CA2940148C - Method for curing of green polysilazane-based silicon carbide precursor fibers - Google Patents

Method for curing of green polysilazane-based silicon carbide precursor fibers Download PDF

Info

Publication number
CA2940148C
CA2940148C CA2940148A CA2940148A CA2940148C CA 2940148 C CA2940148 C CA 2940148C CA 2940148 A CA2940148 A CA 2940148A CA 2940148 A CA2940148 A CA 2940148A CA 2940148 C CA2940148 C CA 2940148C
Authority
CA
Canada
Prior art keywords
fiber
resin
polysilazane
free
radical generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CA2940148A
Other languages
English (en)
French (fr)
Other versions
CA2940148A1 (en
Inventor
Ryan Christopher Mills
Peter Kennedy Davis
Matthew Hal Littlejohn
Slawomir Rubinsztajn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of CA2940148A1 publication Critical patent/CA2940148A1/en
Application granted granted Critical
Publication of CA2940148C publication Critical patent/CA2940148C/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F11/00—Chemical after-treatment of artificial filaments or the like during manufacture
    • D01F11/04—Chemical after-treatment of artificial filaments or the like during manufacture of synthetic polymers
    • D01F11/08—Chemical after-treatment of artificial filaments or the like during manufacture of synthetic polymers of macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/571—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained from Si-containing polymer precursors or organosilicon monomers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/62227—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products obtaining fibres
    • C04B35/62272—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products obtaining fibres based on non-oxide ceramics
    • C04B35/62277—Fibres based on carbides
    • C04B35/62281—Fibres based on carbides based on silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/6269—Curing of mixtures
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/628—Coating the powders or the macroscopic reinforcing agents
    • C04B35/62844—Coating fibres
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/60—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which all the silicon atoms are connected by linkages other than oxygen atoms
    • C08G77/62—Nitrogen atoms
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J3/00—Processes of treating or compounding macromolecular substances
    • C08J3/24—Crosslinking, e.g. vulcanising, of macromolecules
    • C08J3/243—Two or more independent types of crosslinking for one or more polymers
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01D—MECHANICAL METHODS OR APPARATUS IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS
    • D01D10/00—Physical treatment of artificial filaments or the like during manufacture, i.e. during a continuous production process before the filaments have been collected
    • D01D10/02—Heat treatment
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F6/00—Monocomponent artificial filaments or the like of synthetic polymers; Manufacture thereof
    • D01F6/88—Monocomponent artificial filaments or the like of synthetic polymers; Manufacture thereof from mixtures of polycondensation products as major constituent with other polymers or low-molecular-weight compounds
    • D01F6/94—Monocomponent artificial filaments or the like of synthetic polymers; Manufacture thereof from mixtures of polycondensation products as major constituent with other polymers or low-molecular-weight compounds of other polycondensation products
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
    • D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
    • D01F9/10—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material by decomposition of organic substances
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/44—Metal salt constituents or additives chosen for the nature of the anions, e.g. hydrides or acetylacetonate
    • C04B2235/444—Halide containing anions, e.g. bromide, iodate, chlorite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/48—Organic compounds becoming part of a ceramic after heat treatment, e.g. carbonising phenol resins
    • C04B2235/483—Si-containing organic compounds, e.g. silicone resins, (poly)silanes, (poly)siloxanes or (poly)silazanes
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/52—Constituents or additives characterised by their shapes
    • C04B2235/5208—Fibers
    • C04B2235/5264—Fibers characterised by the diameter of the fibers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/66—Specific sintering techniques, e.g. centrifugal sintering
    • C04B2235/666—Applying a current during sintering, e.g. plasma sintering [SPS], electrical resistance heating or pulse electric current sintering [PECS]
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2383/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen, or carbon only; Derivatives of such polymers
    • C08J2383/16—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen, or carbon only; Derivatives of such polymers in which all the silicon atoms are connected by linkages other than oxygen atoms
    • D—TEXTILES; PAPER
    • D10—INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEXTILES
    • D10B—INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEXTILES
    • D10B2331/00—Fibres made from polymers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds, e.g. polycondensation products
    • D10B2331/30—Fibres made from polymers obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds, e.g. polycondensation products polycondensation products not covered by indexing codes D10B2331/02 - D10B2331/14

