JP6354149B2 - プラズマ窒化装置 - Google Patents
プラズマ窒化装置 Download PDFInfo
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- JP6354149B2 JP6354149B2 JP2013260995A JP2013260995A JP6354149B2 JP 6354149 B2 JP6354149 B2 JP 6354149B2 JP 2013260995 A JP2013260995 A JP 2013260995A JP 2013260995 A JP2013260995 A JP 2013260995A JP 6354149 B2 JP6354149 B2 JP 6354149B2
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- Prior art keywords
- surface treatment
- plasma
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- processing
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/04—Treatment of selected surface areas, e.g. using masks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32366—Localised processing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32522—Temperature
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32568—Relative arrangement or disposition of electrodes; moving means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2220/00—Application
- F05D2220/30—Application in turbines
- F05D2220/32—Application in turbines in gas turbines
- F05D2220/323—Application in turbines in gas turbines for aircraft propulsion, e.g. jet engines
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/90—Coating; Surface treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2240/00—Components
- F05D2240/60—Shafts
- F05D2240/61—Hollow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/327—Arrangements for generating the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/338—Changing chemical properties of treated surfaces
- H01J2237/3387—Nitriding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32513—Sealing means, e.g. sealing between different parts of the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Plasma Technology (AREA)
Description
2 表面処理領域
10 表面処理部
11 処理槽
12 電極
13 電熱ヒータ
15 プラズマ電源
16 ヒータ電源
18 断熱材
20 外部容器
21 下側容器
22 上側容器
30 処理ガス
40 取付治具
Claims (8)
- 処理ガスが供給され、表面処理領域を含む被処理体の一部を収容する処理槽を含み、前記処理槽の内部で前記処理ガスのプラズマによる前記表面処理領域の窒化処理を行う表面処理部と、
前記被処理体の全体と前記処理槽とを、前記被処理体の前記一部以外の部位が前記処理槽から露出した状態で収容する外部容器と
を備えることを特徴とするプラズマ窒化装置。 - 前記表面処理部は、前記表面処理領域と対向するように前記処理槽内に設置され、前記被処理体との間で前記プラズマを生成する電極を含むことを特徴とする請求項1に記載のプラズマ窒化装置。
- 前記表面処理部は、前記表面処理領域を加熱する加熱手段を含むことを特徴とする請求項2に記載のプラズマ窒化装置。
- 前記加熱手段は、前記表面処理領域から離間する前記処理槽の側面に設置される電熱ヒータであることを特徴とする請求項3に記載のプラズマ窒化装置。
- 前記電極は、前記被処理体を中心とした円筒状であることを特徴とする請求項1に記載のプラズマ窒化装置。
- 前記処理槽の内面を覆う断熱材を更に備えることを特徴とする請求項3に記載のプラズマ窒化装置。
- 前記外部容器は、前記処理槽を収容する下側容器と、前記処理槽から露出した前記被処理体の部位を収容する上側容器とから構成され、
前記上側容器は、前記処理槽から突出した単体の前記被処理体の部位を収容するために必要且つ十分な容積をもつことを特徴とする請求項1に記載のプラズマ窒化装置。 - 前記外部容器は、その内部空間を密封する真空容器として構成されていることを特徴とする請求項1に記載のプラズマ窒化装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013260995A JP6354149B2 (ja) | 2013-12-18 | 2013-12-18 | プラズマ窒化装置 |
PCT/JP2014/079303 WO2015093167A1 (ja) | 2013-12-18 | 2014-11-05 | プラズマ窒化装置 |
EP14870897.7A EP3085807A4 (en) | 2013-12-18 | 2014-11-05 | Plasma nitriding apparatus |
US15/172,507 US10443117B2 (en) | 2013-12-18 | 2016-06-03 | Plasma nitriding apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013260995A JP6354149B2 (ja) | 2013-12-18 | 2013-12-18 | プラズマ窒化装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015117405A JP2015117405A (ja) | 2015-06-25 |
