CN100550268C - High-resolution X-ray image enhancer - Google Patents
High-resolution X-ray image enhancer Download PDFInfo
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- CN100550268C CN100550268C CNB2007100176668A CN200710017666A CN100550268C CN 100550268 C CN100550268 C CN 100550268C CN B2007100176668 A CNB2007100176668 A CN B2007100176668A CN 200710017666 A CN200710017666 A CN 200710017666A CN 100550268 C CN100550268 C CN 100550268C
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Abstract
The present invention relates to a kind of high-resolution X-ray image enhancer, comprise input window, photocathode, microchannel plate assembly, output window and shell; Output window comprises phosphor screen, phosphor powder layer and aluminium film; Shell comprises sealing ring, ceramic package and the output window metal shell that axially connects successively; The output window sealing and fixing is on the output window metal shell; Input window is the metal window of sealing and fixing in the middle of the sealing ring front end; Input window material is metallic aluminium or beryllium, and the material of sealing ring is kovar alloy 4J33, passes through aluminium solder soldering sealing-in between input window and the sealing ring.The invention solves that the existing X ray image intensifier that uses the titanium window is low to the transmitance of X ray, poor contrast, scattering is serious, noise is big technical problem, X ray there are high transmitance and little scattered power, can reduce disperse time, transit time and the space charge effect of electronics, reduce the noise of X ray image intensifier, improved contrast.
Description
Technical field
The present invention relates to a kind of x-ray detection device image intensifier.
Background technology
X ray detects as one of method of traditional Non-Destructive Testing, and the effect in industrial nondestructive inspection field seems more and more important.Particularly along with the develop rapidly of electronic technology, continuing to bring out of the miniaturization of encapsulation and the densification of assembling and various novel encapsulated technology, also more and more higher to the requirement of electronics assembling quality, so method and the technology checked are had higher requirement.Automatically X ray detection technique (AXI) not only can detect invisible solder joint, as BGA (BGA Package) etc., can also carry out qualitative, quantitative analysis to testing result, in the hope of finding fault early.Simultaneously, because the miniaturization of electronic product, the application of sandwich construction printed substrate becomes more and more widely.In the manufacturing of multilayer printed circuit board, the arrangement of each plate face need be monitored continuously in real time, and structure and the weld-ring width that is in the internal layer position can be accurately measured in the X ray Non-Destructive Testing.In addition,, can also on X-ray figure, clearly recognize short circuit and open circuit, determine their position and make analysis by this technology as in interlayer electric circuit metal handshaking procedures.All these need use the X ray image intensifier of high-resolution low noise high-contrast as technical support.At present, the input window of the X ray image intensifier of the industrial nondestructive testing technology that is used for of domestic production all is the titanium window that adopts, titanium window sealing-in ratio is easier to, but the titanium window causes to the transmitance of X ray is low that roentgen dose X is big, brightness is low, poor contrast, scattering to X ray is serious, noise is big, can't the clear defective that dynamic observes object to be detected effectively.
Summary of the invention
The purpose of this invention is to provide a kind of high-resolution X-ray image enhancer, its X ray image intensifier that has solved existing use titanium window is low to the transmitance of X ray, poor contrast, scattering is serious, noise is big technical problem.
Technical solution of the present invention is:
A kind of high-resolution X-ray image enhancer comprises input window 1, the reflective photocathode 3 to the X ray sensitivity, microchannel plate assembly, output window 9 and shell 10; Described input window 1, output window 9 and shell 10 constitute vacuum seal 12; Described output window 9 comprises phosphor screen 11, is arranged on the phosphor powder layer 8 of phosphor screen 11 inner surfaces, is arranged on the aluminium film 7 outside the phosphor powder layer 8; Form front end vacuum gap 2 between described input window 1 and the microchannel plate assembly, form rear end vacuum gap 6 between described microchannel plate assembly and the output window 9; Its special character is that described shell 10 comprises sealing ring 16, ceramic package 14 and the output window metal shell 15 that axially connects successively; Described output window 9 sealing and fixing are on output window metal shell 15; Described input window 1 is the metal window 20 of sealing and fixing in the middle of sealing ring 16 front ends; The material of described metal window 20 is metallic aluminium or beryllium, and the material of sealing ring 16 is kovar alloy 4J33, passes through aluminium solder soldering sealing-in between described metal window 20 and the sealing ring 16; Described microchannel plate assembly comprises pressure ring 4, microchannel plate 5 and the pallet 19 that axially connects successively; Described pallet 19 is fixed in the middle of the ceramic package 14, and described pressure ring 4 is fixed on the inboard of sealing ring 16; Described microchannel plate 5 is fixed on the pallet 19 by pressure ring 4; Described photocathode 3 evaporations are at the input face of microchannel plate 5; Described pressure ring 4 is the self-expanding pressure ring on band gap 18 and inclined-plane 17.
