CA2762684A1 - Devices and methods for dynamic determination of sample position and orientation and dynamic repositioning - Google Patents
Devices and methods for dynamic determination of sample position and orientation and dynamic repositioning Download PDFInfo
- Publication number
- CA2762684A1 CA2762684A1 CA2762684A CA2762684A CA2762684A1 CA 2762684 A1 CA2762684 A1 CA 2762684A1 CA 2762684 A CA2762684 A CA 2762684A CA 2762684 A CA2762684 A CA 2762684A CA 2762684 A1 CA2762684 A1 CA 2762684A1
- Authority
- CA
- Canada
- Prior art keywords
- radiation
- sample
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- target
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000000034 method Methods 0.000 title claims abstract description 61
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
- G02B21/244—Devices for focusing using image analysis techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/006—Optical details of the image generation focusing arrangements; selection of the plane to be imaged
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
- G02B21/245—Devices for focusing using auxiliary sources, detectors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/16—Microscopes adapted for ultraviolet illumination ; Fluorescence microscopes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Focusing (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17949809P | 2009-05-19 | 2009-05-19 | |
| US61/179,498 | 2009-05-19 | ||
| PCT/US2010/035253 WO2010135323A1 (en) | 2009-05-19 | 2010-05-18 | Devices and methods for dynamic determination of sample spatial orientation and dynamic repositioning |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2762684A1 true CA2762684A1 (en) | 2010-11-25 |
Family
ID=42712355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2762684A Abandoned CA2762684A1 (en) | 2009-05-19 | 2010-05-18 | Devices and methods for dynamic determination of sample position and orientation and dynamic repositioning |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US20120097835A1 (enExample) |
| EP (2) | EP2433087B1 (enExample) |
| JP (2) | JP2012527651A (enExample) |
| KR (1) | KR20120039547A (enExample) |
| CN (1) | CN102648389B (enExample) |
| AU (1) | AU2010249729A1 (enExample) |
| CA (1) | CA2762684A1 (enExample) |
| SG (1) | SG176579A1 (enExample) |
| WO (1) | WO2010135323A1 (enExample) |
Families Citing this family (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102017203492A1 (de) * | 2017-03-03 | 2018-09-06 | Witec Wissenschaftliche Instrumente Und Technologie Gmbh | Verfahren und Vorrichtung zur Abbildung einer Probenoberfläche |
| JP6245177B2 (ja) * | 2012-10-15 | 2017-12-13 | ソニー株式会社 | 画像取得装置およびスライド傾き測定方法 |
| KR102003202B1 (ko) * | 2012-10-18 | 2019-07-24 | 칼 짜이스 엑스-레이 마이크로스코피, 인크. | 결정학적 그레인 배향 맵핑 능력을 가진 실험실 x-레이 마이크로-단층촬영 시스템 |
| US10844424B2 (en) | 2013-02-20 | 2020-11-24 | Bionano Genomics, Inc. | Reduction of bias in genomic coverage measurements |
| CN105229168B (zh) | 2013-02-20 | 2020-07-17 | 生物纳米基因有限公司 | 纳米流体中分子的表征 |
| CN103674839B (zh) * | 2013-11-12 | 2016-01-06 | 清华大学 | 一种基于光斑检测的可视化样品定位操作系统及方法 |
| CN106029909B (zh) | 2014-02-18 | 2021-02-02 | 生物纳米基因公司 | 测定核酸结构信息的改进方法 |
| CN106164295B (zh) | 2014-02-25 | 2020-08-11 | 生物纳米基因公司 | 减小基因组覆盖测量中的偏差 |
| WO2016022359A1 (en) * | 2014-08-06 | 2016-02-11 | Cellomics, Inc. | Image-based laser autofocus system |
| CN104197847A (zh) * | 2014-09-19 | 2014-12-10 | 孙维 | 一种传感器 |
| US9921399B2 (en) | 2015-03-31 | 2018-03-20 | General Electric Company | System and method for continuous, asynchronous autofocus of optical instruments |
| JP6590366B2 (ja) * | 2015-09-25 | 2019-10-16 | オリンパス株式会社 | 顕微鏡装置、オートフォーカス装置、及び、オートフォーカス方法 |
