CN100487444C - 平板式氧传感器芯片的制造方法 - Google Patents
平板式氧传感器芯片的制造方法 Download PDFInfo
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- CN100487444C CN100487444C CNB2007100519460A CN200710051946A CN100487444C CN 100487444 C CN100487444 C CN 100487444C CN B2007100519460 A CNB2007100519460 A CN B2007100519460A CN 200710051946 A CN200710051946 A CN 200710051946A CN 100487444 C CN100487444 C CN 100487444C
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- base sheet
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- sensor chip
- ceramic powder
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- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 37
- 239000001301 oxygen Substances 0.000 title claims abstract description 37
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 36
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 238000010438 heat treatment Methods 0.000 claims abstract description 57
- 238000000034 method Methods 0.000 claims abstract description 27
- 239000000843 powder Substances 0.000 claims abstract description 20
- 239000000919 ceramic Substances 0.000 claims abstract description 17
- 230000008569 process Effects 0.000 claims abstract description 9
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 9
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims abstract description 9
- 238000005245 sintering Methods 0.000 claims description 21
- 239000002002 slurry Substances 0.000 claims description 21
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 19
- 238000005266 casting Methods 0.000 claims description 16
- 238000009413 insulation Methods 0.000 claims description 9
- 238000003475 lamination Methods 0.000 claims description 9
- 239000003795 chemical substances by application Substances 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 238000000498 ball milling Methods 0.000 claims description 7
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 6
- 238000007731 hot pressing Methods 0.000 claims description 6
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 6
- 238000003892 spreading Methods 0.000 claims description 6
- 230000007480 spreading Effects 0.000 claims description 6
- 238000007766 curtain coating Methods 0.000 claims description 5
- 238000010030 laminating Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 238000002360 preparation method Methods 0.000 claims description 5
- 239000007767 bonding agent Substances 0.000 claims description 4
- 239000000314 lubricant Substances 0.000 claims description 4
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid group Chemical group C(C=1C(C(=O)O)=CC=CC1)(=O)O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000004014 plasticizer Substances 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 4
- 235000019325 ethyl cellulose Nutrition 0.000 claims description 3
- 229920001249 ethyl cellulose Polymers 0.000 claims description 3
- 239000003960 organic solvent Substances 0.000 claims description 3
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 claims description 3
- 239000001856 Ethyl cellulose Substances 0.000 claims description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 claims description 2
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical group OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 2
- 235000021323 fish oil Nutrition 0.000 claims description 2
- 229920000151 polyglycol Polymers 0.000 claims description 2
- 239000010695 polyglycol Substances 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 abstract description 10
- 238000007639 printing Methods 0.000 abstract description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 42
- 239000000543 intermediate Substances 0.000 description 28
- 229910052697 platinum Inorganic materials 0.000 description 21
- 238000012360 testing method Methods 0.000 description 13
- 239000007789 gas Substances 0.000 description 12
- 239000000446 fuel Substances 0.000 description 5
- 238000000465 moulding Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 239000000047 product Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 238000011056 performance test Methods 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 206010013786 Dry skin Diseases 0.000 description 1
- 240000004859 Gamochaeta purpurea Species 0.000 description 1
- 206010058490 Hyperoxia Diseases 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- ISSXKNWTCLRPJY-UHFFFAOYSA-N O.O.[O-2].[Zr+4].[O-2] Chemical compound O.O.[O-2].[Zr+4].[O-2] ISSXKNWTCLRPJY-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000000222 hyperoxic effect Effects 0.000 description 1
- 208000018875 hypoxemia Diseases 0.000 description 1
