CA937340A - Electron beam apparatus with means for generating a rotation-symmetrical magnetic field - Google Patents

Electron beam apparatus with means for generating a rotation-symmetrical magnetic field

Info

Publication number
CA937340A
CA937340A CA120801A CA120801A CA937340A CA 937340 A CA937340 A CA 937340A CA 120801 A CA120801 A CA 120801A CA 120801 A CA120801 A CA 120801A CA 937340 A CA937340 A CA 937340A
Authority
CA
Canada
Prior art keywords
generating
rotation
magnetic field
electron beam
beam apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA120801A
Other languages
English (en)
Other versions
CA120801S (en
Inventor
B. Lepoole Jan.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA937340A publication Critical patent/CA937340A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/56—Arrangements for controlling cross-section of ray or beam; Arrangements for correcting aberration of beam, e.g. due to lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/145—Combinations of electrostatic and magnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CA120801A 1970-08-21 1971-08-18 Electron beam apparatus with means for generating a rotation-symmetrical magnetic field Expired CA937340A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7012387A NL7012387A (de) 1970-08-21 1970-08-21

Publications (1)

Publication Number Publication Date
CA937340A true CA937340A (en) 1973-11-20

Family

ID=19810827

Family Applications (1)

Application Number Title Priority Date Filing Date
CA120801A Expired CA937340A (en) 1970-08-21 1971-08-18 Electron beam apparatus with means for generating a rotation-symmetrical magnetic field

Country Status (8)

Country Link
US (1) US3731094A (de)
BE (1) BE771537A (de)
CA (1) CA937340A (de)
CH (1) CH536026A (de)
FR (1) FR2104603A5 (de)
GB (1) GB1367360A (de)
NL (1) NL7012387A (de)
SE (1) SE377001B (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3912930A (en) * 1973-09-26 1975-10-14 Physics Int Co Electron beam focusing system
EP0417354A1 (de) * 1989-09-15 1991-03-20 Koninklijke Philips Electronics N.V. Elektronenstrahlgerät mit Ausfladungskompensierung
ATA4694A (de) * 1994-01-13 1994-11-15 Ims Ionen Mikrofab Syst Projektionssystem fuer geladene teilchen

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2233264A (en) * 1938-12-27 1941-02-25 Rca Corp Electron lens
GB578273A (en) * 1943-03-03 1946-06-21 British Thomson Houston Co Ltd Improvements in electron optical systems
BE477488A (de) * 1945-08-28
US2890342A (en) * 1954-09-29 1959-06-09 Gen Electric System for charge neutralization
NL285301A (de) * 1961-11-15
US3209147A (en) * 1963-03-05 1965-09-28 Centre Nat Rech Scient Electron lens spherical aberration correcting device comprising a current carrying wire section on the lens axis

Also Published As

Publication number Publication date
DE2138892B2 (de) 1977-03-24
FR2104603A5 (de) 1972-04-14
DE2138892A1 (de) 1972-02-24
US3731094A (en) 1973-05-01
NL7012387A (de) 1972-02-23
BE771537A (fr) 1972-02-21
SE377001B (de) 1975-06-16
GB1367360A (en) 1974-09-18
CH536026A (de) 1973-04-15

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