JP4494829B2 - Coating liquid supply apparatus and coating liquid supply method - Google Patents

Coating liquid supply apparatus and coating liquid supply method Download PDF

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JP4494829B2
JP4494829B2 JP2004058914A JP2004058914A JP4494829B2 JP 4494829 B2 JP4494829 B2 JP 4494829B2 JP 2004058914 A JP2004058914 A JP 2004058914A JP 2004058914 A JP2004058914 A JP 2004058914A JP 4494829 B2 JP4494829 B2 JP 4494829B2
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coating liquid
cylinder
piston
coating
syringe pump
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JP2005246201A (en
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卓 岩出
雅充 山下
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Toray Engineering Co Ltd
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Description

本発明は、塗布液供給装置および塗布液供給方法に関する。   The present invention relates to a coating liquid supply apparatus and a coating liquid supply method.

従来から、塗布液供給装置として特許文献1に記載されたものが提案されている。
特許文献1に記載された塗布液供給装置は、塗布液タンクから塗布液流路を通して塗布液をシリンジポンプに供給し、必要量の塗布液をシリンジポンプから塗布液流路を通して塗工機に供給するものである。
Conventionally, what was described in patent document 1 as a coating liquid supply apparatus is proposed.
The coating liquid supply apparatus described in Patent Document 1 supplies a coating liquid from a coating liquid tank to a syringe pump through a coating liquid flow path, and supplies a required amount of the coating liquid from the syringe pump to the coating machine through the coating liquid flow path. To do.

そして、シリンジポンプとして、シリンダ内を往復動可能なピストンを設け、シリンダのヘッド部に弁板を回転可能に設けて塗布液の吸入、吐出を制御する構成のものが採用されている。
特開2002−200452号公報
And as a syringe pump, the thing of the structure which provides the piston which can reciprocate the inside of a cylinder, and provides the valve plate in the cylinder head part so that rotation is possible is controlled.
JP 2002-200452 A

特許文献1に記載されたシリンジポンプにおいては、シリンダとピストンとの間のシールをどのようにするかを明確には記載していないが、ピストンの長さが全ストロークと比較して著しく短いので、例えば図6に示すように、ピストン102の外周にOリングなどのシール部材103を装着し、シリンダ101に圧入することにより、シリンダ101とピストン102との間のシールを達成していると考えられる。   The syringe pump described in Patent Document 1 does not clearly describe how to seal between the cylinder and the piston, but the length of the piston is significantly shorter than the full stroke. For example, as shown in FIG. 6, a seal member 103 such as an O-ring is attached to the outer periphery of the piston 102 and press-fitted into the cylinder 101 to achieve a seal between the cylinder 101 and the piston 102. It is done.

したがって、シリンダ101の内面の平坦度が悪い場合には、ピストン102のスムーズな移動が阻害され、供給すべき塗布液の量の精度が低下してしまう。特に、シリンジポンプにおいては、内部に気泡が侵入すると、気泡が圧縮性であることに起因して定量精度が低下するので、シリンダ101として内部視認性に優れたガラス製のものを採用することが一般化している。そして、ガラス製のシリンダ101は内面にかなりの凹凸が存在しているので、シール部材103とシリンダ101内面との間の摩擦がかなり大きく変動し、ピストン102を移動させるのに必要な力がかなり大きく変動し、シール部材103とシリンダ101とがスリップし、ひいては塗布液の吐出量が変動する。   Therefore, when the flatness of the inner surface of the cylinder 101 is poor, the smooth movement of the piston 102 is hindered, and the accuracy of the amount of coating liquid to be supplied is lowered. In particular, in the syringe pump, when bubbles enter the inside, the quantitative accuracy is lowered due to the bubbles being compressible. Therefore, a cylinder made of glass having excellent internal visibility can be adopted as the cylinder 101. Generalized. Since the glass cylinder 101 has considerable irregularities on the inner surface, the friction between the seal member 103 and the inner surface of the cylinder 101 fluctuates considerably, and the force required to move the piston 102 is considerably large. Fluctuating greatly, the seal member 103 and the cylinder 101 slip, and as a result, the discharge amount of the coating liquid varies.

