatus action based on the timing of being set by setting device.Therefore, according to the treatment state of substrate, the timing setting that liquid can be supplied with is best timing, regularly and automatically supplies with the liquid of regulation based on this.
Particularly, according to the 12 invention, substrate processing method using same has: first operation, advance and retreat by making the piston in the syringe pump, and via supplying with treatment fluid to the surface of substrate in first Room that in syringe pump, forms; Second operation, the liquid of regulation is supplied with in second indoor in being formed at syringe pump to the side of piston.Therefore, the liquid wash that can be prescribed attached to the treatment fluid on the side of piston and particle is fallen and is removed.In addition, play the effect of lubricant at the liquid of the regulation of the second indoor supply.Therefore, kept the lubricity of piston.
Description of drawings
Fig. 1 is the stereogram of structure of the substrate board treatment of expression one embodiment of the present invention.
Fig. 2 is the sectional view of objective table and gap nozzle.
Fig. 3 is the figure of the structure of expression feed mechanism.
Fig. 4 is the figure that at length represents to inject pump structure.
Fig. 5 is near the figure of the section shape in the side of reduced representation piston.
Fig. 6 is the flow chart of the flow process of processing substrate in the expression substrate board treatment 1.
Fig. 7 is the figure of the injection pump structure of expression variation.
The specific embodiment
Below, with reference to accompanying drawing preferred implementation of the present invention is described.
＜1. the overall structure of substrate board treatment 〉
Fig. 1 is the stereogram of structure of the substrate board treatment 1 of expression one embodiment of the present invention.This substrate board treatment 1, square glass substrate (being designated hereinafter simply as " substrate ") 90 of picture panel that will be used to make liquid crystal indicator is as processed substrate, be used at the photo-mask process on etching substrates 90 surfaces selectively, to the photoresist liquid (be designated hereinafter simply as " against corrosion liquid ") of the surface of substrate 90 coating as treatment fluid.As shown in Figure 1, substrate board treatment 1 mainly has main part 2 and control part 6.
In addition, on maintenance face 30, be spaced from each other the interval of regulation and dispose can free lifting a plurality of lifter pin LP.Be connected with drive division on lifter pin LP, when drive division moved, lifter pin LP moved with regard to oscilaltion.Thus, the substrate that loads on lifter pin LP 90 keeps flat-hand position constant and oscilaltion is moved.In addition, on maintenance face 30, across the both sides in the zone that is used to keep substrate 90, parallel and flatly be equipped with a pair of orbit 31.Orbit 31 is connected with following crane span structure portion 4, brings into play following effect: towards moving of the laying direction guiding crane span structure portion 4 of orbit 31.
Above objective table 3, be provided with crane span structure portion 4.Crane span structure portion 4 has the elevating mechanism 43,44 at nozzle support portion 40 and 40 two ends, support nozzle support portion.It is that aggregate constitutes that nozzle support portion 40 strengthens resin with carbon fibre, and approximate horizontal is set up on the direction vertical with the laying direction of orbit 31.Gap nozzle 41 and gap sensor (Gap Sensor) 42 is installed in nozzle support portion 40.Gap nozzle 41 has following function: spray liquid against corrosion towards the below in the time of by scanning substrate 90 surfaces, (more precisely, being the zone except the zone of Rack on every side in substrate 90 surfaces) is coated with liquid against corrosion to substrate 90 surfaces.Gap nozzle 41 is connected with feed mechanism 7 described later (with reference to Fig. 2), will be coated on the surface of substrate 90 from the liquid against corrosion that feed mechanism is supplied with.The liquid against corrosion that is coated with forms etchant resist on the surface of substrate 90.In addition, gap sensor 42 be arranged on gap nozzle 41 near.Gap sensor 42 has the function that has the distance between the object (surface of substrate 90 or the surface of etchant resist) of calculating and below.
In addition, the outside in orbit 31 and crane span structure portion 4 is provided with a pair of linear motor 50,51 and a pair of linear encoder 52,53.Moving member 50b, 51b that linear motor 50,51 has the fixture 50a, the 51a that fixedly install in the side of objective table 3 and fixedly installs at the sidepiece of crane span structure portion 4.The driving force of linear motor 50,51 by producing between fixture 50a, 51a and moving member 50b, 51b moving crane span structure portion 4 on the direction of orbit 31.On the other hand, linear encoder 52,53 has along scale portion that fixture 50a, 51a fixedly install and the detecting element that fixedly installs in the outside of moving member 50b, 51b. Linear encoder 52,53 is by calculating the relative position of detecting element relative scale portion, and detects the position of crane span structure portion 4.
On the part by the zone of orbit 31 clampings on the maintenance face 30 of objective table 3, be formed with opening 32.The inside of the main part 2 below opening 32 is provided with treats cabinet (pot), nozzle cleaning mechanism and pre-coating mechanism.These mechanisms are used in the liquid against corrosion that carried out in advance and supply with preliminary treatment such as processing, degassing processing, pre-allotment (pre-dispense) processing before the coating of substrate 90 coatings liquid against corrosion is handled.
