CN100464426C - 像素传感器及其形成方法 - Google Patents

像素传感器及其形成方法 Download PDF

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Publication number
CN100464426C
CN100464426C CNB2006100825705A CN200610082570A CN100464426C CN 100464426 C CN100464426 C CN 100464426C CN B2006100825705 A CNB2006100825705 A CN B2006100825705A CN 200610082570 A CN200610082570 A CN 200610082570A CN 100464426 C CN100464426 C CN 100464426C
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China
Prior art keywords
dopant material
isolation structure
sidewall
region
layer
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Expired - Lifetime
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CNB2006100825705A
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English (en)
Chinese (zh)
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CN1873993A (zh
Inventor
M·D·贾菲
J·W·阿基森
P·K·莱迪
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SK Hynix Inc
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International Business Machines Corp
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/807—Pixel isolation structures

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  • Solid State Image Pick-Up Elements (AREA)
  • Element Separation (AREA)
CNB2006100825705A 2005-05-31 2006-05-17 像素传感器及其形成方法 Expired - Lifetime CN100464426C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/908,885 US7141836B1 (en) 2005-05-31 2005-05-31 Pixel sensor having doped isolation structure sidewall
US10/908,885 2005-05-31

Publications (2)

Publication Number Publication Date
CN1873993A CN1873993A (zh) 2006-12-06
CN100464426C true CN100464426C (zh) 2009-02-25

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Family Applications (1)

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CNB2006100825705A Expired - Lifetime CN100464426C (zh) 2005-05-31 2006-05-17 像素传感器及其形成方法

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US (2) US7141836B1 (cg-RX-API-DMAC10.html)
JP (1) JP4524269B2 (cg-RX-API-DMAC10.html)
CN (1) CN100464426C (cg-RX-API-DMAC10.html)
TW (1) TWI416714B (cg-RX-API-DMAC10.html)

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KR100672730B1 (ko) * 2005-07-15 2007-01-24 동부일렉트로닉스 주식회사 씨모스 이미지 센서 및 그 제조방법
US7521278B2 (en) * 2006-10-17 2009-04-21 Eastman Kodak Company Isolation method for low dark current imager
US8072015B2 (en) 2007-06-04 2011-12-06 Sony Corporation Solid-state imaging device and manufacturing method thereof
JP5400280B2 (ja) * 2007-06-07 2014-01-29 パナソニック株式会社 固体撮像装置
FR2955701A1 (fr) * 2010-01-28 2011-07-29 St Microelectronics Sa Structure compacte de capteur d'image
US20120080731A1 (en) * 2010-09-30 2012-04-05 Doan Hung Q Photodetector isolation in image sensors
US20120083067A1 (en) * 2010-09-30 2012-04-05 Doan Hung Q Method for forming photodetector isolation in imagers
US8378398B2 (en) 2010-09-30 2013-02-19 Omnivision Technologies, Inc. Photodetector isolation in image sensors
US8101450B1 (en) * 2010-12-13 2012-01-24 Omnivision Technologies, Inc. Photodetector isolation in image sensors
JP5767465B2 (ja) 2010-12-15 2015-08-19 キヤノン株式会社 固体撮像装置およびその製造方法ならびにカメラ
CN102651372B (zh) * 2011-02-23 2014-11-05 中芯国际集成电路制造(上海)有限公司 Cmos图像传感器及其制作方法
JP2013131516A (ja) * 2011-12-20 2013-07-04 Sony Corp 固体撮像装置、固体撮像装置の製造方法、及び、電子機器
CN103972054B (zh) * 2013-01-24 2017-03-01 华邦电子股份有限公司 图案化工艺
FR3027156A1 (fr) * 2014-10-10 2016-04-15 St Microelectronics Crolles 2 Sas Photodiode pincee a faible courant d'obscurite
CN105529340A (zh) * 2014-10-21 2016-04-27 中芯国际集成电路制造(上海)有限公司 传导控制晶体管及其制备方法以及cis芯片结构
US10236400B2 (en) 2016-02-01 2019-03-19 Heptagon Micro Optics Pte. Ltd. Quantum dot film based demodulation structures
KR102663165B1 (ko) 2019-01-07 2024-05-09 삼성전자주식회사 이미지 센서의 제조 방법
US11282886B2 (en) * 2019-12-11 2022-03-22 Omnivision Technologies, Inc. Pixel, associated image sensor, and method
CN111048541B (zh) * 2019-12-24 2025-05-30 格科微电子（上海）有限公司 减少背照式图像传感器暗电流的方法及背照式图像传感器
CN114914255B (zh) * 2021-02-07 2025-07-18 格科微电子（上海）有限公司 图像传感器的像素结构及其制备方法、图像传感器
CN113363273B (zh) * 2021-05-31 2023-11-24 武汉新芯集成电路制造有限公司 感光阵列及成像装置

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US20040173799A1 (en) * 2003-03-05 2004-09-09 Inna Patrick CMOS imager with enhanced transfer of charge and low voltage operation and method of formation
US20040178430A1 (en) * 2003-03-12 2004-09-16 Howard Rhodes Angled implant for trench isolation

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JP4282049B2 (ja) * 2002-02-28 2009-06-17 キヤノン株式会社 半導体装置、光電変換装置及びカメラ
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Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
CN1305229A (zh) * 1999-11-15 2001-07-25 全视技术有限公司 用于cmos图象传感器的优化浮置p+区光电二极管
US6730980B2 (en) * 2000-08-28 2004-05-04 Micron Technology, Inc. Multi-trench region for accumulation of photo-generated charge in a CMOS imager
US20040173799A1 (en) * 2003-03-05 2004-09-09 Inna Patrick CMOS imager with enhanced transfer of charge and low voltage operation and method of formation
US20040178430A1 (en) * 2003-03-12 2004-09-16 Howard Rhodes Angled implant for trench isolation

Also Published As

Publication number Publication date
US20060267013A1 (en) 2006-11-30
JP4524269B2 (ja) 2010-08-11
US7491561B2 (en) 2009-02-17
TW200711111A (en) 2007-03-16
US7141836B1 (en) 2006-11-28
CN1873993A (zh) 2006-12-06
JP2006339643A (ja) 2006-12-14
US20070087463A1 (en) 2007-04-19
TWI416714B (zh) 2013-11-21

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