ガラス製のシリンダ101の内面が凹凸しているため、シール部材103で凹凸を吸収させるように、シール部材103をシリンダ101に強く押し当てている。これにより、シール部材103の磨耗が激しく、シール部材103の寿命が短くなってしまう。   Since the inner surface of the glass cylinder 101 is uneven, the seal member 103 is strongly pressed against the cylinder 101 so that the unevenness is absorbed by the seal member 103. Thereby, the wear of the seal member 103 is intense, and the life of the seal member 103 is shortened.

さらに、シリンダ101の個体差のため、シール部材103を受けるためのピストン102の溝をそれに合わせて別々の形状にしなければならない。
ガラスをホーニング加工し、その後、酸化セリウムなどの研磨剤で磨くことによって平坦度が高い透明なガラスを得ることができるが、この場合には、シリンダを製造するために多大な費用がかかるという新たな不都合を生じるので、実際には、このような方法は採用されていない。
Furthermore, due to individual differences of the cylinders 101, the grooves of the piston 102 for receiving the seal member 103 must be formed in different shapes accordingly.
The glass can be honed and then polished with an abrasive such as cerium oxide to obtain a transparent glass with high flatness. In this case, however, a new cost is required to produce a cylinder. In practice, such a method has not been adopted.

特許文献1に記載されたシリンジポンプを、複数種類の塗布液の供給に使用する場合には、シリンダの内部を洗浄し、その後に新たな塗布液を供給する必要がある。この場合において、特許文献1に記載されたシリンジポンプは、液体の吸入、吐出をシリンダのヘッド部を通して行うようにしているので、シリンダ内に流入する液体はシリンダ内で殆ど流動せず、殆どが吸入口、吐出口の近傍のみで流動する。   When the syringe pump described in Patent Document 1 is used for supplying a plurality of types of coating liquids, it is necessary to clean the inside of the cylinder and then supply a new coating liquid. In this case, since the syringe pump described in Patent Document 1 sucks and discharges the liquid through the head portion of the cylinder, the liquid flowing into the cylinder hardly flows in the cylinder. It flows only in the vicinity of the inlet and outlet.

したがって、シリンダ内で液体の滞留量が多くなり、シリンダの内部を完全に洗浄して新たな塗布液の供給を開始するまでの所要時間が長くなってしまう。
本発明は上記の問題点に鑑みてなされたものであり、シリンダ内面の状態に拘らず塗布液の吐出量の制御精度を高めることができるとともに、シール部材の寿命を長くすることができ、しかもシリンダの内部を洗浄するための所要時間を短縮することができるシリンジポンプを採用する塗布液供給装置および塗布液供給方法を提供することを目的としている。
Therefore, the amount of liquid staying in the cylinder increases, and the time required for completely cleaning the inside of the cylinder and starting the supply of a new coating liquid becomes long.
The present invention has been made in view of the above problems, and can improve the control accuracy of the discharge amount of the coating liquid regardless of the state of the inner surface of the cylinder, and can extend the life of the seal member. It is an object of the present invention to provide a coating liquid supply apparatus and a coating liquid supply method that employ a syringe pump that can reduce the time required for cleaning the inside of a cylinder.

