CH640366A5 - Microscopio elettronico a scansione. - Google Patents

Microscopio elettronico a scansione. Download PDF

Info

Publication number
CH640366A5
CH640366A5 CH451280A CH451280A CH640366A5 CH 640366 A5 CH640366 A5 CH 640366A5 CH 451280 A CH451280 A CH 451280A CH 451280 A CH451280 A CH 451280A CH 640366 A5 CH640366 A5 CH 640366A5
Authority
CH
Switzerland
Prior art keywords
frame
cup body
chamber
microscope according
fixed
Prior art date
Application number
CH451280A
Other languages
English (en)
Italian (it)
Inventor
Walter Hotz
Cosimo Gabriele
Francesco Porro
Original Assignee
Agusta Aeronaut Costr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agusta Aeronaut Costr filed Critical Agusta Aeronaut Costr
Publication of CH640366A5 publication Critical patent/CH640366A5/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Microscoopes, Condenser (AREA)
CH451280A 1979-06-12 1980-06-11 Microscopio elettronico a scansione. CH640366A5 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT68260/79A IT1118775B (it) 1979-06-12 1979-06-12 Microscopio elettronico a scansione a camera scomponibile particolarmente per l osservazione di pezzi di dimensioni relativamente elevate

Publications (1)

Publication Number Publication Date
CH640366A5 true CH640366A5 (it) 1983-12-30

Family

ID=11308732

Family Applications (1)

Application Number Title Priority Date Filing Date
CH451280A CH640366A5 (it) 1979-06-12 1980-06-11 Microscopio elettronico a scansione.

Country Status (8)

Country Link
US (1) US4313056A (enExample)
JP (1) JPS561453A (enExample)
CH (1) CH640366A5 (enExample)
DE (1) DE3022094A1 (enExample)
FR (1) FR2458893A1 (enExample)
GB (1) GB2052848B (enExample)
IT (1) IT1118775B (enExample)
NL (1) NL8003286A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4418162A1 (de) * 1994-05-25 1995-11-30 Fraunhofer Ges Forschung Einrichtung zur Durchführung elektronenstrahltechnologischer Prozesse im Vakuum
US5820723A (en) * 1996-06-05 1998-10-13 Lam Research Corporation Universal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support
US5948704A (en) * 1996-06-05 1999-09-07 Lam Research Corporation High flow vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US408830A (en) * 1889-08-13 Watch-case
US2627580A (en) * 1948-10-23 1953-02-03 Rca Corp Demountable vacuumtight seal
FR1407511A (fr) * 1963-09-18 1965-07-30 Trueb Tauber & Co Dispositif pour l'examen des surfaces d'objet en microscopie électronique
US3405264A (en) * 1965-08-24 1968-10-08 Rca Corp Specimen injector for electron microscopes with a rotatable specimen holder

Also Published As

Publication number Publication date
GB2052848B (en) 1983-01-26
DE3022094A1 (de) 1980-12-18
IT7968260A0 (it) 1979-06-12
IT1118775B (it) 1986-03-03
GB2052848A (en) 1981-01-28
JPS561453A (en) 1981-01-09
JPS6346954B2 (enExample) 1988-09-19
FR2458893B1 (enExample) 1984-12-07
US4313056A (en) 1982-01-26
NL8003286A (nl) 1980-12-16
FR2458893A1 (fr) 1981-01-02

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