CH581823A5 - Two beam interferrometer length measuring instrument - has no first order tilting error and includes beam splitter and adjustable reflector - Google Patents

Two beam interferrometer length measuring instrument - has no first order tilting error and includes beam splitter and adjustable reflector

Info

Publication number
CH581823A5
CH581823A5 CH313375A CH313375A CH581823A5 CH 581823 A5 CH581823 A5 CH 581823A5 CH 313375 A CH313375 A CH 313375A CH 313375 A CH313375 A CH 313375A CH 581823 A5 CH581823 A5 CH 581823A5
Authority
CH
Switzerland
Prior art keywords
cube
mirror
test object
triple
corner
Prior art date
Application number
CH313375A
Other languages
German (de)
English (en)
Original Assignee
Zeiss Jena Veb Carl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Jena Veb Carl filed Critical Zeiss Jena Veb Carl
Publication of CH581823A5 publication Critical patent/CH581823A5/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CH313375A 1974-04-11 1975-03-12 Two beam interferrometer length measuring instrument - has no first order tilting error and includes beam splitter and adjustable reflector CH581823A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD17782274A DD111735A1 (enrdf_load_html_response) 1974-04-11 1974-04-11

Publications (1)

Publication Number Publication Date
CH581823A5 true CH581823A5 (en) 1976-11-15

Family

ID=5495366

Family Applications (1)

Application Number Title Priority Date Filing Date
CH313375A CH581823A5 (en) 1974-04-11 1975-03-12 Two beam interferrometer length measuring instrument - has no first order tilting error and includes beam splitter and adjustable reflector

Country Status (3)

Country Link
CH (1) CH581823A5 (enrdf_load_html_response)
CS (1) CS217606B1 (enrdf_load_html_response)
DD (1) DD111735A1 (enrdf_load_html_response)

Also Published As

Publication number Publication date
CS217606B1 (en) 1983-01-28
DD111735A1 (enrdf_load_html_response) 1975-03-05

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Legal Events

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PL Patent ceased