請求項1の塗布液供給装置は、塗布液を収容する塗布液タンクと、塗布液を塗布対象物に塗布する塗布機構と、塗布液タンクから塗布液流路を通して塗布液が供給され、必要量の塗布液を塗布液流路を通して塗布機構に供給するシリンジポンプとを含む塗布液供給装置であって、前記シリンジポンプは、塗布液をシリンダ内にシリンダの法線に角度を持って開口させた塗布液導入部を含み、シリンダの開口部側にシール部材を設けてピストンの外周面と接触させることにより、ピストンを、塗布液のシール状態を確保しつつ往復動可能としたものを採用したものである。 The coating liquid supply device according to claim 1 is provided with a coating liquid tank that stores the coating liquid, a coating mechanism that coats the coating liquid on the object to be coated, and a coating liquid that is supplied from the coating liquid tank through the coating liquid flow path. a coating liquid supply apparatus comprising a syringe pump for supplying the coating mechanism a coating liquid through the coating liquid flow path, the syringe pump, and the coating liquid is opened at an angle to the normal of the cylinder into the cylinder Including the coating liquid introduction part , a seal member is provided on the opening side of the cylinder and brought into contact with the outer peripheral surface of the piston, so that the piston can be reciprocated while ensuring the sealing state of the coating liquid It is.

請求項の塗布液供給方法は、塗布液タンクから塗布液流路を通して塗布液をシリンジポンプに供給し、必要量の塗布液をシリンジポンプから塗布液流路を通して塗布機構に供給する塗布液供給方法であって、シリンジポンプに塗布液を吸入し、塗布液を吸入するに当たって、塗布液をシリンダ内にシリンダの法線に角度を持って開口させた開口部から導入させ、吐出するに当たって、シリンダの開口部側にシール部材を設けてピストンの外周面と接触させることにより、ピストンを、塗布液のシール状態を確保しつつ往復動させる方法である。 According to a second aspect of the present invention, there is provided a coating liquid supply method for supplying a coating liquid from a coating liquid tank to a syringe pump through a coating liquid flow path and supplying a required amount of the coating liquid from the syringe pump to a coating mechanism through the coating liquid flow path. A method for inhaling a coating liquid into a syringe pump and introducing the coating liquid into the cylinder through an opening opened at an angle with respect to the normal line of the cylinder and discharging the cylinder. This is a method of reciprocating the piston while ensuring the sealing state of the coating liquid by providing a seal member on the opening side of the nozzle and bringing it into contact with the outer peripheral surface of the piston.

請求項の塗布液供給方法は、シリンジポンプに塗布液を吸入し、吐出するに当たって、ピストンをシリンダ内に押し込んだ状態を待機位置とし、ピストンを抜き取り方向に移動させて必要量の塗布液を吸入し、その後、ピストンを押し込んで塗布液を塗布機構に供給する方法である。 According to a third aspect of the present invention, there is provided a coating liquid supply method in which the piston pump is pushed into the cylinder when the coating liquid is sucked into the syringe pump and discharged. This is a method of sucking and then pushing the piston to supply the coating liquid to the coating mechanism.

請求項1の発明であれば、内部視認性に影響を与えないピストンにシール部材を押圧す
るのであるから、ピストンの表面平坦性を簡単に高めて塗布液の供給量の制御精度を高め
ることができるとともに、シール部材の磨耗を少なくして寿命を長くすることができ、シリンダの内部を洗浄する必要がある場合に、シリンダ内に旋回流を発生し洗浄時間を短縮することができる。
If it is invention of Claim 1, since a sealing member is pressed against the piston which does not affect internal visibility, the surface flatness of a piston can be raised easily and the control precision of the supply amount of a coating liquid can be improved. In addition, the wear of the seal member can be reduced and the life can be extended. When the inside of the cylinder needs to be cleaned, a swirling flow can be generated in the cylinder and the cleaning time can be shortened.

請求項の発明であれば、内部視認性に影響を与えないピストンにシール部材を押圧す
るのであるから、ピストンの表面平坦性を簡単に高めて塗布液の供給量の制御精度を高め
ることができるとともに、シール部材の磨耗を少なくして寿命を長くすることができ、シリンダの内部を洗浄する必要がある場合、シリンダ内に旋回流を発生し洗浄時間を短縮することができる。
According to the invention of claim 2 , since the seal member is pressed against the piston that does not affect the internal visibility, the surface flatness of the piston can be easily increased to improve the control accuracy of the supply amount of the coating liquid. In addition, the wear of the sealing member can be reduced and the life can be extended , and when the inside of the cylinder needs to be cleaned, a swirling flow can be generated in the cylinder and the cleaning time can be shortened.

