CN106940182A - A kind of four masses coupling micro-electro-mechanical gyroscope - Google Patents
A kind of four masses coupling micro-electro-mechanical gyroscope Download PDFInfo
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- CN106940182A CN106940182A CN201710306761.3A CN201710306761A CN106940182A CN 106940182 A CN106940182 A CN 106940182A CN 201710306761 A CN201710306761 A CN 201710306761A CN 106940182 A CN106940182 A CN 106940182A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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Abstract
Micro-electro-mechanical gyroscope is coupled the invention discloses a kind of four mass, is related to microcomputer gyroscope field.A kind of four masses coupling micro-electro-mechanical gyroscope, including four masses, each mass are divided into four full symmetric units；Each mass is main by driver framework（19）And detection framework（20）Constitute, four driver frameworks（19）By driving coupling spring（21）Interconnection, two neighboring detection framework（20）By detecting coupling spring（3）Interconnection, each pair driver framework（19）And detection framework（20）Between pass through driving spring（7）Interconnection.The present invention provides a kind of four masses coupling micro-electro-mechanical gyroscope, and the structure that realization driving and detection quality are coupled simultaneously is to overcome the shortcoming that driving voltage is higher, so as to improve performance requirement of the sensor for circuit part.
Description
Technical field
The present invention relates to microcomputer gyroscope field, especially a kind of four masses coupling micro-electro-mechanical gyroscope.
Background technology
With the development of micro mechanical technology, there is increasing MEMS to realize commercial even army in recent years
With.Wherein, MEMS inertial sensor achieves very big success in automotive electronics, inertial navigation and portable equipment.
MEMS gyroscope is substantially the angular-rate sensor realized by Coriolis effect.It is by the stress of mass
（That is coriolis force）Linked together with additional angular speed, then stress is converted into by position by Hooke's law and second order dynamical system
Move, and realize using certain displacement detecting mechanism the detection of angular velocity.
MEMS gyroscope generally comprises linear oscillator or mass, detection mass and the corresponding driving of angular oscillation
And detection means.In order to realize for the interference of various external common-modes（Such as vibration, acceleration and mechanical shock）Suppression, MEMS
Gyroscope generally has even number to drive and detection mass, and is generally in symmetrical structure.Wherein, adjacent mass motion side
To all on the contrary, so as to realize differential effect, and four mass block structures to have preferably suppress and imitate for various common mode mechanical disturbances
Really.
Detection mass is exactly coupled by the mode of other suppression common mode interference by spring, thus may be used
With in the parameter of different detection masses（Mainly coefficient of elasticity）Occur that their detecting positions are greatly lowered in the case of mismatch
The mismatch of shifting.
But it is due to that common MEMS technology flow can be only formed planar structure, if detection mass is coupling in by selection
Will result in driving mass together can not couple, and equivalent driving quality factor also just be reduced, so as to need bigger driving
Voltage could realize identical drive amplitude.
The content of the invention
Micro-electro-mechanical gyroscope is coupled it is an object of the invention to overcome the deficiencies of the prior art and provide a kind of four mass,
The structure that driving and detection quality are coupled simultaneously is to overcome the shortcoming that driving voltage is higher, so as to improve sensor for circuit portion
The performance requirement divided.
The purpose of the present invention is achieved through the following technical solutions：A kind of four masses coupling micro-electro-mechanical gyroscope,
Including four masses, each mass is divided into four full symmetric units；Each mass is main by driving frame
Frame and detection framework are constituted, and four driver frameworks are interconnected by driving coupling spring, and two detection frameworks of upper row pass through detection
The annexation of the lower row of coupling spring interconnection is identical with upper row, mutual by driving spring between each pair driver framework and detection framework
Even.
It is preferred that, described driving coupling bomb can also be deformed upon when sensed-mode.