Fig. 2 is the above-mentioned objective table 3 and the sectional view of gap nozzle 41.Electrical or the mechanical syndeton of in Fig. 2, also schematically representing the each several part of substrate board treatment 1.Control part 6 electrically connects with gap sensor 42, elevating mechanism 43,44, linear motor 50,51, linear encoder 52,53 and feed mechanism 7.Control part 6 receives the instrumentation value of sending from gap sensor 42 or linear encoder 52,53, and control elevating mechanism 43,44, the action of linear motor 50, feed mechanism 7.For example, control part 6 is regulated the distance between substrate 90 and the gap nozzle 41 thus by control the action of elevating mechanism 43,44 according to the instrumentation value that receives from gap sensor 42.In addition, control part 6 carries out the scanning motion of gap nozzle 41 thus by control the action of linear motor 50 according to the instrumentation value that receives from linear encoder 52,53 on objective table 3.In addition, control part 6 comes to spray liquid against corrosion from gap nozzle 41 to the surface of substrate 90 by the action of control feed mechanism 7.
＜2. the formation of feed mechanism 〉
Fig. 3 is the figure of the concrete structure of expression feed mechanism 7.As shown in Figure 3, feed mechanism 7 has collecting box (trap tank) 71, pipe arrangement 72a～72h, open and close valve 73a～73d, pressure adjustment part 74, filter 75 and syringe pump 8.Open and close valve 73a～73d, the driving mechanism 86 of pressure adjustment part 74, filter 75 and syringe pump 8 electrically connects with control part 6, by control part 6 their actions of control, realizes gap nozzle 41 is supplied with the supply action of liquid against corrosion.
The collecting box 71 temporary transient liquid of supplying with via pipe arrangement 72a from liquid supply source 70 against corrosion against corrosion of storing.When storage had liquid against corrosion in collecting box 71, the bubble in the liquid against corrosion floats went up liquid level, accumulates to the top of collecting box 71.And the gas componant that accumulates in collecting box 71 tops is discharged to the outside via pipe arrangement 72b.Thus, the bubble in the liquid against corrosion is removed.
Connect by pipe arrangement 72c between the chamber, the place ahead 84 of syringe pump 8 and the collecting box 71.And, dispose open and close valve 73a midway in the path of pipe arrangement 72c.In addition, connect by pipe arrangement 72d between the chamber, the place ahead 84 of syringe pump 8 and the gap nozzle 41.And, dispose open and close valve 73b midway in the path of pipe arrangement 72d.Therefore, when closing open and close valve 73b and open open and close valve 73a, and when making piston 82 retreat (promptly carrying out the action of " drawing "), the liquid against corrosion that will store in collecting box 71 via pipe arrangement 72c is attracted in the chamber, the place ahead 84.Then, when closing open and close valve 73a and open open and close valve 73b, and when making piston 82 advance (promptly carrying out the action of " pushing away "), the liquid against corrosion of filling in the chamber 84 forwardly via pipe arrangement 72d are carried to gap nozzle 41 and are supplied with.Gap nozzle 41 is coated on the carry liquid of supplying with against corrosion on the surface of substrate 90.
On the other hand, on the chamber, rear 85 of cylinder body 81, be connected with pipe arrangement 72e.The upstream side of pipe arrangement 72e branches into pipe arrangement 72f and pipe arrangement 72g, is connected with the cleaning solution supplying source 76 that is used to supply with cleaning fluid at the upstream side of pipe arrangement 72f.Therefore, when the open and close valve 73c that is provided with on pipe arrangement 72f opened, 76 rearward supplied with cleaning fluids in the chamber 85 by pipe arrangement 72f and pipe arrangement 72e from the cleaning solution supplying source.In addition, the upstream side at pipe arrangement 72g is connected with the substitution gas supply source 77 that is used to supply with substitution gas.Therefore, when the open and close valve 73d that is provided with opens, rearward supply with substitution gas in the chamber 85 by pipe arrangement 72g and pipe arrangement 72e on pipe arrangement 72g from substitution gas supply source 77.Open and close valve 73c and open and close valve 73d are bringing into play the effect of the switching device shifter of the supply that is used to switch cleaning fluid and substitution gas.
The cleaning fluid or the substitution gas that supply in the chamber, rear 85 are discharged to the outside of cylinder body via pipe arrangement 72h.In addition, as above-mentioned cleaning fluid, for example use as the solvent composition of liquid against corrosion and have acetone, organic solvents such as PEGMEA, PEGME as the function of lubricant.In addition, as above-mentioned substitution gas, use for example inert gas or CDA (drying compressed gas) such as nitrogen.
