CA2863711C - Caliper coating measurement on continuous non-uniform web using thz sensor - Google Patents
Caliper coating measurement on continuous non-uniform web using thz sensor Download PDFInfo
- Publication number
- CA2863711C CA2863711C CA2863711A CA2863711A CA2863711C CA 2863711 C CA2863711 C CA 2863711C CA 2863711 A CA2863711 A CA 2863711A CA 2863711 A CA2863711 A CA 2863711A CA 2863711 C CA2863711 C CA 2863711C
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- 238000005259 measurement Methods 0.000 title claims abstract description 77
- 238000000576 coating method Methods 0.000 title claims abstract description 48
- 239000011248 coating agent Substances 0.000 title claims abstract description 42
- 230000005855 radiation Effects 0.000 claims abstract description 55
- 238000000034 method Methods 0.000 claims abstract description 32
- 239000010410 layer Substances 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 12
- 238000012545 processing Methods 0.000 claims description 12
- 238000004611 spectroscopical analysis Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 10
- 239000011247 coating layer Substances 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 7
- 230000005672 electromagnetic field Effects 0.000 claims description 4
- 238000001328 terahertz time-domain spectroscopy Methods 0.000 abstract description 9
- 230000008569 process Effects 0.000 abstract description 4
- 239000000523 sample Substances 0.000 description 48
- 239000000463 material Substances 0.000 description 15
- 239000000835 fiber Substances 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
- 230000009977 dual effect Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000012937 correction Methods 0.000 description 3
- 230000001934 delay Effects 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- SKJCKYVIQGBWTN-UHFFFAOYSA-N (4-hydroxyphenyl) methanesulfonate Chemical compound CS(=O)(=O)OC1=CC=C(O)C=C1 SKJCKYVIQGBWTN-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000005670 electromagnetic radiation Effects 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- PCTMTFRHKVHKIS-BMFZQQSSSA-N (1s,3r,4e,6e,8e,10e,12e,14e,16e,18s,19r,20r,21s,25r,27r,30r,31r,33s,35r,37s,38r)-3-[(2r,3s,4s,5s,6r)-4-amino-3,5-dihydroxy-6-methyloxan-2-yl]oxy-19,25,27,30,31,33,35,37-octahydroxy-18,20,21-trimethyl-23-oxo-22,39-dioxabicyclo[33.3.1]nonatriaconta-4,6,8,10 Chemical compound C1C=C2C[C@@H](OS(O)(=O)=O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@H]([C@H](C)CCCC(C)C)[C@@]1(C)CC2.O[C@H]1[C@@H](N)[C@H](O)[C@@H](C)O[C@H]1O[C@H]1/C=C/C=C/C=C/C=C/C=C/C=C/C=C/[C@H](C)[C@@H](O)[C@@H](C)[C@H](C)OC(=O)C[C@H](O)C[C@H](O)CC[C@@H](O)[C@H](O)C[C@H](O)C[C@](O)(C[C@H](O)[C@H]2C(O)=O)O[C@H]2C1 PCTMTFRHKVHKIS-BMFZQQSSSA-N 0.000 description 1
- 241001556567 Acanthamoeba polyphaga mimivirus Species 0.000 description 1
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000003000 extruded plastic Substances 0.000 description 1
- 238000009532 heart rate measurement Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012804 iterative process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 239000012209 synthetic fiber Substances 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