It is preferred that, each mass is divided into four full symmetric units, wherein each unit handle includes：Driving electricity
Pole, self-inspection electrode, detection coupling spring, driving detecting electrode, quadrature error compensating electrode, chi structure, driving spring, detection
Electrode, framework, detection spring, shared spring and driving coupling spring；
It is preferred that, described driving electrodes and self-inspection electrode are arranged using differential mode；One end of detection spring and the inspection of framework
Survey framework connection, other end connection anchor point；Detection coupling spring one end and the detection coupling spring of adjacent detection framework are in series,
Other end connecting detection framework；Driving coupling spring one end and the driving coupling spring of adjacent driven framework are in series, the other end
Connect driver framework；The one end for sharing spring is connected with driver framework, other end connection anchor point；Driving spring connects driver framework
And detection framework；Quadrature error compensating electrode and driving mass formation hierarchic structure.
It is preferred that, the larger part of frame width is provided with stress relief hole；Described stress relief hole can necessarily journey
The quality of structure is reduced on degree and releasing sacrificial layer is aided in.
It is preferred that, described driving electrodes and driving detecting electrode employ broach electric capacity, it is ensured that the direction of motion and broach
Length direction is identical.
It is preferred that, described detecting electrode and self-inspection electrode takes capacity plate antenna, it is ensured that the direction of motion and broach length side
To being mutually perpendicular to.
It is preferred that, when mass is moved, sent out between driving detecting electrode and detecting electrode positive and negative terminal and mass
The change of raw opposite direction, by difference channel can out-going quality block motion.
It is preferred that, the midpoint up and down of described mass is both provided with sharing spring and drives coupling spring；Often
Individual shared spring or driving coupling spring be by the first folded spring, the second folded spring, first connecting rod, second connecting rod,
Coercive mechanism and anchor point are constituted.
It is preferred that, coercive mechanism is image point, the central point or anchor point of the first folded spring, and its effect is to allow first connecting rod
There can be certain angle between second connecting rod and the first folded spring and anchor point.
It is preferred that, the distance of the tie point of the second folded spring and anchor point apart from anchor point top should be as far as possible small, and raising finishes
The symmetry of boundary condition after structure is symmetrical.
It is preferred that, by active force to the right when mass is moved downward；The compensated for electrostatic power that adjacent mass is subject to
In the opposite direction, balancing force and drive displacement same-phase and quadrature error same-phase, realize the effect of quadrature error compensation.
The beneficial effects of the invention are as follows：A kind of four masses coupling micro-electro-mechanical gyroscope is provided, driving and detection quality are same
When the structure that couples to overcome the shortcoming that driving voltage is higher, will so as to improve performance requirement of the sensor for circuit part
Framework and Internal moving mass are all coupled, so as to obtain higher driving Q values simultaneously, can reduce driving voltage or lifting letter
Make an uproar than with higher common mode inhibition capacity.
Brief description of the drawings
Fig. 1 is a mass a quarter structure chart of the invention；
Fig. 2 is driving and detection working state figure；
Fig. 3 is that gyroscope shares/coupling spring structural representation；
Fig. 4 is chi structure schematic cross-section；
Accompanying drawing main element explanation：Driving electrodes 1, self-inspection electrode 2, detection coupling spring 3, driving detecting electrode 4, quadrature error
Compensating electrode 5, chi structure 6, driving spring 7, stress relief hole 8, first connecting rod 9, second connecting rod 10, the first folded spring
11st, anchor point 12, the second folded spring 13, detecting electrode 14, framework 15, coercive mechanism 16, detection spring 17, shared spring 18, drive
Move framework 19, detection framework 20, drive coupling spring 21, apart from 1L1 and apart from 2L2.
Embodiment
Technical scheme is described in further detail below in conjunction with the accompanying drawings, but protection scope of the present invention is not limited to
It is as described below.
