CN102042829B - All-forward capacitance type micro-machined gyroscope - Google Patents
All-forward capacitance type micro-machined gyroscope Download PDFInfo
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- CN102042829B CN102042829B CN2009102356541A CN200910235654A CN102042829B CN 102042829 B CN102042829 B CN 102042829B CN 2009102356541 A CN2009102356541 A CN 2009102356541A CN 200910235654 A CN200910235654 A CN 200910235654A CN 102042829 B CN102042829 B CN 102042829B
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Abstract
The invention discloses an all-forward capacitance type micro-machined gyroscope comprising a glass substrate (1), metal electrodes A(2), B(14), C(16), and D(19), forward pectinated drivers A(6) and B(7), a mass block (8), a forward pectinated differential capacitor (12), a driving detection capacitor (15), fixed electrodes A(5), B(17) and C(18), a driving frame (4), anchor points A(10) and B(13), and elastic beams A(3), B(9) and C(11). In the invention, a forward driving, driving detection and the pectinated difference capacitor structure are adopted to solve the problem that the capacitance variation quantity is nonlinear to displacement variation quantity, thereby improving the signal to noise ratio of the micro-machined gyroscope. A U-shaped decoupling beam structure satisfies a bipolar decoupling function. A driving system is limited to move in a driving direction X, and a detection system is limited to move in a detection direction Y.
Description
Technical field
What the present invention relates to is a kind of all-cis to capacitive micro mechinery gyroscope, belongs to microelectromechanical systems field and inertia measurement field.
Background technology
Utilize the silicon micromechanical gyroscope of micro mechanical technology manufacturing to compare, have that volume is little, in light weight, cost is low, low in energy consumption a, advantage such as reliability is high, can produce in batches and be prone to and the CMOS interface circuit is integrated with traditional gyro.Can be widely used in many fields such as Aeronautics and Astronautics, automobile, weapon, medical science, consumer electronics, have huge market potential.Now the silicon micromechanical gyroscope of various structures emerges in an endless stream in the world, and their common feature is that mutually perpendicular two direction of vibration are arranged, i.e. the responsive direction of vibration that causes of excited vibration direction and coriolis force.
The type of drive that micromechanical gyro adopts usually has static driven and Electromagnetic Drive.Electromagnetic drive mode mainly is to utilize Lorentz force to realize, driving amplitude is big, but will adopt bigger drive current, and big power consumption causes device heating easily, thereby influences performance, and the manufacture craft more complicated will be made insulation course in addition.So adopt the static driven mode.The detection mode of micromechanical gyro mainly contains pressure drag and detects and capacitance detecting, and the pressure drag detection has bigger temperature coefficient, thus poor-performing.Wherein the silicon micromechanical gyroscope of static driven, capacitance detecting is because manufacture craft realizes characteristics such as temperature coefficient is little and extensively being adopted easily.The detection mode of micromechanical gyro generally adopts and becomes the detection of clearance-type biasing broach differential capacitance; Through the variable in distance between comb electrodes; Be that capacitance variations detects coriolis force, and then detect angular velocity signal, its advantage is simple in structure; But have bigger non-linearly between capacitance change and the pole plate displacement, promptly detect and have comparatively between output and the coriolis force to be detected that severe nonlinear concerns.In order to improve the linearity that becomes clearance-type biasing broach differential capacitance, can increase the gap difference, but this will make detection mass quality reduce, and influence the sensitivity of gyro.Have very big press-filming damping between biasing broach differential capacitance, make its quality factor very low, this has limited the raising of micromechanical gyro sensitivity, generally need under vacuum state, work, and has increased the difficulty and the cost of encapsulation.Adopt the mode that becomes the gap to detect capacitance variations owing to become clearance-type biasing broach differential capacitance, short range power effect strokes such as capillary adhesive force, Van der Waals for change thereupon, and this will influence the stability and the reliability of micromechanical gyro.
Summary of the invention
It is a kind of all-cis to capacitive micro mechinery gyroscope that the object of the invention is to provide; Can realize the driving mode and the resonance frequency coupling that detects mode of micromechanical gyro; Reduce between two mode being coupled, in atmospheric environment, work and also can obtain the micromechanical gyro of high linearity, high sensitivity and high reliability.
