CN100469941C - 保护制品免受高温、氧化环境损害的方法和这种制品 - Google Patents

保护制品免受高温、氧化环境损害的方法和这种制品 Download PDF

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Publication number
CN100469941C
CN100469941C CNB031522211A CN03152221A CN100469941C CN 100469941 C CN100469941 C CN 100469941C CN B031522211 A CNB031522211 A CN B031522211A CN 03152221 A CN03152221 A CN 03152221A CN 100469941 C CN100469941 C CN 100469941C
Authority
CN
China
Prior art keywords
substrate
coating
protective coating
target
atomic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB031522211A
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English (en)
Chinese (zh)
Other versions
CN1500905A (zh
Inventor
D·M·利普金
J·-C·赵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=31186018&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CN100469941(C) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by General Electric Co filed Critical General Electric Co
Publication of CN1500905A publication Critical patent/CN1500905A/zh
Application granted granted Critical
Publication of CN100469941C publication Critical patent/CN100469941C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
CNB031522211A 2002-07-31 2003-07-31 保护制品免受高温、氧化环境损害的方法和这种制品 Expired - Fee Related CN100469941C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/064,618 US20040022662A1 (en) 2002-07-31 2002-07-31 Method for protecting articles, and related compositions
US10/064618 2002-07-31

Publications (2)

Publication Number Publication Date
CN1500905A CN1500905A (zh) 2004-06-02
CN100469941C true CN100469941C (zh) 2009-03-18

Family

ID=31186018

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB031522211A Expired - Fee Related CN100469941C (zh) 2002-07-31 2003-07-31 保护制品免受高温、氧化环境损害的方法和这种制品

Country Status (5)

Country Link
US (1) US20040022662A1 (https=)
EP (1) EP1391533B1 (https=)
JP (1) JP2004068156A (https=)
CN (1) CN100469941C (https=)
DE (1) DE60316234T2 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010047838A1 (en) * 2000-03-28 2001-12-06 Segal Vladimir M. Methods of forming aluminum-comprising physical vapor deposition targets; sputtered films; and target constructions
US20040256218A1 (en) * 2002-05-31 2004-12-23 Glass Howard L. Thin films and methods of forming thin films utilizing ECAE-targets
US20040185182A1 (en) * 2002-07-31 2004-09-23 General Electric Company Method for protecting articles, and related compositions
DE10355036A1 (de) * 2003-11-25 2005-06-23 Mtu Aero Engines Gmbh Verfahren zur Herstellung einer Schutzschicht, Schutzschicht und Bauteil mit einer solchen Schutzschicht
US7416790B2 (en) * 2006-12-08 2008-08-26 General Electric Company Coating systems containing rhodium aluminide-based layers
US20080160208A1 (en) * 2006-12-29 2008-07-03 Michael Patrick Maly System and method for restoring or regenerating an article
IL191822A0 (en) * 2007-06-25 2009-02-11 Sulzer Metaplas Gmbh Layer system for the formation of a surface layer on a surface of a substrate and also are vaporization source for the manufacture of a layer system
SE531933C2 (sv) 2007-12-14 2009-09-08 Seco Tools Ab Belagt hårdmetallskär för bearbetning av stål och rostfria stål
US8906170B2 (en) * 2008-06-24 2014-12-09 General Electric Company Alloy castings having protective layers and methods of making the same
ATE532886T1 (de) * 2008-09-19 2011-11-15 Oerlikon Trading Ag Verfahren zum herstellen von metalloxidschichten durch funkenverdampfung
RU2445403C1 (ru) * 2011-02-24 2012-03-20 Российская Федерация, в лице которой выступает Министерство промышленности и торговли Российской Федерации (Минпромторг РФ) Многослойное износостойкое термостойкое покрытие
EP3696823B1 (en) * 2017-11-14 2024-04-10 Korea Atomic Energy Research Institute Zirconium alloy cladding with improved oxidation resistance at high temperature and method for manufacturing same

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3341307A (en) * 1965-05-25 1967-09-12 Tarr Charles Oliver Oxidation resistant niobium
US4109061A (en) * 1977-12-08 1978-08-22 United Technologies Corporation Method for altering the composition and structure of aluminum bearing overlay alloy coatings during deposition from metallic vapor
JPH01147038A (ja) * 1987-12-02 1989-06-08 Honda Motor Co Ltd 粉末冶金用耐熱Ａｌ合金
FR2671808B1 (fr) * 1991-01-18 1994-06-17 Centre Nat Rech Scient Alliages d'aluminium a proprietes specifiques.
JP2965776B2 (ja) * 1992-02-17 1999-10-18 功二 橋本 高耐食アモルファスアルミニウム合金
US5312584A (en) * 1992-02-18 1994-05-17 General Motors Corporation Moldless/coreless single crystal castings of nickel-aluminide
JPH06248383A (ja) * 1993-02-22 1994-09-06 Yamaha Motor Co Ltd 内燃機関ピストン用アルミニウム合金
JP3235386B2 (ja) * 1994-12-28 2001-12-04 ヤマハ株式会社 熱電材料及びその製造方法
JP3372129B2 (ja) * 1995-04-17 2003-01-27 ワイケイケイ株式会社 高強度アルミニウム合金固化材およびその製造方法
JPH10183337A (ja) * 1996-11-01 1998-07-14 Japan Energy Corp Ａｌ合金薄膜およびＡｌ合金スパッタリングターゲット
US6284390B1 (en) * 1998-06-12 2001-09-04 United Technologies Corporation Thermal barrier coating system utilizing localized bond coat and article having the same
US6287644B1 (en) * 1999-07-02 2001-09-11 General Electric Company Continuously-graded bond coat and method of manufacture
US6207297B1 (en) * 1999-09-29 2001-03-27 Siemens Westinghouse Power Corporation Barrier layer for a MCrAlY basecoat superalloy combination
JP2001316803A (ja) * 2000-04-28 2001-11-16 Honeywell Electronics Japan Kk スパッタリングターゲット材の製造方法
US6475642B1 (en) * 2000-08-31 2002-11-05 General Electric Company Oxidation-resistant coatings, and related articles and processes
US6861157B2 (en) * 2002-03-18 2005-03-01 General Electric Company Article for high temperature service and method for manufacture

Also Published As

Publication number Publication date
DE60316234D1 (de) 2007-10-25
EP1391533A1 (en) 2004-02-25
EP1391533B1 (en) 2007-09-12
CN1500905A (zh) 2004-06-02
JP2004068156A (ja) 2004-03-04
US20040022662A1 (en) 2004-02-05
DE60316234T2 (de) 2008-06-19

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C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20090318

Termination date: 20110731