As shown in figure 1, a kind of four masses coupling micro-electro-mechanical gyroscope includes four masses, wherein adjacent mass
The direction of motion is all on the contrary, so as to realize differential effect；Each mass is divided into four full symmetric parts, single quality
The a quarter of block, it includes：Driving electrodes 1, driving detecting electrode 4, self-inspection electrode 2, quadrature error compensating electrode 5, detection
Electrode 14, driving spring 7, detection spring 17, detection coupling spring 3 and framework 15；
Described driving electrodes 1 and self-inspection electrode 2 are arranged using differential mode, and when applying voltage, mass is moved, and is driven
The dynamic change that opposite direction occurs between detecting electrode 4 and the positive and negative terminal of detecting electrode 14 and mass, passes through difference channel
The motion of out-going quality block.
Driving spring 7 is mainly responsible for control driving frequency, and also realizes the coriolis force conduction that mass will be driven to produce
To detection framework 20.One end of detection spring 17 is connected with detection framework 20, other end connection anchor point, and detects coupling spring 3
Detection coupling spring 3 of the other end then with adjacent mass be in series.
The larger part of the width of framework 15 is provided with stress relief hole 8 reduces the quality and auxiliary of structure to a certain extent
Releasing sacrificial layer.
Quadrature error compensating electrode 5 and driving mass formation hierarchic structure, due to the overlapping area on the right side of fixed electrode
It is bigger, by active force to the left when mass is moved upwards in the case that up electrode is powered, when mass is moved downward
By active force to the right.The compensated for electrostatic force direction that adjacent mass is subject to is on the contrary, and balancing force and drive displacement are same
Phase, thus also with quadrature error same-phase, therefore can realize quadrature error compensation effect.
Described driving electrodes 1 and driving detecting electrode 4 employ broach electric capacity, it is ensured that the direction of motion and broach length
Direction is identical, overcomes the nonlinear problem of electric capacity.
Described detecting electrode 14 and self-inspection electrode 2 takes capacity plate antenna, it is ensured that the direction of motion and broach length direction
Be mutually perpendicular to, improve capacitance change, driving voltage and broach area needed for reduction, due to detection direction Displacement Ratio compared with
Small, the nonlinear problem influence of capacity plate antenna is little.Detect that the spacing of fixed electrode both sides is identical, can cause electric after difference
The input capacitance of terminal is zero.
When mass is moved, occurs phase between driving detecting electrode 4 and the positive and negative terminal of detecting electrode 14 and mass
The change of opposite direction, by difference channel can out-going quality block motion.
The midpoint up and down of described mass is both provided with sharing spring 18 and drives coupling spring 21；It is each common
It is by the first folded spring 11, the second folded spring 13, first connecting rod 9, second with spring 18 or driving coupling spring 21
Connecting rod 10, coercive mechanism and anchor point 12 are constituted.
Distance of the tie point of the second described folded spring 13 and anchor point 12 apart from the top of anchor point 12 should be as far as possible small, improves
The symmetry of boundary condition after symmetrical configuration.
By active force to the right when mass is moved downward；The compensated for electrostatic force direction phase that adjacent mass is subject to
Instead, balancing force and drive displacement same-phase and quadrature error same-phase, realize the effect of quadrature error compensation.
As shown in Fig. 2 its driving and detection working condition are respectively shown in a, b.The gyro uses frame structure, its work
It is to apply opposite driving voltage on two adjacent driving masses to make them produce differential motion as principle.Driving direction
Spring include sharing spring 18, driving coupling spring 21 and driving spring 7, four driving masses are by driving coupling spring
21, which intercouple, makes them be remained in spring mismatch with close and higher displacement, needed for thus can effectively reducing
Driving voltage.
Because the displacement of driver framework is anti-phase two-by-two, thus exist input z-axis angular speed in the case of driver framework by
This power is conducted to detection framework to the effect of the coriolis force in x directions, and by driving spring.Connecting detection framework 19
Spring includes detection spring 17, detection coupling spring 3 and the shared spring 1,2 for passing through the indirectly-acting of driving spring 7.Thus
Driving and four masses of detection are realized while the effect coupled.
