CN100562355C - 废气处理装置的废气处理塔及该处理塔所用的电加热器 - Google Patents

废气处理装置的废气处理塔及该处理塔所用的电加热器 Download PDF

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Publication number
CN100562355C
CN100562355C CNB2005100823442A CN200510082344A CN100562355C CN 100562355 C CN100562355 C CN 100562355C CN B2005100823442 A CNB2005100823442 A CN B2005100823442A CN 200510082344 A CN200510082344 A CN 200510082344A CN 100562355 C CN100562355 C CN 100562355C
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China
Prior art keywords
waste gas
exhaust gas
electric heater
treating tower
gas treating
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Expired - Fee Related
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CNB2005100823442A
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English (en)
Chinese (zh)
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CN1721045A (zh
Inventor
今村启志
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Koken Science & Technology Co Ltd
Kanken Techno Co Ltd
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Koken Science & Technology Co Ltd
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CNB2005100823442A 2000-12-21 2001-12-21 废气处理装置的废气处理塔及该处理塔所用的电加热器 Expired - Fee Related CN100562355C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000388492A JP3626092B2 (ja) 2000-12-21 2000-12-21 半導体排ガス処理装置
JP388492/2000 2000-12-21
JP398686/2000 2000-12-27
JP026159/2001 2001-02-01

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN 01133863 Division CN1243599C (zh) 2000-12-21 2001-12-21 废气处理装置的废气处理塔

Publications (2)

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CN1721045A CN1721045A (zh) 2006-01-18
CN100562355C true CN100562355C (zh) 2009-11-25

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CNB2005100823442A Expired - Fee Related CN100562355C (zh) 2000-12-21 2001-12-21 废气处理装置的废气处理塔及该处理塔所用的电加热器

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JP (1) JP3626092B2 (ja)
CN (1) CN100562355C (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102375700B1 (ko) * 2017-11-21 2022-03-18 에스케이하이닉스 주식회사 반도체 제조 장비의 배기 시스템
CN109865422A (zh) * 2019-03-15 2019-06-11 江苏东本环保工程有限公司 急冷干法脱酸系统
CN113041810B (zh) * 2020-12-30 2022-08-30 北京京仪自动化装备技术股份有限公司 废气处理系统

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4049901A (en) * 1976-02-23 1977-09-20 Pomeschikov Andrei Grigorievic Electroslag furnace
US4211887A (en) * 1978-10-25 1980-07-08 Owens-Corning Fiberglas Corporation Electrical furnace, zones balanced with a symmetrically tapped transformer
CN2080281U (zh) * 1991-01-07 1991-07-03 陈海波 电加热器
US5864576A (en) * 1996-02-01 1999-01-26 Nikkato Corp. Electric furnace
CN2326830Y (zh) * 1998-04-13 1999-06-30 樊邦弘 焊接式带灯

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4049901A (en) * 1976-02-23 1977-09-20 Pomeschikov Andrei Grigorievic Electroslag furnace
US4211887A (en) * 1978-10-25 1980-07-08 Owens-Corning Fiberglas Corporation Electrical furnace, zones balanced with a symmetrically tapped transformer
CN2080281U (zh) * 1991-01-07 1991-07-03 陈海波 电加热器
US5864576A (en) * 1996-02-01 1999-01-26 Nikkato Corp. Electric furnace
CN2326830Y (zh) * 1998-04-13 1999-06-30 樊邦弘 焊接式带灯

Also Published As

Publication number Publication date
CN1721045A (zh) 2006-01-18
JP2002186828A (ja) 2002-07-02
JP3626092B2 (ja) 2005-03-02

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Granted publication date: 20091125

Termination date: 20111221