請求項の発明であれば、ピストンとシール部材との間の潤滑を確保し続けることがで
き、シール部材の寿命をさらに長くすることができる。
If it is invention of Claim 3 , the lubrication between a piston and a sealing member can be ensured continuously, and the lifetime of a sealing member can be made still longer.

以下、添付図面を参照して、本発明の塗布液供給装置および塗布液供給方法の実施の態様を詳細に説明する。   Hereinafter, embodiments of the coating liquid supply apparatus and the coating liquid supply method of the present invention will be described in detail with reference to the accompanying drawings.

図1は本発明の塗布液供給装置の一実施形態を示す概略図である。
この塗布液供給装置は、塗布液タンク1と、塗布機構部2と、シリンジポンプ3と、塗布液タンク1とシリンジポンプ3とを連通する第1塗布液流路4と、第1塗布液流路4に介在された第1弁5と、シリンジポンプ3と塗布機構部2とを連通する第2塗布液流路6と、第2塗布液流路6に介在された第2弁7とを有している。
FIG. 1 is a schematic view showing an embodiment of a coating liquid supply apparatus of the present invention.
The coating liquid supply apparatus includes a coating liquid tank 1, a coating mechanism unit 2, a syringe pump 3, a first coating liquid channel 4 that communicates the coating liquid tank 1 and the syringe pump 3, and a first coating liquid flow. A first valve 5 interposed in the path 4, a second coating liquid channel 6 communicating the syringe pump 3 and the coating mechanism 2, and a second valve 7 interposed in the second coating liquid channel 6. Have.

なお、塗布液としては、ガラス基板上に塗布されるPDP用ガラスペーストが例示できるが、これに限定されるものではなく、従来公知の種々の塗布液を採用することができる。
前記シリンジポンプ3は、下部が開放されたシリンダ31と、シリンダ31に対して押し込み方向、引き出し方向に動作可能なピストン32と、シリンダ31の開口縁に一体的に設けられたマニホールド33とを有している。このマニホールド33は、図2にも示すように、シリンダ31の内径とほぼ同じ貫通孔を有しているとともに、内面の所定位置にOリングなどのシール部材34を有している。そして、マニホールド33の内面とピストン32との間に形成される環状の空間に対して、ほぼ接線方向から塗布液を導入できるように、塗布液導入部35を有している。
In addition, as a coating liquid, although the glass paste for PDP apply | coated on a glass substrate can be illustrated, it is not limited to this, Various conventionally well-known coating liquids can be employ | adopted.
The syringe pump 3 includes a cylinder 31 whose lower part is opened, a piston 32 that can be operated in a pushing direction and a pulling direction with respect to the cylinder 31, and a manifold 33 that is integrally provided at an opening edge of the cylinder 31. is doing. As shown in FIG. 2, the manifold 33 has a through hole substantially the same as the inner diameter of the cylinder 31 and a seal member 34 such as an O-ring at a predetermined position on the inner surface. And it has the coating liquid introduction part 35 so that a coating liquid can be introduce | transduced into a cyclic | annular space formed between the inner surface of the manifold 33 and the piston 32 from a substantially tangential direction.

また、前記第2塗布液流路6は、シリンダ31の上部(シリンダヘッド部)を通してシリンダ31の内部と連通されている。
前記シリンダ31は、どのような材質のものであってもよいが、内部視認性を考慮すれば、ガラス製であることが好ましい。
The second coating liquid flow path 6 is communicated with the inside of the cylinder 31 through the upper part (cylinder head portion) of the cylinder 31.
The cylinder 31 may be made of any material, but is preferably made of glass in view of internal visibility.

