CN100365674C - Flat panel display and method of fabricating the same - Google Patents

Flat panel display and method of fabricating the same Download PDF

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Publication number
CN100365674C
CN100365674C CNB2004100471951A CN200410047195A CN100365674C CN 100365674 C CN100365674 C CN 100365674C CN B2004100471951 A CNB2004100471951 A CN B2004100471951A CN 200410047195 A CN200410047195 A CN 200410047195A CN 100365674 C CN100365674 C CN 100365674C
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gate line
grid
flat
panel monitor
photoresist pattern
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CN1629907A (en
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朴商一
具在本
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Samsung Display Co Ltd
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Samsung SDI Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits

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  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Thin Film Transistor (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

Disclosed is a flat panel display which comprises a substrate; a gate line formed on the substrate along a predetermined direction; and a gate electrode electrically connected to the gate line, and having a sheet resistance different from the gate line. With this configuration, a wiring resistance of the gate line can be lowered with minimizing the change of the process and without increasing the thickness of the gate line.

Description

The method of flat-panel monitor and this flat-panel monitor of manufacturing
Cross reference to related application
The application requires its disclosure to be quoted in full to do reference at this in the right of the 2003-87793 korean patent application of submission on November 29th, 2003.
Technical field
The method that the present invention relates to a kind of flat-panel monitor and make this flat-panel monitor relates in particular to a kind of active matrix flat panel display and manufacture method thereof.
Background technology
Active matrix flat panel display is equipped with the pixel that is arranged to matrix form.In active matrix flat panel display, pixel comprises at least one thin film transistor (TFT), a pixel electrode and a different in nature electrode corresponding with this pixel electrode by this thin film transistor (TFT) control.If between pixel electrode and different in nature electrode, insert an organic luminous layer, be referred to as organic light emitting apparatus, and if insert a liquid crystal layer betwixt, then be called LCD.
This active matrix flat panel display comprises the pixel that is defined by a plurality of gate lines and a plurality of data line.These pixels are arranged with matrix form, and the pixel that these journey matrix types are arranged is called as pel array.Provide the gate driver circuit of sweep signal and the data drive circuit that data-signal is provided to data line in the peripheral disposition of pel array one by one to gate line.
Here, the cloth line resistance of gate line can cause being occurred postponing by the sweep signal that gate driver circuit provides to gate line.Further, the delay of this sweep signal makes the image quality deterioration at the pixel place that is provided with away from gate driver circuit.Therefore, along with the board device maximization that becomes, problem such in flat-panel monitor is serious day by day.
In order to address the above problem, arrange another gate driver circuit again in the periphery of pel array, such gate line just can receive sweep signal from two gate driver circuits of both sides.But, this structure can increase dull and stereotyped size.
In order to address the above problem, another kind of method is the thickness that increases gate line, and its sheet resistance will reduce like this.But, thick gate line can cause and other layer between the stress equilibrium problem.
Summary of the invention
The method that each side of the present invention provides a kind of flat-panel monitor and made this flat-panel monitor has wherein reduced the voltage drop of gate line.
One aspect of the present invention provides a kind of flat-panel monitor, comprising: a substrate; Be formed on a gate line on the substrate along predetermined direction; With the grid that is electrically connected with this gate line, this grid has the sheet resistance that is different from gate line, and this gate line has identical thickness with grid.
Another aspect of the present invention provides a kind of flat-panel monitor, comprising: a substrate; Be formed on a gate line on the substrate along predetermined direction; And a grid that is electrically connected with this gate line, wherein this gate line and this grid have same thickness, and this gate line is doped with ion and has the sheet resistance lower than this grid.
Another aspect of the present invention provides a kind of method of making flat-panel monitor.This method comprises the step that the substrate with wiring zone and first area is provided.First active layer is formed on the first area.Gate line and first grid are respectively formed in wiring zone and the first area.Be that gate line mixes ion when sheltering first grid, thereby make gate line have the sheet resistance lower than first grid.
Description of drawings
By preferred embodiments of the present invention will be described in detail with reference to the annexed drawings, above-mentioned and further feature of the present invention and advantage will become clearer for those of ordinary skills, and wherein accompanying drawing is:
Fig. 1 is the planimetric map of a kind of organic light emitting apparatus of providing according to one embodiment of the invention;
Fig. 2 A is the cross-sectional view of making the method for organic light emitting apparatus according to the explanation that one embodiment of the invention provides to 2E;
Fig. 3 is the chart that the sheet resistance of explanation gate line changes with ion implantation dosage; And
Fig. 4 is the chart of the estimation thickness of the gate line that reduces of explanation sheet resistance.
Embodiment