Be connected with pressure adjustment part 74 with on collecting box 71 and the pipe arrangement 72c that cylinder body 81 is connected.Pressure adjustment part 74 will maintain below the setting from the suction pressure of collecting box 71 to the liquid against corrosion of cylinder body 81 attractions, prevent from thus to produce bubble in liquid against corrosion.In addition, the pipe arrangement 72d that syringe pump 8 is connected with gap nozzle 41 is provided with filter 75.Filter 75 is removed the impurity (particle, bubble etc.) that exists from the liquid against corrosion of syringe pump 8 ejections, purifies liquid against corrosion.
Fig. 4 is the figure that represents the structure of above-mentioned syringe pump 8 in more detail.Further specify the structure of syringe pump 8 with reference to Fig. 4.The cylinder body 81 of syringe pump 8 is made of stainless steels such as SUS, has the profile of general cylindrical shape shape.The inner space of cylinder body 81 is divided into chamber, the place ahead 84 and chamber, rear 85 by isolated part 83.On the side that is positioned at chamber, the place ahead 84 of cylinder body 81, be formed with and attract hole 81a.Attracting to be connected with above-mentioned pipe arrangement 72c on the 81a of hole, the liquid against corrosion that attracts from collecting box 71 (with reference to Fig. 3) is imported in the chamber, the place ahead 84 from attraction hole 81a.In addition, on the leading section (upper surface of cylinder body 81 among Fig. 4) of cylinder body 81, be formed with squit hole 81b.Be connected with above-mentioned pipe arrangement 72d on squit hole 81b, the liquid against corrosion that sprays from cylinder body 81 is sent to pipe arrangement 72d via squit hole 81b.That is, chamber, the place ahead 84 becomes the space that is used to fill as the liquid against corrosion of treatment fluid.
In addition, the rearward end (bottom surface of the cylinder body 81 among Fig. 4) at cylinder body 81 is equipped with the back-end component 87 that is used for closed cylinder 81 rearward end.Back-end component 87 constitutes the outer wall of chamber, rear 85 with isolated part 83, and the space that is surrounded by the side of isolated part 83, back-end component 87 and cylinder body 81 becomes chamber, rear 85.On isolated part 83 and back-end component 87, be formed with through hole 83a, 87a respectively, in through hole 83a, 87a, insert and be connected with piston 82 in the fore-and-aft direction perforation of cylinder body 81.
The rearward end of piston 82 is connected with driving mechanism 86.Driving mechanism 86 has motor 86a, ball screw 86b, nut portions 86c, guide part 86d and attaching parts 86e.Driving mechanism 86 utilizes the driving force that is generated by motor 86a to make ball screw 86b rotation, and the nut portions 86c that is screwed on the ball screw is moved up in the front and back of cylinder body 81 along guide part 86d.The piston 82 that is connected with nut portions 86c via attaching parts 86e is accompanied by moving and the motion of advancing and retreat of nut portions 86c.
At the through hole 83a of isolated part 83 inner peripheral surface the first seal member 83b is installed.The first seal member 83b is made of sliding and the superior resin material of wearability, can and make free sliding between them with sealing between the outer peripheral face of the inner peripheral surface of the through hole 83a of isolated part 83 and piston 82.In addition, on the inner peripheral surface of the through hole 87a of back-end component 87, the second seal member 87b is installed.The second seal member 87b also is made of sliding and the superior resin material of wearability, can and make free sliding between them with sealing between the outer peripheral face of the inner peripheral surface of the through hole 87a of back-end component 87 and piston 82.As constituting seal member 83b, the material of 87b specifically, can use resin materials such as PEEK class, Ny class, POM class, UHMW-HDPE class, PET class, polyimide.
When supplying with cleaning fluid in the chamber 85 rearward, cleaning fluid is stored in the chamber, rear 85, and formation liquid flows the piston during being disposed at chamber, rear 85 82 near.Therefore, accompanying liquid against corrosion and particle are cleaned liquid and rinse out in the side of piston 82, and are removed from the side of piston 82.Therefore, prevent to be exposed to the rear side of back-end component 87 and to solidify at the accompanying cleaning fluid in the side of piston 82.In addition, also prevent to enter into the front side of isolated part 83 and be blended into liquid against corrosion in the chamber, the place ahead 84 at the accompanying particle in the side of piston 82.
Rearward the part of cleaning liquid supplied in the chamber 85 attached to the surface of the first seal member 83b, the second seal member 87b and piston 82, is being brought into play the effect of lubricant.Therefore, can keep the lubricity between the first seal member 83b and the second seal member 87b and the piston 82, make piston 82 action of advancing and retreat swimmingly.
