CN100434882C - Static excitation resonator capacitor vibration pick-up structure - Google Patents
Static excitation resonator capacitor vibration pick-up structure Download PDFInfo
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- CN100434882C CN100434882C CNB2007101902258A CN200710190225A CN100434882C CN 100434882 C CN100434882 C CN 100434882C CN B2007101902258 A CNB2007101902258 A CN B2007101902258A CN 200710190225 A CN200710190225 A CN 200710190225A CN 100434882 C CN100434882 C CN 100434882C
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Abstract
An electrostatic incentive resonator capacitor vibration pick-up structure designs a symmetrical drive and detecting capacitor pick-up structure based on the two-end incentive / two-end detecting principle; the upper part and the lower part of a resonante beam (5) are respectively provided with three electrodes, wherein, the middle of the upper part of the resonante beam (5) is provided with a first detecting electrode (1); two sides of the upper part of the resonante beam (5) are respectively provided with a first drive electrode (3); the middle of the lower part of the resonante beam (5) is provided with a second drive electrode (2); two sides of the lower part of the resonante beam (5) are respectively provided with a second detecting electrode (4); the resonante beam (5) is respectively in vertical and cross arrangement with the electrodes of the upper part and the lower part of the resonante beam (5); two ends of the resonante beam (5), the first detecting electrode (1) and the first drive electrode (3) are positioned on an insulating layer (6) of a substrate (7); two ends of the second drive electrode (2) and the second detecting electrode (4) are positioned between the substrate (7) and the insulating layer (6).
Description
Technical field
The present invention is based on a kind of symmetrical capacitor vibration pick-up structure that drives and detect of principle design that both-end excitation/both-end detects, and belongs to micro mechanical system structural design and detection technique field.
Background technology
Micro electronic mechanical system (Micro-electro mechanical System, MEMS)/(Nano-electro mechanical System, NEMS) vibration detection of resonator is the emphasis of MEMS area research always to receive Mechatronic Systems.The MEMS/NEMS resonator of static excitation capacitor vibration pick-up is a kind of resonator commonly used, is divided into single-ended device and both-end device.In the MEMS field, capacitor vibration pick-up belongs to Detection of Weak Signals, so the noise that the spuious coupling capacitance that exists in the MEMS device is introduced can influence the signal to noise ratio (S/N ratio) of detection signal, even can cause the detection failure, when device size is little when the nano-scale, the electric capacity of NEMS device is littler, 10
-17About F, this moment, The noise can be more serious.The both-end device is a kind of noise source owing to coupling capacitance causes the feedthrough effect between input end and the output terminal, therefore need reduce generating noise as much as possible by suitable detection architecture, improves the signal to noise ratio (S/N ratio) of capacitor vibration pick-up.
Summary of the invention
Technical matters: the objective of the invention is to design a kind of static excitation resonator capacitor vibration pick-up structure, suppress the feedthrough that the both-end device causes owing to the coupling capacitance between input end and the output terminal in the static excitation capacitor vibration pick-up MEMS/NEMS resonator, improve the signal to noise ratio (S/N ratio) of output signal.
Technical scheme: static excitation resonator capacitor vibration pick-up structure of the present invention has respectively designed three electrodes at the upper and lower of resonance beam, and wherein middle above resonance beam is first detecting electrode, and both sides are respectively first drive electrode; In the middle of below resonance beam is second drive electrode, and both sides are respectively second detecting electrode; Resonance beam is provided with each electrode square crossing of resonance beam upper and lower respectively, the two ends of resonance beam, first detecting electrode, first drive electrode all are positioned on the on-chip insulation course, and the two ends of second drive electrode, second detecting electrode are all between substrate and insulation course.
On second drive electrode and first drive electrode, load the driving voltage of 180 ° of phasic differences mutually, the vibration of excitation resonance beam.
Because symmetric design, the both sides input end is identical with coupling capacitance between the output terminal, the both sides driving voltage output terminal produced the amplitude same phase opposite noise signal, thereby reached the effect of cancelling out each other, eliminated the feedthrough effect.The detecting electrode of appropriate design upper and lower reduces the influence that useful signal weakens mutually simultaneously.