- G01N21/3586—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/86—Investigating moving sheets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Toxicology (AREA)
- Mathematical Physics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261596595P | 2012-02-08 | 2012-02-08 | |
| US61/596,595 | 2012-02-08 | ||
| US13/444,767 US9140542B2 (en) | 2012-02-08 | 2012-04-11 | Caliper coating measurement on continuous non-uniform web using THz sensor |
| US13/444,767 | 2012-04-11 | ||
| PCT/CA2013/000066 WO2013116924A1 (en) | 2012-02-08 | 2013-01-24 | Caliper coating measurement on continuous non-uniform web using thz sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2863711A1 CA2863711A1 (en) | 2013-08-15 |
| CA2863711C true CA2863711C (en) | 2019-09-10 |
Family
ID=48903665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2863711A Active CA2863711C (en) | 2012-02-08 | 2013-01-24 | Caliper coating measurement on continuous non-uniform web using thz sensor |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9140542B2 (enExample) |
| EP (1) | EP2815206B1 (enExample) |
| JP (1) | JP6151721B2 (enExample) |
| CN (1) | CN104169677B (enExample) |
| CA (1) | CA2863711C (enExample) |
| WO (1) | WO2013116924A1 (enExample) |
Families Citing this family (47)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2781911B1 (en) * | 2013-03-18 | 2019-10-16 | ABB Schweiz AG | Sensor system and method for determining paper sheet quality parameters |
| US9606054B2 (en) | 2013-09-30 | 2017-03-28 | Advantest Corporation | Methods, sampling device and apparatus for terahertz imaging and spectroscopy of coated beads, particles and/or microparticles |
| EP3069120B1 (en) * | 2013-11-15 | 2024-08-14 | Luna Innovations Incorporated | System for determining at least one property of a sheet dielectric sample using terahertz radiation |
| US9581433B2 (en) * | 2013-12-11 | 2017-02-28 | Honeywell Asca Inc. | Caliper sensor and method using mid-infrared interferometry |
| US9417181B2 (en) * | 2014-05-08 | 2016-08-16 | Advantest Corporation | Dynamic measurement of density using terahertz radiation with real-time thickness measurement for process control |
| US20150323452A1 (en) * | 2014-05-08 | 2015-11-12 | Advantest Corporation | Dynamic measurement of material properties using terahertz radiation with real-time thickness measurement for process control |
| CN104019910B (zh) * | 2014-06-23 | 2017-05-10 | 山东科技大学 | 基于闪耀光栅的法布里‑珀罗THz波长测量仪及其测量方法 |
| CN104517295A (zh) * | 2014-12-25 | 2015-04-15 | 深圳市一体太赫兹科技有限公司 | 一种三维太赫兹图像的图像分割方法及系统 |
| JP6502698B2 (ja) * | 2015-02-19 | 2019-04-17 | 株式会社Ｓｃｒｅｅｎホールディングス | 測定装置および測定方法 |
| CN107429988B (zh) * | 2015-03-03 | 2020-12-08 | Abb瑞士股份有限公司 | 用于表征湿漆层的堆叠体的传感器系统和方法 |
| DE102015107616A1 (de) * | 2015-05-13 | 2016-11-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zum Bestimmen der Schichtdicken einer mehrschichtigen Probe |
| CN104880256B (zh) * | 2015-06-02 | 2017-11-03 | 上海理工大学 | 一种测试太赫兹横波和纵波相位动态变化的方法和装置 |
