CN100541115C - 外观检查装置和方法 - Google Patents

外观检查装置和方法 Download PDF

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Publication number
CN100541115C
CN100541115C CNB2006800014370A CN200680001437A CN100541115C CN 100541115 C CN100541115 C CN 100541115C CN B2006800014370 A CNB2006800014370 A CN B2006800014370A CN 200680001437 A CN200680001437 A CN 200680001437A CN 100541115 C CN100541115 C CN 100541115C
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CN
China
Prior art keywords
mentioned
focal point
rotating mirror
polygonal rotating
scanning direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2006800014370A
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English (en)
Chinese (zh)
Other versions
CN101080608A (zh
Inventor
小野裕司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of CN101080608A publication Critical patent/CN101080608A/zh
Application granted granted Critical
Publication of CN100541115C publication Critical patent/CN100541115C/zh
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CNB2006800014370A 2005-04-14 2006-04-12 外观检查装置和方法 Expired - Fee Related CN100541115C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP116869/2005 2005-04-14
JP2005116869 2005-04-14

Publications (2)

Publication Number Publication Date
CN101080608A CN101080608A (zh) 2007-11-28
CN100541115C true CN100541115C (zh) 2009-09-16

Family

ID=37115039

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2006800014370A Expired - Fee Related CN100541115C (zh) 2005-04-14 2006-04-12 外观检查装置和方法

Country Status (5)

Country Link
JP (1) JP4874103B2 (ja)
KR (1) KR101204585B1 (ja)
CN (1) CN100541115C (ja)
DE (1) DE112006000841T5 (ja)
WO (1) WO2006112315A1 (ja)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5146636B2 (ja) * 2007-01-31 2013-02-20 株式会社ブイ・テクノロジー 高さ測定装置
CN101349550B (zh) * 2008-08-26 2010-06-09 浙江大学 在线橡胶栓外形质量检查机
DE102011083421A1 (de) * 2011-09-26 2013-03-28 Siemens Aktiengesellschaft Verfahren und Vorrichtung zum Vermessen homogen reflektierender Oberflächen
CA2995228A1 (en) * 2015-08-21 2017-03-02 Adcole Corporation Optical profiler and methods of use thereof
JP6806139B2 (ja) * 2016-03-30 2021-01-06 株式会社ニコン ビーム走査装置およびパターン描画装置
CN105783778B (zh) * 2016-04-27 2018-04-17 中国科学院云南天文台 基于激光扫描法的非接触光学镜面检测系统及其检测方法
CN106705881A (zh) * 2016-12-12 2017-05-24 哈尔滨工业大学 基于共聚焦显微原理的大口径光学元件母线轮廓测量方法
JP6829992B2 (ja) * 2016-12-28 2021-02-17 株式会社キーエンス 光走査高さ測定装置
CN106839978B (zh) * 2016-12-29 2019-04-19 贵州虹轴轴承有限公司 一种轴承套圈外壁加工精度检测装置
CN106767468B (zh) * 2016-12-29 2019-03-01 贵州虹轴轴承有限公司 一种轴承套圈外壁精度检测装置
CN109443243A (zh) * 2018-12-19 2019-03-08 孙志军 一种测量物体形状的设备和测量方法
CN110186391A (zh) * 2019-05-22 2019-08-30 浙江大学 一种三维模型梯度扫描方法
CA3155008A1 (en) * 2019-09-18 2021-03-25 DWFritz Automation, Inc. Non-contact optical measurement devices and exchangeable optical probes
CN113251949B (zh) * 2021-06-18 2021-11-30 三代光学科技（天津）有限公司 一种微透镜阵列面形的单点光学测量路径生成方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4689491A (en) * 1985-04-19 1987-08-25 Datasonics Corp. Semiconductor wafer scanning system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51122462A (en) 1975-03-31 1976-10-26 Canon Kk Measuring apparatus
JPS5662219A (en) * 1979-10-26 1981-05-28 Shinko Electric Co Ltd Mirror for laser beam scanning
JPH1137723A (ja) 1997-07-23 1999-02-12 Fujitsu Ltd 高さ検査装置
JP2958456B1 (ja) * 1998-06-25 1999-10-06 防衛庁技術研究本部長 走行車両の距離測定装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4689491A (en) * 1985-04-19 1987-08-25 Datasonics Corp. Semiconductor wafer scanning system

Also Published As

Publication number Publication date
WO2006112315A1 (ja) 2006-10-26
KR20070120086A (ko) 2007-12-21
JP4874103B2 (ja) 2012-02-15
DE112006000841T5 (de) 2008-02-28
CN101080608A (zh) 2007-11-28
KR101204585B1 (ko) 2012-11-23
JPWO2006112315A1 (ja) 2008-12-11

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Granted publication date: 20090916

Termination date: 20140412