CH657224A5 - Insulator, which is protected against glow discharges, for use in discharge spaces - Google Patents

Insulator, which is protected against glow discharges, for use in discharge spaces Download PDF

Info

Publication number
CH657224A5
CH657224A5 CH299380A CH299380A CH657224A5 CH 657224 A5 CH657224 A5 CH 657224A5 CH 299380 A CH299380 A CH 299380A CH 299380 A CH299380 A CH 299380A CH 657224 A5 CH657224 A5 CH 657224A5
Authority
CH
Switzerland
Prior art keywords
cathode
insulator
insulating body
elements
anode
Prior art date
Application number
CH299380A
Other languages
German (de)
English (en)
Inventor
Svetoslav Savov
Mintscho Mintschev
Original Assignee
Vmei Lenin Nis
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vmei Lenin Nis filed Critical Vmei Lenin Nis
Publication of CH657224A5 publication Critical patent/CH657224A5/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/42—Means for obtaining improved distribution of voltage; Protection against arc discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/42—Means for obtaining improved distribution of voltage; Protection against arc discharges
    • H01B17/46—Means for providing an external arc-discharge path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32559—Protection means, e.g. coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Lasers (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Emergency Protection Circuit Devices (AREA)
  • Insulators (AREA)
CH299380A 1980-04-15 1980-04-17 Insulator, which is protected against glow discharges, for use in discharge spaces CH657224A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8012334A GB2073999B (en) 1980-04-15 1980-04-15 Device for use in a glow discharge apparatus

Publications (1)

Publication Number Publication Date
CH657224A5 true CH657224A5 (en) 1986-08-15

Family

ID=10512791

Family Applications (1)

Application Number Title Priority Date Filing Date
CH299380A CH657224A5 (en) 1980-04-15 1980-04-17 Insulator, which is protected against glow discharges, for use in discharge spaces

Country Status (5)

Country Link
AT (1) AT369927B (fr)
CH (1) CH657224A5 (fr)
FR (1) FR2481012A1 (fr)
GB (1) GB2073999B (fr)
SE (1) SE450179B (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0908921A1 (fr) * 1997-10-10 1999-04-14 European Community Chambre de traitement pour dépÔt chimique en phase vapeur renforcé par plasma et dispositif utilisant cette chambre de traitment

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR825025A (fr) * 1936-11-07 1938-02-22 Dunlop Sa Perfectionnements aux roues de tracteurs ou autre véhicule en vue d'augmenter leur adhérence
US2906911A (en) * 1953-05-28 1959-09-29 Berghaus Elektrophysik Anst Leading-in insulators for electric glow discharge receptacles
NL108521C (fr) * 1954-08-05
FR1268489A (fr) * 1959-05-08 1961-08-04 Berghaus Elektrophysik Anst Organe porteur isolant

Also Published As

Publication number Publication date
FR2481012A1 (fr) 1981-10-23
ATA194380A (de) 1982-06-15
SE8002774L (sv) 1981-10-15
FR2481012B1 (fr) 1985-03-15
GB2073999B (en) 1983-09-07
AT369927B (de) 1983-02-10
GB2073999A (en) 1981-10-21
SE450179B (sv) 1987-06-09

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Legal Events

Date Code Title Description
PL Patent ceased