GB1367360A - Electron-optical apparatus - Google Patents

Electron-optical apparatus

Info

Publication number
GB1367360A
GB1367360A GB3875271A GB3875271A GB1367360A GB 1367360 A GB1367360 A GB 1367360A GB 3875271 A GB3875271 A GB 3875271A GB 3875271 A GB3875271 A GB 3875271A GB 1367360 A GB1367360 A GB 1367360A
Authority
GB
United Kingdom
Prior art keywords
lens
electron
space charge
auxiliary
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3875271A
Inventor
Poole J B Le
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1367360A publication Critical patent/GB1367360A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/56—Arrangements for controlling cross-section of ray or beam; Arrangements for correcting aberration of beam, e.g. due to lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/145—Combinations of electrostatic and magnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1367360 Electron beam focusing apparatus PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 18 Aug 1971 [21 Aug 1970] 38752/71 Heading H1D Electron-optical apparatus (e.g. in an electron microscope, scanning microanalyser or beam machining apparatus) for focusing an image forming electron beam includes magnetic lens means for providing a rotationally-symmetrical magnetic field about the beam axis, an auxiliary electron source (7) located away from the axis so that focusing is not disturbed, the auxiliary source providing an auxiliary non-image forming focused beam directed to one side of the first beam and crossing the axis at not greater than 30 degrees so as to describe a generally helical path about the main beam to provide a corresponding space charge compensating for spherical aberration effects. The space charge may be formed by secondary electrons by gas ionization, pressures being 10<SP>-4</SP> to 10<SP>-10</SP> torr. Alternatively, the beam may itself remain in the region sufficiently long that a space charge is built up, or both effects may operate. Fig. 1 (not shown) includes coil (2), ferromagnetic shield (4), and air gap (5), which may be replaced by a permanent magnet or e.m. pole shoes, and source (7) with magnetic lens (13) mounted in anode (11). Non-ferromagnetic sleeve (15) at positive potential repels positive ions, producing a negative space charge. Variation of sleeve (15) potential controls the injection direction. Fig. 2 (not shown) includes anode (11), control electrode (10), deformable rings (16) and (17) enabling alignment of the gun after mounting by adjustment screws (not shown). The electron microscope of Fig. 3, includes condenser lens 22, main lens 2, projector lens 23 and target screen 24. Permanent magnet lenses may be used. The beam 12 may be injected in any of the lenses or any other rotationally symmetrical magnetic lens. Fig. 4 (not shown) includes objective lens (25) of the type in U.S. patent Specification 3,394,254 used in a scanning microanalyser for example, with elongated magnetic coil (26), cooling body (27) and auxiliary electron beam source (7). Focus spot size may be 1 Ám. The apparatus may include the image forming lens of a scanning electron microscope located nearest the object or may be the convergence lens of an electron beam machining apparatus. Reference is made to U.K. patent Specification 578,273.
GB3875271A 1970-08-21 1971-08-18 Electron-optical apparatus Expired GB1367360A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7012387A NL7012387A (en) 1970-08-21 1970-08-21

Publications (1)

Publication Number Publication Date
GB1367360A true GB1367360A (en) 1974-09-18

Family

ID=19810827

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3875271A Expired GB1367360A (en) 1970-08-21 1971-08-18 Electron-optical apparatus

Country Status (8)

Country Link
US (1) US3731094A (en)
BE (1) BE771537A (en)
CA (1) CA937340A (en)
CH (1) CH536026A (en)
FR (1) FR2104603A5 (en)
GB (1) GB1367360A (en)
NL (1) NL7012387A (en)
SE (1) SE377001B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995019640A1 (en) * 1994-01-13 1995-07-20 Ims Ionen Mikrofabrikations Systeme Gesellschaft M.B.H. Charged particle projector system

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3912930A (en) * 1973-09-26 1975-10-14 Physics Int Co Electron beam focusing system
EP0417354A1 (en) * 1989-09-15 1991-03-20 Koninklijke Philips Electronics N.V. Electron beam apparatus with charge-up compensation

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2233264A (en) * 1938-12-27 1941-02-25 Rca Corp Electron lens
GB578273A (en) * 1943-03-03 1946-06-21 British Thomson Houston Co Ltd Improvements in electron optical systems
BE477488A (en) * 1945-08-28
US2890342A (en) * 1954-09-29 1959-06-09 Gen Electric System for charge neutralization
NL285301A (en) * 1961-11-15
US3209147A (en) * 1963-03-05 1965-09-28 Centre Nat Rech Scient Electron lens spherical aberration correcting device comprising a current carrying wire section on the lens axis

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995019640A1 (en) * 1994-01-13 1995-07-20 Ims Ionen Mikrofabrikations Systeme Gesellschaft M.B.H. Charged particle projector system

Also Published As

Publication number Publication date
CA937340A (en) 1973-11-20
US3731094A (en) 1973-05-01
NL7012387A (en) 1972-02-23
DE2138892B2 (en) 1977-03-24
CH536026A (en) 1973-04-15
SE377001B (en) 1975-06-16
FR2104603A5 (en) 1972-04-14
BE771537A (en) 1972-02-21
DE2138892A1 (en) 1972-02-24

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee