CN100516540C - Shaft seal dust-proof structure of turbo molecular pump - Google Patents
Shaft seal dust-proof structure of turbo molecular pump Download PDFInfo
- Publication number
- CN100516540C CN100516540C CNB2005800361210A CN200580036121A CN100516540C CN 100516540 C CN100516540 C CN 100516540C CN B2005800361210 A CNB2005800361210 A CN B2005800361210A CN 200580036121 A CN200580036121 A CN 200580036121A CN 100516540 C CN100516540 C CN 100516540C
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- China
- Prior art keywords
- purge gas
- shaft seal
- dust
- proof structure
- motor case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/10—Shaft sealings
- F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
- F04D29/104—Shaft sealings especially adapted for elastic fluid pumps the sealing fluid being other than the working fluid or being the working fluid treated
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
The invention provides a shaft seal dustproof structure for a shaft seal dustproof structure, by which a the corrosive gases and corpuscles can be prevented form intruding into a motor casing of a turbo-molecular pump for vacuously exhausting the corrosive gases and the gases with dust and other corpuscles. Namely, shaft seal sections, consisting of a clearance seal section 3a at the external circumference of a jut 1b at the center of a disc 1a of a rotor 1 and a centrifuge blade dustproof section 3b with a centrifuge blade 1c on the surface of the disc 1a, are respectively arranged in the turbo-molecular pump of the motor casing 5, which has a sweeping gas supply port 5a and in a sweeping gas path, which goes from the motor casing 5 to a pump chamber 8.
Description
Technical field
The present invention relates to the turbomolecular pump of the gas vacuum exhaust that is particularly suitable for corrosive gas, contains dust.
Background technique
Turbomolecular pump is the ultrahigh vacuum pump that is used to carry out the vacuum exhaust of semiconductor-fabricating device etc.
Figure 5 shows that the profile diagram of an example of existing turbomolecular pump.
Among Fig. 5, a is an intakeport, and b is a relief opening, and in addition, c is rotor (rotor).
At the peripheral part of this rotor c, be to give prominence to radial and multistagely and be provided with a plurality of moving vanes.
Described rotor c is inlayed is fixed in running shaft d, and this running shaft d is supported in motor case (housing) g by ball bearing (ball bearing) f etc. that drives with motor (motor) e, lubricant oil (grease) lubricated type.
In order to prevent that having corrosive exhaust invades in the described motor case g, when the peripheral part of described running shaft d is provided with dynamic pressure spiral seal (seal) i, purge gas (purge gas) supplying mouth (port) is set in described motor case g, makes clean gas purging gas from motor case g side direction pump chamber k side flow.
In addition, the sealing configuration of turbomolecular pump also has following example, is adjacent to dynamic pressure spiral seal portion, and establishes fixed interval (FI) sealing (clearance seal) portion (for example, referring to Patent Document 1).
Patent documentation 1: the spy of Japan opens the 2004-162533 communique
Though described spiral seal, clearance seal are effective to the intrusion that prevents corrosive gas, and the intrusion that prevents coccoid etc. is less produced effect.
This is slack-off because locate the flow velocity of purge gas in spiral seal portion etc., and institute is so that be used to prevent that the resistance of fine particle intrusion is not enough.
Summary of the invention
The object of the present invention is to provide a kind of shaft seal dust-proof structure of turbomolecular pump, can address the above problem, prevent corrosive gas, prevent the intrusion of dust etc. simultaneously the intrusion in the motor case.
In order to achieve the above object, in this turbomolecular pump, motor case has and is used to prevent that exhaust from invading the purge gas supplying mouth in the described motor case, lead to the purge gas path of pump chamber from described motor case, be provided with the axle envelope portion that forms by clearance seal portion and the dustproof portion of centrifugal blade.The peripheral part that described clearance seal portion is formed at the outstanding jut of the central part of rotor discs rotates between the interior perimembranous of inserting the guiding trestle that leads to freely with this jut.