As shown in figure 3, the midpoint up and down of each mass is both provided with sharing spring 18 and coupling spring 21.Often
Individual shared spring 18 is by the first folded spring 11, the second stacking spring 13, first connecting rod 9, second with driving coupling spring 21
Connecting rod 10, coercive mechanism and anchor point 12 are constituted, and when occurring the motion of y directions, are shared spring and are passed through the first folded spring 11 and second
The y directions deformation of folded spring 13 is realized, and coupling spring can only then be realized by the y directions deformation of the first folded spring 11.
Although this reduces the symmetry of structure, the coupling in y directions still can be fully achieved.This foldable structure and general top
The spring used in spiral shell is similar.
Connecting rod 1 hardly bends because width is larger when x directions are moved, between first connecting rod 9 and second connecting rod 10
By the first folded spring 11 formation hinged relationship, now the first folded spring 11 is no longer parallel with x-axis, but has necessarily
Angle.
Second connecting rod 10 after deflection and the folded spring 13 of anchor point 12 and second one displacement amplifying mechanism of formation, increase by the
The length of two connecting rods 10 can reduce coefficient of elasticity of the spring in x directions.Meanwhile, the second folded spring 13 and second connects 10 rods
Into coercive mechanism 16 exist allow structure to obtain full symmetric boundary condition.If because without coercive mechanism 16,
The top of second connecting rod 10 of asymmetric end will turn into clamped side.
As shown in figure 4, the cross section structure of chi structure 6 is wherein, the L1 of distance 1 setting should be slightly bigger than driving mass and exist
Maximum displacement in driving or detection direction；The L2 of distance 2 setting is then related to processing technology, and its size should be slightly bigger than knot
Structure deformation in the z-axis direction is in order to avoid first connecting rod 9 and driving mass come in contact.
The above is only the preferred embodiment of the present invention, it should be understood that the present invention is not limited to described herein
Form, is not to be taken as the exclusion to other embodiment, and available for various other combinations, modification and environment, and can be at this
In the text contemplated scope, it is modified by the technology or knowledge of above-mentioned teaching or association area.And those skilled in the art are entered
Capable change and change does not depart from the spirit and scope of the present invention, then all should appended claims of the present invention protection domain
It is interior.
Claims (10)
1. a kind of four mass couples micro-electro-mechanical gyroscope, including four masses, it is characterised in that：Each mass is divided
For four full symmetric units；Each mass is main by driver framework（19）And detection framework（20）Constitute, four drives
Dynamic framework（19）By driving coupling spring（21）Interconnection, two adjacent detection frameworks of upper row（20）By detecting coupling spring
（3）Two adjacent detection framework annexations of the lower row of interconnection are identical with upper row, each pair driver framework（19）And detection framework
（20）Between pass through driving spring（7）Interconnection.
2. a kind of four masses coupling micro-electro-mechanical gyroscope according to claim 1, it is characterised in that：Each mass quilt
Four full symmetric units are divided into, wherein each unit handle includes：Driving electrodes（1）, self-inspection electrode（2）, detection coupling
Spring（3）, driving detecting electrode（4）, quadrature error compensating electrode（5）, chi structure（6）, driving spring（7）, detecting electrode
（14）, framework（15）, detection spring（17）, share spring（18）With driving coupling spring（21）.
3. a kind of four masses coupling micro-electro-mechanical gyroscope according to claim 1, it is characterised in that：Described driving electricity
Pole（1）With self-inspection electrode（2）Arranged using differential mode；Detection spring（17）One end and framework（15）Detection framework（20）
Connection, other end connection anchor point（12）；Detect coupling spring（3）One end and the detection coupling spring of adjacent detection framework are mutually gone here and there
Connection, other end connecting detection framework（20）；Drive coupling spring（21）One end and the driving coupling spring phase of adjacent driven framework
Series connection, other end connection driver framework（19）；Share spring（18）One end and driver framework（19）Connection, other end connection anchor
Point（12）；Driving spring（7）Connect driver framework（19）And detection framework（20）；Quadrature error compensating electrode（5）With driving matter
Gauge block formation hierarchic structure.
4. a kind of four masses coupling micro-electro-mechanical gyroscope according to claim 3, it is characterised in that：Framework（15）Width
Larger part is provided with stress relief hole（8）；Described stress relief hole（8）The quality of structure can be reduced to a certain extent
And aid in releasing sacrificial layer.