| WO2017120161A1 (en) * | 2016-01-07 | 2017-07-13 | Arkema Inc. | Object position independent method to measure the thickness of coatings deposited on curved objects moving at high rates |
| DE102016212019A1 (de) * | 2016-07-01 | 2018-01-04 | Carl Zeiss Microscopy Gmbh | Neigungsmessung und -korrektur des Deckglases im Strahlengang eines Mikroskops |
| CN106324795B (zh) * | 2016-09-29 | 2018-10-16 | 电子科技大学 | 一种检测仪显微镜多视野自动快速对焦方法 |
| US11385180B2 (en) | 2017-03-03 | 2022-07-12 | Witec Wissenschaftliche Instrumente Und Technologie Gmbh | Method and device for imaging a specimen surface |
| NL2018853B1 (en) | 2017-05-05 | 2018-11-14 | Illumina Inc | Systems and methods for improved focus tracking using a hybrid mode light source |
| NL2018854B1 (en) | 2017-05-05 | 2018-11-14 | Illumina Inc | Systems and methodes for improved focus tracking using blocking structures |
| NL2018857B1 (en) * | 2017-05-05 | 2018-11-09 | Illumina Inc | Systems and methods for improved focus tracking using a light source configuration |
| US10416430B2 (en) | 2017-05-10 | 2019-09-17 | Applejack 199 L.P. | Focusing of optical devices |
| CN107189940A (zh) * | 2017-05-19 | 2017-09-22 | 上海理工大学 | 基于激光的自动化快速复温装置 |
| CN108020163B (zh) * | 2017-12-26 | 2020-01-31 | 中国科学技术大学 | 一种显微追踪微粒三维位移的装置 |
| NL2020618B1 (en) | 2018-01-12 | 2019-07-18 | Illumina Inc | Real time controller switching |
| EP3614192A1 (en) * | 2018-08-20 | 2020-02-26 | Till GmbH | Microscope device |
| EP3850329A4 (en) | 2018-09-10 | 2022-06-22 | Fluidigm Canada Inc. | APPARATUS AND METHOD FOR AUTO-FOCUSING SAMPLE IMAGING |
| DE102018131427B4 (de) * | 2018-12-07 | 2021-04-29 | Leica Microsystems Cms Gmbh | Verfahren zur automatischen Positionsermittlung auf einer Probenanordnung und entsprechendes Mikroskop, Computerprogramm und Computerprogrammprodukt |
| DE102019109832B3 (de) * | 2019-04-12 | 2020-04-23 | Leica Microsystems Cms Gmbh | Lichtblattmikroskop und Verfahren zum Erfassen einer Messgröße |
| US11086118B2 (en) * | 2019-04-29 | 2021-08-10 | Molecular Devices, Llc | Self-calibrating and directional focusing systems and methods for infinity corrected microscopes |
| CA3134331A1 (en) * | 2019-05-08 | 2020-11-12 | Tuan-Shu Ho | Optical system and detection method therof |
| DE102019113975B4 (de) * | 2019-05-24 | 2023-10-19 | Abberior Instruments Gmbh | Verfahren und Vorrichtung zum Überwachen des Fokuszustands eines Mikroskops sowie Mikroskop |
| CN110260783B (zh) * | 2019-07-10 | 2020-11-10 | 中国工程物理研究院机械制造工艺研究所 | 一种干涉显微镜自动对焦装置及方法 |
| CN112113501A (zh) * | 2020-10-12 | 2020-12-22 | 中国科学院生物物理研究所 | 一种基于干涉测量的单分子轴向定位装置及其工作方法 |
| CN112987292B (zh) * | 2021-04-15 | 2021-08-10 | 中国人民解放军国防科技大学 | 基于点阵光斑质心偏差信息的计算机辅助装调方法及装置 |
| EP4092462A1 (en) * | 2021-05-18 | 2022-11-23 | Leica Instruments (Singapore) Pte. Ltd. | Laser assisted autofocus |
| CN115854891A (zh) * | 2021-09-26 | 2023-03-28 | 深圳中科飞测科技股份有限公司 | 一种检测方法、检测系统及计算机可读存储介质 |
| CN115876077A (zh) * | 2021-09-26 | 2023-03-31 | 深圳中科飞测科技股份有限公司 | 一种检测方法、检测系统及计算机可读存储介质 |
| CN114414589A (zh) * | 2022-02-23 | 2022-04-29 | 湖北九峰山实验室 | 一种用于芯片缺陷检测的系统 |
| KR20230139684A (ko) * | 2022-03-28 | 2023-10-05 | 주식회사 스타노스 | 광학현미경을 위한 자동 초점 장치 및 자동 초점 유지 방법 |
| CN114647058B (zh) * | 2022-05-18 | 2022-09-06 | 合肥金星智控科技股份有限公司 | 焦点调整方法、焦点调整装置、libs检测系统和存储介质 |
| CN115717859B (zh) * | 2022-11-16 | 2023-09-29 | 南京博视医疗科技有限公司 | 一种点扫描光学系统激光标定方法及其装置 |
| CN116540395A (zh) * | 2023-04-28 | 2023-08-04 | 广东粤港澳大湾区黄埔材料研究院 | 一种可锁定成像焦面的激发模组、显微镜及显微成像系统 |
| WO2025072986A1 (de) * | 2023-10-04 | 2025-04-10 | Akrima Gmbh | Anbaugerät für ein mikroskop |
| BE1032505B1 (nl) * | 2024-04-03 | 2025-11-03 | Soleras Advanced Coatings Bvba | Reflectometersysteem en werkwijze voor het bepalen van een reflectie |