Fig. 5 is near the figure of the cross sectional shape reduced representation piston 82 sides.As shown in Figure 5, the side of piston 82 becomes so-called " plateau structured surface (plateau shaped surface) ", and the mode that promptly become par 82a so that high peak portion is reamed, stays the dark 82b of paddy portion processes.Therefore, the side of piston 82 reduces the possibility of the first seal member 83b and second seal member 87b damage, and prevents that the first seal member 83b and the second seal member 87b wearing and tearing from worsening.In addition, enter the 82b of paddy portion, also cleaning fluid can be remained on well the side of piston 82 by cleaning fluid.Therefore, can keep lubricity between the first seal member 83b and the second seal member 87b and the piston 82 well.
The side of piston 82, specifically, preferably process in the following manner, i.e. the bearing length rate Rmr (c) of the profile of regulation in JISB0601 (corresponding international standard is ISO4287), under 50% the profile height c of the maximum height Rz of profile, be Rmr (c) 〉=70%.The side of such piston 82 has the characteristic of plateau structure more significantly.Therefore, can prevent more well that the wearing and tearing of the first seal member 83b and the second seal member 87b from worsening, can keep the lubricity between the first seal member 83b and the second seal member 87b and the piston 82 well.
In addition, the side of piston 82, more preferably to process in the following manner, promptly the arithmetic average deviation Ra and the largest contours peak height Rp of regulation are in JISB0601 (corresponding international standard is ISO4287): Ra≤0.08 μ m and Rp≤0.3 μ m.The side of such piston 82 becomes the plateau structured surface that high peak portion is cut more smoothly.Therefore, can prevent the wearing and tearing deterioration of the first seal member 83b and the second seal member 87b more well.In addition, if utilize the maximum height Rz and the dark Rv of largest contours paddy of the profile of regulation among the JISB0601 (corresponding international standard is ISO4287), further limit the character and the state of piston side, then Rz≤1.3 μ m, Rv≤1.0 μ m preferably are processed in the side of piston 82.
Return Fig. 4, piston 82 directly with the medial surface sliding-contact of cylinder body 81, and with the through hole 83a that forms on the isolated part 83 and on back-end component 87 the medial surface sliding-contact of the through hole 87a of formation go forward side by side to advance and move back.And, change from squit hole 81b by the volume that makes chamber, the place ahead 84 to spray liquid against corrosion.Therefore, do not need the medial surface of cylinder body 81 and the side of piston 82 are kept high manufacturing accuracy on long distance.Therefore, the processing of syringe pump 8 becomes easily, and also can easily make jumbo syringe pump 8.
＜3. the action of substrate board treatment 〉
Action when then, treatment substrate 90 in the above-mentioned substrate board treatment 1 being described with reference to above-mentioned each figure and the flow chart of Fig. 6.In addition, below the processing action of explanation is that drive division, gap sensor 42, elevating mechanism 43,44, linear motor 50,51, linear encoder 52,53, open and close valve 73a～73d, pressure adjustment part 74, driving mechanism 86 etc. by 6 couples of above-mentioned lifter pin LP of control part are controlled and carried out.
In substrate board treatment 1, during treatment substrate 90, at first, close open and close valve 73d and open open and close valve 73c, with cleaning solution supplying (step S1) in the chamber, rear 85 of syringe pump 8.Near cleaning fluid chamber 85 interior piston 82 liquid that form in the wings flows, and rinses out attached to liquid against corrosion and particle on piston 82 sides.By liquid against corrosion and the particle removed from piston 82 sides, discharge from squit hole 81d with cleaning fluid.The supply of cleaning fluid continues official hour, and this official hour preestablishes in storage part 61.
Then, close open and close valve 73c and open open and close valve 73d, substitution gas is supplied to the chamber, rear 85 interior (step S2) of syringe pump 8.Substitution gas pushes the liquid in the chamber, rear 85 forcibly to squit hole 81d side, and with 85 discharges from the chamber, rear of unnecessary cleaning fluid.Thus, prevent that cleaning fluid from entering into the front side of isolated part 83 and being blended into liquid against corrosion in the chamber, the place ahead 84.The side of piston 82 is in such state: the cleaning fluid that has only adhered to suitable amount thinly is used as lubricant.The supply of substitution gas continues predefined official hour in the storage part 61.
By the transport mechanism conveyance substrate 90 of operating personnel or regulation, substrate 90 be loaded into a plurality of lifter pin LPs of from the maintenance face 30 of objective table 3 outstanding and standby on thereafter.And, descend by making a plurality of lifter pin LP, and substrate 90 be loaded in (step S3) on the maintenance face 30.Substrate 90 is under the effect of the absorption affinity of vacuum suction mouth and on the maintenance face of being attracted to 30, and remains on the maintenance face 30 with being stabilized.
When substrate 90 was loaded on the maintenance face 30, elevating mechanism 43,44 was adjusted the posture and the height (step S4) of gap nozzle 41 according to the instrumentation value of gap sensor 42.In addition, in feed mechanism 7, close open and close valve 73b and open open and close valve 73a.Then, syringe pump 8 retreats piston 82 by making driving mechanism 86 action, attracts the liquid against corrosion in the collecting box 71 and is filled in the chamber, the place ahead 84 (step S5).At this moment, the rear portion of piston 82 pulled into the rear side of back-end component 87, and is exposed to the outside of cylinder body 81.But, be exposed to outside part in the side of piston 82, cleaned in the chamber 85 in the wings, thereby do not adhered to liquid against corrosion.Therefore, liquid against corrosion can not be exposed to the outside of cylinder body 81 and solidify.
