CN206683650U - A kind of four masses coupling micro-electro-mechanical gyroscope - Google Patents
A kind of four masses coupling micro-electro-mechanical gyroscope Download PDFInfo
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- CN206683650U CN206683650U CN201720484245.5U CN201720484245U CN206683650U CN 206683650 U CN206683650 U CN 206683650U CN 201720484245 U CN201720484245 U CN 201720484245U CN 206683650 U CN206683650 U CN 206683650U
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Abstract
The utility model discloses a kind of four masses coupling micro-electro-mechanical gyroscope, it is related to microcomputer gyroscope field.A kind of four masses coupling micro-electro-mechanical gyroscope, including four masses, each mass are divided into four full symmetric units；Each mass is mainly by driver framework（19）And detection framework（20）Form, four driver frameworks（19）By driving coupling spring（21）Interconnection, two neighboring detection framework（20）By detecting coupling spring（3）Interconnection, each pair driver framework（19）And detection framework（20）Between pass through driving spring（7）Interconnection.The shortcomings that the utility model provides a kind of four masses coupling micro-electro-mechanical gyroscope, and the structure that realization driving and detection quality couple simultaneously is to overcome driving voltage higher, so as to improve performance requirement of the sensor for circuit part.
Description
Technical field
Microcomputer gyroscope field is the utility model is related to, especially a kind of four masses coupling micro-electro-mechanical gyroscope.
Background technology
With the development of micro mechanical technology, there is increasing MEMS to realize commercial even army in recent years
With.Wherein, MEMS inertial sensor achieves very big success in automotive electronics, inertial navigation and portable equipment.
MEMS gyroscope is substantially the angular-rate sensor realized by Coriolis effect.It is by the stress of mass
（That is coriolis force）Linked together with additional angular speed, then stress is converted into by position by Hooke's law and second order dynamical system
Move, and the detection of angular velocity is realized using certain displacement detecting mechanism.
MEMS gyroscope generally comprises the mass, detection mass and corresponding driving of linear oscillator or angular oscillation
And detection means.Disturbed to realize for various external common-modes（Such as vibration, acceleration and mechanical shock）Suppression, MEMS
Gyroscope generally has even number to drive and detects mass, and is generally in symmetrical structure.Wherein, adjacent mass motion side
To all on the contrary, so as to realize differential effect, and four mass block structures have for various common mode mechanical disturbances and preferably suppress effect
Fruit.
Detection mass is exactly coupled by the mode of other suppression common mode interference by spring, thus may be used
With in the parameter of different detection masses（Mainly coefficient of elasticity）Occur that their detecting positions are greatly lowered in the case of mismatch
The mismatch of shifting.
But because common MEMS technology flow can be only formed planar structure, if detection mass is coupling in by selection
Will result in driving mass together can not couple, and equivalent driving quality factor also just be reduced, so as to need bigger driving
Voltage could realize identical drive amplitude.
The content of the invention
The purpose of this utility model is overcome the deficiencies in the prior art, there is provided a kind of four masses coupling microelectromechanicgyroscope gyroscope
The shortcomings that structure that instrument, driving and detection quality couple simultaneously is to overcome driving voltage higher, so as to improve sensor for electricity
The performance requirement of road part.
The purpose of this utility model is achieved through the following technical solutions：A kind of four masses coupling microelectromechanicgyroscope gyroscope
Instrument, including four masses, each mass are divided into four full symmetric units；Each mass is mainly by driving
Framework and detection framework are formed, and for four driver frameworks by driving coupling spring to interconnect, two detection frameworks of upper row pass through inspection
It is identical with upper row to survey the annexation of the lower row of coupling spring interconnection, passes through driving spring between each pair driver framework and detection framework
Interconnection.
Preferably, described driving coupling bomb can also deform upon when sensed-mode.
Preferably, each mass is divided into four full symmetric units, wherein each unit handle includes：Driving electricity
Pole, self-test electrode, detection coupling spring, driving detecting electrode, quadrature error compensating electrode, chi structure, driving spring, detection
Electrode, framework, detection spring, shared spring and driving coupling spring；
Preferably, described driving electrodes and self-test electrode are arranged using differential mode；One end of detection spring and framework
Detection framework connection, the other end connection anchor point；Detect coupling spring one end and the detection coupling spring phase of adjacent detection framework
Series connection, other end connecting detection framework；Driving coupling spring one end and the driving coupling spring of adjacent driven framework are in series, separately
One end connects driver framework；The one end for sharing spring is connected with driver framework, other end connection anchor point；Driving spring connection driving
Framework and detection framework；Quadrature error compensating electrode forms hierarchic structure with driving mass.