前記ピストン32は内部視認性に全く影響を及ぼさないので、鏡面加工が容易な金属製(例えば、ステンレススチール、鉄、クロムメッキなど)であり、しかも鏡面加工など表面平坦化処理が施されたものであればよい。   The piston 32 does not affect the internal visibility at all, so it is made of metal that can be easily mirror finished (for example, stainless steel, iron, chrome plating, etc.), and has been subjected to surface flattening such as mirror finishing. If it is.

前記マニホールド33は、製造の便宜上、シリンダ31と異なる材質からなるものであることが好ましいが、シリンダ31と同じ材質からなるものであってもよい。
上記の構成の塗布液供給装置の作用は次のとおりである。
The manifold 33 is preferably made of a material different from that of the cylinder 31 for the convenience of manufacturing, but may be made of the same material as the cylinder 31.
The operation of the coating liquid supply apparatus having the above-described configuration is as follows.

図3に示すように、シリンジポンプ3は、ピストン32をシリンダ31に押し込んだ状態で待機している。なお、ピストン32はシリンダ31の最も内奥部まで押し込まれていることが好ましい。また、第1弁5と第2弁7とは共に閉じられており、シリンダ31とピストン32との間の空間には気泡が存在せず、塗布液のみが存在する状態とされている。   As shown in FIG. 3, the syringe pump 3 stands by with the piston 32 pushed into the cylinder 31. The piston 32 is preferably pushed to the innermost part of the cylinder 31. Further, both the first valve 5 and the second valve 7 are closed, and there is no bubble in the space between the cylinder 31 and the piston 32, and only the coating liquid is present.

次いで、図4に示すように、第1弁5を開き、塗布液の必要量に応じた距離だけピストン32を抜き取り方向に移動させることにより、シリンダ31の内部に必要量の塗布液を収容することができる。この場合において、シリンダ31に流入する塗布液は、螺旋矢印で示すように旋回流を形成し螺旋状の流れとなる。   Next, as shown in FIG. 4, the first valve 5 is opened, and the piston 32 is moved in the extraction direction by a distance corresponding to the required amount of the application liquid, thereby storing the required amount of the application liquid in the cylinder 31. be able to. In this case, the coating liquid flowing into the cylinder 31 forms a swirl flow as shown by a spiral arrow and becomes a spiral flow.

また、ピストン32の抜き取り方向への移動にしたがって、少量の塗布液が外部に引き出された部分に残留し、図3に示す待機状態から直ちにピストン32のスムーズな動作を可能にすることができる。   Further, as the piston 32 moves in the extraction direction, a small amount of the coating liquid remains in the part drawn out, and the piston 32 can be smoothly operated immediately from the standby state shown in FIG.

その後、図5に示すように、第1弁5を閉じるとともに、第2弁7を開き、しかもピストン32を押し込み方向に移動させ、シリンダ31内の塗布液を第2塗布液流路6を通して塗布機構部2に供給することができる。したがって、シリンダ31内の塗布液は、ピストン32の押し込み方向への移動距離に応じた量だけ塗布機構部2に供給される。この場合には、図4に示す動作で、ピストン32の引き出し部分に塗布液の薄層が既に形成されているので、押し込み方向へのピストン32の移動時にもシール部材34との間の十分な潤滑を達成できる。   After that, as shown in FIG. 5, the first valve 5 is closed and the second valve 7 is opened, and the piston 32 is moved in the pushing direction to apply the coating liquid in the cylinder 31 through the second coating liquid channel 6. It can be supplied to the mechanism unit 2. Accordingly, the coating liquid in the cylinder 31 is supplied to the coating mechanism unit 2 by an amount corresponding to the moving distance of the piston 32 in the pushing direction. In this case, in the operation shown in FIG. 4, since a thin layer of the coating liquid has already been formed in the drawing portion of the piston 32, a sufficient space between the piston 32 and the seal member 34 can be obtained even when the piston 32 moves in the pushing direction. Lubrication can be achieved.

