CN100470720C - 减压干燥处理装置 - Google Patents
减压干燥处理装置 Download PDFInfo
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- CN100470720C CN100470720C CNB200710002925XA CN200710002925A CN100470720C CN 100470720 C CN100470720 C CN 100470720C CN B200710002925X A CNB200710002925X A CN B200710002925XA CN 200710002925 A CN200710002925 A CN 200710002925A CN 100470720 C CN100470720 C CN 100470720C
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Abstract
Description
基板和顶板间的距离 | 表面异物 |
25mm | × |
15mm | △ |
12mm | ○ |
10mm | ○ |
Claims (4)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006023166 | 2006-01-31 | ||
JP2006023166 | 2006-01-31 | ||
JP2006325216 | 2006-12-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101013657A CN101013657A (zh) | 2007-08-08 |
CN100470720C true CN100470720C (zh) | 2009-03-18 |
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Application Number | Title | Priority Date | Filing Date |
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CNB200710002925XA Active CN100470720C (zh) | 2006-01-31 | 2007-01-26 | 减压干燥处理装置 |
Country Status (1)
Country | Link |
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CN (1) | CN100470720C (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5144299B2 (ja) * | 2008-02-12 | 2013-02-13 | 光洋サーモシステム株式会社 | 減圧乾燥装置 |
JP5579550B2 (ja) * | 2010-09-10 | 2014-08-27 | 株式会社スギノマシン | 減圧乾燥機 |
CN107062812B (zh) * | 2017-04-26 | 2019-09-03 | 京东方科技集团股份有限公司 | 一种减压干燥腔及真空减压干燥设备 |
CN107621125B (zh) * | 2017-09-04 | 2020-10-27 | 深圳市镭煜科技有限公司 | 一种立库式锂电池自动干燥控制系统 |
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2007
- 2007-01-26 CN CNB200710002925XA patent/CN100470720C/zh active Active
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Publication number | Publication date |
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CN101013657A (zh) | 2007-08-08 |
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Effective date of registration: 20230531 Address after: Ibaraki Patentee after: Ameco Technology Co.,Ltd. Address before: Kanagawa, Japan Patentee before: Process Equipment Business Division Preparation Co.,Ltd. Effective date of registration: 20230531 Address after: Kanagawa, Japan Patentee after: Process Equipment Business Division Preparation Co.,Ltd. Address before: Kanagawa Patentee before: TOKYO OHKA KOGYO Co.,Ltd. |