Preferably, the larger part of frame width is provided with stress relief hole；Described stress relief hole can certain journey
The quality of structure is reduced on degree and aids in releasing sacrificial layer.
Preferably, described driving electrodes and driving detecting electrode employ broach electric capacity, ensure the direction of motion and broach
Length direction is identical.
Preferably, described detecting electrode and self-test electrode take capacity plate antenna, ensure the direction of motion and broach length side
To being mutually perpendicular to.
Preferably, when mass moves, drive and sent out between detecting electrode and detecting electrode positive and negative terminal and mass
The change of raw opposite direction, by difference channel can out-going quality block motion.
Preferably, the midpoint up and down of described mass is both provided with sharing spring and drives coupling spring；Often
Individual shared spring or driving coupling spring be by the first folded spring, the second folded spring, first connecting rod, second connecting rod,
Coercive mechanism and anchor point are formed.
Preferably, coercive mechanism is image point, the central point or anchor point of the first folded spring, and its effect is to allow first connecting rod
There can be certain angle between second connecting rod and the first folded spring and anchor point.
Preferably, distance of the tie point of the second folded spring and anchor point apart from anchor point top should be as far as possible small, and raising finishes
Structure symmetrically after boundary condition symmetry.
Preferably, by active force to the right when mass moves downward；The compensated for electrostatic power that adjacent mass is subject to
In the opposite direction, balancing force and drive displacement same-phase and quadrature error same-phase, the effect of quadrature error compensation is realized.
The beneficial effects of the utility model are：A kind of four masses coupling micro-electro-mechanical gyroscope, driving and detection matter are provided
The shortcomings that structure of amount coupling simultaneously is to overcome driving voltage higher, will for the performance of circuit part so as to improve sensor
Ask, framework and Internal moving mass be all coupled, so as to obtain higher driving Q values simultaneously, driving voltage can be reduced or
Lift signal to noise ratio and higher common mode inhibition capacity.
Brief description of the drawings
Fig. 1 is a mass a quarter structure chart；
Fig. 2 is driving and detection working state figure；
Fig. 3 is that gyroscope shares/coupling spring structural representation；
Fig. 4 is chi structure schematic cross-section；
Accompanying drawing main element explanation：Driving electrodes 1, self-test electrode 2, coupling spring 3 is detected, detecting electrode 4 is driven, is orthogonal
Error compensation electrode 5, chi structure 6, driving spring 7, stress relief hole 8, first connecting rod 9, second connecting rod 10, the first folded ammunition
Spring 11, anchor point 12, the second folded spring 13, detecting electrode 14, framework 15, coercive mechanism 16, detection spring（17）, share spring
18th, driver framework 19, detection framework 20, driving coupling spring 21, distance 1L1 and distance 2L2.
Embodiment
The technical solution of the utility model, but the scope of protection of the utility model are described in further detail below in conjunction with the accompanying drawings
It is not limited to as described below.
As shown in figure 1, a kind of four masses coupling micro-electro-mechanical gyroscope includes four masses, wherein adjacent mass
The direction of motion is all on the contrary, so as to realize differential effect；Each mass is divided into four full symmetric parts, single quality
The a quarter of block, it includes：Driving electrodes 1, driving detecting electrode 4, self-test electrode 2, quadrature error compensating electrode 5, detection
Electrode 14, driving spring 7, detection spring 17, detection coupling spring 3 and framework 15；
Described driving electrodes 1 and self-test electrode 2 are arranged using differential mode, and when applying voltage, mass is transported
It is dynamic, the change that opposite direction occurs between detecting electrode 4 and the positive and negative terminal of detecting electrode 14 and mass is driven, passes through difference channel
Can out-going quality block motion.
Driving spring 7 is mainly responsible for control driving frequency, and also realizes coriolis force conduction caused by driving mass
To detection framework 20.One end of detection spring 17 is connected with detection framework 20, other end connection anchor point, and detects coupling spring 3
Detection coupling spring 3 of the other end then with adjacent mass be in series.
The larger part of the width of framework 15 is provided with stress relief hole 8 reduces the quality and auxiliary of structure to a certain extent
Releasing sacrificial layer.
Quadrature error compensating electrode 5 forms hierarchic structure with driving mass, due to the overlapping area on the right side of fixed electrode
It is bigger, by active force to the left when mass moves upwards in the case that up electrode is powered, when mass moves downward
By active force to the right.Compensated for electrostatic force direction that adjacent mass is subject on the contrary, and balancing force and drive displacement it is same
Phase, thus also with quadrature error same-phase, therefore can realize quadrature error compensation effect.
Described driving electrodes 1 and driving detecting electrode 4 employ broach electric capacity, ensure that the direction of motion and broach length
Direction is identical, overcomes the nonlinear problem of electric capacity.