| US20180120094A1 (en) * | 2015-07-31 | 2018-05-03 | Hp Indigo B.V. | Calculation of layer thickness |
| US10071482B2 (en) | 2015-08-19 | 2018-09-11 | Ford Global Technologies, Llc | Robotic vehicle painting instrument including a terahertz radiation device |
| CN105157629A (zh) * | 2015-09-18 | 2015-12-16 | 深圳市和胜金属技术有限公司 | 一种基于x-射线光谱仪测量碳化钒薄膜厚度的方法 |
| JP6589239B2 (ja) * | 2015-09-25 | 2019-10-16 | 株式会社Ｓｃｒｅｅｎホールディングス | 膜厚測定装置及び膜厚測定方法 |
| DE102015122205B4 (de) * | 2015-12-18 | 2022-11-03 | Inoex Gmbh | Terahertz-Messverfahren und Terahertz-Messvorrichtung zum Ermitteln einer Schichtdicke oder eines Abstandes eines Messobjektes |
| CA3017393C (en) * | 2016-04-04 | 2020-07-21 | Tetechs Inc. | Methods and systems for thickness measurement of multilayer structures |
| DE102016105599A1 (de) * | 2016-04-14 | 2017-10-19 | Inoex Gmbh | Terahertz-Messvorrichtung zur Vermessung von Prüfobjekten sowie ein Terahertz-Messverfahren |
| US20180066935A1 (en) * | 2016-09-08 | 2018-03-08 | Traycer Diagnostic Systems, Inc. | THz Continuous Wave Thickness Profile Measurements Software Algorithms |
| DE102016118905A1 (de) * | 2016-10-05 | 2018-04-05 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zum zeitaufgelösten Erfassen gepulster elektromagnetischer Hochfrequenzstrahlung |
| EP3524930B1 (en) * | 2016-10-07 | 2021-07-21 | Pioneer Corporation | Examination device, examination method, computer program, and recording medium |
| US10648937B2 (en) * | 2016-10-27 | 2020-05-12 | General Electric Company | Nondestructive inspection method for coatings and ceramic matrix composites |
| GB2559164B (en) * | 2017-01-27 | 2021-11-10 | Teraview Ltd | Method and system for measuring coating thicknesses |
| CN106767462A (zh) * | 2017-02-28 | 2017-05-31 | 华讯方舟科技有限公司 | 管壁厚度在线监测仪、系统及方法 |
| CN106875541A (zh) * | 2017-03-17 | 2017-06-20 | 深圳怡化电脑股份有限公司 | 一种纸币厚度检测的方法、装置及系统 |
| JP6575824B2 (ja) * | 2017-03-22 | 2019-09-18 | トヨタ自動車株式会社 | 膜厚測定方法および膜厚測定装置 |
| KR102350650B1 (ko) * | 2017-03-30 | 2022-01-12 | 한양대학교 산학협력단 | 두께 측정 장치, 두께 측정 방법 및 두께 측정 프로그램 |
| WO2018182360A1 (ko) * | 2017-03-30 | 2018-10-04 | 한양대학교 산학협력단 | 두께 측정 장치, 두께 측정 방법 및 두께 측정 프로그램 |
| US10254219B1 (en) * | 2017-10-27 | 2019-04-09 | Ford Motor Company | System and method for visually aligning terahertz light beam |
| CN108020165B (zh) * | 2017-11-30 | 2020-03-24 | 中国特种设备检测研究院 | 利用太赫兹波对非金属材料的厚度进行测量的方法和系统 |
| US10323932B1 (en) | 2017-12-28 | 2019-06-18 | Ford Motor Company | System for inspecting vehicle bodies |
| CN108106551A (zh) * | 2017-12-30 | 2018-06-01 | 深圳市太赫兹科技创新研究院有限公司 | 一种基于电磁波的刀具的监测方法及监测系统 |
| CN108444417B (zh) * | 2018-03-20 | 2019-09-13 | 中国电子科技集团公司第三十八研究所 | 一种多层平纹织物厚度减小量的获取方法 |
| CN111886473B (zh) * | 2018-03-22 | 2022-04-12 | 3M创新有限公司 | 具有单个基准表面的时域太赫兹测量系统 |
| CN108398096A (zh) * | 2018-04-11 | 2018-08-14 | 青岛万龙智控科技有限公司 | 钢丝帘布厚度的太赫兹波反射式在线测量方法 |
| CN108844915B (zh) * | 2018-06-12 | 2020-11-03 | 江苏大学 | 一种在线蒙皮面漆激光清洗检测装置及其方法 |
| CN109358001B (zh) * | 2018-10-25 | 2023-09-08 | 中国科学院上海微系统与信息技术研究所 | 可弯曲样品的固定装置、测量系统和测量方法 |
