CH627791A5 - Process for covering the surface of an electrically conductive article, plant for making use of the process and application of the process - Google Patents

Process for covering the surface of an electrically conductive article, plant for making use of the process and application of the process Download PDF

Info

Publication number
CH627791A5
CH627791A5 CH602678A CH602678A CH627791A5 CH 627791 A5 CH627791 A5 CH 627791A5 CH 602678 A CH602678 A CH 602678A CH 602678 A CH602678 A CH 602678A CH 627791 A5 CH627791 A5 CH 627791A5
Authority
CH
Switzerland
Prior art keywords
enclosure
coating
cathodes
gas
covered
Prior art date
Application number
CH602678A
Other languages
English (en)
French (fr)
Inventor
Michel Gantois
Henri Michel
Original Assignee
Michel Gantois
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Michel Gantois filed Critical Michel Gantois
Publication of CH627791A5 publication Critical patent/CH627791A5/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
CH602678A 1977-06-07 1978-06-01 Process for covering the surface of an electrically conductive article, plant for making use of the process and application of the process CH627791A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR777717439A FR2393854A1 (fr) 1977-06-07 1977-06-07 Procede de recouvrement de la surface d'une piece conductrice de l'electricite

Publications (1)

Publication Number Publication Date
CH627791A5 true CH627791A5 (en) 1982-01-29

Family

ID=9191791

Family Applications (1)

Application Number Title Priority Date Filing Date
CH602678A CH627791A5 (en) 1977-06-07 1978-06-01 Process for covering the surface of an electrically conductive article, plant for making use of the process and application of the process

Country Status (11)

Country Link
JP (1) JPS544246A (it)
AT (1) AT364217B (it)
BE (1) BE867913A (it)
CH (1) CH627791A5 (it)
DE (1) DE2820183C3 (it)
FR (1) FR2393854A1 (it)
GB (1) GB1574677A (it)
IT (1) IT1109053B (it)
NL (1) NL7806125A (it)
SE (1) SE7806503L (it)
ZA (1) ZA782794B (it)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0106638A1 (en) * 1982-10-12 1984-04-25 National Research Development Corporation Method and apparatus for growing material in a glow discharge
US4704339A (en) * 1982-10-12 1987-11-03 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Infra-red transparent optical components
DE3606529A1 (de) * 1986-02-28 1987-09-03 Glyco Metall Werke Verfahren zur herstellung von schichtwerkstoff oder schichtwerkstuecken durch aufdampfen mindestens eines metallischen werkstoffes auf ein metallisches substrat
FI85793C (fi) * 1990-05-18 1992-05-25 Plasmapiiri Oy Foerfarande och anordning foer framstaellning av kretskort.
IL115713A0 (en) * 1995-10-22 1996-01-31 Ipmms Dev & Production Ltd Sputter deposit method and apparatus
DE10159907B4 (de) * 2001-12-06 2008-04-24 Interpane Entwicklungs- Und Beratungsgesellschaft Mbh & Co. Beschichtungsverfahren

Also Published As

Publication number Publication date
FR2393854B1 (it) 1980-01-18
DE2820183C3 (de) 1981-09-10
FR2393854A1 (fr) 1979-01-05
IT1109053B (it) 1985-12-16
DE2820183A1 (de) 1978-12-14
DE2820183B2 (de) 1980-11-20
SE7806503L (sv) 1978-12-08
AT364217B (de) 1981-10-12
BE867913A (fr) 1978-12-07
IT7868139A0 (it) 1978-05-18
NL7806125A (nl) 1978-12-11
GB1574677A (en) 1980-09-10
JPS544246A (en) 1979-01-12
ZA782794B (en) 1979-05-30
JPS5615780B2 (it) 1981-04-13
ATA413078A (de) 1981-02-15

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