| WO2025213063A1 (en) * | 2024-04-05 | 2025-10-09 | Fei Deutschland Gmbh | Systems and methods for autofocusing images |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0617934B2 (ja) * | 1985-09-30 | 1994-03-09 | 三鷹光器株式会社 | 非接触自動位置合わせ装置 |
| US4687913A (en) * | 1985-11-25 | 1987-08-18 | Warner Lambert Technologies, Inc. | Microscope autofocus system |
| JPH0769162B2 (ja) * | 1990-04-23 | 1995-07-26 | 大日本スクリーン製造株式会社 | 光学的検査システムのための自動焦点合わせ装置 |
| JP3180229B2 (ja) * | 1992-03-31 | 2001-06-25 | キヤノン株式会社 | 自動焦点合わせ装置 |
| JPH05332735A (ja) * | 1992-05-29 | 1993-12-14 | Canon Inc | ３次元形状測定装置及びそれを用いた３次元形状測定方法 |
| IL111229A (en) * | 1994-10-10 | 1998-06-15 | Nova Measuring Instr Ltd | Autofocusing microscope |
| JP3460131B2 (ja) * | 1995-06-29 | 2003-10-27 | 株式会社ニコン | 投影露光装置 |
| US5784164A (en) * | 1997-03-20 | 1998-07-21 | Zygo Corporation | Method and apparatus for automatically and simultaneously determining best focus and orientation of objects to be measured by broad-band interferometric means |
| US6172349B1 (en) * | 1997-03-31 | 2001-01-09 | Kla-Tencor Corporation | Autofocusing apparatus and method for high resolution microscope system |
| JP4671463B2 (ja) * | 2000-03-24 | 2011-04-20 | オリンパス株式会社 | 照明光学系及び照明光学系を備えた顕微鏡 |
| DE10244767A1 (de) * | 2002-09-26 | 2004-04-08 | Europäisches Laboratorium für Molekularbiologie | Verfahren und Vorrichtung zum Bestimmen des Abstands zwischen einer Referenzebene und einer inneren oder äußeren optischen Grenzfläche eines Objekts sowie Verwendung derselben zum Bestimmen eines Oberflächenprofils eines, inbesondere metallischen, Objekts, Autofokus-Modul, Mikroskop und Verfahren zum Autofokussieren eines Mikroskops |
| DE10308171A1 (de) * | 2003-02-27 | 2004-09-09 | Leica Microsystems Jena Gmbh | Verfahren zur automatischen Fokussierung |
| JP2007225627A (ja) | 2004-03-25 | 2007-09-06 | Research Organization Of Information & Systems | 標本合焦位置高精度計測法 |
| JP4544904B2 (ja) * | 2004-04-28 | 2010-09-15 | オリンパス株式会社 | 光学系 |
| JP4690132B2 (ja) * | 2005-07-13 | 2011-06-01 | オリンパス株式会社 | 焦点検出装置 |
| DE102006034205B4 (de) * | 2006-07-25 | 2012-03-01 | Carl Mahr Holding Gmbh | Dynamische Bildaufnahme mit bildgebenden Sensoren |
| CN101281289A (zh) * | 2007-12-29 | 2008-10-08 | 青岛海信电器股份有限公司 | 自动聚焦方法 |
| US8249440B2 (en) * | 2008-10-01 | 2012-08-21 | Hong Kong Applied Science And Technology Research Institute Co. Ltd. | Multi-drive mechanism lens actuator |
-
2010
- 2010-05-18 US US13/320,945 patent/US20120097835A1/en not_active Abandoned
- 2010-05-18 KR KR20117030283A patent/KR20120039547A/ko not_active Withdrawn
- 2010-05-18 EP EP20100725926 patent/EP2433087B1/en not_active Revoked
- 2010-05-18 CA CA2762684A patent/CA2762684A1/en not_active Abandoned
- 2010-05-18 WO PCT/US2010/035253 patent/WO2010135323A1/en not_active Ceased
- 2010-05-18 AU AU2010249729A patent/AU2010249729A1/en not_active Abandoned
- 2010-05-18 EP EP15151827.1A patent/EP2881701A1/en not_active Withdrawn
- 2010-05-18 SG SG2011085693A patent/SG176579A1/en unknown
- 2010-05-18 CN CN201080029227.9A patent/CN102648389B/zh not_active Expired - Fee Related
- 2010-05-18 JP JP2012511961A patent/JP2012527651A/ja active Pending
-
2014
- 2014-08-23 JP JP2014169962A patent/JP2015028637A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| SG176579A1 (en) | 2012-01-30 |
| EP2433087A1 (en) | 2012-03-28 |
| EP2433087B1 (en) | 2015-01-21 |
| JP2015028637A (ja) | 2015-02-12 |
| KR20120039547A (ko) | 2012-04-25 |
| CN102648389B (zh) | 2015-04-29 |
| CN102648389A (zh) | 2012-08-22 |
| JP2012527651A (ja) | 2012-11-08 |
| AU2010249729A1 (en) | 2011-12-15 |
| WO2010135323A1 (en) | 2010-11-25 |
| US20120097835A1 (en) | 2012-04-26 |
| EP2881701A1 (en) | 2015-06-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |
Effective date: 20150424 |
|
| FZDE | Discontinued |
Effective date: 20170518 |