- 238000009863 impact test Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000010416 ion conductor Substances 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
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- Measuring Oxygen Concentration In Cells (AREA)
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Priority Applications (1)
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CNB2007100519460A CN100487444C (zh) | 2007-04-24 | 2007-04-24 | 平板式氧传感器芯片的制造方法 |
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CNB2007100519460A CN100487444C (zh) | 2007-04-24 | 2007-04-24 | 平板式氧传感器芯片的制造方法 |
Publications (2)
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CN101042366A CN101042366A (zh) | 2007-09-26 |
CN100487444C true CN100487444C (zh) | 2009-05-13 |
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CNB2007100519460A Expired - Fee Related CN100487444C (zh) | 2007-04-24 | 2007-04-24 | 平板式氧传感器芯片的制造方法 |
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Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007050806A1 (de) * | 2007-10-24 | 2009-04-30 | Robert Bosch Gmbh | Verfahren zur Umkontaktierung in keramischen Bauelementen |
JP4788707B2 (ja) * | 2007-11-27 | 2011-10-05 | トヨタ自動車株式会社 | 空燃比センサ及び内燃機関の制御装置 |
CN101315824B (zh) * | 2008-06-30 | 2011-01-12 | 广东风华高新科技股份有限公司 | 一种陶瓷基片电阻板的制备方法及所得的电阻板 |
CN102235994B (zh) * | 2010-04-23 | 2014-12-10 | 比亚迪股份有限公司 | 一种片式氧传感器及其制备方法 |
CN102297880A (zh) * | 2010-06-28 | 2011-12-28 | 先达汽车产品股份有限公司 | 生产加热式氧传感器的装置和方法 |
CN102346166B (zh) * | 2010-07-28 | 2013-08-21 | 比亚迪股份有限公司 | 一种片式氧传感器 |
CN102157346B (zh) * | 2010-12-29 | 2013-11-06 | 常州星海电子有限公司 | 芯片脱膜的方法 |
CN102140953B (zh) * | 2010-12-30 | 2012-07-11 | 西藏瑞阳科技发展有限公司 | 氧传感器芯片的制造方法 |
CN102608182A (zh) * | 2012-02-20 | 2012-07-25 | 曾咏平 | 一种氧传感器片芯及其制造方法 |
CN102608193B (zh) * | 2012-04-10 | 2013-09-25 | 无锡隆盛科技股份有限公司 | 一种平板式氧传感器及其制备方法 |
CN103776871B (zh) * | 2014-01-15 | 2016-06-29 | 深圳市普利斯通传感科技有限公司 | 一种基于氧化物流延浆料的车用氧传感器及其制造方法 |
CN103776888B (zh) * | 2014-01-15 | 2016-08-17 | 深圳市普利斯通传感科技有限公司 | 一种基于氧化物绝缘浆料的车用氧传感器及其制造方法 |
CN103913485B (zh) * | 2014-04-17 | 2017-03-08 | 常州联德电子有限公司 | 一种车用氧传感器模块化总成和封装方法 |
CN104165905A (zh) * | 2014-08-25 | 2014-11-26 | 深圳市宏业翔科技有限公司 | 一种氧传感器芯片及其制备方法 |
CN104251876A (zh) * | 2014-09-18 | 2014-12-31 | 莱鼎电子材料科技有限公司 | 一种新型片式氧传感器及其制备方法与检测方法 |
CN104407035A (zh) * | 2014-11-14 | 2015-03-11 | 无锡信大气象传感网科技有限公司 | 一种气体传感器芯片 |
CN104597087A (zh) * | 2014-11-14 | 2015-05-06 | 无锡信大气象传感网科技有限公司 | 一种气体传感器芯片的制造方法 |
CN104407034A (zh) * | 2014-11-14 | 2015-03-11 | 无锡信大气象传感网科技有限公司 | 一种气体传感器芯片 |
CN104931559B (zh) * | 2015-07-01 | 2017-12-26 | 武汉科技大学 | 一种氮氧化物传感器芯片及其制备方法 |
CN105717185B (zh) * | 2016-03-11 | 2018-01-16 | 武汉锆元传感技术有限公司 | 一种片式氧传感器芯片的制造方法 |
CN111855746A (zh) * | 2020-07-27 | 2020-10-30 | 江苏联电电子科技有限公司 | 一种用于氧传感器芯片的带过渡层绝缘层及其制备方法 |
CN112730739A (zh) * | 2020-12-11 | 2021-04-30 | 凯晟动力技术(嘉兴)有限公司 | 一种片式带空气道氧传感器负电压消除方法 |
-
2007
- 2007-04-24 CN CNB2007100519460A patent/CN100487444C/zh not_active Expired - Fee Related
Non-Patent Citations (6)
Title |
---|
平板式二氧化锆氧传感器的研究进展. 罗志安,肖建中,夏风,梁建超,刘石明.传感器技术,第23卷第8期. 2004 |
平板式二氧化锆氧传感器的研究进展. 罗志安,肖建中,夏风,梁建超,刘石明.传感器技术,第23卷第8期. 2004 * |
流延法制备陶瓷燃料电池电解质膜的研究进展. 贺连星,温廷琏,吕之奕.材料科学与工程,第15卷第3期. 1997 |
流延法制备陶瓷燃料电池电解质膜的研究进展. 贺连星,温廷琏,吕之奕.材料科学与工程,第15卷第3期. 1997 * |
流延法制备陶瓷薄片的研究进展. 李冬云,乔冠军,金志浩.硅酸盐通报,第2期. 2004 |
流延法制备陶瓷薄片的研究进展. 李冬云,乔冠军,金志浩.硅酸盐通报,第2期. 2004 * |
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Application publication date: 20070926 Assignee: Zhenjiang Nernst Automotive Technology Co., Ltd. Assignor: Xie Guangyuan Contract record no.: 2012320001000 Denomination of invention: Manufacturing method of plate type oxygen sensor chip Granted publication date: 20090513 License type: Exclusive License Record date: 20121109 |
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Application publication date: 20070926 Assignee: Zhejiang Fineworld Automobile Cpmponents Co., Ltd. Assignor: Xie Guangyuan Contract record no.: 2013320000057 Denomination of invention: Manufacturing method of plate type oxygen sensor chip Granted publication date: 20090513 License type: Exclusive License Record date: 20130305 |
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Effective date of registration: 20150615 Address after: 212009 Zhenjiang high tech Industrial Development Zone, Jiangsu, No. seven, No. 19 Patentee after: Zhenjiang Nernst Automotive Technology Co., Ltd. Address before: 430081 Department of metal materials, School of metallurgical engineering, Wuhan University of Science and Technology, 947 Heping Avenue, Qingshan District, Hubei, Wuhan Patentee before: Xie Guangyuan |
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