CA3014048A1 - Free atom nanotube growth - Google Patents
Free atom nanotube growth Download PDFInfo
- Publication number
- CA3014048A1 CA3014048A1 CA3014048A CA3014048A CA3014048A1 CA 3014048 A1 CA3014048 A1 CA 3014048A1 CA 3014048 A CA3014048 A CA 3014048A CA 3014048 A CA3014048 A CA 3014048A CA 3014048 A1 CA3014048 A1 CA 3014048A1
- Authority
- CA
- Canada
- Prior art keywords
- substrate
- broadtip
- nanotube growth
- emrad
- feedlayer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/064—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with boron
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
- B82B3/0009—Forming specific nanostructures
- B82B3/0019—Forming specific nanostructures without movable or flexible elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/164—Preparation involving continuous processes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/10—Particle morphology extending in one dimension, e.g. needle-like
- C01P2004/13—Nanotubes
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Inorganic Chemistry (AREA)
- Nanotechnology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Carbon And Carbon Compounds (AREA)
- Catalysts (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/043,952 | 2016-02-15 | ||
| US15/043,952 US10618810B2 (en) | 2013-09-25 | 2016-02-15 | Free atom nanotube growth |
| PCT/US2017/017583 WO2017142819A1 (en) | 2016-02-15 | 2017-02-12 | Free atom nanotube growth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA3014048A1 true CA3014048A1 (en) | 2017-08-24 |
Family
ID=59562387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA3014048A Pending CA3014048A1 (en) | 2016-02-15 | 2017-02-12 | Free atom nanotube growth |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US10618810B2 (https=) |
| EP (1) | EP3416914A4 (https=) |
| JP (2) | JP2019511995A (https=) |
| KR (1) | KR102708904B1 (https=) |
| CN (1) | CN108883938B (https=) |
| CA (1) | CA3014048A1 (https=) |
| RU (2) | RU2021122177A (https=) |
| WO (1) | WO2017142819A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10618810B2 (en) * | 2013-09-25 | 2020-04-14 | Odysseus Technologies, Inc. | Free atom nanotube growth |
| US11247901B2 (en) | 2012-10-29 | 2022-02-15 | Odysseus Technologies, Inc. | Free atom nanotube growth |
| FR3107053B1 (fr) * | 2020-02-11 | 2022-02-04 | Commissariat Energie Atomique | Materiau hydride 2d/1d comprenant une couche carbonee recouverte par une foret de nanotubes de carbone |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0216654D0 (en) | 2002-07-17 | 2002-08-28 | Univ Cambridge Tech | CVD Synthesis of carbon nanoutubes |
| CN100411979C (zh) | 2002-09-16 | 2008-08-20 | 清华大学 | 一种碳纳米管绳及其制造方法 |
| CN101205060B (zh) | 2006-12-20 | 2011-05-04 | 清华大学 | 碳纳米管阵列的制备方法 |
| US8206674B2 (en) | 2007-05-15 | 2012-06-26 | National Institute Of Aerospace Associates | Boron nitride nanotubes |
| US20090163647A1 (en) * | 2007-12-21 | 2009-06-25 | Envont Llc | Hybrid metal oxides |
| KR100977147B1 (ko) * | 2007-12-31 | 2010-08-23 | 세메스 주식회사 | 유동층 탄소나노튜브 생성 장치 및 그것을 사용한탄소나노튜브 생성 설비 및 방법 |
| US7883580B2 (en) * | 2008-04-02 | 2011-02-08 | Raythedn Company | System and method for nanotube growth via Ion implantation using a catalytic transmembrane |
| CN101734641A (zh) * | 2008-11-14 | 2010-06-16 | 华北电力大学 | 热解合成碳纳米管加热器及合成方法 |
| RU2393276C1 (ru) * | 2009-03-05 | 2010-06-27 | Общество с ограниченной ответственностью "Объединенный центр исследований и разработок" | Способ изготовления длинных ориентированных жгутов углеродных нановолокон |