Referring now to accompanying drawing the present invention, the preferred embodiments of the present invention shown in the drawings are described more fully hereinafter.Yet the present invention can implement with different forms, and should not be interpreted as only limiting to embodiment described here.On the contrary, provide these embodiment will make the disclosure complete comprehensively, and scope of the present invention is showed the people who is familiar with this area comprehensively.Mark identical in whole instructions is represented components identical.
Fig. 1 is the planimetric map of the organic light emitting apparatus that provides according to one embodiment of the invention.
With reference to Fig. 1, many gate lines 131 are set in a predetermined direction.In the direction of intersecting with gate line 131 many data lines 155 are set, wherein this data line 155 and gate line 131 are insulated from each other.Intersecting with gate line 131 and the direction parallel with data line 155 is provided with many public power wires 157, wherein this public power wire 157 and gate line 131 are insulated from each other.Many gate lines 131, many data lines 155 and many public power wires 157 have defined the pixel that is arranged to matrix form.These pixels that are the matrix type layout are called pel array.Each pixel all comprises a switching thin-film transistor 210, drive thin film transistors 230, an electric capacity 220 and an Organic Light Emitting Diode 240.
Switching thin-film transistor 210 comprises that one has the semiconductor layer 110 of source/drain region; The grid 135 that links to each other with gate line 131; With the source/drain electrode 150 that links to each other with the source/drain region of semiconductor layer 110 via contact hole.Moreover drive thin film transistors 230 comprises that one has the semiconductor layer 113 of source/drain region; One grid 133; With a source/drain electrode 153 that links to each other with the source/drain region of semiconductor layer 113 via contact hole.
Simultaneously, electric capacity 220 comprises the bottom electrode 132 that links to each other with the grid 133 of drive thin film transistors 230, links to each other via one of source/drain electrode 150 of contact hole and switching thin-film transistor 210 simultaneously; With a top electrode 158 that links to each other with public power wire 157 via one of source/drain electrode 153 of contact hole and drive thin film transistors 230.Another of the source/drain electrode 153 of one pixel electrode 170 by through hole 165a and drive thin film transistors 230 links to each other.
Being equipped with one in the outer periphery of pel array provides the gate driver circuit 500 and of sweep signal to provide the data drive circuit 600 of data-signal to data line 153 to gate line 131 one by one.
Thereby gate line 131 is mixed with ion has low cloth line resistance.Therefore reduced the voltage drop in the gate line 131.And this gate line 131 has with the grid 135 of switching thin-film transistor 210 and the grid 133 of drive thin film transistors 230 compares low cloth line resistance.
Fig. 2 A is to be used to illustrate the cross-sectional view of making the method for organic light emitting apparatus according to one embodiment of the invention to 2E, and they show along part (A, B) and one drive circuit zone (C) of I-I ' line intercepting among Fig. 1.
With reference to Fig. 2 A, provide the substrate 100 that comprises wiring zone (A), first area (B) and second area (C).This wiring zone (A) is the zone that forms gate line thereon by following process.First area (B) is the zone that forms switching thin-film transistor thereon by following process.Second area (C) is a partial circuit zone, form thereon one with the dissimilar circuit film transistor of switching thin-film transistor.
On substrate 100, form a cushion 105.The effect of this cushion 105 is contaminating impurities that the protective film transistor is not selected by substrate 100, and wherein this cushion 105 can be made of one silica layer, a silicon nitride layer or their stack layer.
First active layer 110 and second active layer 115 are formed on the cushion 105 of first and second zones (B, C).This first and second active layer 110,115 can be made of amorphous silicon or polysilicon, preferably polysilicon.Gate insulation layer 120 is formed on the whole surface of substrate 100, comprises first and second active layers 110 and 115, forms conductive layer 130 on gate insulation layer 120.
This conductive layer 130 preferably by with a kind of making in next group material, comprises aluminium (Al), aluminium alloy, molybdenum (Mo) and molybdenum alloy.More preferably, this conductive layer 130 is formed by molybdenum and tungsten alloy.In addition, have suitable cloth line resistance in order to make the grid wiring that forms in the following process, this conductive layer 130 preferably has 150 to 400nm thickness.
The first photoresist pattern 310 that covers the predetermined portions in wiring zone (A) is formed on conductive layer 130, first active layer 110 part and the whole zone of second area (C) except that two ends.
With reference to Fig. 2 B, utilize the first photoresist pattern 310 as this conductive layer 130 of mask etching, so just on wiring zone (A) and first area (B), formed a gate line 131 and a first grid 135 respectively.Utilize the first photoresist pattern 310 and first grid 135 as mask, first kind of ion all mixed at the two ends of first active layer 110, so just formed first source/drain region 110a at the two ends of first active layer 110.Like this, just defined the first channel region 110b that places between first source/drain region 110a.
Doping treatment can be utilized the ion shower method.The ion shower method makes ion have activity comparing under the low temperature with the temperature of ion implantation, and the ion shower method has the advantages that the discharge particle can be quickened and inject to the mass separation of need not.Therefore, in ion doping process, many hydrogen ions can be diffused in the internal membrane.