Described detecting electrode 14 and self-test electrode 2 takes capacity plate antenna, ensure that the direction of motion and broach length direction
Be mutually perpendicular to, improve capacitance change, reduce required driving voltage and broach area, due to detection direction Displacement Ratio compared with
Small, the nonlinear problem of capacity plate antenna influences less.It is identical to detect the spacing of fixed electrode both sides, electricity after difference can be caused
The input capacitance of terminal is zero.
When mass moves, drive and phase occurs between detecting electrode 4 and the positive and negative terminal of detecting electrode 14 and mass
The change of opposite direction, by difference channel can out-going quality block motion.
The midpoint up and down of described mass is both provided with sharing spring 18 and drives coupling spring 21；It is each common
It is by the first folded spring 11, the second folded spring 13, first connecting rod 9, second with spring 18 or driving coupling spring 21
Connecting rod 10, coercive mechanism and anchor point 12 are formed.
Distance of the tie point of the second described folded spring 13 and anchor point 12 apart from the top of anchor point 12 should be as far as possible small, improves
The symmetry of boundary condition after symmetrical configuration.
By active force to the right when mass moves downward；The compensated for electrostatic force direction phase that adjacent mass is subject to
Instead, balancing force and drive displacement same-phase and quadrature error same-phase, the effect of quadrature error compensation is realized.
As shown in Fig. 2 its driving and detection working condition are respectively shown in a, b.The gyro uses frame structure, its work
It is to apply opposite driving voltage on two adjacent driving masses to make them produce differential motion as principle.Driving direction
Spring include sharing spring 18, drive coupling spring 21 and driving spring 7, four driving masses are by driving coupling spring
21, which intercouple, makes them remain to have close and higher displacement in spring mismatch, thus can effectively reduce required
Driving voltage.
Because the displacement of driver framework is anti-phase two-by-two, thus exist input z-axis angular speed in the case of driver framework by
This power is conducted to detection framework to the effect of the coriolis force in x directions, and by driving spring.Connecting detection framework 19
Spring includes detection spring 17, detection coupling spring 3 and the shared spring 1,2 for passing through the indirectly-acting of driving spring 7.Thus
Realize driving and four masses of detection while the effect of coupling.
As shown in figure 3, the midpoint up and down of each mass is both provided with sharing spring 18 and coupling spring 21.Often
Individual shared spring 18 and driving coupling spring 21 are by the first folded spring 11, the second stacking spring 13, first connecting rod 9, second
Connecting rod 10, coercive mechanism and anchor point 12 are formed, and when the motion of y directions occurs, are shared spring and are passed through the first folded spring 11 and second
The y directions deformation of folded spring 13 is realized, and coupling spring can only then be realized by the y directions deformation of the first folded spring 11.
Although this reduces the symmetry of structure, the coupling in y directions still can fully achieve.This foldable structure and general top
The spring used in spiral shell is similar.
Connecting rod 1 hardly bends because width is larger when x directions are moved, between first connecting rod 9 and second connecting rod 10
Hinged relationship is formed by the first folded spring 11, now the first folded spring 11 is no longer parallel with x-axis, but has necessarily
Angle.
Second connecting rod 10 after deflection and the folded spring 13 of anchor point 12 and second form a displacement amplifying mechanism, increase by the
The length of two connecting rods 10 can reduce coefficient of elasticity of the spring in x directions.Meanwhile second folded spring 13 and second connects 10 rods
Into coercive mechanism 16 exist allow structure to obtain full symmetric boundary condition.If because without coercive mechanism 16,
The top of second connecting rod 10 of asymmetric end will turn into clamped side.
As shown in figure 4, the cross section structure of chi structure 6 is wherein, the L1 of distance 1 setting should be slightly bigger than driving mass and exist
Maximum displacement in driving or detection direction；The L2 of distance 2 setting is then related to processing technology, and its size should be slightly bigger than knot
Structure deformation in the z-axis direction is in order to avoid first connecting rod 9 and driving mass are in contact.
Described above is only preferred embodiment of the present utility model, it should be understood that the utility model is not limited to herein
Disclosed form, the exclusion to other embodiment is not to be taken as, and can be used for various other combinations, modification and environment, and
It can be modified in contemplated scope described herein by the technology or knowledge of above-mentioned teaching or association area.And this area
The change and change that personnel are carried out do not depart from spirit and scope of the present utility model, then all should be in right appended by the utility model
It is required that protection domain in.
Claims (10)
1. a kind of four masses coupling micro-electro-mechanical gyroscope, including four masses, it is characterised in that：Each mass is divided
For four full symmetric units；Each mass is mainly by driver framework（19）And detection framework（20）Form, four drives
Dynamic framework（19）By driving coupling spring（21）Interconnection, two adjacent detection frameworks of upper row（20）By detecting coupling spring
（3）Two adjacent detection framework annexations of the lower row of interconnection are identical with upper row, each pair driver framework（19）And detection framework
（20）Between pass through driving spring（7）Interconnection.