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Textile Engineering (AREA)
  • Structural Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Nanotechnology (AREA)
  • Inorganic Fibers (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Silicon Polymers (AREA)
  • Artificial Filaments (AREA)
  • Spinning Methods And Devices For Manufacturing Artificial Fibers (AREA)
CA2940148A 2014-02-28 2015-02-20 Method for curing of green polysilazane-based silicon carbide precursor fibers Active CA2940148C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/193,158 US9587331B2 (en) 2014-02-28 2014-02-28 Method for curing of green polysilazane-based silicon carbide precursor fibers
US14/193,158 2014-02-28
PCT/US2015/016768 WO2015130564A1 (en) 2014-02-28 2015-02-20 Method for curing of green polysilazane-based silicon carbide precursor fibers

Publications (2)

Publication Number Publication Date
CA2940148A1 CA2940148A1 (en) 2015-09-03
CA2940148C true CA2940148C (en) 2022-08-09

Family

ID=52627572

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2940148A Active CA2940148C (en) 2014-02-28 2015-02-20 Method for curing of green polysilazane-based silicon carbide precursor fibers

Country Status (6)

Country Link
US (1) US9587331B2 (enExample)
EP (1) EP3110773B1 (enExample)
JP (1) JP6626451B2 (enExample)
CN (1) CN106061921B (enExample)
CA (1) CA2940148C (enExample)
WO (1) WO2015130564A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9593210B1 (en) * 2015-06-03 2017-03-14 General Electric Company Methods of preparing polysilazane resin with low halogen content
KR102548405B1 (ko) * 2017-04-20 2023-06-28 (주)디엔에프 다이실릴아민 화합물을 포함하는 실리콘 함유 박막증착용 조성물 및 이를 이용하는 실리콘 함유 박막의 제조방법
US20220340494A1 (en) * 2019-09-13 2022-10-27 Kansas State University Research Foundation Polymer-derived ceramic fibers and methods of preparing the same

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3098830A (en) 1961-04-14 1963-07-23 Gen Electric Polymeric silazanes
FR2581391B1 (fr) * 1985-05-06 1987-06-05 Rhone Poulenc Rech Composition organo-polysilazane comportant des generateurs de radicaux libres et reticulable par apport d'energie
US4631260A (en) 1985-06-24 1986-12-23 Dow Corning Corporation Process for preparing ceramic materials
US4997601A (en) 1988-01-19 1991-03-05 Hoechst Celanese Corp. Process for dry spinning thermally sensitive organosilicon preceramic fibers with production of ceramic fibers therefrom
US4942011A (en) 1988-05-03 1990-07-17 E. I. Du Pont De Nemours And Company Process for preparing silicon carbide fibers
US4929704A (en) 1988-12-20 1990-05-29 Hercules Incorporated Isocyanate- and isothiocyanate-modified polysilazane ceramic precursors
US5223461A (en) 1989-06-05 1993-06-29 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Ceramic silicon-boron-carhon fibers from organic silicon-boron-polymers
US5155181A (en) 1989-11-27 1992-10-13 Hercules Incorporated (Thio)amide-modified silazane polymer composition containing a free radical generator
US5032649A (en) 1989-11-27 1991-07-16 Hercules Incorporated Organic amide-modified polysilazane ceramic precursors
US5268336A (en) 1990-06-18 1993-12-07 Dow Corning Corporation Preparation of substantially polycrystalline silicon carbide fibers from methylpolydisilylazanes
US5086126A (en) * 1990-12-24 1992-02-04 Dow Corning Corporation Method for producing functional silazane polymers
US5171722A (en) 1991-10-09 1992-12-15 University Of Florida SiC fibers having low oxygen content and methods of preparation
US5242870A (en) 1991-10-09 1993-09-07 University Of Florida SIC fibers having low oxygen content and methods of preparation
US5792416A (en) * 1996-05-17 1998-08-11 University Of Florida Preparation of boron-doped silicon carbide fibers
JP2001279535A (ja) * 2000-01-25 2001-10-10 Ube Ind Ltd 結晶性炭化ケイ素系無機繊維及びその製造方法
JP2007031186A (ja) * 2005-07-25 2007-02-08 Chugoku Electric Power Co Inc:The 繊維結合体又はその製造方法
US7700202B2 (en) * 2006-02-16 2010-04-20 Alliant Techsystems Inc. Precursor formulation of a silicon carbide material
US20090001219A1 (en) * 2006-12-07 2009-01-01 Honeywell International, Inc. Fiber polymer matrix composites having silicon-containing inorganic-organic matrices and methods of making the same
US8987402B2 (en) 2010-02-26 2015-03-24 General Electric Company Stoichiometric silicon carbide fibers from thermo-chemically cured polysilazanes
US9045347B2 (en) 2010-02-26 2015-06-02 General Electric Company Stiochiometric silicon carbide fibers from thermo-chemically cured polysilazanes
US9359479B2 (en) 2013-05-30 2016-06-07 General Electric Company Methods of using boron-containing additives as silicon carbide crosslinking agents

Also Published As

Publication number Publication date
CN106061921B (zh) 2019-03-19
JP2017515986A (ja) 2017-06-15
EP3110773A1 (en) 2017-01-04
US9587331B2 (en) 2017-03-07
CA2940148A1 (en) 2015-09-03
CN106061921A (zh) 2016-10-26
WO2015130564A1 (en) 2015-09-03
EP3110773B1 (en) 2021-03-31
US20150247265A1 (en) 2015-09-03
JP6626451B2 (ja) 2019-12-25

Similar Documents

Publication Publication Date Title
EP0934982B1 (en) Method for producing ceramic fibers from blends of siloxane resins and boron containing polymers
Radovanovic et al. Silicon oxycarbide glasses from silicone networks
US9045347B2 (en) Stiochiometric silicon carbide fibers from thermo-chemically cured polysilazanes
CA2940148C (en) Method for curing of green polysilazane-based silicon carbide precursor fibers
US8987402B2 (en) Stoichiometric silicon carbide fibers from thermo-chemically cured polysilazanes
CA2913536C (en) Polydisilazanes prepared from boron-containing additives
CN106987924B (zh) 聚碳硅烷不熔化纤维的制备方法
US4806612A (en) Preceramic acetylenic polysilanes
CN100486929C (zh) 一种聚硼硅氮烷先驱体的制备方法
US5155181A (en) (Thio)amide-modified silazane polymer composition containing a free radical generator
CN110451970A (zh) 一种高纯度碳化硅制品的制备方法
JP3174622B2 (ja) 高純度β型炭化ケイ素焼結体の製造方法
JP2010275143A (ja) ポリマーブレンドによる多孔質セラミックス及びその製造方法
US4889899A (en) Method of producing silicon carbide preceramic vinyl-containing polymers
KR101898839B1 (ko) 프리-세라믹 성형체를 제조하기 위한 고분자 폴리실란 및 그의 제조 방법
Chu et al. A model SiC-based fiber with a low oxygen content prepared from a vinyl-containing polycarbosilane precursor
Zhang et al. Synthesis and thermal behavior of polymeric precursor for carbon‐free silicon oxynitride ceramic
JPH10114828A (ja) シラザンポリマー用架橋剤
Wang et al. Synthesis of Liquid Polysilazoxanes for Si O C N Ceramics With Adjustable Composition and High‐Temperature Properties
RU2639865C2 (ru) Способ получения термопластичных полимеров, модифицированных кремнием
JPH03197364A (ja) シリコン・カーバイド・ナイトライド系成形物の製造法

Legal Events

Date Code Title Description
EEER Examination request

Effective date: 20200214

EEER Examination request

Effective date: 20200214