SE377001B - - Google Patents
Info
- Publication number
- SE377001B SE377001B SE7110502A SE1050271DA SE377001B SE 377001 B SE377001 B SE 377001B SE 7110502 A SE7110502 A SE 7110502A SE 1050271D A SE1050271D A SE 1050271DA SE 377001 B SE377001 B SE 377001B
- Authority
- SE
- Sweden
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/56—Arrangements for controlling cross-section of ray or beam; Arrangements for correcting aberration of beam, e.g. due to lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/145—Combinations of electrostatic and magnetic lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7012387A NL7012387A (xx) | 1970-08-21 | 1970-08-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE377001B true SE377001B (xx) | 1975-06-16 |
Family
ID=19810827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE7110502A SE377001B (xx) | 1970-08-21 | 1971-08-18 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3731094A (xx) |
| BE (1) | BE771537A (xx) |
| CA (1) | CA937340A (xx) |
| CH (1) | CH536026A (xx) |
| FR (1) | FR2104603A5 (xx) |
| GB (1) | GB1367360A (xx) |
| NL (1) | NL7012387A (xx) |
| SE (1) | SE377001B (xx) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3912930A (en) * | 1973-09-26 | 1975-10-14 | Physics Int Co | Electron beam focusing system |
| EP0417354A1 (en) * | 1989-09-15 | 1991-03-20 | Koninklijke Philips Electronics N.V. | Electron beam apparatus with charge-up compensation |
| ATA4694A (de) * | 1994-01-13 | 1994-11-15 | Ims Ionen Mikrofab Syst | Projektionssystem fuer geladene teilchen |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2233264A (en) * | 1938-12-27 | 1941-02-25 | Rca Corp | Electron lens |
| GB578273A (en) * | 1943-03-03 | 1946-06-21 | British Thomson Houston Co Ltd | Improvements in electron optical systems |
| BE477488A (xx) * | 1945-08-28 | |||
| US2890342A (en) * | 1954-09-29 | 1959-06-09 | Gen Electric | System for charge neutralization |
| NL285301A (xx) * | 1961-11-15 | |||
| US3209147A (en) * | 1963-03-05 | 1965-09-28 | Centre Nat Rech Scient | Electron lens spherical aberration correcting device comprising a current carrying wire section on the lens axis |
-
1970
- 1970-08-21 NL NL7012387A patent/NL7012387A/xx unknown
-
1971
- 1971-08-18 CA CA120801A patent/CA937340A/en not_active Expired
- 1971-08-18 CH CH1212671A patent/CH536026A/de not_active IP Right Cessation
- 1971-08-18 GB GB3875271A patent/GB1367360A/en not_active Expired
- 1971-08-18 SE SE7110502A patent/SE377001B/xx unknown
- 1971-08-19 US US00173045A patent/US3731094A/en not_active Expired - Lifetime
- 1971-08-19 BE BE771537A patent/BE771537A/xx unknown
- 1971-08-20 FR FR7130436A patent/FR2104603A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| BE771537A (fr) | 1972-02-21 |
| CA937340A (en) | 1973-11-20 |
| NL7012387A (xx) | 1972-02-23 |
| DE2138892B2 (de) | 1977-03-24 |
| DE2138892A1 (de) | 1972-02-24 |
| FR2104603A5 (xx) | 1972-04-14 |
| CH536026A (de) | 1973-04-15 |
| US3731094A (en) | 1973-05-01 |
| GB1367360A (en) | 1974-09-18 |