Then, linear motor 50,51 moves crane span structure portion 4 according to the instrumentation value of linear encoder 52,53.In addition, in feed mechanism 7, close open and close valve 73a and open open and close valve 73b, syringe pump 8 advances piston 82 by driving mechanism 86.Thus, gap nozzle 41 scans above substrate 90, is coated with liquid against corrosion (step S6) to the surface of substrate 90 simultaneously.At this moment, the front portion of piston 82 is pulled to the front side of isolated part 83, and enters in the chamber, the place ahead 84.But, enter into the part in the chamber, the place ahead 84 in the side of piston 82, cleaned in the chamber 85 in the wings, there is not particle to adhere to.Therefore, particle can not be blended in the liquid against corrosion in the chamber, the place ahead 84.
When the processing to substrate 90 coatings liquid against corrosion finished, linear motor 50,51 made crane span structure portion 7 get back to position of readiness.And, rise by making a plurality of lifter pin LP, and substrate 90 separated from maintenance face 30.Thereafter, the transport mechanism by operating personnel or regulation takes off substrate 90 from a plurality of lifter pin LP, and takes out of the outside (step S7) of substrate board treatment 1.So far, the processing to substrate 90 finishes in substrate board treatment 1.
As mentioned above, the syringe pump 8 of this substrate board treatment 1 in the chamber, rear 85 that the rear portion side of cylinder body 81 forms, is supplied with cleaning fluid to the side of piston 82.Therefore, accompanying liquid against corrosion and particle are cleaned liquid and rinse out in the side of piston 82, thereby are removed from the side of piston 82.Therefore, prevent that the against corrosion liquid accompanying in the side of piston 82 is exposed to the rear side of back-end component 87 and solidifies.In addition, also prevent to enter into the front side of isolated part 83 and be blended into liquid against corrosion in the chamber, the place ahead 84 at the accompanying particle in the side of piston 82.
In addition, be fed into the part of the cleaning fluid in the chamber, rear 85, on the surface attached to the first seal member 83b and the second seal member 87b and piston 82, bring into play the effect of lubricant.Therefore, can keep the lubricity between the first seal member 83b and the second seal member 87b and the piston 82, make piston 82 action of advancing and retreat swimmingly.
In addition, in the syringe pump 8, advance and retreat by the medial surface sliding-contact that makes the through hole 83a, the 87a that form on piston 82 and isolated part 83 in cylinder body 81 and the back-end component 87, and the volume of chamber, the place ahead 84 is changed, spray liquid against corrosion from squit hole 81b thus.Therefore, piston 82 and the not direct sliding-contact of the medial surface of cylinder body 81 do not need the medial surface of cylinder body 81 and the side of piston 82 are kept high manufacturing accuracy on long distance.Therefore, processing syringe pump 8 becomes easily, simultaneously, also can easily make jumbo syringe pump 8.
In addition, syringe pump 8 is stored cleaning fluid in the chamber 85 in the wings, near the formation liquid stream piston 82 of while in being disposed at chamber, rear 85.Therefore, cleaning fluid is supplied on the side of piston 82 reliably, thereby can remove liquid against corrosion and particle accompanying on the side of piston 82 well.
In addition, syringe pump 8 liquid that will become the solvent composition of liquid against corrosion uses as cleaning fluid.Therefore, even being blended in the liquid against corrosion in the chamber, the place ahead 84, cleaning fluid can not bring bad influence to the liquid against corrosion in the chamber, the place ahead 84 yet.
In addition, in the chamber, rear 85 of syringe pump 8, after having supplied with cleaning fluid, supply with substitution gas.Therefore, unnecessary cleaning fluid is discharged to the outside of cylinder body 81 forcibly, and the possibility that unnecessary cleaning fluid enters into the place ahead of isolated part 83 reduces.
In addition, the side of piston 82 processes in the mode that becomes the plateau structured surface.Therefore, the side of piston 82 reduces the possibility of the first seal member 83b and second seal member 87b damage, prevents that the wearing and tearing of the first seal member 83b and the second seal member 87b from worsening.In addition, owing to keep cleaning fluid well in the side of piston 82, thus keep the lubricity between the first seal member 83b and the second seal member 87b and the piston 82 well.
