CH386702A - Verfahren zum Ziehen von kristallinen Halbleiterstäben aus der Schmelze - Google Patents
Verfahren zum Ziehen von kristallinen Halbleiterstäben aus der SchmelzeInfo
- Publication number
- CH386702A CH386702A CH7918459A CH7918459A CH386702A CH 386702 A CH386702 A CH 386702A CH 7918459 A CH7918459 A CH 7918459A CH 7918459 A CH7918459 A CH 7918459A CH 386702 A CH386702 A CH 386702A
- Authority
- CH
- Switzerland
- Prior art keywords
- melt
- crystalline semiconductor
- semiconductor rods
- pulling
- pulling crystalline
- Prior art date
Links
- 239000000155 melt Substances 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
- H01L29/045—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes by their particular orientation of crystalline planes
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES60264A DE1090868B (de) | 1958-10-15 | 1958-10-15 | Verfahren zum Ziehen von einkristallinen Halbleiterstaeben aus Schmelzen |
DES73154A DE1207636B (de) | 1958-10-15 | 1961-03-27 | Verfahren zum Herstellen von Scheiben aus einkristallinem Silizium und/oder Germanium fuer Halbleiterbauelemente |
Publications (1)
Publication Number | Publication Date |
---|---|
CH386702A true CH386702A (de) | 1965-01-15 |
Family
ID=43127708
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH7918459A CH386702A (de) | 1958-10-15 | 1959-10-08 | Verfahren zum Ziehen von kristallinen Halbleiterstäben aus der Schmelze |
CH1454261A CH409886A (de) | 1958-10-15 | 1961-12-14 | Verfahren zum Herstellen von Scheiben aus einkristallinem Silizium oder Germanium |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH1454261A CH409886A (de) | 1958-10-15 | 1961-12-14 | Verfahren zum Herstellen von Scheiben aus einkristallinem Silizium oder Germanium |
Country Status (5)
Country | Link |
---|---|
CH (2) | CH386702A (de) |
DE (2) | DE1090868B (de) |
FR (2) | FR1235174A (de) |
GB (2) | GB898096A (de) |
NL (1) | NL274787A (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4121965A (en) * | 1976-07-16 | 1978-10-24 | The United States Of America As Represented By The Administrator Of The National Aeronautics & Space Administration | Method of controlling defect orientation in silicon crystal ribbon growth |
US4118197A (en) * | 1977-01-24 | 1978-10-03 | Mobil Tyco Solar Energy Corp. | Cartridge and furnace for crystal growth |
US4239734A (en) * | 1978-07-13 | 1980-12-16 | International Business Machines Corporation | Method and apparatus for forming silicon crystalline bodies |
US4751059A (en) * | 1986-12-05 | 1988-06-14 | Westinghouse Electric Corp. | Apparatus for growing dendritic web crystals of constant width |
JPH08298251A (ja) * | 1995-02-28 | 1996-11-12 | Shin Etsu Handotai Co Ltd | 薄板の製造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH292927A (de) * | 1950-01-13 | 1953-08-31 | Western Electric Co | Verfahren und Einrichtung zur Erzeugung von Halbleiterkristallen. |
-
1958
- 1958-10-15 DE DES60264A patent/DE1090868B/de active Pending
-
1959
- 1959-09-15 FR FR805164A patent/FR1235174A/fr not_active Expired
- 1959-10-08 CH CH7918459A patent/CH386702A/de unknown
- 1959-10-14 GB GB34803/59A patent/GB898096A/en not_active Expired
-
1961
- 1961-03-27 DE DES73154A patent/DE1207636B/de active Pending
- 1961-12-14 CH CH1454261A patent/CH409886A/de unknown
-
1962
- 1962-02-14 NL NL274787D patent/NL274787A/xx unknown
- 1962-03-23 GB GB11321/62A patent/GB938917A/en not_active Expired
- 1962-03-26 FR FR892273A patent/FR81564E/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR1235174A (fr) | 1960-10-26 |
FR81564E (fr) | 1963-10-11 |
CH409886A (de) | 1966-03-31 |
DE1207636B (de) | 1965-12-23 |
GB898096A (en) | 1962-06-06 |
NL274787A (de) | 1964-09-25 |
GB938917A (en) | 1963-10-09 |
DE1090868B (de) | 1960-10-13 |
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