GB578273A - Improvements in electron optical systems - Google Patents

Improvements in electron optical systems

Info

Publication number
GB578273A
GB578273A GB3510/43A GB351043A GB578273A GB 578273 A GB578273 A GB 578273A GB 3510/43 A GB3510/43 A GB 3510/43A GB 351043 A GB351043 A GB 351043A GB 578273 A GB578273 A GB 578273A
Authority
GB
United Kingdom
Prior art keywords
axis
electrons
lens
region
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3510/43A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
British Thomson Houston Co Ltd
Original Assignee
British Thomson Houston Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Thomson Houston Co Ltd filed Critical British Thomson Houston Co Ltd
Priority to GB3510/43A priority Critical patent/GB578273A/en
Priority to US522138A priority patent/US2426866A/en
Publication of GB578273A publication Critical patent/GB578273A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10Lenses
    • H01J37/145Combinations of electrostatic and magnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Cold Cathode And The Manufacture (AREA)

Abstract

578,273. Electron lenses. BRITISH THOMSON - HOUSTON CO., Ltd., and GABOR, D. March 3, 1943, No. 3510. [Class 39 (i)] A dispersing electron, lens for correcting spherical aberration consists of an axially symmetrical electronic space charge confined within a limited region by combined electric and magnetic fields. The electron beam to be focused travels along the axis 17, Fig. 4, and passes first through a convergent magnetic lens 2. It then passes into the region within magnetic coil 4 in which electrons supplied by annular auxiliary cathode 6 are confined within the space marked 7 by the combined effect of the magnetic field, the positive electrode 5 and negatively charged end electrodes which as shown are the ends of coil casing 3. It is shown that, provided the cathode 6 is situated on or near the line of field 8, Fig. 5, which cuts the axis 17, there will be set up two rotating streams of electrons travelling in opposite directions and forming a highly concentrated space charge which, near the axis, increases with radial distance from the axis. The potential at the axis falls to zero and in order to prevent hollowing out of the beam, and the accumulation of excess energy electrons, electrons are removed from the region at a controlled rate by slightly positive electrode 16; the charge density ultimately falls to zero at the edges of the region and no electrons are collected by anode 5. The magnetic fields of the rotating streams combine to oppose and weaken the field of coil 4 at the axis. As the lens has a negative spherical aberration, it combines with ordinary lenses having a positive aberration to produce a compound lens of low spherical aberration and short focal length, suitable for electron microscopes. The Provisional Specification states that chromatic aberration may also be corrected.
GB3510/43A 1943-03-03 1943-03-03 Improvements in electron optical systems Expired GB578273A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB3510/43A GB578273A (en) 1943-03-03 1943-03-03 Improvements in electron optical systems
US522138A US2426866A (en) 1943-03-03 1944-02-12 Electron optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3510/43A GB578273A (en) 1943-03-03 1943-03-03 Improvements in electron optical systems

Publications (1)

Publication Number Publication Date
GB578273A true GB578273A (en) 1946-06-21

Family

ID=9759687

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3510/43A Expired GB578273A (en) 1943-03-03 1943-03-03 Improvements in electron optical systems

Country Status (2)

Country Link
US (1) US2426866A (en)
GB (1) GB578273A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3731094A (en) * 1970-08-21 1973-05-01 Philips Corp Electron beam apparatus with means for generating a rotation-symmetrical magnetic field

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1941157A (en) * 1928-12-05 1933-12-26 Raytheon Mfg Co Electron discharge apparatus
DE906737C (en) * 1931-05-31 1954-03-18 Siemens Ag Arrangement for enlarged imaging of objects by means of electron beams
US2128597A (en) * 1935-08-07 1938-08-30 Firm Fernseh Ag Braun tube
US2119679A (en) * 1936-05-29 1938-06-07 Charles V Litton X-ray tube
US2266411A (en) * 1938-05-27 1941-12-16 Int Standard Electric Corp Electron tube
US2288402A (en) * 1941-01-29 1942-06-30 Rca Corp Television transmitting tube

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3731094A (en) * 1970-08-21 1973-05-01 Philips Corp Electron beam apparatus with means for generating a rotation-symmetrical magnetic field

Also Published As

Publication number Publication date
US2426866A (en) 1947-09-02

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