CN100583348C - 电子束设备 - Google Patents
电子束设备 Download PDFInfo
- Publication number
- CN100583348C CN100583348C CN200810090063A CN200810090063A CN100583348C CN 100583348 C CN100583348 C CN 100583348C CN 200810090063 A CN200810090063 A CN 200810090063A CN 200810090063 A CN200810090063 A CN 200810090063A CN 100583348 C CN100583348 C CN 100583348C
- Authority
- CN
- China
- Prior art keywords
- space
- device electrode
- dimensional structure
- wiring
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 41
- 230000005684 electric field Effects 0.000 claims abstract description 29
- 238000000034 method Methods 0.000 claims description 21
- 230000008569 process Effects 0.000 claims description 12
- 230000004888 barrier function Effects 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 25
- 238000007599 discharging Methods 0.000 description 18
- 230000015572 biosynthetic process Effects 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 9
- 208000034699 Vitreous floaters Diseases 0.000 description 8
- 239000011521 glass Substances 0.000 description 7
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 238000007650 screen-printing Methods 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 239000003550 marker Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 238000001035 drying Methods 0.000 description 3
- 239000003292 glue Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910003445 palladium oxide Inorganic materials 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000005764 inhibitory process Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- HBEQXAKJSGXAIQ-UHFFFAOYSA-N oxopalladium Chemical compound [Pd]=O HBEQXAKJSGXAIQ-UHFFFAOYSA-N 0.000 description 2
- -1 palladium proline compound Chemical class 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 208000033999 Device damage Diseases 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- ONIBWKKTOPOVIA-UHFFFAOYSA-N Proline Natural products OC(=O)C1CCCN1 ONIBWKKTOPOVIA-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 238000007645 offset printing Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002940 repellent Effects 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/316—Cold cathodes, e.g. field-emissive cathode having an electric field parallel to the surface, e.g. thin film cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/04—Cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
- H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
- H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/316—Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
- H01J2201/3165—Surface conduction emission type cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
- H01J2329/02—Electrodes other than control electrodes
- H01J2329/04—Cathode electrodes
- H01J2329/0486—Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
- H01J2329/0489—Surface conduction emission type cathodes
Landscapes
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Gas-Filled Discharge Tubes (AREA)
- Cold Cathode And The Manufacture (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007-096401 | 2007-04-02 | ||
| JP2007096401A JP2008257912A (ja) | 2007-04-02 | 2007-04-02 | 電子線装置 |
| JP2007096401 | 2007-04-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101281840A CN101281840A (zh) | 2008-10-08 |
| CN100583348C true CN100583348C (zh) | 2010-01-20 |
Family
ID=39793078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810090063A Expired - Fee Related CN100583348C (zh) | 2007-04-02 | 2008-04-02 | 电子束设备 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US7710010B2 (enExample) |
| JP (1) | JP2008257912A (enExample) |
| CN (1) | CN100583348C (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009059547A (ja) * | 2007-08-31 | 2009-03-19 | Canon Inc | 電子放出素子とその製造方法 |
| JP2010067398A (ja) * | 2008-09-09 | 2010-03-25 | Canon Inc | 電子線装置 |
| JP2010244830A (ja) * | 2009-04-06 | 2010-10-28 | Canon Inc | 画像表示装置及びその製造方法 |
| JP2010262892A (ja) * | 2009-05-11 | 2010-11-18 | Canon Inc | 電子線装置及びこれを用いた画像表示装置 |
| JP2010267474A (ja) * | 2009-05-14 | 2010-11-25 | Canon Inc | 電子線装置及びこれを用いた画像表示装置 |
| JP2011018491A (ja) * | 2009-07-08 | 2011-01-27 | Canon Inc | 電子放出素子とこれを用いた電子線装置、画像表示装置 |
| JP2012028213A (ja) * | 2010-07-26 | 2012-02-09 | Canon Inc | 画像表示装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5831387A (en) * | 1994-05-20 | 1998-11-03 | Canon Kabushiki Kaisha | Image forming apparatus and a method for manufacturing the same |
| CN1832098A (zh) * | 2005-01-25 | 2006-09-13 | 佳能株式会社 | 电子束装置 |
| CN1921051A (zh) * | 2005-08-24 | 2007-02-28 | 佳能株式会社 | 电子源和图像显示设备 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5023110A (en) | 1988-05-02 | 1991-06-11 | Canon Kabushiki Kaisha | Process for producing electron emission device |
| JPH0687392B2 (ja) | 1988-05-02 | 1994-11-02 | キヤノン株式会社 | 電子放出素子の製造方法 |
| JP3768803B2 (ja) | 2000-11-09 | 2006-04-19 | キヤノン株式会社 | 画像表示装置 |
| US6903504B2 (en) * | 2002-01-29 | 2005-06-07 | Canon Kabushiki Kaisha | Electron source plate, image-forming apparatus using the same, and fabricating method thereof |
| CN100419939C (zh) | 2003-01-21 | 2008-09-17 | 佳能株式会社 | 通电处理方法和电子源衬底的制造方法 |
| JP4579630B2 (ja) | 2004-09-22 | 2010-11-10 | キヤノン株式会社 | 電子線装置の製造方法および電子線装置 |
| JP4886184B2 (ja) | 2004-10-26 | 2012-02-29 | キヤノン株式会社 | 画像表示装置 |
| JP4817641B2 (ja) | 2004-10-26 | 2011-11-16 | キヤノン株式会社 | 画像形成装置 |
| US7262548B2 (en) * | 2004-12-15 | 2007-08-28 | Canon Kabushiki Kaisha | Image forming apparatus capable of suppressing a fluctuation in an incident position of an electron beam |
| JP4522275B2 (ja) | 2005-01-25 | 2010-08-11 | キヤノン株式会社 | 電子線装置及びそれを用いた表示パネル |
| US7427826B2 (en) | 2005-01-25 | 2008-09-23 | Canon Kabushiki Kaisha | Electron beam apparatus |
-
2007
- 2007-04-02 JP JP2007096401A patent/JP2008257912A/ja not_active Withdrawn
-
2008
- 2008-03-20 US US12/051,890 patent/US7710010B2/en not_active Expired - Fee Related
- 2008-04-02 CN CN200810090063A patent/CN100583348C/zh not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5831387A (en) * | 1994-05-20 | 1998-11-03 | Canon Kabushiki Kaisha | Image forming apparatus and a method for manufacturing the same |
| CN1832098A (zh) * | 2005-01-25 | 2006-09-13 | 佳能株式会社 | 电子束装置 |
| CN1921051A (zh) * | 2005-08-24 | 2007-02-28 | 佳能株式会社 | 电子源和图像显示设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| US7710010B2 (en) | 2010-05-04 |
| JP2008257912A (ja) | 2008-10-23 |
| CN101281840A (zh) | 2008-10-08 |
| US20080238288A1 (en) | 2008-10-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100120 Termination date: 20140402 |