CN100421263C - 用于薄膜晶体管的多晶硅薄膜和使用该多晶硅薄膜的器件 - Google Patents
用于薄膜晶体管的多晶硅薄膜和使用该多晶硅薄膜的器件 Download PDFInfo
- Publication number
- CN100421263C CN100421263C CNB031327869A CN03132786A CN100421263C CN 100421263 C CN100421263 C CN 100421263C CN B031327869 A CNB031327869 A CN B031327869A CN 03132786 A CN03132786 A CN 03132786A CN 100421263 C CN100421263 C CN 100421263C
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- Prior art keywords
- tft
- active channel
- grain boundary
- probability
- transistor
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- Expired - Lifetime
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 43
- 229920005591 polysilicon Polymers 0.000 title claims description 39
- 239000010409 thin film Substances 0.000 title abstract description 12
- 239000010408 film Substances 0.000 title 1
- 230000014509 gene expression Effects 0.000 claims abstract description 21
- 239000012528 membrane Substances 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 21
- 239000013078 crystal Substances 0.000 abstract description 26
- 230000000694 effects Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 19
- 230000008569 process Effects 0.000 description 17
- 239000011159 matrix material Substances 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000002425 crystallisation Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 239000002800 charge carrier Substances 0.000 description 6
- 230000008025 crystallization Effects 0.000 description 6
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000002596 correlated effect Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- UPLPHRJJTCUQAY-WIRWPRASSA-N 2,3-thioepoxy madol Chemical compound C([C@@H]1CC2)[C@@H]3S[C@@H]3C[C@]1(C)[C@@H]1[C@@H]2[C@@H]2CC[C@](C)(O)[C@@]2(C)CC1 UPLPHRJJTCUQAY-WIRWPRASSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000012938 design process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
- H01L27/1274—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor
- H01L27/1285—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1296—Multistep manufacturing methods adapted to increase the uniformity of device parameters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/7866—Non-monocrystalline silicon transistors
- H01L29/78672—Polycrystalline or microcrystalline silicon transistor
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Thin Film Transistor (AREA)
- Recrystallisation Techniques (AREA)
- Liquid Crystal (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR39495/02 | 2002-07-08 | ||
KR10-2002-0039495A KR100483987B1 (ko) | 2002-07-08 | 2002-07-08 | 티에프티용 다결정 실리콘 박막 및 이를 사용한 디바이스 |
KR39495/2002 | 2002-07-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1495913A CN1495913A (zh) | 2004-05-12 |
CN100421263C true CN100421263C (zh) | 2008-09-24 |
Family
ID=29728780
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031327869A Expired - Lifetime CN100421263C (zh) | 2002-07-08 | 2003-07-08 | 用于薄膜晶体管的多晶硅薄膜和使用该多晶硅薄膜的器件 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6825494B2 (zh) |
EP (1) | EP1381089B1 (zh) |
JP (1) | JP4338463B2 (zh) |
KR (1) | KR100483987B1 (zh) |
CN (1) | CN100421263C (zh) |
DE (1) | DE60329441D1 (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200414280A (en) * | 2002-09-25 | 2004-08-01 | Adv Lcd Tech Dev Ct Co Ltd | Semiconductor device, annealing method, annealing apparatus and display apparatus |
KR100454751B1 (ko) * | 2002-10-21 | 2004-11-03 | 삼성에스디아이 주식회사 | 듀얼 또는 멀티플 게이트를 사용하는 티에프티의 제조 방법 |
KR100501700B1 (ko) * | 2002-12-16 | 2005-07-18 | 삼성에스디아이 주식회사 | 엘디디/오프셋 구조를 구비하고 있는 박막 트랜지스터 |
CN1324540C (zh) * | 2003-06-05 | 2007-07-04 | 三星Sdi株式会社 | 具有多晶硅薄膜晶体管的平板显示装置 |
US8329557B2 (en) * | 2009-05-13 | 2012-12-11 | Silicon Genesis Corporation | Techniques for forming thin films by implantation with reduced channeling |
KR101094285B1 (ko) * | 2009-12-04 | 2011-12-19 | 삼성모바일디스플레이주식회사 | 박막트랜지스터 및 이를 포함하는 표시장치 |
KR102512718B1 (ko) * | 2016-03-17 | 2023-03-23 | 삼성디스플레이 주식회사 | 박막트랜지스터 기판 및 이를 구비한 유기 발광 표시 장치, 박막트랜지스터 기판의 제조방법 |