5. a kind of four masses coupling micro-electro-mechanical gyroscope according to claim 2, it is characterised in that：Described driving electricity
Pole（1）With driving detecting electrode（4）Employ broach electric capacity, it is ensured that the direction of motion is identical with broach length direction.
6. a kind of four masses coupling micro-electro-mechanical gyroscope according to claim 2, it is characterised in that：Described detection electricity
Pole（14）With self-inspection electrode（2）Take capacity plate antenna, it is ensured that the direction of motion is mutually perpendicular to broach length direction.
7. a kind of four masses coupling micro-electro-mechanical gyroscope according to claim 1, it is characterised in that：Occur in mass
During motion, detecting electrode is driven（4）And detecting electrode（14）The change of opposite direction occurs between positive and negative terminal and mass, passes through
Difference channel can out-going quality block motion.
8. a kind of four masses coupling micro-electro-mechanical gyroscope according to claim 2, it is characterised in that：Described mass
Midpoint up and down be both provided with share spring（18）With driving coupling spring（21）；Each share spring（18）Or drive
Dynamic coupling spring（21）It is by the first folded spring（11）, the second folded spring（13）, first connecting rod（9）, second connecting rod
（10）, coercive mechanism and anchor point（12）Constitute.
9. a kind of four masses coupling micro-electro-mechanical gyroscope according to claim 8, it is characterised in that：Second folded spring
（13）With anchor point（12）Tie point apart from anchor point（12）The distance on top should be as far as possible small, improves perimeter strip after symmetrical configuration
The symmetry of part.
10. a kind of four masses coupling micro-electro-mechanical gyroscope according to claim 1, it is characterised in that：Mass is downward
By active force to the right during motion；The compensated for electrostatic force direction that adjacent mass is subject to is on the contrary, balancing force and drive displacement
Same-phase and quadrature error same-phase, realize the effect of quadrature error compensation.
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| CN107167123A (en) * | 2017-06-09 | 2017-09-15 | 深迪半导体(上海)有限公司 | A kind of micro electronmechanical two axis gyroscope instrument |
| CN111410168A (en) * | 2020-04-26 | 2020-07-14 | 中国兵器工业集团第二一四研究所苏州研发中心 | Mass discretization MEMS device impact-resistant structure and design method |
| CN112129278A (en) * | 2020-09-15 | 2020-12-25 | 浙江大学 | Gate structure capable of reducing nonlinearity between capacitance and displacement caused by capacitance edge effect |
| CN113091722A (en) * | 2021-04-02 | 2021-07-09 | 瑞声开泰科技(武汉)有限公司 | Three-axis micromechanical gyroscope and angular velocity measuring method |
| CN116147599A (en) * | 2023-04-18 | 2023-05-23 | 华芯拓远(天津)科技有限公司 | Four-mass full-differential double-shaft MEMS gyroscope |
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| CN111410168A (en) * | 2020-04-26 | 2020-07-14 | 中国兵器工业集团第二一四研究所苏州研发中心 | Mass discretization MEMS device impact-resistant structure and design method |
| CN112129278A (en) * | 2020-09-15 | 2020-12-25 | 浙江大学 | Gate structure capable of reducing nonlinearity between capacitance and displacement caused by capacitance edge effect |
| CN113091722A (en) * | 2021-04-02 | 2021-07-09 | 瑞声开泰科技(武汉)有限公司 | Three-axis micromechanical gyroscope and angular velocity measuring method |
| CN116147599A (en) * | 2023-04-18 | 2023-05-23 | 华芯拓远(天津)科技有限公司 | Four-mass full-differential double-shaft MEMS gyroscope |
| CN116147599B (en) * | 2023-04-18 | 2023-06-23 | 华芯拓远(天津)科技有限公司 | Four-mass full-differential double-shaft MEMS gyroscope |
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| CN106940182B (en) | 2023-05-23 |
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