Yet; first kind of ion is to utilize the ion shower method to mix there being the first very thick photoresist pattern 310 to stay under the state on the first grid 135, like this can grill-protected insulation course 120 and first grid 135 below first semiconductor layers 110 be not injected into hydrogen ion.Therefore, the gate insulation layer 120 and first semiconductor layer 110 can keep their layer characteristic and the interphase characteristic between them.And thin film transistor (TFT) is being improved aspect threshold voltage, electron mobility and the reliability.For this reason, the first photoresist pattern 310 preferably has 5000  or bigger thickness.
With reference to Fig. 2 C, in having removed Fig. 2 B, after the first photoresist pattern 310, form the second photoresist pattern 320, make it cover wiring zone (A) and first area (B) fully, and cover the conductive layer 130 except that second active layer, 115 two ends.Then, utilize the second photoresist pattern 320 this conductive layer 130 to be carried out etching, thereby form second grid 137 as mask.
Utilize the second photoresist pattern 320 and second grid 137 as mask,, form the source/drain region 115a of light dope like this at the two ends of second active layer 115 with the two ends of second kind of ion light dope second active layer 115.Like this, just defined the second channel region 115b between the source/drain region 115a that places light dope.This second kind of ion preferably has and first kind of type that ion is different.More preferably, first kind of ion is the p type, and second kind of ion is the n type.
Similar with the doping process of first kind of ion, this doping process can utilize the ion shower method to realize.Second kind of ion is to utilize the ion shower method to mix there being the second very thick photoresist pattern 320 to stay under the state on the second grid 137, like this can grill-protected insulation course 120 and second grid 137 below second semiconductor layers 115 be not injected into hydrogen ion.Similarly, this second photoresist pattern 320 preferably has 5000  or bigger thickness.
With reference to Fig. 2 D, remove the second photoresist pattern 320 among Fig. 2 C.Then, form the 3rd photoresist pattern 330, expose wiring zone (A), cover first area (B) fully, and cover second grid 137 and both lateral sides thereof.Utilize the 3rd photoresist pattern 330 as mask, gate line 131 and second kind of ion of second active layer, 115 usefulness are carried out heavy doping, so just in the second active layer 115c, formed heavily doped source/drain region 115c.In order to make heavily doped source/drain region 115c have suitable conductivity, second kind of preferred implantation dosage of ion is 3.0 * 10 15Ions/cm 2(ion/square centimeter) is to 5.0 * 10 15Ions/cm 2This doping process can utilize the ion shower method to finish.
At this moment, gate line 131 has mixed second kind of ion, and the cloth line resistance just can reduce like this.Yet grid 135 and 137 has been covered in by aforesaid photoresist pattern 310,320 and 330 in above-mentioned ion doping process, thereby makes them not be impregnated in ion.Therefore, compare with 137 cloth line resistance with grid 135, the cloth line resistance of gate line 131 is just lower.Like this, just eliminated the voltage drop in the gate line 131, thereby prevented signal delay.With reference to Fig. 2 E, remove the 3rd photoresist pattern 330 among Fig. 2 D, thereby expose grid 135 and 137.On the grid 135 and 137 that exposes, form middle layer 140.This middle layer 140 is preferably formed by monox.
Then, in middle layer 140, form a contact hole, source/drain electrode material layer is pressed on the middle layer 140.Then, source/drain electrode materials processing pattern for this lamination, so that form first source/drain electrode 150 and second source/drain electrode 155 on middle layer 140, wherein these first and second sources/drain electrode 150 contacts with 115 with first and second active layers 110 respectively by contact hole with 155.
After this, utilize typical method to handle continuously, thereby make organic light emitting apparatus.
Fig. 3 illustrates the chart of the sheet resistance of gate line with respect to the variation of ion doping dosage.
With reference to Fig. 3, the dosage of ion doping is big more, and the sheet resistance of gate line reduces manyly more.Yet the dosage that injects when ion is 3.0 * 10 15Ions/cm 2To 5.0 * 10 15Ions/cm 2Scope in the time, the sheet resistance of gate line can descend 9% to 15%, this dosage range is the suitable ion implantation dosage of formation source/drain region on semiconductor layer.Therefore, compare with 137 sheet resistance with the grid 135 that does not mix ion among Fig. 2 E, the sheet resistance of this gate line be its 85% to 91%.
Fig. 4 is the chart that the estimation thickness of the gate line that sheet resistance reduces is shown.
With reference to Fig. 4, the dosage that injects when ion is 3.0 * 10 15Ions/cm 2The time, the sheet resistance of this gate line reduces by 9%, and this has identical effect with the gate line that thickness is about 3000  (on ' p ' point).Moreover the dosage that injects when ion is 5.0 * 10 15Ions/cm 2The time, the sheet resistance of this gate line reduces by 15%, and this has identical effect with the gate line that thickness is about 3800  (on ' q ' point).As a reference, the thickness with the gate line of ion doping is about 2000  basically.Therefore, under the situation that does not increase gate line thickness, prevented voltage drop.
As mentioned above, only need technology is made minimal change, just can under the situation that does not increase gate line thickness, optionally reduce the cloth line resistance of gate line.Further, utilize photoresist pattern and grid,, prevented this thin-film transistor performance deterioration like this by ion shower method ion doping semiconductor layer as mask.
Although described the present invention, be understandable that disclosed content is used for being not limited only to scope of the present invention is made restriction by example explanation the present invention with reference to specific embodiment.Any technician of this area can make the present invention under the situation that does not deviate from scope and spirit of the present invention and improving and variation.