＜4. variation 〉
One embodiment of the present invention more than has been described, but the present invention is not limited only to above-mentioned example.For example, syringe pump 8 also can be a structure shown in Figure 7.The syringe pump 8 of Fig. 7, the entrance hole 81c that is used for cleaning fluid is imported to chamber, rear 85 is provided with spraying portion 88.The side of the piston 82 of spraying portion 88 in chamber 85 in the wings.Therefore, be the side ejection of vaporific piston 82 in chamber, rear 85 from cleaning solution supplying source 76 cleaning liquid supplied.Thus, directly supply with cleaning fluid, remove liquid against corrosion and particle well in the side attachment of piston 82 in the side of piston 82.
In addition, in above-mentioned example, use as cleaning fluid, also liquid against corrosion itself can be used as cleaning fluid though will become the liquid of the solvent composition of liquid against corrosion.Like this, even cleaning fluid is blended in the liquid against corrosion in the chamber, the place ahead 84, the composition component ratio of the liquid against corrosion in the chamber, the place ahead 84 can not change yet.
In addition, in above-mentioned example, when the processing to a substrate 90 begins, carry out the supply (step S1) of cleaning fluid and the supply (step S2) of substitution gas, still, their supply regularly can change according to various conditions.For example, also can be a collection of or carry out the supply of cleaning fluid and the supply of substitution gas during the substrate 90 of regulation number in every processing.Like this, by carrying out the supply of cleaning fluid and the supply of substitution gas, saved the consumption of cleaning fluid and substitution gas thus in the timing that limits.
In addition, in above-mentioned example, the side integral body of piston 82 processes in the mode that becomes the plateau structured surface, but, the side of piston 82 with at least with the part of the first seal member 83b and the second seal member 87b sliding-contact become the mode of plateau structured surface processed form also passable.
Claims (12)
1. a syringe pump is used for carrying and supplying with treatment fluid, it is characterized in that having:
The cylinder body of hollow, it has attraction hole that attracts described treatment fluid and the squit hole that sprays described treatment fluid;
Isolated part, its inner space with described cylinder body is divided into first Room and second Room, and has first through hole that on the fore-and-aft direction of described cylinder body, connects, wherein, this first Room is connected with described attraction hole and described squit hole, and this second Room is compared described first Room and is formed on the rear portion side of described cylinder body;
Back-end component, the rearward end that it is configured in described cylinder body constitutes the part of the outer wall of described second Room, and has second through hole that connects on the fore-and-aft direction of described cylinder body;
Piston, it is inserted in described first through hole and described second through hole, and the leading section of piston is configured in the inside of described first Room, and the rearward end of piston is compared the rearward end of described cylinder body and is configured in the outside of described cylinder body;
Drive division, it makes described piston move back enterprising the advancing of the fore-and-aft direction of described cylinder body;
First seal member seals between its side with the medial surface of described first through hole and described piston, and makes between the side of the medial surface of described first through hole and described piston and be free to slide contact;
Second seal member seals between its side with the medial surface of described second through hole and described piston, and makes between the side of the medial surface of described second through hole and described piston and be free to slide contact;
Fluid Supplying apparatus, it supplies with the liquid of regulation to the side of described piston in the inside of described second Room;
Liquid discharge device, it discharges the liquid of described regulation from described second Room.
2. syringe pump as claimed in claim 1, it is characterized in that, described piston does not move back enterprising the advancing of the fore-and-aft direction of described cylinder body with the medial surface sliding-contact of described cylinder body, changes by the volume that makes described first Room, thereby described treatment fluid is sprayed from described squit hole.
3. syringe pump as claimed in claim 2 is characterized in that, described fluid Supplying apparatus by the liquid in the described regulation of the described second indoor storage, supplies with to the side of described piston the liquid of described regulation.
4. syringe pump as claimed in claim 2 is characterized in that, described fluid Supplying apparatus sprays the liquid of described regulation towards the side at the described piston of the described second indoor configuration.
5. as claim 3 or 4 described syringe pumps, it is characterized in that the liquid of described regulation is the solvent or the described treatment fluid of described treatment fluid.
6. as claim 3 or 4 described syringe pumps, it is characterized in that also having:
Gas supply device, it supplies with the gas of regulation in the side of the described second indoor described piston to the liquid that has been supplied to described regulation;
Gas exhausting device, it discharges the gas of described regulation from described second Room.
7. as claim 3 or 4 described syringe pumps, it is characterized in that in the side of described piston, the part with described first seal member and the described second seal member sliding-contact is the plateau structured surface at least.
8. syringe pump as claimed in claim 7, it is characterized in that, the bearing length rate Rmr (c) of the profile of described plateau structured surface, under 50% the profile height c of the maximum height Rz of profile, be Rmr (c) 〉=70%, wherein, the bearing length rate Rmr (c) of this profile is the bearing length rate Rmr (c) of the profile stipulated in the JISB0601 corresponding with international standard ISO4287.
9. syringe pump as claimed in claim 7, it is characterized in that, the arithmetic average deviation Ra of described plateau structured surface and largest contours peak height Rp, be Ra≤0.08 μ m and Rp≤0.3 μ m, wherein, this arithmetic average deviation Ra and largest contours peak height Rp are arithmetic average deviation Ra and the largest contours peak height Rp that stipulates in the JISB0601 corresponding with international standard ISO4287.