The material of above-mentioned phosphor screen 11 is K4 glass or fibre faceplate, and described photocathode 3 is an alkali halogen compound reflective photocathode, and the material of described phosphor powder layer 8 is a P20 fluorescent material.
Above-mentioned alkali halogen compound reflective photocathode is specially the CsI photocathode.
The axial length of above-mentioned front end vacuum gap 2 is 5～6mm; The axial length of described rear end vacuum gap 6 is 0.5～1mm; The thickness of described metal window 20 is 0.3～2mm, and effective diameter is Ф 18～Ф 100mm.
Advantage of the present invention is:
1, input window of the present invention adopts aluminium/beryllium metal window, because the atomic nucleus of aluminium, beryllium is little, not only can high transmitance be arranged to X ray, and it is little to the scattering of X ray, so the present invention can obtain significantly to reduce the using dosage of x-ray source under the situation of same radiant power at photocathode, can improve spatial resolution, for example the metal window effective diameter is under the situation of Ф 25, and its spatial resolution is better than 20LP/mm.
2, use the self-expanding pressure ring to compress microchannel plate among the present invention, overcome that pressure ring that the dependence spot welding machine spot welding pressure ring that in the past adopted exists does not press tightly and the electrode discharge sparking problem that causes in the seasoned process of device, improved the stability and the reliability of X ray image intensifier.
3, the nearly structure of pasting of employing between structure, microchannel plate and the phosphor screen is close in employing between photocathode of the present invention and the microchannel plate, not only can reduce the disperse and the transit time of electronics, and reduced space charge effect, reduced the noise of X ray image intensifier, improved contrast, so reduced x-ray dose, obtained the preferable image quality, volume reduces significantly simultaneously.
4, the present invention adopts fine aluminium/pure beryllium input window and the aluminium solder sealing-in of kovar alloy 4J33 sealing ring, has realized the unmatched sealing of input window and kovar alloy, can guarantee good vacuum-tightness effect, has guaranteed the X ray high permeability.
Description of drawings
Fig. 1 is the front and back position schematic diagram of each parts of the present invention;
Fig. 2 is the structural representation of self-expanding pressure ring of the present invention;
Fig. 3 is the structural representation of high-resolution X-ray image enhancer of the present invention;
Wherein: 1-input window, 2-front end vacuum gap, 3-photocathode, 4-pressure ring, the 5-microchannel plate, 6-rear end vacuum gap, 7-aluminium film, the 8-phosphor powder layer, 9-output window, 10-shell, the 11-phosphor screen, 12-vacuum seal, 14-ceramic package, 15-output window metal shell, 16-sealing ring, 17-inclined-plane, the 18-gap, 19-pallet, 20-metal window.
Embodiment
Structure of the present invention is seen Fig. 1 and Fig. 3, comprise input window 1, reflective photocathode 3 to the X ray sensitivity, the microchannel plate assembly, output window 9 and shell 10, wherein input window 1, output window 9 and shell 10 constitute vacuum seal 12, shell 10 comprises the sealing ring 16 that axially connects successively, ceramic package 14 and output window metal shell 15, input window 1 is the metal window 20 in the middle of the front end that is fixed on sealing ring 16, metal window 20 adopts fine aluminium/pure beryllium material, thickness is 0.3～2mm, be advisable with 0.5～1mm, effective diameter is Ф 18～Ф 100mm, is advisable with Ф 25～Ф 100mm.The microchannel plate assembly comprises pressure ring 4, microchannel plate 5 and the pallet 19 that axially connects successively; Pallet 19 is fixed in the middle of the ceramic package 14, and pressure ring 4 is fixed on the rear end of sealing ring 16; Microchannel plate 5 is fixed on the pallet 19 by pressure ring 4; Output window 9 sealing and fixing are on output window metal shell 15, and output window 9 comprises phosphor screen 11, is arranged on the phosphor powder layer 8 of phosphor screen 11 inner surfaces, is arranged on the aluminium film 7 outside the phosphor powder layer 8; 5 of input window 1 and microchannel plates form front end vacuum gap 2, and the axial length of front end vacuum gap 2 is 5～6mm; Form rear end vacuum gap 6 between microchannel plate 5 and the output window 9, the axial length of rear end vacuum gap 6 is 0.5～1mm.