| EP4038366A4 (en) * | 2019-10-01 | 2024-03-06 | The Regents of the University of California | METHOD FOR IDENTIFYING CHEMICAL AND STRUCTURAL VARIATIONS BY TERAHERTZ SPECTROSCOPY IN THE TIME DOMAIN |
| WO2021087459A1 (en) | 2019-10-31 | 2021-05-06 | The Regents Of The University Of California | Methods and systems for detecting water status in plants using terahertz radiation |
| DE102020120547A1 (de) * | 2020-08-04 | 2022-02-10 | CiTEX Holding GmbH | THz-Messverfahren sowie THz-Messvorrichtung zum Vermessen eines Messobjektes |
| CN116034253B (zh) * | 2020-08-12 | 2025-03-28 | 达斯-纳诺技术公司 | 涂层特征的无接触确定 |
| DE102020121478A1 (de) * | 2020-08-14 | 2022-02-17 | Helmut Fischer GmbH Institut für Elektronik und Messtechnik | Verfahren und Vorrichtung zum Verarbeiten von mit einem Modell assoziierten Daten |
| CN114427838A (zh) * | 2022-01-10 | 2022-05-03 | 首都师范大学 | 基于反射太赫兹光谱的介质厚度预测、评价方法及系统 |
| CN114460596B (zh) * | 2022-04-14 | 2022-06-14 | 宜科(天津)电子有限公司 | 一种基于能量和距离的自适应数据处理方法 |
| CN118089558B (zh) * | 2023-10-27 | 2024-09-06 | 天津大学四川创新研究院 | 一种基于太赫兹的涂层厚度检测方法及系统 |
| CN118350219B (zh) * | 2024-05-11 | 2024-11-19 | 华中科技大学 | 含非均匀厚度膜层的有机发光器件光学仿真方法和系统 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2580200A (en) * | 1946-01-05 | 1951-12-25 | British Artificial Resin Compa | Production of continuous web or length of sheet material |
| US4732776A (en) * | 1987-02-24 | 1988-03-22 | Measurex Corporation | Apparatus and method for controlling the thickness of coatings on paper or other materials |
| JP2637820B2 (ja) | 1989-03-27 | 1997-08-06 | オリンパス光学工業株式会社 | 光学式膜厚測定装置 |
| US5604581A (en) | 1994-10-07 | 1997-02-18 | On-Line Technologies, Inc. | Film thickness and free carrier concentration analysis method and apparatus |
| KR960018523A (ko) * | 1994-11-16 | 1996-06-17 | 배순훈 | 드럼의 다이아몬드상 카본 코팅두께 측정방법 |
| US5748318A (en) | 1996-01-23 | 1998-05-05 | Brown University Research Foundation | Optical stress generator and detector |
| JPH1194525A (ja) * | 1997-09-22 | 1999-04-09 | Toshiba Corp | 膜厚測定方法及び膜厚測定装置 |
| US6242739B1 (en) | 1998-04-21 | 2001-06-05 | Alexander P. Cherkassky | Method and apparatus for non-destructive determination of film thickness and dopant concentration using fourier transform infrared spectrometry |
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-
2012
- 2012-04-11 US US13/444,767 patent/US9140542B2/en active Active
-
2013
- 2013-01-24 EP EP13746971.4A patent/EP2815206B1/en active Active
- 2013-01-24 CN CN201380008574.7A patent/CN104169677B/zh active Active
- 2013-01-24 CA CA2863711A patent/CA2863711C/en active Active
- 2013-01-24 WO PCT/CA2013/000066 patent/WO2013116924A1/en not_active Ceased
- 2013-01-24 JP JP2014555901A patent/JP6151721B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP6151721B2 (ja) | 2017-06-21 |
| EP2815206B1 (en) | 2016-10-12 |
| CN104169677A (zh) | 2014-11-26 |
| EP2815206A1 (en) | 2014-12-24 |
| US9140542B2 (en) | 2015-09-22 |
| EP2815206A4 (en) | 2015-09-09 |
| US20130204577A1 (en) | 2013-08-08 |
| JP2015508160A (ja) | 2015-03-16 |
| CA2863711A1 (en) | 2013-08-15 |
| WO2013116924A1 (en) | 2013-08-15 |
| CN104169677B (zh) | 2017-11-28 |
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