CN101016977B - 光照射器及安装于光照射器的放电灯 - Google Patents

光照射器及安装于光照射器的放电灯 Download PDF

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Publication number
CN101016977B
CN101016977B CN2007100054656A CN200710005465A CN101016977B CN 101016977 B CN101016977 B CN 101016977B CN 2007100054656 A CN2007100054656 A CN 2007100054656A CN 200710005465 A CN200710005465 A CN 200710005465A CN 101016977 B CN101016977 B CN 101016977B
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CN
China
Prior art keywords
lamp
base
discharge lamp
pair
light irradiator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2007100054656A
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English (en)
Chinese (zh)
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CN101016977A (zh
Inventor
辻宏二
矢羽田强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
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Ushio Denki KK
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Publication of CN101016977A publication Critical patent/CN101016977A/zh
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
CN2007100054656A 2006-02-09 2007-02-08 光照射器及安装于光照射器的放电灯 Expired - Fee Related CN101016977B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP031907/2006 2006-02-09
JP2006031907A JP4929743B2 (ja) 2006-02-09 2006-02-09 光照射器および光照射器に取り付けられる放電ランプ

Publications (2)

Publication Number Publication Date
CN101016977A CN101016977A (zh) 2007-08-15
CN101016977B true CN101016977B (zh) 2010-05-19

Family

ID=38488755

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2007100054656A Expired - Fee Related CN101016977B (zh) 2006-02-09 2007-02-08 光照射器及安装于光照射器的放电灯

Country Status (4)

Country Link
JP (1) JP4929743B2 (enExample)
KR (1) KR100997587B1 (enExample)
CN (1) CN101016977B (enExample)
TW (1) TW200732590A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021010283A1 (ja) * 2019-07-16 2021-01-21 ウシオ電機株式会社 ロングアーク型放電ランプ、ランプユニット及び光照射装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5387800A (en) * 1992-08-19 1995-02-07 Dymax Corporation Prefocused lamp and reflector assembly
CN2741070Y (zh) * 2004-11-08 2005-11-16 罗筱泠 易调焦定位的投影灯

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04110153A (ja) * 1990-08-31 1992-04-10 Toshiba Lighting & Technol Corp 紫外線照射装置
JP3893208B2 (ja) * 1997-12-17 2007-03-14 キヤノン株式会社 照明装置、及びその照明装置を備える画像読み取り装置
JP4237907B2 (ja) * 1999-10-04 2009-03-11 浜松ホトニクス株式会社 光源装置、スポット光源装置及び光源装置用放電管

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5387800A (en) * 1992-08-19 1995-02-07 Dymax Corporation Prefocused lamp and reflector assembly
CN2741070Y (zh) * 2004-11-08 2005-11-16 罗筱泠 易调焦定位的投影灯

Also Published As

Publication number Publication date
CN101016977A (zh) 2007-08-15
JP4929743B2 (ja) 2012-05-09
TWI363848B (enExample) 2012-05-11
TW200732590A (en) 2007-09-01
JP2007209884A (ja) 2007-08-23
KR100997587B1 (ko) 2010-11-30
KR20070081081A (ko) 2007-08-14

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Granted publication date: 20100519

Termination date: 20210208

CF01 Termination of patent right due to non-payment of annual fee