FR2104603A5 - - Google Patents

Info

Publication number
FR2104603A5
FR2104603A5 FR7130436A FR7130436A FR2104603A5 FR 2104603 A5 FR2104603 A5 FR 2104603A5 FR 7130436 A FR7130436 A FR 7130436A FR 7130436 A FR7130436 A FR 7130436A FR 2104603 A5 FR2104603 A5 FR 2104603A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7130436A
Inventor
Poole J B Le
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Priority to FR7136436A priority Critical patent/FR2155841B2/fr
Application granted granted Critical
Publication of FR2104603A5 publication Critical patent/FR2104603A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/56—Arrangements for controlling cross-section of ray or beam; Arrangements for correcting aberration of beam, e.g. due to lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/145—Combinations of electrostatic and magnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7130436A 1970-08-21 1971-08-20 Expired FR2104603A5 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7136436A FR2155841B2 (fr) 1971-08-20 1971-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7012387A NL7012387A (fr) 1970-08-21 1970-08-21

Publications (1)

Publication Number Publication Date
FR2104603A5 true FR2104603A5 (fr) 1972-04-14

Family

ID=19810827

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7130436A Expired FR2104603A5 (fr) 1970-08-21 1971-08-20

Country Status (8)

Country Link
US (1) US3731094A (fr)
BE (1) BE771537A (fr)
CA (1) CA937340A (fr)
CH (1) CH536026A (fr)
FR (1) FR2104603A5 (fr)
GB (1) GB1367360A (fr)
NL (1) NL7012387A (fr)
SE (1) SE377001B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0417354A1 (fr) * 1989-09-15 1991-03-20 Koninklijke Philips Electronics N.V. Appareil à faisceau d'électrons avec compensation des charges accumulées

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3912930A (en) * 1973-09-26 1975-10-14 Physics Int Co Electron beam focusing system
ATA4694A (de) * 1994-01-13 1994-11-15 Ims Ionen Mikrofab Syst Projektionssystem fuer geladene teilchen

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2233264A (en) * 1938-12-27 1941-02-25 Rca Corp Electron lens
GB578273A (en) * 1943-03-03 1946-06-21 British Thomson Houston Co Ltd Improvements in electron optical systems
BE477488A (fr) * 1945-08-28
US2890342A (en) * 1954-09-29 1959-06-09 Gen Electric System for charge neutralization
NL285301A (fr) * 1961-11-15
US3209147A (en) * 1963-03-05 1965-09-28 Centre Nat Rech Scient Electron lens spherical aberration correcting device comprising a current carrying wire section on the lens axis

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0417354A1 (fr) * 1989-09-15 1991-03-20 Koninklijke Philips Electronics N.V. Appareil à faisceau d'électrons avec compensation des charges accumulées

Also Published As

Publication number Publication date
BE771537A (fr) 1972-02-21
SE377001B (fr) 1975-06-16
CA937340A (en) 1973-11-20
NL7012387A (fr) 1972-02-23
DE2138892B2 (de) 1977-03-24
DE2138892A1 (de) 1972-02-24
CH536026A (de) 1973-04-15
US3731094A (en) 1973-05-01
GB1367360A (en) 1974-09-18

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Legal Events

Date Code Title Description
ST Notification of lapse