CH653209GA3 - - Google Patents
Download PDFInfo
- Publication number
- CH653209GA3 CH653209GA3 CH184982A CH184982A CH653209GA3 CH 653209G A3 CH653209G A3 CH 653209GA3 CH 184982 A CH184982 A CH 184982A CH 184982 A CH184982 A CH 184982A CH 653209G A3 CH653209G A3 CH 653209GA3
- Authority
- CH
- Switzerland
- Prior art keywords
- frequency
- quartz resonator
- temperature characteristics
- cut quartz
- masses
- Prior art date
Links
- 239000010453 quartz Substances 0.000 abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
- H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz
-
- G—PHYSICS
- G04—HOROLOGY
- G04F—TIME-INTERVAL MEASURING
- G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
- G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
- G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
- G04F5/063—Constructional details
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/0421—Modification of the thickness of an element
- H03H2003/0428—Modification of the thickness of an element of an electrode
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
The GT-cut quartz resonator resonated by two longitudinal modes and provided with the masses for frequency-temperature characteristics adjustment and frequency adjustment. The frequency-temperature characteristics and the frequency of the GT-cut quartz resonator are adjusted by eliminating the masses. Consequently, the quartz resonator adjusted to the normal frequency and having the excellent frequency-temperature characteristics is attained. Further the GT-cut quartz resonator of small and thin size is attained by making the resonant portion and the supporting portions in one piece by photolithographic technique.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4337181A JPS57157616A (en) | 1981-03-25 | 1981-03-25 | Gt-cut quartz oscillator |
JP6882981A JPS57183115A (en) | 1981-05-07 | 1981-05-07 | Small-sized gt-cut quartz oscillator |
JP10295781A JPS585018A (en) | 1981-06-30 | 1981-06-30 | Small-sized gt-cut quartz oscillator |
Publications (1)
Publication Number | Publication Date |
---|---|
CH653209GA3 true CH653209GA3 (en) | 1985-12-31 |
Family
ID=27291516
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH184982A CH653209GA3 (en) | 1981-03-25 | 1982-03-25 |
Country Status (5)
Country | Link |
---|---|
US (1) | US4447753A (en) |
CH (1) | CH653209GA3 (en) |
DE (1) | DE3210578A1 (en) |
FR (1) | FR2502867B1 (en) |
GB (1) | GB2098395B (en) |
Families Citing this family (59)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5833308A (en) * | 1981-08-21 | 1983-02-26 | Seiko Instr & Electronics Ltd | Coupled quartz oscillator |
US4633124A (en) * | 1982-03-16 | 1986-12-30 | Kabushiki Kaisha Daini Seikosha | Mount for quartz crystal resonator |
US4642505A (en) * | 1984-03-05 | 1987-02-10 | Motorola, Inc. | Laser trimming monolithic crystal filters to frequency |
US4658175A (en) * | 1986-03-26 | 1987-04-14 | The Singer Company-Kearfott Division | Vibrating beam force transducer with A-frame beam root and frequency adjusting means |
US5216490A (en) * | 1988-01-13 | 1993-06-01 | Charles Stark Draper Laboratory, Inc. | Bridge electrodes for microelectromechanical devices |
US5187458A (en) * | 1989-09-21 | 1993-02-16 | Nihon Musen Kabushiki Kaisha | Composite longitudinal vibration mechanical filter having central frequency deviation elimination means and method of manufacturing same |
US5144184A (en) * | 1990-01-26 | 1992-09-01 | The Charles Stark Draper Laboratory, Inc. | Micromechanical device with a trimmable resonant frequency structure and method of trimming same |
US5473945A (en) * | 1990-02-14 | 1995-12-12 | The Charles Stark Draper Laboratory, Inc. | Micromechanical angular accelerometer with auxiliary linear accelerometer |
US5408119A (en) * | 1990-10-17 | 1995-04-18 | The Charles Stark Draper Laboratory, Inc. | Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency |
US5605598A (en) * | 1990-10-17 | 1997-02-25 | The Charles Stark Draper Laboratory Inc. | Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency |
US5129983A (en) * | 1991-02-25 | 1992-07-14 | The Charles Stark Draper Laboratory, Inc. | Method of fabrication of large area micromechanical devices |
US5203208A (en) * | 1991-04-29 | 1993-04-20 | The Charles Stark Draper Laboratory | Symmetrical micromechanical gyroscope |
US5331852A (en) * | 1991-09-11 | 1994-07-26 | The Charles Stark Draper Laboratory, Inc. | Electromagnetic rebalanced micromechanical transducer |
US5635639A (en) * | 1991-09-11 | 1997-06-03 | The Charles Stark Draper Laboratory, Inc. | Micromechanical tuning fork angular rate sensor |
US5408877A (en) * | 1992-03-16 | 1995-04-25 | The Charles Stark Draper Laboratory, Inc. | Micromechanical gyroscopic transducer with improved drive and sense capabilities |
US5349855A (en) * | 1992-04-07 | 1994-09-27 | The Charles Stark Draper Laboratory, Inc. | Comb drive micromechanical tuning fork gyro |
US5767405A (en) * | 1992-04-07 | 1998-06-16 | The Charles Stark Draper Laboratory, Inc. | Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout |
DE4321949C2 (en) * | 1992-07-03 | 1997-07-10 | Murata Manufacturing Co | Vibrator unit |
DE4322144C2 (en) * | 1992-07-03 | 1997-06-05 | Murata Manufacturing Co | Vibrator unit |
DE4229449A1 (en) * | 1992-09-03 | 1994-03-10 | Abb Research Ltd | Fiber optic quartz voltage sensor |
US5650568A (en) * | 1993-02-10 | 1997-07-22 | The Charles Stark Draper Laboratory, Inc. | Gimballed vibrating wheel gyroscope having strain relief features |
JPH06268462A (en) * | 1993-03-12 | 1994-09-22 | Seiko Electronic Components Ltd | Frequency adjustment method for ns-gt cut crystal resonator |
GB2278721B (en) * | 1993-05-31 | 1996-12-18 | Murata Manufacturing Co | Chip-type piezoelectric resonance component |
US5621263A (en) * | 1993-08-09 | 1997-04-15 | Murata Manufacturing Co., Ltd. | Piezoelectric resonance component |
US5648746A (en) * | 1993-08-17 | 1997-07-15 | Murata Manufacturing Co., Ltd. | Stacked diezoelectric resonator ladder-type filter with at least one width expansion mode resonator |
GB2281159B (en) * | 1993-08-17 | 1997-10-01 | Murata Manufacturing Co | Ladder-type filter |
US5646348A (en) * | 1994-08-29 | 1997-07-08 | The Charles Stark Draper Laboratory, Inc. | Micromechanical sensor with a guard band electrode and fabrication technique therefor |
US5581035A (en) * | 1994-08-29 | 1996-12-03 | The Charles Stark Draper Laboratory, Inc. | Micromechanical sensor with a guard band electrode |
US5495135A (en) * | 1994-09-21 | 1996-02-27 | Motorola, Inc. | Piezoelectric resonator with an attenuated spurious response |
US5725729A (en) * | 1994-09-26 | 1998-03-10 | The Charles Stark Draper Laboratory, Inc. | Process for micromechanical fabrication |
JP3114526B2 (en) * | 1994-10-17 | 2000-12-04 | 株式会社村田製作所 | Chip type piezoelectric resonance component |
US5817942A (en) * | 1996-02-28 | 1998-10-06 | The Charles Stark Draper Laboratory, Inc. | Capacitive in-plane accelerometer |
JPH1098350A (en) * | 1996-07-31 | 1998-04-14 | Daishinku Co | Piezoelectric vibrating device |
US5892153A (en) * | 1996-11-21 | 1999-04-06 | The Charles Stark Draper Laboratory, Inc. | Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors |
US5911156A (en) * | 1997-02-24 | 1999-06-08 | The Charles Stark Draper Laboratory, Inc. | Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices |
US5783973A (en) * | 1997-02-24 | 1998-07-21 | The Charles Stark Draper Laboratory, Inc. | Temperature insensitive silicon oscillator and precision voltage reference formed therefrom |
US5952574A (en) * | 1997-04-29 | 1999-09-14 | The Charles Stark Draper Laboratory, Inc. | Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors |
US6114795A (en) * | 1997-06-24 | 2000-09-05 | Tdk Corporation | Piezoelectric component and manufacturing method thereof |
JPH11168338A (en) * | 1997-10-01 | 1999-06-22 | Murata Mfg Co Ltd | Piezoelectric resonator, frequency adjustment method for piezoelectric resonator and communication equipment |
EP1078453B1 (en) * | 1998-05-08 | 2003-04-16 | Infineon Technologies AG | Thin-layered piezo-resonator |
US7075211B1 (en) * | 1999-05-31 | 2006-07-11 | Nanomotion Ltd. | Multilayer piezoelectric motor |
US6879085B1 (en) * | 2000-02-24 | 2005-04-12 | Nanomotion Ltd. | Resonance shifting |
US20040035206A1 (en) * | 2002-03-26 | 2004-02-26 | Ward Paul A. | Microelectromechanical sensors having reduced signal bias errors and methods of manufacturing the same |
US6707351B2 (en) * | 2002-03-27 | 2004-03-16 | Motorola, Inc. | Tunable MEMS resonator and method for tuning |
US8766745B1 (en) | 2007-07-25 | 2014-07-01 | Hrl Laboratories, Llc | Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same |
US7068126B2 (en) * | 2004-03-04 | 2006-06-27 | Discera | Method and apparatus for frequency tuning of a micro-mechanical resonator |
EP1645847B1 (en) * | 2004-10-08 | 2014-07-02 | STMicroelectronics Srl | Temperature compensated micro-electromechanical device and method of temperature compensation in a micro-electromechanical device |