以上の説明から分かるように、塗布液はマニホールド33からシリンダヘッド部に向かって旋回流を形成して螺旋状に流れるのであるから、シリンダ31内部における塗布液の滞留を殆ど皆無にすることができる。   As can be seen from the above description, since the coating liquid forms a swirl flow from the manifold 33 toward the cylinder head portion and flows spirally, the coating liquid stays in the cylinder 31 almost completely. .

また、供給すべき塗布液を切り換える場合には、洗浄液を用いてシリンダ31の内部を洗浄する。この動作を行うに当たっては、図3に示すようにピストン32が待機状態に位置する場合に、第1弁5、および第2弁7を開き、しかも塗布液タンク1に代えて洗浄液タンク(図示せず)を採用することが好ましい。   Further, when the coating liquid to be supplied is switched, the inside of the cylinder 31 is cleaned using a cleaning liquid. In performing this operation, when the piston 32 is in a standby state as shown in FIG. 3, the first valve 5 and the second valve 7 are opened, and a cleaning liquid tank (not shown) is used instead of the coating liquid tank 1. It is preferable to employ

この場合には、洗浄液がマニホールド33からシリンダヘッド部に向かって旋回流を形成して螺旋状に流れるのであるから、シリンダ31内部における洗浄液の滞留を殆ど皆無にすることができ、しかもシリンダ31内の有効体積を小さくすることができるので、洗浄所要時間を大幅に短縮することができる。   In this case, since the cleaning liquid forms a swirling flow from the manifold 33 toward the cylinder head portion, the cleaning liquid flows in a spiral shape. Since the effective volume of can be reduced, the time required for cleaning can be greatly shortened.

図1に示す構成のシリンジポンプを動作させて時間当たりの塗布液の吐出むらを測定したところ、±0.1%/secであった。
比較例として、図6に示す構成のシリンジポンプを動作させて時間当たりの塗布液の吐出むらを測定したところ、±2%/secであった。
When the non-uniformity of discharge of the coating liquid per hour was measured by operating the syringe pump having the configuration shown in FIG. 1, it was ± 0.1% / sec.
As a comparative example, when the non-uniformity of the coating liquid discharged per hour was measured by operating the syringe pump having the configuration shown in FIG. 6, it was ± 2% / sec.

両測定結果を比較すると、図1に示す構成のシリンジポンプではピストンのより滑らかな動きを達成できたことが分かる。   Comparing both measurement results, it can be seen that the syringe pump configured as shown in FIG. 1 can achieve a smoother movement of the piston.

図1に示す構成のシリンジポンプを反復動作させてシール部材の寿命を測定したところ、10,000回であった。   When the life of the seal member was measured by repeatedly operating the syringe pump having the configuration shown in FIG. 1, it was 10,000 times.

比較例として、図6に示す構成のシリンジポンプを反復動作させてシール部材の寿命を測定したところ、2,000回であった。   As a comparative example, the life of the seal member was measured by repeatedly operating the syringe pump having the configuration shown in FIG.

なお、寿命は、液漏れを目視し、液漏れが確認されるまでの反復回数とした。また、フッ素系ゴム製のシール部材を使用した。両測定結果を比較すると、図1に示す構成のシリンジポンプではシール部材とピストンとの間の摩擦が小さくなっていることが分かる。   The lifetime was defined as the number of repetitions until the liquid leakage was confirmed by visually checking the liquid leakage. Also, a fluorine rubber seal member was used. Comparing both measurement results, it can be seen that the friction between the seal member and the piston is small in the syringe pump configured as shown in FIG.

図1に示す構成のシリンジポンプを待機状態にし、この状態において洗浄を行って所要時間を測定したところ、15分であった。   It was 15 minutes when the syringe pump of the structure shown in FIG. 1 was made into the standby state, and it wash | cleaned in this state and measured the required time.

比較例として、図6に示す構成のシリンジポンプの洗浄を行って所要時間を測定したところ、60分であった。   As a comparative example, the syringe pump having the configuration shown in FIG. 6 was washed and the required time was measured and found to be 60 minutes.

なお、洗浄完了は、シリンジポンプ内部を目視することにより判定した。また、150cc用シリンジポンプを使用した。両測定結果を比較すると、図1に示す構成のシリンジポンプでは液体の滞留が殆どなく、スムーズな洗浄を達成できたことが分かった。   In addition, completion of washing was determined by visually observing the inside of the syringe pump. A 150 cc syringe pump was used. When both measurement results were compared, it was found that the syringe pump having the configuration shown in FIG.

本発明の塗布液供給装置の一実施形態を示す概略図である。It is the schematic which shows one Embodiment of the coating liquid supply apparatus of this invention. 図1に示されたシリンジポンプの概略横断面図である。It is a schematic cross-sectional view of the syringe pump shown in FIG. シリンジポンプの待機状態を示す概略縦断面図である。It is a schematic longitudinal cross-sectional view which shows the standby state of a syringe pump. シリンジポンプの液体吸入状態を示す概略縦断面図である。It is a schematic longitudinal cross-sectional view which shows the liquid inhalation state of a syringe pump. シリンジポンプの液体吐出状態を示す概略縦断面図である。It is a schematic longitudinal cross-sectional view which shows the liquid discharge state of a syringe pump. 従来の塗布液供給装置を示す概略図である。It is the schematic which shows the conventional coating liquid supply apparatus.

符号の説明Explanation of symbols

1 塗布液タンク
2 塗布機構部
3 シリンジポンプ
4 第1塗布液流路
6 第2塗布液流路
31 シリンダ
32 ピストン
34 シール部材
35 塗布液導入部
DESCRIPTION OF SYMBOLS 1 Application liquid tank 2 Application | coating mechanism part 3 Syringe pump 4 1st application liquid flow path 6 2nd application liquid flow path 31 Cylinder 32 Piston 34 Seal member 35 Application liquid introduction part

Claims (3)