With the fine aluminium sheet by the design metal window 1 dimensioned good and clean up after, with aluminium solder fine aluminium sheet and sealing ring 16 sealing rings are welded together, the material of sealing ring 16 is kovar alloy 4J33.The material selection alkali halogen compound CsI of photocathode 3, because CsI can be exposed in the air short time, therefore photocathode 3 can be in vacuum coating equipment with the method for evaporation coating directly be deposited on microchannel plate 5 input face on, the good back of plating is taken out and other parts such as shell 10, pressure ring 4 assemble.The phosphor powder layer 8 of phosphor screen 11 can adopt the precipitation method or centrifugal process that P20 fluorescent material is made on the output window 9 that K4 glass or fibre faceplate make, and the surperficial evaporation of phosphor powder layer 8 has layer of aluminum film 7.Shell 10 adopts high temperature molybdenum-manganese method technology to make.Photocathode 3, microchannel plate 5 vacuum seals are in ceramic and metal package 10.The negative voltage that adds 800～1000V during work on the input face of microchannel plate 5, output face ground connection.The positive voltage that adds 4～5KV during work therebetween.
The principle of the invention and the course of work:
The high-resolution X-ray image enhancer that adopts aluminium/beryllium window is that a kind of industrial nondestructive inspection field that is used for converts radioscopic image the two-dimensional imaging detector of visible images to, and it mainly is made up of photocathode, microchannel plate and phosphor screen.Wherein photocathode converts x-ray photon to photoelectron, and the photoelectron of generation reaches 10 by microchannel plate
4Reach after the multiplication on the phosphor screen, phosphor screen changes the electronic image that produces into visible images.
Referring to Fig. 1, X ray that x-ray source sends is got on the photocathode to the X ray sensitivity through X ray there being the aluminium/beryllium window of high permeability, the photoelectron that photocathode is launched enters in the microchannel of microchannel plate at certain inclination angle, under the effect of extra electric field, produce secondary electron, secondary electron carries out continuous collision in passage, make electronics avalanche multiplication therein.The size of gain depends primarily on added operating voltage on the microchannel plate except outside the Pass the factors such as physical dimension with the physical characteristic that constitutes microchannel plate glass, microchannel have.By electronics impact fluorescence bisque after several kilovolts voltage acceleration of microchannel plate output, phosphor powder layer is converted to visible images with electronic image, thereby realizes being detected the detection of object.
Aluminum window/beryllium window is little to transmitance height, the scattering of X ray, noise is low, but aluminum window/beryllium window sealing-in is because the sealing-in of aluminium/beryllium and kovar alloy belongs to unmatched sealing, and expansion coefficient difference is big, and its sealing technology difficulty great achievement is to limit the technical bottleneck of its use.The present invention adopts the aluminium solder sealing-in to realize the unmatched sealing of aluminium/beryllium input window and kovar alloy 4J33 sealing ring, can guarantee good vacuum-tightness effect.
The present invention also can be used for medical and health industry.
Claims (4)
1, a kind of high-resolution X-ray image enhancer comprises input window (1), the reflective photocathode (3) to the X ray sensitivity, microchannel plate assembly, output window (9) and shell (10); Described input window (1), output window (9) and shell (10) constitute vacuum seal (12); Described output window (9) comprises phosphor screen (11), is arranged on the phosphor powder layer (8) of phosphor screen (11) inner surface, is arranged on the outer aluminium film (7) of phosphor powder layer (8); Form front end vacuum gap (2) between described input window (1) and the microchannel plate assembly, form rear end vacuum gap (6) between described microchannel plate assembly and the output window (9); It is characterized in that: described shell (10) comprises sealing ring (16), ceramic package (14) and the output window metal shell (15) that axially connects successively; Described output window (9) sealing and fixing is on output window metal shell (15); Described input window (1) is the metal window (20) of sealing and fixing in the middle of sealing ring (16) front end; The material of described metal window (20) is metallic aluminium or beryllium, and the material of sealing ring (16) is kovar alloy 4J33, passes through aluminium solder soldering sealing-in between described metal window (20) and the sealing ring (16); Described microchannel plate assembly comprises pressure ring (4), microchannel plate (5) and the pallet (19) that axially connects successively; Described pallet (19) is fixed in the middle of the ceramic package (14), and described pressure ring (4) is fixed on the inboard of sealing ring (16); Described microchannel plate (5) is fixed on the pallet (19) by pressure ring (4); Described photocathode (3) evaporation is at the input face of microchannel plate (5); Described pressure ring (4) is the self-expanding pressure ring of band gap (18) and inclined-plane (17).
