CN100451351C - 真空喷射泵 - Google Patents

真空喷射泵 Download PDF

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Publication number
CN100451351C
CN100451351C CNB2005800256708A CN200580025670A CN100451351C CN 100451351 C CN100451351 C CN 100451351C CN B2005800256708 A CNB2005800256708 A CN B2005800256708A CN 200580025670 A CN200580025670 A CN 200580025670A CN 100451351 C CN100451351 C CN 100451351C
Authority
CN
China
Prior art keywords
nozzle body
jet pump
nozzle
vacuum jet
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2005800256708A
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English (en)
Chinese (zh)
Other versions
CN101002027A (zh
Inventor
赵镐英
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOREA PRESSURE SYSTEM CO Ltd
Korea Pneumatic System Co Ltd
Original Assignee
KOREA PRESSURE SYSTEM CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOREA PRESSURE SYSTEM CO Ltd filed Critical KOREA PRESSURE SYSTEM CO Ltd
Publication of CN101002027A publication Critical patent/CN101002027A/zh
Application granted granted Critical
Publication of CN100451351C publication Critical patent/CN100451351C/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F04F5/22—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating of multi-stage type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles
    • F04F5/467—Arrangements of nozzles with a plurality of nozzles arranged in series
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/48—Control
    • F04F5/52—Control of evacuating pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CNB2005800256708A 2004-07-28 2005-07-28 真空喷射泵 Expired - Fee Related CN100451351C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020040059067 2004-07-28
KR1020040059067A KR100578540B1 (ko) 2004-07-28 2004-07-28 진공 이젝터 펌프

Publications (2)

Publication Number Publication Date
CN101002027A CN101002027A (zh) 2007-07-18
CN100451351C true CN100451351C (zh) 2009-01-14

Family

ID=35786464

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2005800256708A Expired - Fee Related CN100451351C (zh) 2004-07-28 2005-07-28 真空喷射泵

Country Status (5)

Country Link
US (1) US20070148009A1 (fr)
KR (1) KR100578540B1 (fr)
CN (1) CN100451351C (fr)
DE (1) DE112005001806B4 (fr)
WO (1) WO2006011760A1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100624563B1 (ko) * 2004-11-18 2006-09-18 오토르 주식회사 이젝터 펌프
KR100629994B1 (ko) * 2005-12-30 2006-10-02 한국뉴매틱(주) 진공 이젝터 펌프
KR100730323B1 (ko) * 2007-03-15 2007-06-19 한국뉴매틱(주) 필터 카트리지를 이용한 진공 시스템
DE202009019074U1 (de) 2009-11-24 2016-05-23 J. Schmalz Gmbh Druckluftbetriebener Unterdruckerzeuger
KR200460087Y1 (ko) * 2010-04-14 2012-05-02 킴스엔지니어링 주식회사 에어 이젝터
KR200460086Y1 (ko) * 2010-04-15 2012-05-02 킴스엔지니어링 주식회사 에어 이젝터
KR101029967B1 (ko) * 2011-01-03 2011-04-19 한국뉴매틱(주) 퀵-릴리즈 진공펌프
KR101066212B1 (ko) * 2011-03-10 2011-09-20 한국뉴매틱(주) 퀵-릴리즈 진공펌프
KR101157542B1 (ko) * 2012-04-26 2012-06-22 한국뉴매틱(주) 인-라인 진공펌프
DE102013107537B4 (de) 2013-07-16 2015-02-19 J. Schmalz Gmbh Mehrstufiger Ejektor
KR101472503B1 (ko) 2014-04-24 2014-12-12 한국뉴매틱(주) 이젝터 어셈블리 및 진공펌프
CN106089636B (zh) * 2016-08-17 2019-03-26 魏学惠 空压驱动式真空泵
CN106212648A (zh) * 2016-08-30 2016-12-14 苏州贝特贝斯能源技术有限公司 车载微真空果蔬采摘现场冷却装置及其预冷方法
KR101699721B1 (ko) * 2016-09-01 2017-02-13 (주)브이텍 진공 펌프 및 그 어레이
CN106229287B (zh) * 2016-09-30 2019-04-05 厦门市三安光电科技有限公司 用于转移微元件的转置头及微元件的转移方法
CN108317108A (zh) * 2018-04-12 2018-07-24 微可为（厦门）真空科技有限公司 一种超音速真空管
US11969886B2 (en) * 2021-06-01 2024-04-30 J.Schmalz Gmbh Valve device for a vacuum handling device or a vacuum clamping device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH054185A (ja) * 1991-06-28 1993-01-14 Smc Corp 真空供給装置
KR19980074701A (ko) * 1997-03-26 1998-11-05 윤종용 반도체 제조용 모터펌프
KR19990039684A (ko) * 1997-11-13 1999-06-05 윤종용 투명커버가 취부된 파워단자를 갖는 진공펌프
KR20020003166A (ko) * 2001-11-24 2002-01-10 장명수 목초액(스모크향)을 이용한 건강보조식품의 제조방법.
US6394760B1 (en) * 1998-03-20 2002-05-28 Piab Ab Vacuum ejector pump
CN1407207A (zh) * 2001-09-04 2003-04-02 休斯Ubhd器具有限责任公司 具有独立喷射泵的浅孔钻进总成

