CN100536179C - 单片式白光发射器件 - Google Patents

单片式白光发射器件 Download PDF

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CN100536179C
CN100536179C CNB200510054450XA CN200510054450A CN100536179C CN 100536179 C CN100536179 C CN 100536179C CN B200510054450X A CNB200510054450X A CN B200510054450XA CN 200510054450 A CN200510054450 A CN 200510054450A CN 100536179 C CN100536179 C CN 100536179C
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white light
light emitting
emitting device
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CN1667850A (zh
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赵济熙
尹皙胡
李庭旭
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Samsung Electronics Co Ltd
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Samsung Electro Mechanics Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/08Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26Materials of the light emitting region
    • H01L33/30Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
    • H01L33/32Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
    • H01L33/325Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen characterised by the doping materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/04Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
    • H01L33/06Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier

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Abstract

本发明提供了一种单片式白光发射器件。该单片式白光发射器件中的有源层掺有形成次能带的硅或稀土金属。该单片式白光发射器件中包括的有源层数量为一或二个。当该白光发射器件中包括两个有源层时,在该两个有源层之间插入一覆层。根据这种白光发射结构,可以由半导体发射白光,因此就不需要磷光材料了。传统的白光发射器件需要磷光材料的帮助,与之相比,这种单片式白光发射器件可以低成本简单地制造且可应用到很宽范围的领域中。

Description

单片式白光发射器件
技术领域
本发明涉及一种白光发射器件,尤其涉及一种能够自发发射白光的单片式白光发射器件。
背景技术
一般地,白光发射器件利用半导体发光和磷光材料(phosphor)发光产生白光(参见美国专利No.6069440和5998925)。这些发光器件使用磷光材料吸收半导体发射的光,从而发射出接近白色的光。半导体通常发蓝光,磷光材料吸收半导体所发的蓝光以产生绿/红光。因此,该磷光材料是绿色和红色荧光材料(fluorescent material)的混合物。
根据具有此类结构的混合式白光发射器件,不容易实现根据现有半导体制造工艺制造的集成电路。从而限制了这种混合式白光发射器件的应用领域。
T.Mukai曾提出一种没有磷光材料,使用多能带发射(multi-bandemission)的白光发射器件(LED)(参见JJAP 41(3A)L2462002)。因此,Mukai的LED具有多个有源层,以产生不同波长的光。
这种LED通常用于背光装置中,需要容易地制造且有着高的发光效率和白度(whiteness)。
发明内容
本发明提供了一种具有能容易制造的简单结构的单片式白光发射器件。
根据本发明的一方面,提供了一种白光发射器件,其包括n型氮化物半导体层、p型氮化物半导体层和具有量子阱结构的有源层,该有源层置于n型和p型氮化物半导体层之间。有源层中同时发生基于量子能级的光发射和由掺杂原子形成的基于掺杂能级的光发射。
根据本发明的另一方面,提供了一种白光发射器件,其包括n型氮化物半导体层、p型氮化物半导体层、置于该n型和p型氮化物半导体层之间、均具有量子阱结构的第一和第二有源层、以及设于该第一和第二有源层之间的氮化物覆层(cladding layer)。第一有源层中发生由掺杂原子形成的基于掺杂能级的光发射,而第二有源层中发生基于量子能级的光发射。
该n型和p型氮化物半导体层可以是GaN。该第一和第二有源层的每一层可以包括GaN势垒层和InGaN量子阱层(well layer)。量子阱层可以掺有掺杂原子。该掺杂原子可以是硅或稀土金属。
该n型半导体层可以是掺Si的GaN,该p型半导体层可以是掺Mg的GaN。
附图说明
参考附图详细描述本发明的示范性实施例后,本发明的上述和其他特征和优点将会变得更加明白,在附图中:
图1是依据本发明第一实施例的发光器件的垂直结构的示意性截面图;
图2是解释图1的发光器件的发光机理的能量分布图;
图3是依据本发明第二实施例的发光器件的垂直结构的示意性截面图;
图4是解释图3的发光器件的发光机理的能量分布图;
图5是给出依据本发明的发光器件的测量得到的电致发光(EL)光谱和测量得到的光致发光(PL)光谱的曲线图;
图6是示出由图5获得的样品A、B和C获得的光的色坐标的CIE(相干红外能量)图。
具体实施方式
现在将参考附图详细描述依据本发明的一种单片式白光发射器件,附图中示出了示范性实施例。
图1是依据本发明第一实施例的发光器件的垂直结构的示意性截面图。图2是解释图1的发光器件的发光机理的能量分布图。
参考图1,首先,在绝缘衬底1上形成掺有Si的n型覆层(n-GaN)2作为n型半导体层,衬底1,例如由蓝宝石形成。多量子阱(MQW)有源层3形成在该n型覆层2上,该有源层3是本发明的一个特征。在MQW有源层3上形成掺有Mg的p型覆层(p-GaN)4作为p型半导体层。该MQW有源层3中的势垒层由GaN形成,其中的阱层包括AlGaN。这些层堆叠,例如,约5个周期以形成MQW有源层3。
根据本发明的一方面,该MQW有源层3掺有硅或者稀土金属作为杂质。此时,杂质可以掺入阱层或势垒层,优选为阱层。杂质在整个或部分MQW有源层3中掺杂。因此,如图1和2所示,在该MQW有源层3中同时发生基于量子能级的带间发射(band-to-band emission)和由掺杂原子形成的基于掺杂能级的次能带发射,从而能够获得白光。根据本发明的这种白光发射不是通过天然缺陷,而是通过因硅或稀土金属离子(RE离子)的注入引起的杂质缺陷实现的。对于430到480nm的中心波长可以使用Tm作为稀土金属。对于520到570nm的中心波长可以使用Er、Ho、Tb等作为稀土金属。对于430到480nm的中心波长可以使用Tm作为稀土金属。对于540到590nm的中心波长可以使用Si作为稀土金属。对于430到480nm的中心波长可以使用Tm作为稀土金属。对于580到630nm的中心波长可以使用Eu、Sm、Pr等作为稀土金属。
图3是依据本发明第二实施例的发光器件的垂直结构的示意性截面图。图4是解释图3的发光器件的发光机理的能量分布图。
与第一实施例不同的是,根据第二实施例的发光器件的MQW有源层3具有第一和第二有源层3a和3b,其由覆层3c相互隔开。
参考图3,首先,在绝缘衬底1上形成掺有Si的n型覆层(n-GaN)2作为n型半导体层,衬底1例如由蓝宝石形成。在该n覆层2上形成第一和第二有源层3a和3b,每一有源层都具有MQW结构且其间具有覆层(GaN)3c,有源层是本发明的特征。在MQW有源层3上形成掺有Mg的p型覆层(p-GaN)4作为p型半导体层。该MQW有源层3中的势垒层由GaN形成,其中的阱层包括AlGaN。这些层堆叠,例如,约5个周期以形成MQW有源层3。
根据本发明的一方面,第一和第二有源层3a和3b中之一掺有杂质而另一个具有未掺杂质的常规MQW结构。在第二实施例中,第一有源层3a掺有稀土金属作为杂质,而第二有源层3b未掺杂质,也就是说,具有常规的MQW结构。此时,杂质可以掺在第一有源层3a的阱层或势垒层中,优选为阱层中。更具体地讲,在整个或部分的第一有源层3a中掺入杂质。
第二有源层3b具有常规MQW结构。
因此,如图3和4所示,在具有MQW结构的第二有源层3b中发生基于量子能级的带间发射,而在掺杂有硅或稀土金属离子的第一有源层3a中发生由掺杂离子形成的基于掺杂能级的次能带发射。
图5是给出依据本发明的发光器件的测量得到的电致发光(EL)光谱和测量得到的光致发光(PL)光谱的曲线图。图5示出了三个样品A、B和C中的EL光谱和样品B中的PL光谱,在这三个样品A、B和C中,分别使用0.35sccm、0.3sccm和0.25sccm的硅烷气体在775℃的温度下对MQW有源层的GaN势垒层掺Si。该MQW有源层通过堆叠5个周期的GaN/AlGaN形成。该EL和PL光谱是在以20mA电流驱动该MQW有源层时测量的。
从图5可知,黄光(YL)随有源层掺杂浓度的变化而变化。通过比较EL和PL波长可知,黄光发射(YE)的起源不是来自封装(package)而是来自半导体自身。
图6为示出图5所获样品A、B和C的YE变化的色坐标图。参考图6,YE的量按照样品C、B、然后A的顺序增大。另外可以从图6知道,有可能在YE的中心(0.45,0.55)和能带发射(band emission,BE)的中心(0.17,0.02)的连线(L)上改变颜色。CIE图包括形成该CIE图的轮廓的光谱轨迹(S)和存在于该CIE图中的普朗克轨迹(plankian locus)(P)。考虑到具有在普朗克轨迹(P)上的坐标值的光被认为是白色的,可以通过控制有源层所含硅或稀土金属离子的浓度改变发光的色坐标。在图6中,样品A的坐标代表具有4400K色温(CCT)的白光。因此,样品A自身就是白光发射器件,能够用于实际的背光装置中。
本发明提出了一种白光发射器件的结构,通过在氮化物半导体有源层中引入因杂质引起的次能带发射,该结构可以被用作白光光源。在该白光发射器件中,构成有源层的阱层和势垒层中的任何一种被掺入掺杂剂,例如,Si或者稀土金属。
如上所述,本发明提供了一种在半导体层中发生白光发射的单片式白光发射器件。这种单片式白光发射器件不需要常规白光发射器件所需的磷光材料的任何帮助即可发出白光,因此这种单片式白光发射器件的制造变得更加容易。特别地,由于这种单片式白光发射器件具有单片式结构,其可应用于很宽范围的领域中且其制造成本低廉。
尽管已经参考其示范性实施例对本发明进行了特定的展示和描述,本领域的技术人员可以理解的是,在不背离权利要求所界定的本发明的精神和范围的前提下可以在其中做出多种形式和细节上的变化。

Claims (6)

1.一种白光发射器件,其包括:
n型氮化物半导体层;
p型氮化物半导体层;
均具有量子阱结构的第一和第二有源层,其置于所述n型和p型氮化物半导体层之间;以及
设于所述第一和第二有源层之间的氮化物覆层,
其中在所述第一有源层中发生由掺杂原子形成的基于掺杂能级的光发射,且在所述第二有源层中发生基于量子能级的光发射。
2.如权利要求1所述的白光发射器件,其中所述n型和p型氮化物半导体层为GaN。
3.如权利要求1所述的白光发射器件,其中所述第一和第二有源层中的每一个包括GaN势垒层和InGaN阱层。
4.如权利要求3所述的白光发射器件,其中所述阱层包括所述掺杂原子。
5.如权利要求4所述的白光发射器件,其中所述掺杂原子为硅和稀土金属之一。
6.如权利要求1所述的白光发射器件,其中所述n型半导体层为掺Si的GaN,且所述p型半导体层为掺Mg的GaN。
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