| CN102574688A (zh) * | 2009-07-31 | 2012-07-11 | 麻省理工学院 | 涉及形成碳基纳米管的系统和方法 |
| US20110162957A1 (en) * | 2009-11-25 | 2011-07-07 | Massachusetts Institute Of Technology | Systems and methods for enhancing growth of carbon-based nanostructures |
| WO2013119295A1 (en) * | 2011-11-18 | 2013-08-15 | William Marsh Rice University | Graphene-carbon nanotube hybrid materials and use as electrodes |
| US20130306490A1 (en) | 2012-05-15 | 2013-11-21 | Bryan Edward Laubscher | Nanotube Detangler |
| US9656246B2 (en) * | 2012-07-11 | 2017-05-23 | Carbice Corporation | Vertically aligned arrays of carbon nanotubes formed on multilayer substrates |
| TW201418156A (zh) * | 2012-10-26 | 2014-05-16 | Applied Materials Inc | 銅基板上的奈米碳管之生長 |
| US10618810B2 (en) * | 2013-09-25 | 2020-04-14 | Odysseus Technologies, Inc. | Free atom nanotube growth |
| US9371232B2 (en) * | 2012-10-29 | 2016-06-21 | Bryan Edward Laubscher | Trekking atom nanotube growth |
| US20140120028A1 (en) | 2012-10-29 | 2014-05-01 | Bryan Edward Laubscher | Proximate atom nanotube growth |
| US9239224B2 (en) | 2013-02-26 | 2016-01-19 | Bryan Edward Laubscher | Natural light interferometer |
-
2016
- 2016-02-15 US US15/043,952 patent/US10618810B2/en active Active
-
2017
- 2017-02-12 RU RU2021122177A patent/RU2021122177A/ru unknown
- 2017-02-12 CN CN201780019697.9A patent/CN108883938B/zh active Active
- 2017-02-12 EP EP17753675.2A patent/EP3416914A4/en active Pending
- 2017-02-12 KR KR1020187026340A patent/KR102708904B1/ko active Active
- 2017-02-12 WO PCT/US2017/017583 patent/WO2017142819A1/en not_active Ceased
- 2017-02-12 RU RU2018132725A patent/RU2753099C2/ru active
- 2017-02-12 CA CA3014048A patent/CA3014048A1/en active Pending
- 2017-02-12 JP JP2018561194A patent/JP2019511995A/ja active Pending
-
2021
- 2021-06-03 JP JP2021093680A patent/JP7384855B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| RU2021122177A3 (https=) | 2022-04-19 |
| KR102708904B1 (ko) | 2024-09-23 |
| JP7384855B2 (ja) | 2023-11-21 |
| KR20180114127A (ko) | 2018-10-17 |
| RU2018132725A (ru) | 2020-03-17 |
| JP2019511995A (ja) | 2019-05-09 |
| JP2021121580A (ja) | 2021-08-26 |
| RU2021122177A (ru) | 2021-10-29 |
| CN108883938B (zh) | 2023-06-23 |
| EP3416914A1 (en) | 2018-12-26 |
| RU2753099C2 (ru) | 2021-08-11 |
| EP3416914A4 (en) | 2020-03-18 |
| US10618810B2 (en) | 2020-04-14 |
| RU2018132725A3 (https=) | 2020-07-30 |
| CN108883938A (zh) | 2018-11-23 |
| WO2017142819A1 (en) | 2017-08-24 |
| US20170233254A1 (en) | 2017-08-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7384855B2 (ja) | 遊離原子ナノチューブの成長 | |
| El Mel et al. | The Kirkendall effect and nanoscience: hollow nanospheres and nanotubes | |
| CA2686629C (en) | Boron nitride nanotubes | |
| JP4701161B2 (ja) | 正確に位置決めされたナノウィスカおよびナノウィスカアレイ、およびそれらを作成する方法 | |
| JP5956645B2 (ja) | 結晶表面構造およびその製造方法 | |
| US20250128945A1 (en) | Free atom nanotube growth | |
| US20060141268A1 (en) | Nanoparticle coated nanostructured surfaces for detection, catalysis and device applications | |
| US7354871B2 (en) | Nanowires comprising metal nanodots and method for producing the same | |
| JP2006225258A (ja) | シリコンナノワイヤおよびその製造方法 | |
| JP2021121580A5 (https=) | ||
| US20100006820A1 (en) | Silica nanowire comprising silicon nanodots and method of preparing the same | |
| Lin et al. | One-pot heterointerfacial metamorphosis for synthesis and control of widely varying heterostructured nanoparticles | |
| Noriki et al. | Patterning technique for gold nanoparticles on substrates using a focused electron beam | |