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3137240A (en) * 1961-07-17 1964-06-16 Russell G Hunt Pumps
SE370765B (fr) * 1973-12-05 1974-10-28 Piab Ab
JPH0353039Y2 (fr) * 1987-05-30 1991-11-19
SE466561B (sv) * 1988-06-08 1992-03-02 Peter Tell Multiejektoranordning
JPH04194400A (ja) * 1990-11-27 1992-07-14 Smc Corp 真空発生ユニット
SE469291B (sv) * 1991-10-31 1993-06-14 Piab Ab Ejektorarrangemang innefattande minst tvaa tryckluftsdrivna ejektorer samt foerfarande foer att med minst tvaa tryckluftsdrivna ejektorer aastadkomma ett oenskat undertryck paa kortast moejliga tid och med minsta energifoerbrukning
US5683227A (en) * 1993-03-31 1997-11-04 Smc Corporation Multistage ejector assembly
IL125791A (en) * 1998-08-13 2004-05-12 Dan Greenberg Vacuum pump
SE513991C2 (sv) * 1999-02-26 2000-12-11 Piab Ab Filter för en vakuumpump av ejektortyp med ljuddämpare
DE19957066A1 (de) * 1999-11-26 2001-05-31 Mannesmann Vdo Ag Saugstrahlpumpe
KR100345386B1 (ko) * 2000-01-19 2002-07-24 태크뱅크 주식회사 챔버의 개폐장치를 포함하는 진공챔버장치
KR100454082B1 (ko) * 2001-10-15 2004-10-26 한국뉴매틱(주) 진공 발생/파기 장치

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH054185A (ja) * 1991-06-28 1993-01-14 Smc Corp 真空供給装置
KR19980074701A (ko) * 1997-03-26 1998-11-05 윤종용 반도체 제조용 모터펌프
KR19990039684A (ko) * 1997-11-13 1999-06-05 윤종용 투명커버가 취부된 파워단자를 갖는 진공펌프
US6394760B1 (en) * 1998-03-20 2002-05-28 Piab Ab Vacuum ejector pump
CN1407207A (zh) * 2001-09-04 2003-04-02 休斯Ubhd器具有限责任公司 具有独立喷射泵的浅孔钻进总成
KR20020003166A (ko) * 2001-11-24 2002-01-10 장명수 목초액(스모크향)을 이용한 건강보조식품의 제조방법.

Also Published As

Publication number Publication date
WO2006011760A1 (fr) 2006-02-02
CN101002027A (zh) 2007-07-18
DE112005001806B4 (de) 2012-06-21
US20070148009A1 (en) 2007-06-28
KR20040072573A (ko) 2004-08-18
KR100578540B1 (ko) 2006-05-15
DE112005001806T5 (de) 2007-07-12

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