CN100541334C - 具有气体冲洗装置的光刻设备 - Google Patents

具有气体冲洗装置的光刻设备 Download PDF

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Publication number
CN100541334C
CN100541334C CNB2005100817530A CN200510081753A CN100541334C CN 100541334 C CN100541334 C CN 100541334C CN B2005100817530 A CNB2005100817530 A CN B2005100817530A CN 200510081753 A CN200510081753 A CN 200510081753A CN 100541334 C CN100541334 C CN 100541334C
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CN
China
Prior art keywords
exhausr port
gas
gas flushing
flushing device
laminated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB2005100817530A
Other languages
English (en)
Chinese (zh)
Other versions
CN1725110A (zh
Inventor
M·贝克斯
R·J·胡特曼斯
N·坦卡特
N·R·科珀
N·F·科佩拉亚斯
J·-M·肖特斯曼
R·范德哈姆
J·A·M·M·范尤特雷格特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Netherlands BV
Original Assignee
ASML Netherlands BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Netherlands BV filed Critical ASML Netherlands BV
Publication of CN1725110A publication Critical patent/CN1725110A/zh
Application granted granted Critical
Publication of CN100541334C publication Critical patent/CN100541334C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70933—Purge, e.g. exchanging fluid or gas to remove pollutants
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus

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  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CNB2005100817530A 2004-05-25 2005-05-24 具有气体冲洗装置的光刻设备 Expired - Lifetime CN100541334C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/852686 2004-05-25
US10/852,686 US7136142B2 (en) 2004-05-25 2004-05-25 Lithographic apparatus having a gas flushing device

Publications (2)

Publication Number Publication Date
CN1725110A CN1725110A (zh) 2006-01-25
CN100541334C true CN100541334C (zh) 2009-09-16

Family

ID=34938293

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2005100817530A Expired - Lifetime CN100541334C (zh) 2004-05-25 2005-05-24 具有气体冲洗装置的光刻设备

Country Status (8)

Country Link
US (1) US7136142B2 (https=)
EP (1) EP1600819B1 (https=)
JP (2) JP4318667B2 (https=)
KR (1) KR100768946B1 (https=)
CN (1) CN100541334C (https=)
DE (1) DE602005013145D1 (https=)
SG (1) SG117593A1 (https=)
TW (1) TWI266965B (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060119811A1 (en) * 2004-12-07 2006-06-08 Asml Netherlands B.V. Radiation exposure apparatus comprising a gas flushing system
US8092029B2 (en) * 2004-12-23 2012-01-10 Carl Zeiss Smt Gmbh Lens module comprising at least one exchangeable optical element
NL1036181A1 (nl) * 2007-11-30 2009-06-04 Asml Netherlands Bv A lithographic apparatus, a projection system and a device manufacturing method.
KR101399303B1 (ko) * 2008-12-05 2014-05-26 엘지디스플레이 주식회사 평판표시장치용 노광장비
NL2008184A (en) 2011-02-28 2012-08-29 Asml Netherlands Bv Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method.
US9453801B2 (en) 2012-05-25 2016-09-27 Kla-Tencor Corporation Photoemission monitoring of EUV mirror and mask surface contamination in actinic EUV systems
US9662688B2 (en) 2012-07-09 2017-05-30 Kla-Tencor Corporation Apparatus and method for cross-flow purge for optical components in a chamber
NL2012291A (en) 2013-02-20 2014-08-21 Asml Netherlands Bv Gas flow optimization in reticle stage environment.
CN109283797B (zh) * 2017-07-21 2021-04-30 上海微电子装备（集团）股份有限公司 物镜保护装置、物镜系统以及光刻设备
CN108398858B (zh) * 2018-03-20 2019-05-10 李笛 一种气体隔离装置及隔离方法
WO2020182540A1 (en) 2019-03-14 2020-09-17 Asml Netherlands B.V. Providing substantially laminar fluid flow in a lithographic apparatus
JP7427461B2 (ja) * 2020-02-06 2024-02-05 キヤノン株式会社 露光装置、及び物品の製造方法
DE102022128598A1 (de) * 2022-10-28 2024-05-08 Trumpf Laser- Und Systemtechnik Gmbh Vorrichtung und Verfahren zur Inertisierung einer Prozesskammer für die additive Fertigung eines Werkstücks

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4692934A (en) 1984-11-08 1987-09-08 Hampshire Instruments X-ray lithography system
JPH03252507A (ja) 1990-03-02 1991-11-11 Hitachi Ltd レーザ干渉測長装置およびそれを用いた位置決め方法
JP3448670B2 (ja) * 1993-09-02 2003-09-22 株式会社ニコン 露光装置及び素子製造方法
JP3637639B2 (ja) 1995-07-10 2005-04-13 株式会社ニコン 露光装置
JP2828090B2 (ja) * 1997-03-24 1998-11-25 株式会社ニコン 露光装置
DE19830438A1 (de) 1998-07-08 2000-01-13 Zeiss Carl Fa Verfahren zur Dekontamination von Mikrolithographie-Projektionsbelichtungsanlagen
TW563002B (en) * 1999-11-05 2003-11-21 Asml Netherlands Bv Lithographic projection apparatus, method of manufacturing a device using a lithographic projection apparatus, and device manufactured by the method
TW480372B (en) 1999-11-05 2002-03-21 Asm Lithography Bv Lithographic projection apparatus, method of manufacturing a device using the apparatus, and device manufactured according to the method
JP2002373852A (ja) * 2001-06-15 2002-12-26 Canon Inc 露光装置

Also Published As

Publication number Publication date
SG117593A1 (en) 2005-12-29
JP2005340825A (ja) 2005-12-08
TW200609687A (en) 2006-03-16
TWI266965B (en) 2006-11-21
JP4318667B2 (ja) 2009-08-26
US7136142B2 (en) 2006-11-14
KR20060048091A (ko) 2006-05-18
JP4637223B2 (ja) 2011-02-23
CN1725110A (zh) 2006-01-25
EP1600819A1 (en) 2005-11-30
JP2009021636A (ja) 2009-01-29
KR100768946B1 (ko) 2007-10-19
DE602005013145D1 (de) 2009-04-23
US20050264773A1 (en) 2005-12-01
EP1600819B1 (en) 2009-03-11

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Granted publication date: 20090916