CN105762196B (zh) * | 2016-05-16 | 2018-09-18 | 京东方科技集团股份有限公司 | 一种薄膜晶体管、其制作方法及相应装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1112287A (zh) * | 1993-12-20 | 1995-11-22 | 夏普公司 | 半导体器件及其制造方法 |
CN1118521A (zh) * | 1994-06-15 | 1996-03-13 | 夏普公司 | 半导体器件、其生产方法及其在液晶显示器的应用 |
JP2000243969A (ja) * | 1999-02-24 | 2000-09-08 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタとその製造方法及びそれを用いた液晶表示装置とその製造方法 |
US6117752A (en) * | 1997-08-12 | 2000-09-12 | Kabushiki Kaisha Toshiba | Method of manufacturing polycrystalline semiconductor thin film |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997045827A1 (en) | 1996-05-28 | 1997-12-04 | The Trustees Of Columbia University In The City Of New York | Crystallization processing of semiconductor film regions on a substrate, and devices made therewith |
KR20010071526A (ko) * | 1998-07-06 | 2001-07-28 | 모리시타 요이찌 | 박막 트랜지스터와 액정표시장치 |
JP2000243968A (ja) * | 1999-02-24 | 2000-09-08 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタとその製造方法及びそれを用いた液晶表示装置とその製造方法 |
US6177391B1 (en) | 1999-05-27 | 2001-01-23 | Alam Zafar | One time use disposable soap and method of making |
KR100303142B1 (ko) * | 1999-10-29 | 2001-11-02 | 구본준, 론 위라하디락사 | 액정표시패널의 제조방법 |
JP4732599B2 (ja) * | 2001-01-26 | 2011-07-27 | 株式会社日立製作所 | 薄膜トランジスタ装置 |
KR100483985B1 (ko) * | 2001-11-27 | 2005-04-15 | 삼성에스디아이 주식회사 | 박막 트랜지스터용 다결정 실리콘 박막 및 이를 사용한디바이스 |
KR100462862B1 (ko) * | 2002-01-18 | 2004-12-17 | 삼성에스디아이 주식회사 | 티에프티용 다결정 실리콘 박막 및 이를 이용한디스플레이 디바이스 |
-
2002
- 2002-07-08 KR KR10-2002-0039495A patent/KR100483987B1/ko active IP Right Grant
-
2003
- 2003-06-05 US US10/454,612 patent/US6825494B2/en not_active Expired - Lifetime
- 2003-07-08 EP EP03090204A patent/EP1381089B1/en not_active Expired - Lifetime
- 2003-07-08 DE DE60329441T patent/DE60329441D1/de not_active Expired - Lifetime
- 2003-07-08 JP JP2003271874A patent/JP4338463B2/ja not_active Expired - Lifetime
- 2003-07-08 CN CNB031327869A patent/CN100421263C/zh not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1112287A (zh) * | 1993-12-20 | 1995-11-22 | 夏普公司 | 半导体器件及其制造方法 |
CN1118521A (zh) * | 1994-06-15 | 1996-03-13 | 夏普公司 | 半导体器件、其生产方法及其在液晶显示器的应用 |
US6117752A (en) * | 1997-08-12 | 2000-09-12 | Kabushiki Kaisha Toshiba | Method of manufacturing polycrystalline semiconductor thin film |
JP2000243969A (ja) * | 1999-02-24 | 2000-09-08 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタとその製造方法及びそれを用いた液晶表示装置とその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR100483987B1 (ko) | 2005-04-15 |
EP1381089B1 (en) | 2009-09-30 |
CN1495913A (zh) | 2004-05-12 |
EP1381089A3 (en) | 2004-06-16 |
EP1381089A2 (en) | 2004-01-14 |
JP4338463B2 (ja) | 2009-10-07 |
JP2004040111A (ja) | 2004-02-05 |
US20040004219A1 (en) | 2004-01-08 |
US6825494B2 (en) | 2004-11-30 |
DE60329441D1 (de) | 2009-11-12 |
KR20040005184A (ko) | 2004-01-16 |
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C06 | Publication | ||
PB01 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20090109 Address after: Gyeonggi Do, South Korea Patentee after: Samsung Mobile Display Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: Samsung SDI Co.,Ltd. |
|
ASS | Succession or assignment of patent right |
Owner name: SAMSUNG MOBILE DISPLAY CO., LTD. Free format text: FORMER OWNER: SAMSUNG SDI CO., LTD. Effective date: 20090109 |
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ASS | Succession or assignment of patent right |
Owner name: SAMSUNG DISPLAY CO., LTD. Free format text: FORMER OWNER: SAMSUNG MOBILE DISPLAY CO., LTD. Effective date: 20121101 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20121101 Address after: Gyeonggi Do, South Korea Patentee after: SAMSUNG DISPLAY Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: Samsung Mobile Display Co.,Ltd. |
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CX01 | Expiry of patent term |
Granted publication date: 20080924 |
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CX01 | Expiry of patent term |