CA2626127A1 - Soft x-ray generator - Google Patents
Soft x-ray generator Download PDFInfo
- Publication number
- CA2626127A1 CA2626127A1 CA002626127A CA2626127A CA2626127A1 CA 2626127 A1 CA2626127 A1 CA 2626127A1 CA 002626127 A CA002626127 A CA 002626127A CA 2626127 A CA2626127 A CA 2626127A CA 2626127 A1 CA2626127 A1 CA 2626127A1
- Authority
- CA
- Canada
- Prior art keywords
- anode
- ray generator
- soft
- cathode
- assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000007788 liquid Substances 0.000 claims abstract description 6
- 239000002826 coolant Substances 0.000 claims description 34
- 239000003990 capacitor Substances 0.000 claims description 24
- 239000012809 cooling fluid Substances 0.000 claims description 22
- 239000012530 fluid Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 abstract description 8
- 230000003628 erosive effect Effects 0.000 abstract description 3
- 210000002381 plasma Anatomy 0.000 description 16
- 239000007789 gas Substances 0.000 description 6
- 239000012212 insulator Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 239000011261 inert gas Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 230000005855 radiation Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000002050 diffraction method Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 238000002601 radiography Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000010405 anode material Substances 0.000 description 2
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000003574 free electron Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000001455 metallic ions Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—Production of X-ray radiation generated from plasma
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- X-Ray Techniques (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US72788105P | 2005-10-18 | 2005-10-18 | |
| US60/727,881 | 2005-10-18 | ||
| US11/581,954 US7502446B2 (en) | 2005-10-18 | 2006-10-17 | Soft x-ray generator |
| US11/581,954 | 2006-10-17 | ||
| PCT/IB2006/004052 WO2007066239A2 (en) | 2005-10-18 | 2006-10-18 | Soft x-ray generator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2626127A1 true CA2626127A1 (en) | 2007-06-14 |
Family
ID=37948154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002626127A Abandoned CA2626127A1 (en) | 2005-10-18 | 2006-10-18 | Soft x-ray generator |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7502446B2 (enExample) |
| EP (1) | EP1938671A4 (enExample) |
| JP (1) | JP2009512173A (enExample) |
| CA (1) | CA2626127A1 (enExample) |
| WO (1) | WO2007066239A2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7809115B2 (en) * | 2008-09-09 | 2010-10-05 | The United States Of America As Represented By The Secretary Of The Navy | Diode for flash radiography |
| US20110089777A1 (en) * | 2009-10-18 | 2011-04-21 | Ernesto Camilo Rivera | Thermally manageable system and electric device |
| JP2013053850A (ja) * | 2010-01-07 | 2013-03-21 | