CN106981442B - Liquid medicine discharge device - Google Patents
Liquid medicine discharge device Download PDFInfo
- Publication number
- CN106981442B CN106981442B CN201610811889.0A CN201610811889A CN106981442B CN 106981442 B CN106981442 B CN 106981442B CN 201610811889 A CN201610811889 A CN 201610811889A CN 106981442 B CN106981442 B CN 106981442B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Reciprocating Pumps (AREA)
- Infusion, Injection, And Reservoir Apparatuses (AREA)
Abstract
The present invention provides a liquid medicine discharge device, including: a pump unit having a pump housing and an elastic tube that is disposed inside the pump housing and discharges a drug solution when contracted by an external force, wherein a pump chamber into which a non-compressible fluid for pressurizing the elastic tube flows is formed between an inner surface of the pump housing and an outer surface of the elastic tube; a cylinder unit having a piston for supplying the incompressible fluid by the pump unit, a cylinder rod coupled to a lower portion of the piston, and a cylinder plate for accommodating the piston; a drive unit having an engine for moving the cylinder rod; a power transmission unit for converting a rotational force of the engine into a linear movement of the cylinder rod; and a sleeve unit, a part of which is closely attached to the outer side surface of the piston, supports the piston, prevents the piston from shaking, and a part of which forms a wall surface flow path for the movement of the incompressible fluid together with the outer side surface of the piston.
Description
Technical Field
The present invention relates to a chemical liquid discharge device, and more particularly, to a chemical liquid discharge device capable of preventing deterioration and breakage of a product by reducing one-sided wear of a seal member due to shaking of a piston and uneven friction between the piston and an inner wall of a cylinder.
Background
On the surface of a semiconductor wafer, a glass substrate for liquid crystal, or the like, a minute circuit pattern is formed by a patterning step and an etching step. In the patterning step, a chemical supply apparatus is used for applying a chemical such as a resist solution to the surface of the wafer or the glass substrate.
The liquid medicine contained in the container of the liquid medicine supply device is pumped by the pump, passes through the filter and is sprayed and coated on the coated object through the nozzle.
the chemical liquid supply device includes: the liquid medicine dispenser includes a pump for discharging liquid medicine, and a cylinder unit for supplying a non-compressible fluid for adjusting the amount of liquid medicine discharged from the pump to the pump. Here, the cylinder unit includes a piston and a cylinder.
However, in the conventional chemical liquid supply device, the piston is supported by one support member, and the piston is moved in the reciprocating motion. This not only results in a single wear of the sealing parts arranged between the piston and the cylinder inner wall, but also in the risk of uneven friction between the piston and the cylinder inner wall.
If the sealing member is worn on one side, the incompressible fluid leaks during the reciprocating movement of the piston, and there may occur a problem that the liquid medicine cannot be accurately discharged because an indefinite amount of the incompressible fluid flows into the chamber. Further, uneven friction between the piston and the inner wall of the cylinder causes a reduction in the performance and life of the chemical liquid supply apparatus.
Disclosure of Invention
(problem to be solved)
the invention provides a liquid medicine discharging device capable of preventing performance reduction and damage of a product in order to reduce unilateral abrasion of a sealing part and uneven friction between a piston and an inner wall of a cylinder caused by center inconsistency of the piston.
In order to solve the above problem, the present invention provides a chemical liquid discharge apparatus including:
a pump unit having a pump housing and an elastic tube that is disposed inside the pump housing and discharges a drug solution when contracted by an external force, wherein a pump chamber into which a non-compressible fluid for pressurizing the elastic tube flows is formed between an inner surface of the pump housing and an outer surface of the elastic tube;
A cylinder unit having: a piston for supplying the incompressible fluid by the pump unit; a cylinder rod coupled to a lower portion of the piston; and a cylinder plate accommodating the piston;
A drive unit having an engine for moving the cylinder rod; a power transmission unit for converting a rotational force of the engine into a linear movement of the cylinder rod; and
And a sleeve unit, a part of which is closely attached to an outer side surface of the piston, supports the piston, and prevents the piston from shaking, and a part of which forms a wall surface flow path for the movement of the incompressible fluid together with the outer side surface of the piston.
Drawings
FIG. 1 is a side view schematically showing a medical fluid discharge apparatus according to the present invention.
FIG. 2 is a longitudinal sectional view schematically illustrating the chemical solution discharge apparatus of FIG. 1.
fig. 3 is a perspective view illustrating a cannula unit provided in the medical fluid discharge device of fig. 1.
fig. 4 is a plan view and a partially enlarged view of the bushing unit of fig. 3.
Detailed Description
Hereinafter, preferred embodiments of the present invention that can realize the above-described problems will be described with reference to the drawings. Based on the description of the present embodiment, the same names and the same symbols are used with respect to the same constituents and additional description thereof will be omitted below.
Referring to fig. 1 to 4, embodiments of the chemical liquid discharge apparatus according to the present invention are explained as follows.
the liquid medicine discharge device according to the present embodiment includes: pump unit 100, cylinder unit 200, guide sleeve unit 570, drive unit 400, power transmission unit, seal unit, and sleeve unit 600.
The pump unit 100 includes: pump housing 110, elastic tube 120, inlet-side joint 140, inflow channel 150, outlet-side joint 160, and discharge channel 170. Here, a pump chamber 130 into which a non-compressible fluid for pressurizing the elastic tube 120 flows is formed between the inner side surface of the pump housing 110 and the outer side surface of the elastic tube 120.
The pump housing 110 communicates with the cylinder unit 200 through a communication flow path 800. That is, the incompressible fluid discharged from the cylinder unit 200 flows into the pump chamber 130 through the communication flow path 800.
the elastic tube 120 is disposed inside the pump housing 110, and if it is contracted by an external force, it discharges a medical fluid having a volume corresponding to the contracted volume. That is, if the incompressible fluid starts to flow into the pump chamber 130 from the cylinder unit 200, the incompressible fluid pressurizes the elastic tube 120, and if the elastic tube 120 is pressurized, the chemical liquid present inside the elastic tube 120 is discharged to the outside through the discharge flow path 170.
The outlet-side joint 160 serves to connect the elastic tube 120 and the discharge flow path 170, and the inlet-side joint 140 serves to connect the elastic tube 120 and the inflow flow path 150. Here, the inflow channel 150 is connected to a chemical tank (not shown) for storing chemical.
Of course, when the piston 230 of the cylinder unit 200 is provided and the incompressible fluid is reversely supplied from the pump chamber 130 to the cylinder unit 200 due to the reciprocating movement thereof, the elastic tube 120 is restored to its original state, and the chemical liquid remaining in the chemical liquid tank flows into the elastic tube 120 through the inflow channel 150.
Although not shown, valves for controlling the flow of the chemical liquid are attached to the inflow channel 150 and the discharge channel 170.
In addition, the cylinder unit includes a piston 230, a cylinder rod 280, and a cylinder plate.
The piston 230 is coupled to the cylinder rod 280 and reciprocates up and down while supplying or receiving the non-compressive fluid to or from the pump unit 100.
the upper end of the cylinder rod 280 is coupled to the lower portion of the piston 230, and the lower end of the cylinder rod 280 is coupled to the nut member 550 of the power transmission unit. A rotary shaft insertion portion 281 into which the rotary shaft 520 of the power transmission unit is inserted is formed in the cylinder rod 280.
On the outside of the cylinder rod 280 is mounted a bellows unit 590. Specifically, the bellows unit 590 includes: an upper cover 591 supporting a lower end surface of the piston 230, a lower cover 593 installed at a lower region of the cylinder plate, and a bellows member 592 connecting the upper cover 591 and the lower cover 593.
The lower cover 593 is coupled to a lower region of the cylinder plate to maintain a fixed position. In contrast, however, the upper lid 591 moves up and down together with the up-and-down movement of the piston 230.
the cylinder plate forms a space to receive the piston 230. The cylinder plate body includes: a1 st cylinder plate 210, a 2 nd cylinder plate 220, a 3 rd cylinder plate 240, and a 4 th cylinder plate 250.
the 2 nd cylinder plate 220 is disposed at a lower portion of the 1 st cylinder plate 210, the 3 rd cylinder plate 240 is disposed at an upper end of the 1 st cylinder plate 210, and the 4 th cylinder plate 250 is disposed at a lower portion of the 2 nd cylinder plate 220 and abuts against a bottom surface of the 2 nd cylinder plate 220.
Although the cylinder plates may be separately manufactured and then combined together, they may be integrally formed.
a sleeve receiving portion 211 is formed in a recessed manner on an inner surface of the 1 st cylinder plate 210, and receives at least a portion of the sleeve unit 600. That is, the sleeve receiving portion 211 is formed as an annular recess on the inner surface of the 1 st cylinder plate 210.
The 3 rd cylinder plate 240 forms a main flow path 260, through which the non-compressive fluid moves, together with the upper surface of the piston 230. The main flow path 260 communicates with the communication flow path 800 and also communicates with a wall surface flow path 270 formed on the outer surface of the piston 230 and the outer surface of the sleeve unit.
The sealing unit includes the 1 st sealing member 720 and the 2 nd sealing member 710.
The 1 st sealing member 720 is disposed between the 2 nd cylinder plate 220 and the piston 230, and blocks leakage of the incompressible fluid. A1 st sealing member housing 221 is formed in the 2 nd cylinder plate 220 in a recessed manner, and at least a part of the 1 st sealing member 720 is housed therein.
The 2 nd sealing member 710 is disposed between the lower surface of the 1 st cylinder plate 210 and the upper surface of the 2 nd cylinder plate 220, which can prevent leakage of the non-compressive fluid. A 2 nd sealing member receiving portion 223 is formed in a recessed shape on the upper surface of the 2 nd cylinder plate 220, and receives at least a portion of the 2 nd sealing member 710.
The present invention is not limited thereto, and the 2 nd sealing member 710 may be partially received in the lower surface of the 1 st cylinder plate 210, and may be simultaneously received in both the lower surface of the 1 st cylinder plate 210 and the upper surface of the 2 nd cylinder plate 220.
Further, a part of the sleeve unit 600 is closely attached to the outer side surface of the piston 230 to support the piston 230 and prevent the piston 230 from shaking, and another part forms the wall surface flow path 270 for moving the incompressible fluid together with the outer side surface of the piston 230.
the jacket unit 600 is disposed at a position higher than the 1 st sealing member 720 with respect to the cylinder rod 280, and the jacket unit 600 may be made of a resin material which is excellent in lubricity and does not react with the incompressible fluid.
For example, Polytetrafluoroethylene (PTFE), Polyethylene (PE), polyethylene terephthalate (PET), or the like may be used as the material of the bushing unit 600.
the sleeve unit 600 includes an annular sleeve main body 610, and an inner side surface of the sleeve main body 610 includes: and one or more inner connection parts 621, 622, 623 protruding to a predetermined length in the direction of the outer surface of the piston 230 and coming into close contact with the outer surface of the piston 230, and flow path formation parts 631, 632, 633 corresponding to the inner surface of the sleeve main body 610 except for the inner connection parts 621, 622, 623.
Here, the flow path forming parts 631, 632, 633 form the wall surface flow path 270 together with the outer side surface of the piston 230.
according to this embodiment, there are 3 of the inner connection portions 621, 622, 623, that is, the 1 st inner connection portion 621, the 2 nd inner connection portion 622, and the 3 rd inner connection portion 623, and the flow path forming portions 631, 632, 633 are also 3, that is, the 1 st flow path forming portion 631, the 2 nd flow path forming portion 632, and the 3 rd flow path forming portion 633, and are arranged at regular intervals.
However, the present invention is not limited thereto, and the number of the internal connection portions may be 2 or more, and the number of the flow path forming portions may be 2 or more.
The interconnecting portions 621, 622, 623 and the flow path forming portions 631, 632, 633 are formed in a stepped manner, and the circumferential length of the flow path forming portions 631, 632, 633 forming the piston 230 and the wall surface flow path 270 is longer than the circumferential length of the interconnecting portions 621, 622, 623 contacting the piston 230.
The diameter of the inner surface of the inner part, which is assumed by the assumed extension of the inner surface of the inner part, is the same as the diameter of the outer surface of the piston 230, which is in mating engagement with the inner surface of the inner part.
As a result, since the sleeve unit 600 is mounted, the flow path of the non-compressive fluid existing between the piston 230 and the inner wall of the cylinder plate is smoothed by the inner connection portion and the flow path forming portion while the piston 230 is stably supported.
Further, the chemical liquid discharge device according to the present invention further includes: a guide bushing unit 570 coupled to a lower side of the cylinder plate, i.e., a 4 th cylinder plate 250, and grasping the cylinder rod 280 to prevent the piston 230 from shaking.
A rod penetration groove (not shown) through which the cylinder rod 280 penetrates is formed in the guide sleeve unit 570.
As a result, when the rotary shaft 520 of the power transmission unit rotates, the cylinder rod 280 is supported by the guide bushing unit 570, and the piston 230 is supported by the bushing unit 600, so that the piston 230 does not shake and moves back and forth in a stable straight line.
since the piston 230 linearly reciprocates in the cylinder plate without being inclined, the 1 st sealing member 720 is prevented from being worn at one side, and the piston and the inner wall of the cylinder plate are prevented from being damaged due to uneven friction between the piston 230 and the inner wall of the cylinder plate, thereby improving the expected life and performance of the product.
In addition, the driving unit 400 includes a motor 410 for moving the cylinder rod 280. The motor 410 is coupled with the rotating shaft 520 of the power transmission unit.
the power transmission unit converts the rotational force of the engine 410 into the linear movement of the cylinder rod 280. The power transmission unit includes: a rotation shaft 520, a nut member 550, a1 st support member 540, a 2 nd support member 510, and a guide member 530.
the rotary shaft 520 is coupled to the motor 410 to rotate, and the nut member 550 is coupled to the rotary shaft 520 and linearly moves with respect to the fixed rotary shaft 520.
The nut member 550 is coupled to the rotary shaft 520 at one side thereof and coupled to the cylinder rod 280 at the other side thereof, and linearly moves together with the cylinder rod 280 when the rotary shaft 520 rotates.
The 1 st supporting member 540 is coupled to the nut member 550 and supports the nut member 550. When the rotation shaft 520 rotates, the 1 st supporting member 540 and the nut member 550 move according to the guide member 530.
The guide member 530 has one end fixed to the 2 nd supporting member 510 and the other end fixed to the 4 th cylinder plate 250. Here, the guide member 530 is disposed to penetrate the 1 st supporting member 540. Therefore, when the nut member 550 moves up and down due to the rotation of the rotation shaft 520, the 1 st supporting member 540 coupled to the nut member 550 moves up and down together with the nut member 550 according to the guide member 530.
As a result, the cylinder rod 280 may be kept vertically moving with respect to the horizontal plane even if the nut member 550 is vibrated when the rotation shaft 520 is rotated.
In addition, the guide member 530 functions to prevent the 1 st supporting member 540 and the nut member 550 from rotating during the linear movement. That is, the guide member 530 is disposed to penetrate one side of the 1 st supporting member 540 so as to prevent the 1 st supporting member 540 from rotating around the rotation shaft 520.
If the guide member 530 is not mounted, the 1 st supporting part 540 is rotated together with the nut member 550 and the rotation shaft 520. If the nut member 550 is not vertically moved to rotate together with the rotation shaft 520, since the cylinder rod 280 is not vertically moved to rotate, there may occur a problem that the coupling portions of the cylinder rod 280 and the piston 230 are separated.
Even if the coupling portions of the cylinder rod 280 and the piston 230 are not separated, if the cylinder rod 280 rotates, there may occur a problem in that the bellows unit 590 is deformed by a rotational torque or the life of the bellows 590 is reduced.
The 2 nd supporting member 510 supports the rotation shaft 520 at a position spaced apart from a lower portion of the 1 st supporting member 540.
The power transmission unit and the cylinder plate are fixed to an outer wall frame 310, and the outer wall frame 310 is provided with a1 st handle 320 and a 2 nd handle 330 so that an operator can grasp the chemical solution discharge apparatus when moving the chemical solution discharge apparatus.
the medical fluid discharge apparatus according to the present invention has the following effects.
First, since the sleeve unit is installed, there is an advantage in that the piston is stably caught and a flow path of the non-compressive fluid existing between the piston and the inner wall of the cylinder plate is smooth.
Second, when the rotary shaft rotates, the cylinder rod is supported by the guide sleeve unit, and the piston is supported by the sleeve unit, so that the piston reciprocates in a stable straight line without wobbling.
As a result, since the piston linearly reciprocates in the cylinder plate without being inclined, it is possible to prevent the seal member from being worn away, to prevent the separation phenomenon due to the uneven friction between the piston and the inner wall of the cylinder plate, and to improve the expected life of the product and the performance, and to discharge the high-precision chemical solution.
As described above, the present invention is not limited to the specific preferred embodiments described, and various modifications can be made by persons having ordinary knowledge in the technical field of the present invention in the claims without departing from the gist of the present invention claimed, and such modifications are within the scope of the present invention.
Claims (9)
1. A medical fluid discharge device, comprising:
A pump unit having a pump housing and an elastic tube that is disposed inside the pump housing and discharges a drug solution when contracted by an external force, wherein a pump chamber into which a non-compressible fluid for pressurizing the elastic tube flows is formed between an inner surface of the pump housing and an outer surface of the elastic tube;
A cylinder unit having: a piston that supplies the incompressible fluid with the pump unit; a cylinder rod coupled to a lower portion of the piston; and a cylinder plate accommodating the piston;
A drive unit having an engine for moving the cylinder rod; and
A power transmission unit for converting a rotational force of the engine into a linear movement of the cylinder rod; and
A sleeve unit having a part closely attached to an outer side surface of the piston, supporting the piston, and preventing the piston from shaking, and a part forming a wall surface flow path through which the incompressible fluid moves together with the outer side surface of the piston;
Wherein the bushing unit comprises:
An annular sleeve body;
An inner side of the cannula body comprising: one or more internal connection portions protruding in a direction of an outer side surface of the piston and coming into close contact with the outer side surface of the piston, and a flow path formation portion corresponding to a portion of an inner side surface of the sleeve main body other than the internal connection portion;
The flow passage forming portion forms the wall surface flow passage together with an outer side surface of the piston.
2. The medical liquid discharge apparatus according to claim 1,
the sleeve unit is made of a resin material that does not react with the incompressible fluid, and the number of the inner connecting portions is 3 or more.
3. The medical liquid discharge apparatus according to claim 2,
The inner connection portion and the flow passage forming portion are formed in a stepped manner, and the circumferential length of the flow passage forming portion forming the piston and the wall surface flow passage is longer than the circumferential length of the inner connection portion contacting the piston.
4. The medical fluid discharge device according to any one of claims 1 to 3,
A sleeve housing portion that houses at least a part of the sleeve unit is formed in a recessed manner on the cylinder plate.
5. The medical liquid discharge apparatus according to claim 4,
the cylinder plate includes:
a1 st cylinder plate forming the sleeve accommodating part; and
A 2 nd cylinder plate disposed under the 1 st cylinder plate; and
A 3 rd cylinder plate disposed at an upper end of the 1 st cylinder plate and forming a main flow path through which the incompressible fluid moves together with an upper surface of the piston; and
And a 4 th cylinder plate disposed below the 2 nd cylinder plate and abutting against a lower surface of the 2 nd cylinder plate.
6. The medical fluid discharge device according to claim 5, further comprising:
And a1 st seal member disposed between the 2 nd cylinder plate and the piston, wherein the 2 nd cylinder plate is formed with a1 st seal member housing in a recessed form, and houses at least a part of the 1 st seal member.
