CN100516540C - 涡轮分子泵的轴封防尘结构 - Google Patents

涡轮分子泵的轴封防尘结构 Download PDF

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Publication number
CN100516540C
CN100516540C CNB2005800361210A CN200580036121A CN100516540C CN 100516540 C CN100516540 C CN 100516540C CN B2005800361210 A CNB2005800361210 A CN B2005800361210A CN 200580036121 A CN200580036121 A CN 200580036121A CN 100516540 C CN100516540 C CN 100516540C
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CN
China
Prior art keywords
purge gas
shaft seal
dust
proof structure
motor case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CNB2005800361210A
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English (en)
Chinese (zh)
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CN101044323A (zh
Inventor
大林哲郎
井口昌司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Vacuum Ltd
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Osaka Vacuum Ltd
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Filing date
Publication date
Application filed by Osaka Vacuum Ltd filed Critical Osaka Vacuum Ltd
Publication of CN101044323A publication Critical patent/CN101044323A/zh
Application granted granted Critical
Publication of CN100516540C publication Critical patent/CN100516540C/zh
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F04D29/104—Shaft sealings especially adapted for elastic fluid pumps the sealing fluid being other than the working fluid or being the working fluid treated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
CNB2005800361210A 2004-11-10 2005-10-20 涡轮分子泵的轴封防尘结构 Active CN100516540C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004326453A JP4679119B2 (ja) 2004-11-10 2004-11-10 ターボ分子ポンプの軸封防塵構造
JP326453/2004 2004-11-10

Publications (2)

Publication Number Publication Date
CN101044323A CN101044323A (zh) 2007-09-26
CN100516540C true CN100516540C (zh) 2009-07-22

Family

ID=36336358

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2005800361210A Active CN100516540C (zh) 2004-11-10 2005-10-20 涡轮分子泵的轴封防尘结构

Country Status (3)

Country Link
JP (1) JP4679119B2 (ja)
CN (1) CN100516540C (ja)
WO (1) WO2006051675A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5141065B2 (ja) * 2007-03-26 2013-02-13 株式会社島津製作所 ターボ分子ポンプ
GB2475254B (en) 2009-11-11 2016-02-10 Edwards Ltd Vacuum pump
JP6079052B2 (ja) 2012-08-24 2017-02-15 株式会社島津製作所 真空ポンプ
KR101391408B1 (ko) 2013-02-20 2014-05-07 주식회사 청석 모터 방수수단을 구비한 펌프
CN110821875A (zh) * 2019-11-28 2020-02-21 周东良 一种工业环保用离心式除尘排风机
CN115596699B (zh) * 2022-10-18 2023-08-22 北京中科科仪股份有限公司 脂润滑分子泵轴承保护结构、其制造方法及脂润滑分子泵

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2611819B1 (fr) * 1987-02-25 1989-05-05 Cit Alcatel Pompe a vide, rotative
JPH086708B2 (ja) * 1988-03-18 1996-01-29 株式会社日立製作所 真空ポンプ
JP2590957Y2 (ja) * 1993-09-16 1999-02-24 株式会社大阪真空機器製作所 真空ポンプにおける防塵機構
JP4691242B2 (ja) * 2000-11-08 2011-06-01 株式会社大阪真空機器製作所 ターボ分子ポンプのシール構造

Also Published As

Publication number Publication date
JP2006138216A (ja) 2006-06-01
WO2006051675A1 (ja) 2006-05-18
JP4679119B2 (ja) 2011-04-27
CN101044323A (zh) 2007-09-26

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