Claims (15)

1. flat-panel monitor comprises:
One substrate;
Be formed on a gate line on the substrate along predetermined direction; With
A grid that is electrically connected with this gate line, this grid has the sheet resistance that is different from described gate line, and wherein said gate line has identical thickness with described grid.
2. flat-panel monitor as claimed in claim 1, wherein said gate line have the sheet resistance lower than described grid.
3. flat-panel monitor as claimed in claim 2, the sheet resistance of wherein said gate line be described grid sheet resistance 85% to 91%.
4. flat-panel monitor as claimed in claim 1, wherein said gate line is doped with ion.
5. flat-panel monitor as claimed in claim 1, wherein said gate line and described grid are by a kind of formation of selecting from aluminium (Al), aluminium alloy, molybdenum (Mo) and molybdenum alloy.
6. flat-panel monitor as claimed in claim 5, wherein said gate line and described grid are made of molybdenum and tungsten alloy.
7. flat-panel monitor as claimed in claim 1, wherein said gate line and described grid have the thickness of 150nm to 400nm.
8. flat-panel monitor comprises:
One substrate;
One is formed on gate line on the described substrate along predetermined direction; With
One grid that is electrically connected with described gate line, wherein said gate line and described grid have same thickness, and described gate line is doped with ion and has the sheet resistance lower than described grid.
9. flat-panel monitor as claimed in claim 8, the sheet resistance of wherein said gate line are 85% to 91% of described grid sheet resistances.
10. method of making flat-panel monitor, this method may further comprise the steps:
One substrate with a wiring zone and a first area is provided;
On described first area, form first active layer;
In described wiring zone and described first area, form a gate line and a first grid respectively; With
Described gate line is carried out ion doping sheltering under the situation of described first grid, thereby make described gate line have the sheet resistance lower than described first grid.
11. method as claimed in claim 10, the wherein said step that described gate line is carried out ion doping comprises:
Form a photoresist pattern, described gate line is also exposed in the whole surface of described first active layer of this pattern covers; With
Utilize described photoresist pattern described gate line to be carried out ion doping as mask.
12. method as claimed in claim 11, wherein said photoresist pattern has the thickness of 5000  at least.
13. method as claimed in claim 10, the step that wherein forms gate line and first grid comprises:
Order lamination one gate insulation layer and a conductive layer on the whole surface of described substrate with described first active layer;
On described conductive layer, form a photoresist pattern, the part of this pattern covers described wiring zone and described first active layer except that two ends; And
Utilize described photoresist pattern as this conductive layer of mask etching.
14. method as claimed in claim 13, wherein said photoresist pattern has the thickness of 5000  at least.
15. method as claimed in claim 13 further comprises:
Utilize described photoresist pattern and described first grid as mask, ion doping is carried out at the two ends of described first active layer; And
Remove described photoresist pattern.
CNB2004100471951A 2003-11-29 2004-11-29 Flat panel display and method of fabricating the same Active CN100365674C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR87793/03 2003-11-29
KR1020030087793A KR100623232B1 (en) 2003-11-29 2003-11-29 flat panel display and fabrication method of the same
KR87793/2003 2003-11-29

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CN100365674C true CN100365674C (en) 2008-01-30

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KR20050052305A (en) 2005-06-02
US20050116233A1 (en) 2005-06-02
US20070269939A1 (en) 2007-11-22
CN1629907A (en) 2005-06-22
US7402468B2 (en) 2008-07-22
US7268405B2 (en) 2007-09-11

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