DE102007021920B8 (en) * | 2007-05-10 | 2011-12-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Apparatus for designing a micromechanical device with adapted sensitivity, method for producing a micromechanical device and a micromechanical system |
US10266398B1 (en) | 2007-07-25 | 2019-04-23 | Hrl Laboratories, Llc | ALD metal coatings for high Q MEMS structures |
US7802356B1 (en) * | 2008-02-21 | 2010-09-28 | Hrl Laboratories, Llc | Method of fabricating an ultra thin quartz resonator component |
US8187902B2 (en) * | 2008-07-09 | 2012-05-29 | The Charles Stark Draper Laboratory, Inc. | High performance sensors and methods for forming the same |
WO2010096439A1 (en) * | 2009-02-17 | 2010-08-26 | Leversense, Llc | Resonant sensors and methods of use thereof for the determination of analytes |
US8912711B1 (en) | 2010-06-22 | 2014-12-16 | Hrl Laboratories, Llc | Thermal stress resistant resonator, and a method for fabricating same |
JP6023687B2 (en) * | 2013-10-30 | 2016-11-09 | 京セラドキュメントソリューションズ株式会社 | Optical scanning apparatus, image forming apparatus including the optical scanning apparatus, and method for adjusting resonance frequency of vibration mirror unit in optical scanning apparatus |
US9977097B1 (en) | 2014-02-21 | 2018-05-22 | Hrl Laboratories, Llc | Micro-scale piezoelectric resonating magnetometer |
US9991863B1 (en) | 2014-04-08 | 2018-06-05 | Hrl Laboratories, Llc | Rounded and curved integrated tethers for quartz resonators |
US10031191B1 (en) | 2015-01-16 | 2018-07-24 | Hrl Laboratories, Llc | Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors |
US10175307B1 (en) | 2016-01-15 | 2019-01-08 | Hrl Laboratories, Llc | FM demodulation system for quartz MEMS magnetometer |
JP2021132315A (en) * | 2020-02-20 | 2021-09-09 | セイコーエプソン株式会社 | Vibration element, vibration device, electronic apparatus, movable body, and method for manufacturing vibration element |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB479987A (en) * | 1936-06-12 | 1938-02-15 | Standard Telephones Cables Ltd | Piezo-electric crystal devices |
JPS4871896A (en) * | 1971-12-22 | 1973-09-28 | ||
JPS583602B2 (en) * | 1974-11-09 | 1983-01-22 | セイコーエプソン株式会社 | Suishiyo Shindoushi |
JPS6051283B2 (en) * | 1975-09-10 | 1985-11-13 | 株式会社精工舎 | How to adjust frequency temperature characteristics of GT cut crystal resonator |
JPS533178A (en) * | 1976-06-30 | 1978-01-12 | Seiko Instr & Electronics Ltd | Crystal vibrator |
US4156156A (en) * | 1977-08-18 | 1979-05-22 | P. R. Mallory & Co. Inc. | Method for reducing the resonant frequency of a piezoelectric transducer |
JPS5476089A (en) * | 1977-11-30 | 1979-06-18 | Seiko Instr & Electronics Ltd | Piezoelectric oscillator |
JPS54113297A (en) * | 1978-01-26 | 1979-09-04 | Seiko Epson Corp | Tuning fork-type crystal vibrator |
US4320320A (en) * | 1978-12-01 | 1982-03-16 | Kabushiki Kaisha Suwa Seikosha | Coupled mode tuning fork type quartz crystal vibrator |
DE2939844A1 (en) * | 1978-12-21 | 1980-07-10 | Seiko Instr & Electronics | QUARTZ SWINGER |
JPS55105420A (en) * | 1979-02-06 | 1980-08-13 | Seiko Instr & Electronics Ltd | Frequency control method for piezoelectric oscillator |
JPS55158718A (en) * | 1979-05-26 | 1980-12-10 | Nippon Dempa Kogyo Co Ltd | Temperature characteristic control method for piezoelectric oscillator |
JPS5752213A (en) * | 1980-09-12 | 1982-03-27 | Seiko Instr & Electronics Ltd | Gt-cut quartz oscillator |
JPS57188121A (en) * | 1981-05-15 | 1982-11-19 | Seiko Instr & Electronics Ltd | Frequency adjusting method of coupling oscillator |
JPS586616A (en) * | 1981-07-02 | 1983-01-14 | Seiko Instr & Electronics Ltd | Frequency adjusting method for coupling oscillator |
JPS5833308A (en) * | 1981-08-21 | 1983-02-26 | Seiko Instr & Electronics Ltd | Coupled quartz oscillator |
-
1981
- 1981-11-20 US US06/323,487 patent/US4447753A/en not_active Expired - Lifetime
- 1981-12-15 FR FR8123397A patent/FR2502867B1/en not_active Expired
-
1982
- 1982-03-23 DE DE19823210578 patent/DE3210578A1/en not_active Ceased
- 1982-03-24 GB GB8208607A patent/GB2098395B/en not_active Expired
- 1982-03-25 CH CH184982A patent/CH653209GA3/fr unknown
Also Published As
Publication number | Publication date |
---|---|
DE3210578A1 (en) | 1982-11-04 |
GB2098395A (en) | 1982-11-17 |
FR2502867B1 (en) | 1988-07-01 |
GB2098395B (en) | 1985-11-20 |
US4447753A (en) | 1984-05-08 |
FR2502867A1 (en) | 1982-10-01 |
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