The dustproof portion of described centrifugal blade is disposed at the upstream side of described clearance seal portion, and is made up of the blade of the centrifugal impeller of the underpart that is arranged on described jut and the following plectane that is arranged on described centrifugal impeller; Perhaps,
The described centrifugal blade portion of preventing dust is by the centrifugal blade that is provided with on the disc face of described rotor and facial formation the in upper end of described guiding trestle.Beneficial effect of the present invention is: utilize the present invention, when preventing the corrosivity exhaust to the intrusion in the turbomolecular pump motor case, can prevent that fine particle such as dust from invading in the motor case, therefore have the bonding effect of burn into that can prevent motor case inside.
Description of drawings
Figure 1 shows that the profile diagram of structure of the major component of the embodiment of the invention 1;
Figure 2 shows that the A-A line truncation surface figure of described Fig. 1;
Figure 3 shows that the profile diagram of structure of the major component of the embodiment of the invention 2;
Figure 4 shows that the planimetric map of the centrifugal impeller among the described embodiment 2;
Figure 5 shows that the profile diagram of an example of existing turbomolecular pump.
The explanation of symbol
1,1 ' rotor 1c centrifugal blade (linear blade)
3a, the 9a clearance seal 3b of portion, the dustproof portion of 10b centrifugal blade
5 motor case 6a purge gas bypass passageways
8 pump chambers, 10 centrifugal impellers
10d hangs down denseness lubricant oil
Embodiment
Below explanation preferred embodiment of the present invention.
[embodiment 1]
Fig. 1 is this envelope portion profile diagram of the embodiment 1 of the present invention with shaft seal dust-proof structure turbomolecular pump.
That is, 1 expression rotor, this rotor 1 are tangled is fixed in the running shaft 2 of inserting logical its central part.
And the peripheral part of described rotor 1 as shown in Figure 2, has and is radial and multistage outstanding a plurality of moving vane 1d.In addition, Figure 2 shows that the A-A line truncation surface figure of Fig. 1.
Central part at disk (disc) 1a of described rotor 1, axially outstanding jut (boss) 1b forms with described running shaft 2 concentric, the peripheral part of this jut 1b, and this jut 1b rotates the 3a of clearance seal portion that formation has slight gap between the interior perimembranous of inserting logical guiding trestle (guide bracket) 3 freely.
Described running shaft 2 is supported by motor case 5 by ball bearing 4, flange (flange) 6 of oil lubrication formula.
And described guiding trestle 3 is fixed in described motor case 5 by flange 6.
In addition, 7 are the driving motor.
Purge gas bypass (bypass) passage 6a inserts logical described flange 6 and opening, and purge gas is emitted towards the described clearance seal 3a of portion from this purge gas bypass passageways 6a.
That is, this purge gas bypass passageways 6a makes, the purge gas that the purge gas supplying mouth 5a in described motor case 5 emits, and process flows to the described clearance seal 3a of portion with the purge gas bypass passageways 6a that ball bearing 4 be arranged in parallel.
On the face of the inboard of the disk 1a of described rotor 1, as shown in Figure 2, be a plurality of linear blade 1c of radial configuration and form the centrifugal blade shape, with the facial dustproof 3b of portion of centrifugal blade that forms in the upper end of this linear blade 1c and guiding trestle 3.
The suction side of the dustproof 3b of portion of this centrifugal blade is communicated with the outlet side of the described clearance seal 3a of portion.
That is, in the present embodiment 1, the dustproof 3b of portion of centrifugal blade is disposed at the rear flow side of the 3a of clearance seal portion.
Action and effect thereof to the shaft seal dust-proof structure of present embodiment 1 describes below.
This molecular pump is used for corrosive gas, the gas that contains dust are carried out vacuum exhaust.
That is, in molecular pump when running,, the path of the flow of sweep gas of emitting from purge gas supplying mouth 5a is: by purge gas bypass passageways 6a and the 3a of clearance seal portion, then by the dustproof 3b of portion of centrifugal blade, arrive pump chamber 8.
Therebetween, the exhaust of invading from pump chamber 8 is prevented from invading at the described clearance seal 3a of portion, and the fine particles such as dust of sneaking in described exhaust are flown by the centrifugal force bullet in the dustproof 3b of portion of described centrifugal blade, so these dust, exhaust can not invade the inboard of the described clearance seal 3a of portion.
So, stoped the intrusion to ball bearing 4 etc. such as harmful exhaust, dust, so the turbomolecular pump life-span of present embodiment is long, the running of can working for a long time.
In addition, most of purge gas of supplying with in the motor case 5 does not flow through ball bearing 4, but flow through described purge gas bypass passageways 6a, so can reduce the evaporation of the base oil of the bearing oil that remains on ball bearing 4, therefore can realize the more long lifetime of described ball bearing 4.
[embodiment 2]
Fig. 3 is this envelope portion profile diagram of the embodiment 2 of the present invention with shaft seal dust-proof structure turbomolecular pump.
In the present embodiment 2, this point of upstream side that the dustproof portion of centrifugal blade is disposed at clearance seal portion is different with described embodiment 1.
That is, among Fig. 3, rotor 1 ' the central part of disk 1a ' have axially outstanding jut 1b ', the peripheral part of this jut 1b ', and the formation clearance seal 9a of portion between the interior perimembranous of logical guiding trestle 9 is inserted in this jut 1b ' rotations freely.
And the underpart of described jut 1b ' has the centrifugal impeller 10 with described rotor 1 ' coaxial setting, by the blade 10a of this centrifugal impeller 10, forms the dustproof 10b of portion of centrifugal blade with the following plectane 11 that is arranged on this centrifugal impeller 10.
And, being formed with the 10c of annulus portion at the outer circumferential side of described centrifugal impeller 10, the wall of the 10c of this annulus portion has been coated with low denseness lubricant oil 10d.
Here, denseness is meant the index of the softness of lubricant oil, in the present embodiment, and the hard lubricant oil of application consistency below 200.
In addition, the described annulus 10c of portion is communicated to the described clearance seal 9a of portion.
In addition, described guiding trestle 9 is fixed in motor case 5 by described plectane 11 and flange 6, and purge gas bypass passageways 6a inserts and leads in this flange 6 and opening.
Action to the shaft seal dust-proof structure of present embodiment 2 describes below.
During the molecular pump running, the path of the flow of sweep gas of emitting from purge gas supplying mouth 5a is: the gap between the peripheral part of the jut 10e by purge gas bypass passageways 6a and centrifugal impeller 10 and the interior perimembranous of plectane 11 arrives pump chamber 8 through dustproof 10b of portion of centrifugal blade and the 9a of clearance seal portion.
Therebetween, the exhaust of invading from pump chamber 8 is prevented from invading at the described clearance seal 9a of portion, and, arrive dust of the described clearance seal 9a of portion etc. with described exhaust etc., broken through the 9a of clearance seal portion even defeat described purge gas, also can be positioned at the dustproof 10b of portion of its preceding centrifugal blade and stop, cause adverse effect can not for ball bearing 4 grades of inner oil lubrication formula.
That is, the dust that is flown by centrifugal impeller 10 bullets of the dustproof 10b of portion of centrifugal blade etc. are caught owing to be coated on the low denseness lubricant oil 10d of the wall of the 10c of annulus portion, so the centrifugal impeller side that can not fly back.
And vibration waits increase in the turbomolecular pump in the stopping of turbomolecular pump, and the coccoid that the periphery of the dustproof 10b of portion of centrifugal blade is detained etc. swims, and invades the danger of the inside of motor case 5, is also defendd by being coated with described low denseness lubricant oil 10d.
In addition, the mobile low lubricant oil of low denseness is coated the wall of the 10c of annulus portion, so lubricant oil itself can not invaded in the motor case 5.
The present invention is used in particular for corrosive gas, contains the vacuum pumping hardware of atomic gases such as dust.
The above is preferred embodiment of the present invention only, is not to be used to limit the present invention, and is within the spirit and principles in the present invention all, any modification of being done, is equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (5)
1, a kind of shaft seal dust-proof structure of turbomolecular pump, in this turbomolecular pump, motor case has and is used to prevent that exhaust from invading the purge gas supplying mouth in the described motor case, described shaft seal dust-proof structure is characterised in that, lead to the purge gas path of pump chamber from described motor case, be provided with the axle envelope portion that forms by clearance seal portion and the dustproof portion of centrifugal blade
The peripheral part that described clearance seal portion is formed at the outstanding jut of the central part of rotor discs rotates between the interior perimembranous of inserting the guiding trestle that leads to freely with this jut, the dustproof portion of described centrifugal blade is disposed at the upstream side of described clearance seal portion, and is made up of the blade of the centrifugal impeller of the underpart that is arranged on described jut and the following plectane that is arranged on described centrifugal impeller.
2, the shaft seal dust-proof structure of turbomolecular pump according to claim 1 wherein, has been coated with on the wall of the annulus portion that the outer circumferential side of described centrifugal impeller forms and has been used to catch the lubricant oil of atomic denseness below 200.
3, the shaft seal dust-proof structure of turbomolecular pump according to claim 1 wherein, in the described purge gas path, is provided with the parallel purge gas bypass passageways with ball bearing formula bearing portion.
4, a kind of shaft seal dust-proof structure of turbomolecular pump, in this turbomolecular pump, motor case has and is used to prevent that exhaust from invading the purge gas supplying mouth in the described motor case, described shaft seal dust-proof structure is characterised in that, lead to the purge gas path of pump chamber from described motor case, be provided with the axle envelope portion that forms by clearance seal portion and the dustproof portion of centrifugal blade
The peripheral part that described clearance seal portion is formed at the outstanding jut of the central part of rotor discs rotates between the interior perimembranous of inserting the guiding trestle that leads to freely with this jut, the described centrifugal blade portion of preventing dust is by the centrifugal blade that is provided with on the disc face of described rotor and facial formation the in upper end of described guiding trestle.
5, the shaft seal dust-proof structure of turbomolecular pump according to claim 4 wherein, in the described purge gas path, is provided with the parallel purge gas bypass passageways with ball bearing formula bearing portion.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004326453A JP4679119B2 (en) | 2004-11-10 | 2004-11-10 | Shaft sealed dust-proof structure of turbo molecular pump |
| JP326453/2004 | 2004-11-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101044323A CN101044323A (en) | 2007-09-26 |
| CN100516540C true CN100516540C (en) | 2009-07-22 |
Family
ID=36336358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005800361210A Active CN100516540C (en) | 2004-11-10 | 2005-10-20 | Shaft seal dust-proof structure of turbo molecular pump |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4679119B2 (en) |
| CN (1) | CN100516540C (en) |
| WO (1) | WO2006051675A1 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5141065B2 (en) * | 2007-03-26 | 2013-02-13 | 株式会社島津製作所 | Turbo molecular pump |
| GB2475254B (en) | 2009-11-11 | 2016-02-10 | Edwards Ltd | Vacuum pump |
| JP6079052B2 (en) | 2012-08-24 | 2017-02-15 | 株式会社島津製作所 | Vacuum pump |
| KR101391408B1 (en) | 2013-02-20 | 2014-05-07 | 주식회사 청석 | Pump equipped with airtight impeller |
| CN110821875A (en) * | 2019-11-28 | 2020-02-21 | 周东良 | Centrifugal dust removal exhaust fan for industrial environmental protection |
| CN115596699B (en) * | 2022-10-18 | 2023-08-22 | 北京中科科仪股份有限公司 | Bearing protection structure of grease lubrication molecular pump, manufacturing method thereof and grease lubrication molecular pump |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2611819B1 (en) * | 1987-02-25 | 1989-05-05 | Cit Alcatel | VACUUM PUMP, ROTARY |
| JPH086708B2 (en) * | 1988-03-18 | 1996-01-29 | 株式会社日立製作所 | Vacuum pump |
| JP2590957Y2 (en) * | 1993-09-16 | 1999-02-24 | 株式会社大阪真空機器製作所 | Dustproof mechanism in vacuum pump |
| JP4691242B2 (en) * | 2000-11-08 | 2011-06-01 | 株式会社大阪真空機器製作所 | Turbo molecular pump seal structure |
-
2004
- 2004-11-10 JP JP2004326453A patent/JP4679119B2/en active Active
-
2005
- 2005-10-20 CN CNB2005800361210A patent/CN100516540C/en active Active
- 2005-10-20 WO PCT/JP2005/019276 patent/WO2006051675A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006138216A (en) | 2006-06-01 |
| WO2006051675A1 (en) | 2006-05-18 |
| JP4679119B2 (en) | 2011-04-27 |
| CN101044323A (en) | 2007-09-26 |
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