A kind of 2. four masses coupling micro-electro-mechanical gyroscope according to claim 1, it is characterised in that：Each mass quilt
Four full symmetric units are divided into, wherein each unit handle includes：Driving electrodes（1）, self-test electrode（2）, detection coupling
Spring（3）, driving detecting electrode（4）, quadrature error compensating electrode（5）, chi structure（6）, driving spring（7）, detecting electrode
（14）, framework（15）, detection spring（17）, share spring（18）With driving coupling spring（21）.
A kind of 3. four masses coupling micro-electro-mechanical gyroscope according to claim 1, it is characterised in that：Described driving electricity
Pole（1）With self-test electrode（2）Arranged using differential mode；Detection spring（17）One end and framework（15）Detection framework（20）
Connection, other end connection anchor point（12）；Detect coupling spring（3）One end and the detection coupling spring of adjacent detection framework are mutually gone here and there
Connection, other end connecting detection framework（20）；Drive coupling spring（21）One end and the driving coupling spring phase of adjacent driven framework
Series connection, other end connection driver framework（19）；Share spring（18）One end and driver framework（19）Connection, other end connection anchor
Point（12）；Driving spring（7）Connect driver framework（19）And detection framework（20）；Quadrature error compensating electrode（5）With driving matter
Gauge block forms hierarchic structure.
A kind of 4. four masses coupling micro-electro-mechanical gyroscope according to claim 3, it is characterised in that：Framework（15）Width
Larger part is provided with stress relief hole（8）；Described stress relief hole（8）The quality of structure can be reduced to a certain extent
And aid in releasing sacrificial layer.
A kind of 5. four masses coupling micro-electro-mechanical gyroscope according to claim 2, it is characterised in that：Described driving electricity
Pole（1）With driving detecting electrode（4）Broach electric capacity is employed, ensures that the direction of motion is identical with broach length direction.
A kind of 6. four masses coupling micro-electro-mechanical gyroscope according to claim 2, it is characterised in that：Described detection electricity
Pole（14）With self-test electrode（2）Capacity plate antenna is taken, ensures that the direction of motion is mutually perpendicular to broach length direction.
A kind of 7. four masses coupling micro-electro-mechanical gyroscope according to claim 1, it is characterised in that：Occur in mass
During motion, detecting electrode is driven（4）And detecting electrode（14）The change of opposite direction occurs between positive and negative terminal and mass, passes through
Difference channel can out-going quality block motion.
A kind of 8. four masses coupling micro-electro-mechanical gyroscope according to claim 2, it is characterised in that：Described mass
Midpoint up and down be both provided with share spring（18）With driving coupling spring（21）；Each shared spring（18）Or drive
Dynamic coupling spring（21）It is by the first folded spring（11）, the second folded spring（13）, first connecting rod（9）, second connecting rod
（10）, coercive mechanism and anchor point（12）Form.
A kind of 9. four masses coupling micro-electro-mechanical gyroscope according to claim 8, it is characterised in that：Second folded spring
（13）With anchor point（12）Tie point apart from anchor point（12）The distance on top should be as far as possible small, improves perimeter strip after symmetrical configuration
The symmetry of part.
A kind of 10. four masses coupling micro-electro-mechanical gyroscope according to claim 1, it is characterised in that：Mass is downward
By active force to the right during motion；The compensated for electrostatic force direction that adjacent mass is subject to is on the contrary, balancing force and drive displacement
Same-phase and quadrature error same-phase, realize the effect of quadrature error compensation.
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| CN201720484245.5U CN206683650U (en) | 2017-05-04 | 2017-05-04 | A kind of four masses coupling micro-electro-mechanical gyroscope |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106940182A (en) * | 2017-05-04 | 2017-07-11 | 成都振芯科技股份有限公司 | A kind of four masses coupling micro-electro-mechanical gyroscope |
| CN108061546A (en) * | 2017-12-04 | 2018-05-22 | 成都振芯科技股份有限公司 | The bilingual coupling gyroscope of four mass |
-
2017
- 2017-05-04 CN CN201720484245.5U patent/CN206683650U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106940182A (en) * | 2017-05-04 | 2017-07-11 | 成都振芯科技股份有限公司 | A kind of four masses coupling micro-electro-mechanical gyroscope |
| CN108061546A (en) * | 2017-12-04 | 2018-05-22 | 成都振芯科技股份有限公司 | The bilingual coupling gyroscope of four mass |
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Granted publication date: 20171128 Termination date: 20190504 |