CH455049A - Verfahren zum Behandeln der Oberfläche von Halbleiteranordnungen - Google Patents

Verfahren zum Behandeln der Oberfläche von Halbleiteranordnungen

Info

Publication number
CH455049A
CH455049A CH472863A CH472863A CH455049A CH 455049 A CH455049 A CH 455049A CH 472863 A CH472863 A CH 472863A CH 472863 A CH472863 A CH 472863A CH 455049 A CH455049 A CH 455049A
Authority
CH
Switzerland
Prior art keywords
treating
semiconductor devices
semiconductor
devices
Prior art date
Application number
CH472863A
Other languages
English (en)
Inventor
Fritz-Werner Dipl Ch Beyerlein
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH455049A publication Critical patent/CH455049A/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C22/00Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C22/02Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using non-aqueous solutions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3157Partial encapsulation or coating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00Semiconductor device manufacturing: process
    • Y10S438/906Cleaning of wafer as interim step
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00Semiconductor device manufacturing: process
    • Y10S438/974Substrate surface preparation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Weting (AREA)
CH472863A 1962-04-25 1963-04-16 Verfahren zum Behandeln der Oberfläche von Halbleiteranordnungen CH455049A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0079160 1962-04-25

Publications (1)

Publication Number Publication Date
CH455049A true CH455049A (de) 1968-04-30

Family

ID=7507991

Family Applications (1)

Application Number Title Priority Date Filing Date
CH472863A CH455049A (de) 1962-04-25 1963-04-16 Verfahren zum Behandeln der Oberfläche von Halbleiteranordnungen

Country Status (5)

Country Link
US (1) US3341367A (de)
CH (1) CH455049A (de)
DE (1) DE1639561B1 (de)
GB (1) GB1000683A (de)
NL (1) NL291914A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1564580A1 (de) * 1966-04-27 1969-07-31 Semikron Gleichrichterbau Verfahren zur Stabilisierung der Sperreigenschaft von Halbleiterbauelementen
DE1901319A1 (de) * 1969-01-11 1970-08-06 Siemens Ag Verfahren zur Herstellung von hochreinem Galliumarsenid
EP0560617A3 (en) * 1992-03-13 1993-11-24 Kawasaki Steel Co Method of manufacturing insulating film on semiconductor device and apparatus for carrying out the same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1106879B (de) * 1959-03-11 1961-05-18 Siemens Ag Verfahren zur Herabsetzung der Rekombination an den Oberflaechen von p-Zonen von Halbleiteranordnungen
NL133278C (de) * 1960-04-30

Also Published As

Publication number Publication date
GB1000683A (en) 1965-08-11
NL291914A (de)
DE1639561B1 (de) 1969-09-25
US3341367A (en) 1967-09-12

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