10. a substrate board treatment utilizes treatment fluid that substrate is handled, and it is characterized in that having:
Syringe pump, it sprays treatment fluid;
The treatment fluid feedway, it will be supplied with to the surface of substrate from the described treatment fluid of described syringe pump ejection,
Described syringe pump has:
The cylinder body of hollow, it has attraction hole that attracts described treatment fluid and the squit hole that sprays described treatment fluid;
Isolated part, its inner space with described cylinder body is divided into first Room and second Room, and has first through hole that on the fore-and-aft direction of described cylinder body, connects, wherein, this first Room is connected with described attraction hole and described squit hole, and this second Room is compared described first Room and is formed on the rear portion side of described cylinder body;
Back-end component, the rearward end that it is configured in described cylinder body constitutes the part of the outer wall of described second Room, and has second through hole that connects on the fore-and-aft direction of described cylinder body;
Piston, it is inserted in described first through hole and described second through hole, and the leading section of piston is configured in the inside of described first Room, and the rearward end of piston is compared the rearward end of described cylinder body and is configured in the outside of described cylinder body;
Drive division, it makes described piston move back enterprising the advancing of the fore-and-aft direction of described cylinder body;
First seal member seals between its side with the medial surface of described first through hole and described piston, and makes between the side of the medial surface of described first through hole and described piston and be free to slide contact;
Second seal member seals between its side with the medial surface of described second through hole and described piston, and makes between the side of the medial surface of described second through hole and described piston and be free to slide contact;
Fluid Supplying apparatus, it supplies with the liquid of regulation to the side of described piston in the inside of described second Room;
Liquid discharge device, it discharges the liquid of described regulation from described second Room.
11. substrate board treatment as claimed in claim 10 is characterized in that, also has:
Setting device, it sets the timing of described fluid Supplying apparatus action;
Control device, it makes described fluid Supplying apparatus action based on the timing that is set by described setting device.
12. a substrate processing method using same utilizes treatment fluid that substrate is handled, and it is characterized in that having:
First operation is advanced and retreat by making the piston in the syringe pump, and via supplying with treatment fluid to the surface of substrate in first Room that in described syringe pump, forms;
Second operation, the liquid of regulation is supplied with in second indoor in being formed at described syringe pump to the side of described piston.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006111821A JP4832945B2 (en) | 2006-04-14 | 2006-04-14 | Syringe pump and substrate processing apparatus |
| JP2006111821 | 2006-04-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101053861A true CN101053861A (en) | 2007-10-17 |
| CN100542683C CN100542683C (en) | 2009-09-23 |
Family
ID=38759335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007100886313A Expired - Fee Related CN100542683C (en) | 2006-04-14 | 2007-03-16 | Syringe pump, substrate board treatment and substrate processing method using same |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4832945B2 (en) |
| KR (1) | KR100809219B1 (en) |
| CN (1) | CN100542683C (en) |
| TW (1) | TWI314067B (en) |
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| CN102463198A (en) * | 2010-11-19 | 2012-05-23 | 大连德新机电技术工程有限公司 | Air pressure jet-marking device for screw machine |
| CN103480523A (en) * | 2013-10-03 | 2014-01-01 | 尤潘垦 | Fireproof liquid pressurization injection device for polystyrene board |
| WO2015003417A1 (en) * | 2013-07-12 | 2015-01-15 | 深圳市华星光电技术有限公司 | Ultrasonic cleaning device and coating machine with ultrasonic cleaning device |
| CN105499080A (en) * | 2015-12-31 | 2016-04-20 | 昆山龙腾光电有限公司 | Glue supplying system and glue supplying method |
| CN107387389A (en) * | 2017-08-23 | 2017-11-24 | 四川达灿石油设备有限公司 | A kind of fluid end of fracturing pump |