The objective of the invention is to realize like this:
This is a kind of all-cis to capacitive micro mechinery gyroscope, comprise glass substrate, metal electrode, forward comb actuator, mass, forward the broach differential capacitance, drive and detect electric capacity, fixed electorde, drive frame, anchor point, elastic beam; Wherein, metal electrode sputters on the glass substrate, is bonded in the silicon chip on the glass substrate through bonding region; And etch structure on the silicon chip, and comprise the mass in the middle of being positioned on this structure, forward comb actuator is positioned over the two ends of mass; Forward the broach differential capacitance is positioned over mass both sides in addition; And be positioned over and drive the housing both sides drive detecting electric capacity, fixed electorde links to each other with bonding region, drive frame and anchor point; Drive frame links to each other through elastic beam with mass, and mass links to each other through U-shaped decoupling zero girder construction with broach differential capacitance forward.
Beneficial effect of the present invention:
The present invention adopts forward driving, driving detection to solve capacitance change with the broach differential capacitance structure and become nonlinear problem with displacement variable, has improved the signal to noise ratio (S/N ratio) of micromechanical gyro.Be easy to the driving mode and the resonance frequency coupling that detects mode of micromechanical gyro.U-shaped decoupling zero girder construction flexible design is not limited by bulk, does not receive the restriction of processing technology, is easy to the driving mode and the resonance frequency coupling that detects mode of micromechanical gyro, has solved to drive mode of oscillation and detect the coupled problem between the mode of oscillation.U-shaped decoupling zero girder construction satisfies bipolar decoupling zero function.Drive system is limited in driving direction directions X motion, and detection system is limited in the detection side and moves to the Y direction.
Description of drawings
The vertical view of Fig. 1 structural representation of the present invention
The front view of Fig. 2 structural representation of the present invention
Embodiment
For example the present invention is made more detailed description below in conjunction with accompanying drawing:
The present invention proposes forward broach differential capacitance and U-shaped decoupling zero girder construction, and is forward linear between the variable quantity of broach differential capacitance and the pole plate displacement.Only have slide-film damping between comb electrodes, the detection system quality factor is very high, and gyro is worked under atmospheric conditions, also can obtain higher sensitivity.U-shaped decoupling zero girder construction has realized the full decoupled of drive system and detection system, reduces the mechanical couplings error, has improved signal to noise ratio (S/N ratio).The present invention can realize the raising of little gyro linearity, sensitivity and reliability from structure, Here it is the object of the invention.
In conjunction with Fig. 1 and 2, it comprise glass substrate 1, metal electrode 2,14,16,19, forward comb actuator 6,7, mass 8, forward broach differential capacitance 12, drive and detect electric capacity 15, fixed electorde 5,17,18, drive frame 4, anchor point 10,13, elastic beam 3,9,11; Wherein, metal electrode 2,14,16,19 sputters on the glass substrate, is bonded in the silicon chip on the glass substrate through bonding region; And etch structure on the silicon chip, and comprise the mass 8 in the middle of being positioned on this structure, forward comb actuator 6,7 is positioned over the two ends of mass; Forward broach differential capacitance 12 is positioned over mass both sides in addition; And be positioned over and drive the housing both sides drive detecting electric capacity 15, fixed electorde 5,17,18 links to each other drive frame 4 and anchor point 10,13 with bonding region; Drive frame 4 links to each other through elastic beam 3,9,11 with mass 8, and mass 8 links to each other through U-shaped decoupling zero girder construction with broach differential capacitance 12 forward.
When between the fixed electorde 5 of comb actuator and float electrode 7, applying ac signal, apply voltage V on the fixed electorde 2a
1=V
DC+ V
ACSin (ω t) applies voltage V on the fixed electorde 2b
2=V
DC-V
ACSin (ω t) then produces the electrostatic force of alternation on float electrode, mass 8 is defined as driving direction generation vibration along X axis and is defined as the driving mode of oscillation under the traction of float electrode.When the Z direction has the angular velocity input; Mass axially receives the effect of coriolis force at Y; On this direction, produce vibration, thereby drive another float electrode is defined as sensitive direction and responsive mode of oscillation along Y axial vibration, the electric capacity between detected activity electrode and detection fixed electorde increases at this moment; Electric capacity equivalent between detected activity electrode and detection fixed electorde reduces simultaneously, and then forward the differential capacitance of broach differential capacitance produces an alternating signal.This capacitance variations amplitude is directly proportional with input angular velocity, can record angular velocity signal thereby detect capacitance variations through interface circuit.Owing to adopted bilingual coupling structure; Bipolar decoupling-structure has been eliminated effectively and has been driven and detected the coupling between the mode of oscillation; The detected activity electrode has only sensitive direction to produce vibration, has only the driving direction vibration and drive float electrode, all works under the slide-film damping; Under atmospheric environment, work and can obtain bigger quality factor, the sensitivity of micromechanical gyro is improved.