Beneficial effect: the present invention is simple in structure, is easy to realize, can suppress the feedthrough effect between input end and the output terminal effectively.Common both-end device is owing to exist coupling capacitance between input end and the output terminal, on input end in the load driver voltage, driving voltage can be by coupling capacitance in noise signal that does not change with the resonance beam vibration of output terminal output, because useful signal is extremely faint, the existence of noise signal may cause the useful signal can not be detected in the MEMS field.The present invention is simultaneously at resonance beam upper and lower design driven electrode and detecting electrode, and at the driving voltage of 180 ° of upper and lower loading phase phasic differences, two driving voltages produce the noise signal of 180 ° of two phase phasic differences at output terminal.Because symmetric design is identical with coupling capacitance in the both sides drive voltage amplitude, so the amplitude of the noise signal of output terminal generation is identical, thereby has reached the effect of cancelling out each other, and has suppressed the feedthrough effect.
Description of drawings
Fig. 1 is the novel capacitor vibration pick-up structure figure that symmetry drives and detects,
Fig. 2 is the cut-open view of the novel capacitor vibration pick-up structure A-A face of symmetry driving and detection,
Fig. 3 is the cut-open view of the B-B face of the symmetrical novel capacitor vibration pick-up structure that drives and detect.
Comprise among the figure: first detecting electrode, 1, the second drive electrode, 2, the first drive electrodes, 3, the second detecting electrodes 4, resonance beam 5, insulation course 6, substrate 7.
Specific embodiments
Static excitation resonator capacitor vibration pick-up structure of the present invention has respectively designed three electrodes at the upper and lower of resonance beam 5, and wherein middle above resonance beam 5 is first detecting electrode 1, and both sides are respectively first drive electrode 3; In the middle of below resonance beam 5 is second drive electrode 2, and both sides are respectively second detecting electrode 4; Resonance beam 5 is provided with each electrode square crossings of resonance beam 5 upper and lowers respectively, the two ends of resonance beam 5, first detecting electrode 1, first drive electrode 3 all are positioned on the insulation course 6 on the substrate 7, and the two ends of second drive electrode 2, second detecting electrode 4 are all between substrate 7 and insulation course 6.On second drive electrode 2 and first drive electrode 3, load the driving voltage of 180 ° of phasic differences mutually, 5 vibrations of excitation resonance beam.
Because symmetric design, coupling capacitance between top first drive electrode 3 and first detecting electrode 1 equates with the coupling capacitance between below second detecting electrode 4 and second drive electrode 2, first drive electrode 3 of top by coupling capacitance the noise signal that produces on first detecting electrode 1 with below second drive electrode 2 cancel out each other by the noise signal that coupling capacitance produces on second detecting electrode 4, eliminated the feedthrough between input end and the output terminal.The both sides that below second detecting electrode 4 is wanted as close as possible resonance beam 5, resonance beam 5 vibration below the useful signal that produces on second detecting electrode 4 can much smaller than above in the middle of the useful signal of first detecting electrode 1, weaken the phenomenon of output useful signal thereby avoid the useful signal of upper and lower to cancel out each other.