2, high-resolution X-ray image enhancer according to claim 1, it is characterized in that: the material of described phosphor screen (11) is K4 glass or fibre faceplate, described photocathode (3) is an alkali halogen compound reflective photocathode, and the material of described phosphor powder layer (8) is a P20 fluorescent material.
3, high-resolution X-ray image enhancer according to claim 2 is characterized in that: described alkali halogen compound reflective photocathode is the CsI photocathode.
4, high-resolution X-ray image enhancer according to claim 1 is characterized in that: the axial length of described front end vacuum gap (2) is 5～6mm; The axial length of described rear end vacuum gap (6) is 0.5～1mm; The thickness of described metal window (20) is 0.3～2mm, and effective diameter is Φ 18～Φ 100mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100176668A CN100550268C (en) | 2007-04-17 | 2007-04-17 | High-resolution X-ray image enhancer |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2007100176668A CN100550268C (en) | 2007-04-17 | 2007-04-17 | High-resolution X-ray image enhancer |
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| CN101034653A CN101034653A (en) | 2007-09-12 |
| CN100550268C true CN100550268C (en) | 2009-10-14 |
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| CNB2007100176668A Expired - Fee Related CN100550268C (en) | 2007-04-17 | 2007-04-17 | High-resolution X-ray image enhancer |
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Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102478660B (en) * | 2010-11-26 | 2013-07-24 | 中国科学院大连化学物理研究所 | Modular charged particle two-dimensional imaging detector |
| CN103163549A (en) * | 2011-12-19 | 2013-06-19 | 中国科学院西安光学精密机械研究所 | Large-area X-ray pulse detection device based on microchannel plate split joint |
| CN104979148B (en) * | 2014-04-09 | 2017-01-25 | 北方夜视技术股份有限公司 | Method of improving output brightness uniformity of low light level image intensifier |
| CN105448638B (en) * | 2015-12-15 | 2017-09-22 | 中国科学院西安光学精密机械研究所 | A kind of micro-channel type entrance window and preparation method thereof |
| CN105869974B (en) * | 2016-04-08 | 2017-09-15 | 北方夜视技术股份有限公司 | A kind of method integrally assembled for gleam image intensifier |
| CN109585243A (en) * | 2018-12-27 | 2019-04-05 | 中国科学院西安光学精密机械研究所 | A kind of X-ray framing camera framing image-converter tube and method for sealing |
| CN110600358B (en) * | 2019-09-04 | 2021-12-14 | 中国科学技术大学 | Gas electron multiplier, gas photomultiplier tube, and gas X-ray image intensifier |
| CN110571114B (en) * | 2019-09-04 | 2021-08-13 | 中国科学技术大学 | Gas X-ray image intensifier |
| WO2021042289A1 (en) * | 2019-09-04 | 2021-03-11 | 中国科学技术大学 | Gas electron multiplier, gas photomultiplier tube, and gas x-ray image intensifier |
| CN111090028B (en) * | 2019-12-16 | 2022-02-15 | 北方夜视技术股份有限公司 | Device and method for superposition test of double-piece microchannel plate |
| CN112863977A (en) * | 2021-01-14 | 2021-05-28 | 北方夜视技术股份有限公司 | High-resolution low-light-level image intensifier tube |
| CN114171366B (en) * | 2021-12-09 | 2024-05-14 | 中国科学院高能物理研究所 | Image intensifier with double-fiber light cone structure and image intensifier type detection imaging system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4686417A (en) * | 1984-02-29 | 1987-08-11 | Kabushiki Kaisha Toshiba | X-ray image intensifier |
| US5095243A (en) * | 1989-10-20 | 1992-03-10 | Hamamatsu Photonics K. K. | Image tube device |
| US5404072A (en) * | 1993-05-28 | 1995-04-04 | Itt Corporation | Unistructural housing for an image intensifier tube |
-
2007
- 2007-04-17 CN CNB2007100176668A patent/CN100550268C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4686417A (en) * | 1984-02-29 | 1987-08-11 | Kabushiki Kaisha Toshiba | X-ray image intensifier |
| US5095243A (en) * | 1989-10-20 | 1992-03-10 | Hamamatsu Photonics K. K. | Image tube device |
| US5404072A (en) * | 1993-05-28 | 1995-04-04 | Itt Corporation | Unistructural housing for an image intensifier tube |
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| CN101034653A (en) | 2007-09-12 |
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