CN100422678C - 蒸气收集方法及设备 - Google Patents

蒸气收集方法及设备 Download PDF

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Publication number
CN100422678C
CN100422678C CNB2004800108951A CN200480010895A CN100422678C CN 100422678 C CN100422678 C CN 100422678C CN B2004800108951 A CNB2004800108951 A CN B2004800108951A CN 200480010895 A CN200480010895 A CN 200480010895A CN 100422678 C CN100422678 C CN 100422678C
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CN
China
Prior art keywords
gap
gas
chamber
control
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2004800108951A
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English (en)
Chinese (zh)
Other versions
CN1777784A (zh
Inventor
克雷格·A·米勒
尼马尔·K·贾殷
威廉·B·科尔布
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication date
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Publication of CN1777784A publication Critical patent/CN1777784A/zh
Application granted granted Critical
Publication of CN100422678C publication Critical patent/CN100422678C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B13/00—Machines and apparatus for drying fabrics, fibres, yarns, or other materials in long lengths, with progressive movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B13/00—Machines and apparatus for drying fabrics, fibres, yarns, or other materials in long lengths, with progressive movement
    • F26B13/10—Arrangements for feeding, heating or supporting materials; Controlling movement, tension or position of materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B13/00—Machines and apparatus for drying fabrics, fibres, yarns, or other materials in long lengths, with progressive movement
    • F26B13/005—Seals, locks, e.g. gas barriers for web drying enclosures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
    • F26B25/005—Treatment of dryer exhaust gases
    • F26B25/006—Separating volatiles, e.g. recovering solvents from dryer exhaust gases

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Drying Of Solid Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Drying Of Semiconductors (AREA)
CNB2004800108951A 2003-04-23 2004-03-08 蒸气收集方法及设备 Expired - Fee Related CN100422678C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/421,195 US20030230003A1 (en) 2000-09-24 2003-04-23 Vapor collection method and apparatus
US10/421,195 2003-04-23

Publications (2)

Publication Number Publication Date
CN1777784A CN1777784A (zh) 2006-05-24
CN100422678C true CN100422678C (zh) 2008-10-01

Family

ID=33309574

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2004800108951A Expired - Fee Related CN100422678C (zh) 2003-04-23 2004-03-08 蒸气收集方法及设备

Country Status (9)

Country Link
US (3) US20030230003A1 (https=)
EP (1) EP1620688B1 (https=)
JP (2) JP2006524309A (https=)
KR (1) KR101100461B1 (https=)
CN (1) CN100422678C (https=)
AT (1) ATE518105T1 (https=)
BR (1) BRPI0409605A (https=)
MX (1) MXPA05011288A (https=)
WO (1) WO2004094930A1 (https=)

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BRPI0707331A2 (pt) * 2006-01-25 2011-05-03 Bekaert Sa Nv sistema de convecção para instalação de secadora
JP4527670B2 (ja) 2006-01-25 2010-08-18 東京エレクトロン株式会社 加熱処理装置、加熱処理方法、制御プログラムおよびコンピュータ読取可能な記憶媒体
US7877895B2 (en) 2006-06-26 2011-02-01 Tokyo Electron Limited Substrate processing apparatus
JP4901395B2 (ja) * 2006-09-26 2012-03-21 富士フイルム株式会社 塗布膜の乾燥方法
CN101865852A (zh) * 2010-03-16 2010-10-20 苏州市玮琪生物科技有限公司 一种总胆固醇比色卡
ES2625072T3 (es) 2011-08-11 2017-07-18 Avery Dennison Corporation Secador de placas y método de secado de revestimientos a base de disolvente
US20190283063A1 (en) * 2018-03-14 2019-09-19 Adam Zax Method and apparatus for inline coating of substrates
DE102018124521A1 (de) 2018-10-04 2020-04-09 Brückner Maschinenbau GmbH & Co. KG Behandlungsanlage für eine durch einen Behandlungsofen hindurchführbare flexible Materialbahn, insbesondere Kunststofffolie
WO2022191997A1 (en) * 2021-03-08 2022-09-15 Monsanto Technology Llc Systems and methods for long-term pollen storage
KR102472215B1 (ko) 2022-01-11 2022-11-30 주식회사 강원이솔루션 전기히터를 구비한, 이차전지 제조용 분말원료 건조장치
CN116288940B (zh) * 2023-03-17 2023-10-10 浙江中超新材料股份有限公司 一种三层式喷胶干燥箱及其控制方法

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US20020095818A1 (en) * 2000-09-24 2002-07-25 Jain Nirmal K. Vapor collection method and apparatus
CN1357485A (zh) * 2000-12-06 2002-07-10 富士胶片株式会社 无接触基材输送装置

Also Published As

Publication number Publication date
MXPA05011288A (es) 2006-01-24
US7971370B2 (en) 2011-07-05
CN1777784A (zh) 2006-05-24
JP2006524309A (ja) 2006-10-26
WO2004094930A1 (en) 2004-11-04
US7918038B2 (en) 2011-04-05
JP2010281563A (ja) 2010-12-16
US20060179680A1 (en) 2006-08-17
US20060191160A1 (en) 2006-08-31
KR20050114726A (ko) 2005-12-06
KR101100461B1 (ko) 2011-12-29
ATE518105T1 (de) 2011-08-15
BRPI0409605A (pt) 2006-04-18
US20030230003A1 (en) 2003-12-18
EP1620688B1 (en) 2011-07-27
EP1620688A1 (en) 2006-02-01

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20081001

Termination date: 20200308