塗布液を収容する塗布液タンク(1)と、塗布液を塗布対象物に塗布する塗布機構(2)と、塗布液タンク(1)から塗布液流路(4)を通して塗布液が供給され、必要量の塗布液を塗布液流路(6)を通して塗布機構(2)に供給するシリンジポンプ(3)とを含む塗布液供給装置であって、
前記シリンジポンプ(3)は、塗布液をシリンダ(31)内にシリンダの法線に角度を持って開口させた塗布液導入部(35)を含み、
シリンダ(31)の開口部側にシール部材(34)を設けてピストン(32)の外周面と接触させることにより、ピストン(32)を、塗布液のシール状態を確保しつつ往復動可能としたものであることを特徴とする塗布液供給装置。
A coating liquid tank (1) that stores the coating liquid, a coating mechanism (2) that applies the coating liquid to the object to be coated, and the coating liquid is supplied from the coating liquid tank (1) through the coating liquid channel (4), A coating liquid supply apparatus including a syringe pump (3) for supplying a required amount of the coating liquid to the coating mechanism (2) through the coating liquid channel (6),
The syringe pump (3) includes a coating liquid introduction part (35) in which the coating liquid is opened in the cylinder (31) at an angle to the normal line of the cylinder,
By providing a seal member (34) on the opening side of the cylinder (31) and bringing it into contact with the outer peripheral surface of the piston (32), the piston (32) can be reciprocated while ensuring a sealing state of the coating liquid. A coating solution supply apparatus characterized by being a thing.
塗布液タンク(1)から塗布液流路(4)を通して塗布液をシリンジポンプ(3)に供給し、必要量の塗布液をシリンジポンプ(3)から塗布液流路(6)を通して塗布機構(2)に供給する塗布液供給方法であって、The coating solution is supplied from the coating solution tank (1) to the syringe pump (3) through the coating solution channel (4), and a required amount of coating solution is applied from the syringe pump (3) through the coating solution channel (6) ( 2) a coating liquid supply method to be supplied to
シリンジポンプ(3)に塗布液を吸入し、  Inhale the coating solution into the syringe pump (3),
塗布液を吸入するに当たって、塗布液をシリンダ(31)内にシリンダの法線に角度を持って開口させた開口部から導入させ、  In inhaling the coating liquid, the coating liquid is introduced into the cylinder (31) through an opening portion opened at an angle to the normal line of the cylinder,
吐出するに当たって、シリンダ(31)の開口部側にシール部材(34)を設けてピストン(32)の外周面と接触させることにより、ピストン(32)を、塗布液のシール状態を確保しつつ往復動させることを特徴とする塗布液供給方法。  In discharging, a sealing member (34) is provided on the opening side of the cylinder (31) and brought into contact with the outer peripheral surface of the piston (32), thereby reciprocating the piston (32) while ensuring a sealing state of the coating liquid. A coating liquid supply method, characterized by being moved.
シリンジポンプ(3)に塗布液を吸入し、吐出するに当たって、ピストン(32)をシリンダ(31)内に押し込んだ状態を待機位置とし、ピストン(32)を抜き取り方向に移動させて必要量の塗布液を吸入し、その後、ピストン(32)を押し込んで塗布液を塗布機構(2)に供給する請求項2に記載の塗布液供給方法。When sucking and discharging the coating liquid into the syringe pump (3), the piston (32) is pushed into the cylinder (31) as a standby position, and the piston (32) is moved in the extraction direction to apply the required amount. The coating liquid supply method according to claim 2, wherein the liquid is sucked and then the piston (32) is pushed in to supply the coating liquid to the coating mechanism (2).
JP2004058914A 2004-03-03 2004-03-03 Coating liquid supply apparatus and coating liquid supply method Expired - Fee Related JP4494829B2 (en)

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JP4490320B2 (en) 2005-03-31 2010-06-23 東レエンジニアリング株式会社 Coating device
JP4832945B2 (en) 2006-04-14 2011-12-07 大日本スクリーン製造株式会社 Syringe pump and substrate processing apparatus
JP4838113B2 (en) * 2006-12-27 2011-12-14 中外炉工業株式会社 Coating liquid supply device

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JP2001121062A (en) * 1999-10-29 2001-05-08 Dainippon Printing Co Ltd Coating method and coating apparatus
JP2002035669A (en) * 2000-07-28 2002-02-05 Honda Motor Co Ltd Sealer applying device
JP2002200452A (en) * 2000-12-28 2002-07-16 Chugai Ro Co Ltd Apparatus for supplying coating liquid

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JPS59198220A (en) * 1983-04-27 1984-11-10 Fuji Paudaru Kk Breakage preventing device in pneumatic transport apparatus
JP2507388B2 (en) * 1987-02-17 1996-06-12 株式会社東芝 Syringe pump device
JPH04231358A (en) * 1990-07-20 1992-08-20 Herberts Gmbh Method for producing covering on wire and fiber-like material and device suitable therefor
JP2000037654A (en) * 1998-07-22 2000-02-08 Musashi Eng Co Ltd Liquid delivery device
JP2001121062A (en) * 1999-10-29 2001-05-08 Dainippon Printing Co Ltd Coating method and coating apparatus
JP2002035669A (en) * 2000-07-28 2002-02-05 Honda Motor Co Ltd Sealer applying device
JP2002200452A (en) * 2000-12-28 2002-07-16 Chugai Ro Co Ltd Apparatus for supplying coating liquid

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