7. The medical fluid discharge device according to claim 5, further comprising:
And a 2 nd seal member disposed between the 1 st cylinder plate lower surface and the 2 nd cylinder plate upper surface, wherein the 2 nd seal member accommodates at least one of the 1 st cylinder plate lower surface and the 2 nd cylinder plate upper surface.
8. The medical fluid discharge device according to any one of claims 1 to 3,
the power transmission unit includes:
a rotating shaft coupled with the engine; and
A nut member having one side coupled to the rotation shaft and the other side coupled to the cylinder rod, and linearly moving together with the cylinder rod when the rotation shaft rotates; and
A1 st support member for supporting the nut member; and
a 2 nd support member which supports the rotary shaft below the 1 st support member; and
And a guide member for guiding the 1 st supporting member to move when the 1 st supporting member moves up and down due to the rotation of the rotation shaft.
9. the medical fluid discharge device according to any one of claims 1 to 3, further comprising:
And a guide bushing unit coupled to a lower surface of the cylinder plate, and having a rod penetration groove through which the cylinder rod penetrates, wherein the cylinder rod is supported by the guide bushing unit when the rotary shaft rotates, and the piston is supported by the bushing unit.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20-2015-0005999 | 2015-09-09 | ||
| KR2020150005999U KR200483917Y1 (en) | 2015-09-09 | 2015-09-09 | Apparatus for discharging chemical liquid |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106981442A CN106981442A (en) | 2017-07-25 |
| CN106981442B true CN106981442B (en) | 2019-12-10 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610811889.0A Active CN106981442B (en) | 2015-09-09 | 2016-09-09 | Liquid medicine discharge device |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR200483917Y1 (en) |
| CN (1) | CN106981442B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002158163A (en) * | 2000-11-22 | 2002-05-31 | Dainippon Screen Mfg Co Ltd | Apparatus for processing substrate |
| JP2006291891A (en) * | 2005-04-13 | 2006-10-26 | Koganei Corp | Chemical supply device |
| JP2008038837A (en) * | 2006-08-09 | 2008-02-21 | Saginomiya Seisakusho Inc | Quantitative chemical feeding pump and chemical application device using the same |
| KR20080048913A (en) * | 2006-11-29 | 2008-06-03 | 코가네이 코포레이션 | Chemical liquid supply apparatus |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5060766B2 (en) | 2006-06-19 | 2012-10-31 | 株式会社コガネイ | Chemical supply device |
| JP4916793B2 (en) | 2006-06-30 | 2012-04-18 | 株式会社鷺宮製作所 | Quantitative liquid feeding pump and chemical liquid application device using the same |
| JP4942449B2 (en) | 2006-10-18 | 2012-05-30 | 株式会社コガネイ | Chemical supply device |
| JP5438611B2 (en) * | 2010-07-09 | 2014-03-12 | 株式会社コガネイ | Chemical supply device |
-
2015
- 2015-09-09 KR KR2020150005999U patent/KR200483917Y1/en active IP Right Grant
-
2016
- 2016-09-09 CN CN201610811889.0A patent/CN106981442B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002158163A (en) * | 2000-11-22 | 2002-05-31 | Dainippon Screen Mfg Co Ltd | Apparatus for processing substrate |
| JP2006291891A (en) * | 2005-04-13 | 2006-10-26 | Koganei Corp | Chemical supply device |
| JP2008038837A (en) * | 2006-08-09 | 2008-02-21 | Saginomiya Seisakusho Inc | Quantitative chemical feeding pump and chemical application device using the same |
| KR20080048913A (en) * | 2006-11-29 | 2008-06-03 | 코가네이 코포레이션 | Chemical liquid supply apparatus |
| CN101191482A (en) * | 2006-11-29 | 2008-06-04 | 株式会社小金井 | Chemical liquid supplying apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20170001023U (en) | 2017-03-20 |
| KR200483917Y1 (en) | 2017-07-11 |
| CN106981442A (en) | 2017-07-25 |
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