| KR101348728B1 (ko) | 나노와이어 내부에 귀금속을 불연속적으로 포함하는 산화갈륨 나노와이어의 제조방법 및 이에 의해 제조되는 산화갈륨 나노와이어 | |
| US20050000437A1 (en) | Apparatus and method for fabrication of nanostructures using decoupled heating of constituents | |
| US9371232B2 (en) | Trekking atom nanotube growth | |
| US20040208817A1 (en) | Direct surface patterning of carbon | |
| Sun et al. | One-dimensional silicon− cadmium selenide heterostructures | |
| US20140120028A1 (en) | Proximate atom nanotube growth | |
| KR101346327B1 (ko) | 귀금속을 포함하는 인듐 주석 산화물 나노와이어의 제조방법 및 이에 의해 제조된 인듐 주석 산화물 나노와이어 | |
| Hossen | DNA origami templated optical metamaterials | |
| Hunyadi Murph et al. | Synthetic Strategies for Anisotropic and Shape-Selective Nanomaterials | |
| Jeon et al. | Growth of In-Catalyzed Silicon Nanostructures by Hydrogen Radical-Assisted Deposition Method: Effect of Substrate Temperatures | |
| JP2007203180A (ja) | カーボンナノ構造体の製造方法、触媒金属粒子複合材料およびその製造方法 | |
| Garcia et al. | ZnO NW's Grown by Zn [TMHD] 2 Precursor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |
Effective date: 20220121 |
|
| D15 | Examination report completed |
Free format text: ST27 STATUS EVENT CODE: A-2-2-D10-D15-D126 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: EXAMINER'S REPORT Effective date: 20241120 |
|
| MFA | Maintenance fee for application paid |
Free format text: FEE DESCRIPTION TEXT: MF (APPLICATION, 8TH ANNIV.) - STANDARD Year of fee payment: 8 |
|
| U00 | Fee paid |
Free format text: ST27 STATUS EVENT CODE: A-2-2-U10-U00-U101 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: MAINTENANCE REQUEST RECEIVED Effective date: 20241220 |
|
| U11 | Full renewal or maintenance fee paid |
Free format text: ST27 STATUS EVENT CODE: A-2-2-U10-U11-U102 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: MAINTENANCE FEE PAYMENT DETERMINED COMPLIANT Effective date: 20241220 Free format text: ST27 STATUS EVENT CODE: A-2-2-U10-U11-U102 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: MAINTENANCE FEE PAYMENT PAID IN FULL Effective date: 20241220 |
|
| P11 | Amendment of application requested |
Free format text: ST27 STATUS EVENT CODE: A-2-2-P10-P11-P100 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: AMENDMENT RECEIVED - RESPONSE TO EXAMINER'S REQUISITION Effective date: 20250319 |
|
| W00 | Other event occurred |
Free format text: ST27 STATUS EVENT CODE: A-2-2-W10-W00-W111 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: CORRESPONDENT DETERMINED COMPLIANT Effective date: 20250331 |
|
| P11 | Amendment of application requested |
Free format text: ST27 STATUS EVENT CODE: A-2-2-P10-P11-P102 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: AMENDMENT DETERMINED COMPLIANT Effective date: 20250715 |
|
| P13 | Application amended |
Free format text: ST27 STATUS EVENT CODE: A-2-2-P10-P13-X000 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: APPLICATION AMENDED Effective date: 20250715 |
|
| MFA | Maintenance fee for application paid |
Free format text: FEE DESCRIPTION TEXT: MF (APPLICATION, 9TH ANNIV.) - STANDARD Year of fee payment: 9 |
|
| U00 | Fee paid |
Free format text: ST27 STATUS EVENT CODE: A-2-2-U10-U00-U101 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: MAINTENANCE REQUEST RECEIVED Effective date: 20251210 |
|
| U11 | Full renewal or maintenance fee paid |
Free format text: ST27 STATUS EVENT CODE: A-2-2-U10-U11-U102 (AS PROVIDED BY THE NATIONAL OFFICE); EVENT TEXT: MAINTENANCE FEE PAYMENT PAID IN FULL Effective date: 20251210 |