Claims (1)
1. a static excitation resonator capacitor vibration pick-up structure is characterized in that respectively having designed three electrodes at the upper and lower of resonance beam (5), is first detecting electrode (1) in the middle of the top of resonance beam (5) wherein, and both sides are respectively first drive electrode (3); In the middle of the below of resonance beam (5) is second drive electrode (2), and both sides are respectively second detecting electrode (4); Resonance beam (5) is provided with each electrode square crossing of resonance beam (5) upper and lower respectively, the two ends of resonance beam (5), first detecting electrode (1), first drive electrode (3) all are positioned on the insulation course (6) on the substrate (7), and the two ends of second drive electrode (2), second detecting electrode (4) all are positioned between substrate (7) and the insulation course (6); Go up the driving voltage that loads 180 ° of phasic differences mutually at second drive electrode (2) with first drive electrode (3), excitation resonance beam (5) vibration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101902258A CN100434882C (en) | 2007-11-20 | 2007-11-20 | Static excitation resonator capacitor vibration pick-up structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101902258A CN100434882C (en) | 2007-11-20 | 2007-11-20 | Static excitation resonator capacitor vibration pick-up structure |
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| Publication Number | Publication Date |
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| CN101162170A CN101162170A (en) | 2008-04-16 |
| CN100434882C true CN100434882C (en) | 2008-11-19 |
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| CNB2007101902258A Expired - Fee Related CN100434882C (en) | 2007-11-20 | 2007-11-20 | Static excitation resonator capacitor vibration pick-up structure |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012043275A (en) * | 2010-08-20 | 2012-03-01 | Alps Electric Co Ltd | Capacitance type input device |
| CN103115719A (en) * | 2013-01-29 | 2013-05-22 | 中国科学院半导体研究所 | Resonance-type micro electromechanical system wing wind power sensor and manufacturing method thereof |
| CN104614115A (en) * | 2015-01-30 | 2015-05-13 | 河海大学 | MEMS device for measuring water pressure in real time and measuring method thereof |
| CN107036705B (en) * | 2017-03-08 | 2019-05-17 | 东南大学 | Collect micro- Three-dimensional Axisymmetric vibrating sensor with unconventional edge of dimension electrode in pairs |
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| US6271620B1 (en) * | 1999-05-20 | 2001-08-07 | Sen Corporation | Acoustic transducer and method of making the same |
| US6393913B1 (en) * | 2000-02-08 | 2002-05-28 | Sandia Corporation | Microelectromechanical dual-mass resonator structure |
| US6497141B1 (en) * | 1999-06-07 | 2002-12-24 | Cornell Research Foundation Inc. | Parametric resonance in microelectromechanical structures |
| CN1408120A (en) * | 1999-12-15 | 2003-04-02 | Jds尤尼费斯公司 | Variable capacitor and associated fabrication method |
| US6940370B2 (en) * | 2002-05-06 | 2005-09-06 | The Regents Of The University Of California | MEMS resonator and method of making same |
| EP1610459A1 (en) * | 2003-03-25 | 2005-12-28 | Matsushita Electric Industrial Co., Ltd. | Mechanical resonator |
| CN1813328A (en) * | 2003-06-26 | 2006-08-02 | 皇家飞利浦电子股份有限公司 | Micro-electromechanical device and module and method of manufacturing same |
| CN1853345A (en) * | 2003-09-19 | 2006-10-25 | 索尼株式会社 | Micro electric machine system resonator, drive method thereof, manufacturing method thereof, and frequency filter |
-
2007
- 2007-11-20 CN CNB2007101902258A patent/CN100434882C/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6271620B1 (en) * | 1999-05-20 | 2001-08-07 | Sen Corporation | Acoustic transducer and method of making the same |
| US6497141B1 (en) * | 1999-06-07 | 2002-12-24 | Cornell Research Foundation Inc. | Parametric resonance in microelectromechanical structures |
| CN1408120A (en) * | 1999-12-15 | 2003-04-02 | Jds尤尼费斯公司 | Variable capacitor and associated fabrication method |
| US6393913B1 (en) * | 2000-02-08 | 2002-05-28 | Sandia Corporation | Microelectromechanical dual-mass resonator structure |
| US6940370B2 (en) * | 2002-05-06 | 2005-09-06 | The Regents Of The University Of California | MEMS resonator and method of making same |
| EP1610459A1 (en) * | 2003-03-25 | 2005-12-28 | Matsushita Electric Industrial Co., Ltd. | Mechanical resonator |
| CN1813328A (en) * | 2003-06-26 | 2006-08-02 | 皇家飞利浦电子股份有限公司 | Micro-electromechanical device and module and method of manufacturing same |
| CN1853345A (en) * | 2003-09-19 | 2006-10-25 | 索尼株式会社 | Micro electric machine system resonator, drive method thereof, manufacturing method thereof, and frequency filter |
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| CN101162170A (en) | 2008-04-16 |
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