CA957842A - Method of heating objects and device for the performance of the method - Google Patents

Method of heating objects and device for the performance of the method

Info

Publication number
CA957842A
CA957842A CA115,916A CA115916A CA957842A CA 957842 A CA957842 A CA 957842A CA 115916 A CA115916 A CA 115916A CA 957842 A CA957842 A CA 957842A
Authority
CA
Canada
Prior art keywords
performance
heating objects
objects
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA115,916A
Other versions
CA115916S (en
Inventor
Horst Rordorf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektrophysikalische Anstalt Bernhard Berghaus
Original Assignee
Elektrophysikalische Anstalt Bernhard Berghaus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektrophysikalische Anstalt Bernhard Berghaus filed Critical Elektrophysikalische Anstalt Bernhard Berghaus
Application granted granted Critical
Publication of CA957842A publication Critical patent/CA957842A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Furnace Details (AREA)
CA115,916A 1970-06-18 1971-06-17 Method of heating objects and device for the performance of the method Expired CA957842A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH923470A CH509411A (en) 1970-06-18 1970-06-18 Process for heating objects and equipment for carrying out the process

Publications (1)

Publication Number Publication Date
CA957842A true CA957842A (en) 1974-11-19

Family

ID=4349799

Family Applications (1)

Application Number Title Priority Date Filing Date
CA115,916A Expired CA957842A (en) 1970-06-18 1971-06-17 Method of heating objects and device for the performance of the method

Country Status (9)

Country Link
JP (1) JPS51928B1 (en)
BE (1) BE768243A (en)
CA (1) CA957842A (en)
CH (1) CH509411A (en)
DE (1) DE2130035A1 (en)
FR (1) FR2096240A5 (en)
GB (1) GB1354766A (en)
LU (1) LU63359A1 (en)
NL (1) NL7108367A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3029339C2 (en) * 1979-09-14 1984-11-22 Hitachi, Ltd., Tokio/Tokyo Glow discharge surface treatment method and apparatus
CN104061781A (en) * 2014-07-04 2014-09-24 苏州普京真空技术有限公司 Multistage vacuum furnace

Also Published As

Publication number Publication date
FR2096240A5 (en) 1972-02-11
BE768243A (en) 1971-11-03
DE2130035A1 (en) 1972-01-05
NL7108367A (en) 1971-12-21
CH509411A (en) 1971-06-30
JPS51928B1 (en) 1976-01-12
LU63359A1 (en) 1971-09-20
GB1354766A (en) 1974-06-05

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