Claims (1)
- One kind all-cis to capacitive micro mechinery gyroscope, it is characterized in that: comprise glass substrate (1), metal electrode (2,14,16,19), forward comb actuator (6,7), mass (8), forward broach differential capacitance (12), drive and detect electric capacity (15), fixed electorde (5,17,18), drive frame (4), anchor point (10,13), elastic beam (3,9,11); Wherein, Metal electrode (2,14,16,19) sputters on the glass substrate, is bonded in the silicon chip on the glass substrate through bonding region, and on silicon chip, etches structure; This structure comprises the mass (8) in the middle of being positioned at; Forward comb actuator (6,7) is positioned over the two ends of mass, and forward broach differential capacitance (12) is positioned over mass both sides in addition, and driving detection electric capacity (15) is positioned over driving housing both sides; Fixed electorde (5,17,18) links to each other with bonding region; Drive frame (4) and anchor point (10,13), drive frame (4) links to each other through elastic beam (3,9,11) with mass (8), and mass (8) links to each other through U-shaped decoupling zero girder construction with broach differential capacitance (12) forward.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2009102356541A CN102042829B (en) | 2009-10-10 | 2009-10-10 | All-forward capacitance type micro-machined gyroscope |
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| CN2009102356541A CN102042829B (en) | 2009-10-10 | 2009-10-10 | All-forward capacitance type micro-machined gyroscope |
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| CN102042829A CN102042829A (en) | 2011-05-04 |
| CN102042829B true CN102042829B (en) | 2012-06-20 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI531806B (en) * | 2014-09-18 | 2016-05-01 | 溫瓌岸 | Dual-functional resonant based magnetic field sensor |
| CN105352488A (en) * | 2015-10-08 | 2016-02-24 | 北京理工大学 | Variable area capacitive-type bimodal optimized tuning-fork-type micromechanical gyroscope |
| CN112129278B (en) * | 2020-09-15 | 2022-08-19 | 浙江大学 | Gate structure capable of reducing nonlinearity between capacitance and displacement caused by capacitance edge effect |
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| EP0915323B1 (en) * | 1997-11-07 | 2004-03-31 | Commissariat A L'energie Atomique | Micromechanical vibrating gyroscope |
| CN1749693A (en) * | 2005-10-24 | 2006-03-22 | 西北工业大学 | Capacitive micro mechinery gyroscope |
| CN1766528A (en) * | 2005-11-11 | 2006-05-03 | 中北大学 | Differential micro-mechanical gyro with higher sensitivity and band width |
| CN1948906A (en) * | 2006-11-10 | 2007-04-18 | 北京大学 | Capacitive type complete decoupling horizontal axis miniature mechanical gyro |
| CN101368826A (en) * | 2008-09-25 | 2009-02-18 | 中国人民解放军国防科学技术大学 | Vibration isolation frame work decoupled silicon micro-gyroscope and preparation thereof |
| CN101509771A (en) * | 2008-02-14 | 2009-08-19 | 中国科学院声学研究所 | Decoupling micromechanical gyroscope |
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Patent Citations (6)
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| EP0915323B1 (en) * | 1997-11-07 | 2004-03-31 | Commissariat A L'energie Atomique | Micromechanical vibrating gyroscope |
| CN1749693A (en) * | 2005-10-24 | 2006-03-22 | 西北工业大学 | Capacitive micro mechinery gyroscope |
| CN1766528A (en) * | 2005-11-11 | 2006-05-03 | 中北大学 | Differential micro-mechanical gyro with higher sensitivity and band width |
| CN1948906A (en) * | 2006-11-10 | 2007-04-18 | 北京大学 | Capacitive type complete decoupling horizontal axis miniature mechanical gyro |
| CN101509771A (en) * | 2008-02-14 | 2009-08-19 | 中国科学院声学研究所 | Decoupling micromechanical gyroscope |
| CN101368826A (en) * | 2008-09-25 | 2009-02-18 | 中国人民解放军国防科学技术大学 | Vibration isolation frame work decoupled silicon micro-gyroscope and preparation thereof |
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