JP6354149B2 true JP6354149B2 (ja) | 2018-07-11 |
Family
ID=53402524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013260995A Active JP6354149B2 (ja) | 2013-12-18 | 2013-12-18 | プラズマ窒化装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10443117B2 (ja) |
EP (1) | EP3085807A4 (ja) |
JP (1) | JP6354149B2 (ja) |
WO (1) | WO2015093167A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6789562B2 (ja) * | 2016-02-26 | 2020-11-25 | 国立大学法人 大分大学 | 誘電体バリア放電による金属表層の硬化方法 |
JP6875917B2 (ja) * | 2017-03-31 | 2021-05-26 | 日本製鉄株式会社 | 密閉容器構成部材の合体位置合わせ方法及び密閉容器構成部材の合体位置合わせ装置 |
JP7174943B2 (ja) * | 2017-04-26 | 2022-11-18 | 国立大学法人 大分大学 | 窒化処理装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH519588A (de) * | 1970-02-13 | 1972-02-29 | Berghaus Elektrophysik Anst | Verfahren zur Bearbeitung eines Werkstückes mittels einer Glimmentladung und Apparatur zur Durchführung des Verfahrens |
CH551496A (de) * | 1970-09-21 | 1974-07-15 | Berghaus Bernhard Elektrophysi | Verfahren zur verfestigung der oberflaeche von werkstuecken aus eisen und stahl. |
JPS5298633A (en) * | 1976-02-16 | 1977-08-18 | Kawasaki Heavy Ind Ltd | Surface treating method by vacuum dicharge |
JPS52146734A (en) * | 1976-06-01 | 1977-12-06 | Kawasaki Heavy Ind Ltd | Ionitriding means for largeesized planar work |
DE2657078C2 (de) * | 1975-12-29 | 1984-08-16 | Kawasaki Jukogyo K.K., Kobe, Hyogo | Einrichtung zur Gleichstrom-Ionennitrierung von Werkstücken |
JPS5368641A (en) | 1976-12-01 | 1978-06-19 | Kawasaki Heavy Ind Ltd | Ionic nitriding treatment device |
DE2803331C3 (de) * | 1978-01-26 | 1981-09-03 | Klöckner Ionon GmbH, 5000 Köln | Anlage zum teilweisen Behandeln von langgestreckten Werkstücken durch stromstarke Glimmentladung |
JPS5591968A (en) * | 1978-12-28 | 1980-07-11 | Canon Inc | Film forming method by glow discharge |
US4394234A (en) * | 1979-02-02 | 1983-07-19 | Hitachi, Ltd. | Method of processing electrically conductive material by glow discharge |
JPH02213460A (ja) * | 1989-02-15 | 1990-08-24 | Sumitomo Metal Ind Ltd | 表面特性の優れた鋼板の連続製造法と装置 |
JP3014603B2 (ja) * | 1994-11-29 | 2000-02-28 | 川崎製鉄株式会社 | 金属帯の連続プラズマ処理装置 |
ES2210480T3 (es) * | 1997-04-18 | 2004-07-01 | Plasma Metal S.A. | Proceso de nitruracion y horno de nitruracion para su realizacion. |
JP2008133518A (ja) | 2006-11-29 | 2008-06-12 | Nissan Motor Co Ltd | プラズマ窒化制御方法及びプラズマ窒化システム |
JP5457132B2 (ja) * | 2009-10-19 | 2014-04-02 | 日本碍子株式会社 | プラズマ処理装置 |
-
2013
- 2013-12-18 JP JP2013260995A patent/JP6354149B2/ja active Active
-
2014
- 2014-11-05 EP EP14870897.7A patent/EP3085807A4/en active Pending
- 2014-11-05 WO PCT/JP2014/079303 patent/WO2015093167A1/ja active Application Filing
-
2016
- 2016-06-03 US US15/172,507 patent/US10443117B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2015117405A (ja) | 2015-06-25 |
EP3085807A4 (en) | 2017-07-26 |
US20160281207A1 (en) | 2016-09-29 |
WO2015093167A1 (ja) | 2015-06-25 |
EP3085807A1 (en) | 2016-10-26 |
US10443117B2 (en) | 2019-10-15 |
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