CA970327A - Method of treating workpieces in a glow discharge and device for the performance thereof - Google Patents

Method of treating workpieces in a glow discharge and device for the performance thereof

Info

Publication number
CA970327A
CA970327A CA104,869A CA104869A CA970327A CA 970327 A CA970327 A CA 970327A CA 104869 A CA104869 A CA 104869A CA 970327 A CA970327 A CA 970327A
Authority
CA
Canada
Prior art keywords
performance
glow discharge
treating workpieces
workpieces
treating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA104,869A
Other languages
English (en)
Other versions
CA104869S (en
Inventor
Klaus Keller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektrophysikalische Anstalt Bernhard Berghaus
Original Assignee
Elektrophysikalische Anstalt Bernhard Berghaus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektrophysikalische Anstalt Bernhard Berghaus filed Critical Elektrophysikalische Anstalt Bernhard Berghaus
Application granted granted Critical
Publication of CA970327A publication Critical patent/CA970327A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32697—Electrostatic control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Discharge Heating (AREA)
CA104,869A 1970-02-13 1971-02-09 Method of treating workpieces in a glow discharge and device for the performance thereof Expired CA970327A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH209370A CH519588A (de) 1970-02-13 1970-02-13 Verfahren zur Bearbeitung eines Werkstückes mittels einer Glimmentladung und Apparatur zur Durchführung des Verfahrens
CH4271A CH555898A (de) 1970-02-13 1971-01-05 Verfahren zur bearbeitung eines werkstueckes mittels einer glimmentladung und apparatur zur durchfuehrung des verfahrens.

Publications (1)

Publication Number Publication Date
CA970327A true CA970327A (en) 1975-07-01

Family

ID=25683336

Family Applications (1)

Application Number Title Priority Date Filing Date
CA104,869A Expired CA970327A (en) 1970-02-13 1971-02-09 Method of treating workpieces in a glow discharge and device for the performance thereof

Country Status (11)

Country Link
US (1) US3730863A (xx)
JP (1) JPS5118895B1 (xx)
AT (1) AT303904B (xx)
BE (1) BE762430A (xx)
CA (1) CA970327A (xx)
CH (2) CH519588A (xx)
DE (1) DE2106850C3 (xx)
FR (1) FR2078067A5 (xx)
LU (1) LU62593A1 (xx)
NL (1) NL7101947A (xx)
SE (1) SE358907B (xx)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2777796C1 (ru) * 2021-11-29 2022-08-10 Федеральное государственное бюджетное образовательное учреждение высшего образования "Кубанский государственный технологический университет" (ФГБОУ ВО "КубГТУ") Устройство для азотирования в разряде

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH551496A (de) * 1970-09-21 1974-07-15 Berghaus Bernhard Elektrophysi Verfahren zur verfestigung der oberflaeche von werkstuecken aus eisen und stahl.
US3863074A (en) * 1972-08-30 1975-01-28 Ibm Low temperature plasma anodization apparatus
FR2264891B1 (xx) * 1974-03-19 1977-10-07 Michel Henri
GB1447219A (en) * 1974-04-27 1976-08-25 Softal Elektronik Gmbh Apparatus for the treatment of thin sheet with a corona discharge
JPS527337A (en) * 1975-07-08 1977-01-20 Fuji Electronics Co Ltd Ion surface treatment of metal
DE2657078C2 (de) * 1975-12-29 1984-08-16 Kawasaki Jukogyo K.K., Kobe, Hyogo Einrichtung zur Gleichstrom-Ionennitrierung von Werkstücken
CH621714A5 (xx) * 1976-06-08 1981-02-27 Balzers Hochvakuum
US4193825A (en) * 1977-06-28 1980-03-18 Kayaba Industry Co., Ltd. Method of carbon nitriding a metal workpiece
US4124199A (en) * 1977-07-11 1978-11-07 Abar Corporation Process and apparatus for case hardening of ferrous metal work pieces
DE2803331C3 (de) * 1978-01-26 1981-09-03 Klöckner Ionon GmbH, 5000 Köln Anlage zum teilweisen Behandeln von langgestreckten Werkstücken durch stromstarke Glimmentladung
JPS5514839A (en) * 1978-07-14 1980-02-01 Kawasaki Heavy Ind Ltd Treating method for ion nitriding
FR2439824A1 (fr) * 1978-10-25 1980-05-23 Creusot Loire Perfectionnement dans la chromisation des aciers par voie gazeuse
JPS5591968A (en) * 1978-12-28 1980-07-11 Canon Inc Film forming method by glow discharge
US4394234A (en) * 1979-02-02 1983-07-19 Hitachi, Ltd. Method of processing electrically conductive material by glow discharge
JPS5845177B2 (ja) * 1979-03-09 1983-10-07 富士通株式会社 半導体表面絶縁膜の形成法
FR2483468A2 (fr) * 1980-05-29 1981-12-04 Creusot Loire Perfectionnement dans la chromisation des aciers par voie gazeuse
US4349403A (en) * 1981-01-16 1982-09-14 Lord Corporation Method for bonding elastomers to steel
DE19601436A1 (de) * 1996-01-17 1997-07-24 Siegfried Dr Ing Straemke Verfahren und Vorrichtung zur Oberflächenbehandlung von Werkstücken
DE69726834T2 (de) * 1997-04-18 2004-11-04 Plasma Metal S.A. Verfahren und Ofen zum Nitrieren
JP6354149B2 (ja) * 2013-12-18 2018-07-11 株式会社Ihi プラズマ窒化装置
CN105115801B (zh) * 2015-09-11 2019-01-22 贵州省分析测试研究院 一种金属材料分析前处理器
DE102019205115B3 (de) * 2019-04-10 2020-08-13 Icotek Project Gmbh & Co. Kg Vorrichtung zur Einführung von Leitungen durch eine Öffnung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2777796C1 (ru) * 2021-11-29 2022-08-10 Федеральное государственное бюджетное образовательное учреждение высшего образования "Кубанский государственный технологический университет" (ФГБОУ ВО "КубГТУ") Устройство для азотирования в разряде

Also Published As

Publication number Publication date
LU62593A1 (xx) 1971-08-19
FR2078067A5 (xx) 1971-11-05
NL7101947A (xx) 1971-08-17
CH555898A (de) 1974-11-15
DE2106850C3 (de) 1974-01-31
AT303904B (de) 1972-12-11
US3730863A (en) 1973-05-01
CH519588A (de) 1972-02-29
SE358907B (xx) 1973-08-13
DE2106850B2 (de) 1973-07-05
DE2106850A1 (de) 1971-12-16
BE762430A (fr) 1971-07-16
JPS5118895B1 (xx) 1976-06-14

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