| CN107470051A (en) * | 2016-06-07 | 2017-12-15 | 东京毅力科创株式会社 | Handle liquid supplying device, unit, treatment fluid supply method and storage medium |
| CN110271010A (en) * | 2018-03-15 | 2019-09-24 | 欧姆龙株式会社 | The control method of robot system and robot |
| CN111720301A (en) * | 2019-03-20 | 2020-09-29 | 铠侠股份有限公司 | Pump and coating device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR100912407B1 (en) * | 2007-12-18 | 2009-08-14 | 주식회사 나래나노텍 | An Improved Driving Device For A Pumping Device for Pumping Coating Liquid, and A Pumping Device, A Nozzle Device and A Coating Device Having the Same |
| KR100948123B1 (en) | 2008-07-10 | 2010-03-18 | 주식회사 나래나노텍 | A Pumping Device for Pumping Coating Liquid and A Slit Die and A Coating Device Having the Same |
| KR101259611B1 (en) * | 2011-04-13 | 2013-05-13 | 주식회사 코디엠 | Up-Down Device of Oven Chamber for Fabricating the ＬＣＤ Substrate |
| KR101365609B1 (en) * | 2011-11-09 | 2014-02-20 | 나노에프에이 주식회사 | dispense apparatus of adhesive liquid and method thereof |
| KR101512560B1 (en) * | 2012-08-31 | 2015-04-15 | 가부시키가이샤 스크린 홀딩스 | Substrate processing apparatus |
| JP2018204482A (en) * | 2017-06-01 | 2018-12-27 | 国立研究開発法人日本原子力研究開発機構 | Solution transfer device |
| JP7313782B2 (en) * | 2020-02-28 | 2023-07-25 | 株式会社吉野工業所 | Plunger pump and liquid blow molding device |
| KR102362969B1 (en) * | 2020-05-07 | 2022-02-18 | (주)우원티씨에스 | Syringe pump for quantitative dispensing, coating solution supply method and syringe pump cleaning method |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1105773A (en) | 1979-11-26 | 1981-07-28 | Derek V. Mancini | Combination autoclave pump and nozzle |
| JPS5862539A (en) | 1981-10-11 | 1983-04-14 | Shinko Seiki Kk | Liquid viscosity measuring apparatus with automatic recovery system |
| JPH1192938A (en) * | 1997-09-19 | 1999-04-06 | Shimadzu Corp | Liquid material vaporizing device |
| JP2000189872A (en) | 1998-12-25 | 2000-07-11 | Toray Ind Inc | Method and apparatus for coating and method and apparatus for producing member for plasma display |
| JP4366757B2 (en) * | 1999-05-27 | 2009-11-18 | 東レ株式会社 | Coating apparatus, coating method, and method for manufacturing plasma display or display member |
| JP4494829B2 (en) * | 2004-03-03 | 2010-06-30 | 東レエンジニアリング株式会社 | Coating liquid supply apparatus and coating liquid supply method |
-
2006
- 2006-04-14 JP JP2006111821A patent/JP4832945B2/en not_active Expired - Fee Related
-
2007
- 2007-02-02 TW TW096103932A patent/TWI314067B/en active
- 2007-02-28 KR KR1020070020322A patent/KR100809219B1/en not_active IP Right Cessation
- 2007-03-16 CN CNB2007100886313A patent/CN100542683C/en not_active Expired - Fee Related
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| CN102463198A (en) * | 2010-11-19 | 2012-05-23 | 大连德新机电技术工程有限公司 | Air pressure jet-marking device for screw machine |
| CN102463198B (en) * | 2010-11-19 | 2013-07-31 | 大连德新机电技术工程有限公司 | Air pressure jet-marking device for screw machine |
| WO2015003417A1 (en) * | 2013-07-12 | 2015-01-15 | 深圳市华星光电技术有限公司 | Ultrasonic cleaning device and coating machine with ultrasonic cleaning device |
| CN103480523A (en) * | 2013-10-03 | 2014-01-01 | 尤潘垦 | Fireproof liquid pressurization injection device for polystyrene board |
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| CN105499080A (en) * | 2015-12-31 | 2016-04-20 | 昆山龙腾光电有限公司 | Glue supplying system and glue supplying method |
| CN107470051A (en) * | 2016-06-07 | 2017-12-15 | 东京毅力科创株式会社 | Handle liquid supplying device, unit, treatment fluid supply method and storage medium |
| CN107387389A (en) * | 2017-08-23 | 2017-11-24 | 四川达灿石油设备有限公司 | A kind of fluid end of fracturing pump |
| CN110271010A (en) * | 2018-03-15 | 2019-09-24 | 欧姆龙株式会社 | The control method of robot system and robot |
| CN111720301A (en) * | 2019-03-20 | 2020-09-29 | 铠侠股份有限公司 | Pump and coating device |
| TWI767187B (en) * | 2019-03-20 | 2022-06-11 | 日商鎧俠股份有限公司 | Pumps and Coating Equipment |
| US11413647B2 (en) | 2019-03-20 | 2022-08-16 | Kioxia Corporation | Pump and coating device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20070102388A (en) | 2007-10-18 |
| JP2007287831A (en) | 2007-11-01 |
| KR100809219B1 (en) | 2008-02-29 |
| CN100542683C (en) | 2009-09-23 |
| TWI314067B (en) | 2009-09-01 |
| TW200803994A (en) | 2008-01-16 |
| JP4832945B2 (en) | 2011-12-07 |
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Owner name: SCREEN GROUP CO., LTD. Free format text: FORMER NAME: DAINIPPON SCREEN MFG. CO., LTD. Owner name: DAINIPPON SCREEN MFG. CO., LTD. Free format text: FORMER NAME: DAINIPPON MESH PLATE MFR. CO., LTD. |
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