CH505462A - Ionen-Getter-Vakuumpumpe - Google Patents

Ionen-Getter-Vakuumpumpe

Info

Publication number
CH505462A
CH505462A CH1207368A CH1207368A CH505462A CH 505462 A CH505462 A CH 505462A CH 1207368 A CH1207368 A CH 1207368A CH 1207368 A CH1207368 A CH 1207368A CH 505462 A CH505462 A CH 505462A
Authority
CH
Switzerland
Prior art keywords
cathode
discharge
anode
channel
pump according
Prior art date
Application number
CH1207368A
Other languages
German (de)
English (en)
Inventor
Turner Lamont Lawrence
Original Assignee
Varian Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates filed Critical Varian Associates
Publication of CH505462A publication Critical patent/CH505462A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CH1207368A 1967-08-23 1968-08-12 Ionen-Getter-Vakuumpumpe CH505462A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US66263567A 1967-08-23 1967-08-23

Publications (1)

Publication Number Publication Date
CH505462A true CH505462A (de) 1971-03-31

Family

ID=24658515

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1207368A CH505462A (de) 1967-08-23 1968-08-12 Ionen-Getter-Vakuumpumpe

Country Status (5)

Country Link
US (1) US3460745A (fr)
CH (1) CH505462A (fr)
DE (1) DE1764782A1 (fr)
FR (1) FR1585970A (fr)
GB (1) GB1191223A (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942546A (en) * 1972-10-27 1976-03-09 Continental Oil Company Corrosion monitoring and composition-analytical apparatus
US4097195A (en) * 1975-02-12 1978-06-27 Varian Associates, Inc. High vacuum pump
US4687417A (en) * 1985-12-19 1987-08-18 Hughes Aircraft Company High voltage feedthrough for ion pump
US5655886A (en) * 1995-06-06 1997-08-12 Color Planar Displays, Inc. Vacuum maintenance device for high vacuum chambers
US6004104A (en) * 1997-07-14 1999-12-21 Duniway Stockroom Corp. Cathode structure for sputter ion pump
US6220821B1 (en) * 1999-05-20 2001-04-24 Kernco, Incorporated Ion pump having protective mask components overlying the cathode elements
US20040062659A1 (en) * 2002-07-12 2004-04-01 Sinha Mahadeva P. Ion pump with combined housing and cathode
DE102009040356A1 (de) 2009-09-05 2011-03-17 Schmidt, Linda Elktrodenanordnung für eine Ionengetterpumpe
US9960025B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Cold-matter system having ion pump integrated with channel cell
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US20150311048A1 (en) * 2014-04-24 2015-10-29 Honeywell International Inc. Micro hybrid differential/triode ion pump
US10665437B2 (en) * 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
US10262845B2 (en) 2015-02-10 2019-04-16 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
US10550829B2 (en) * 2016-09-08 2020-02-04 Edwards Vacuum Llc Ion trajectory manipulation architecture in an ion pump
US10629417B1 (en) * 2016-12-01 2020-04-21 ColdQuanta, Inc. Sputter ion pump with penning-trap current sensor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2993638A (en) * 1957-07-24 1961-07-25 Varian Associates Electrical vacuum pump apparatus and method
DE1228750B (de) * 1961-04-01 1966-11-17 Leybolds Nachfolger E Zerstaeubungs-Ionengetterpumpe

Also Published As

Publication number Publication date
US3460745A (en) 1969-08-12
GB1191223A (en) 1970-05-13
DE1764782A1 (de) 1971-11-11
FR1585970A (fr) 1970-02-06

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Legal Events

Date Code Title Description
PL Patent ceased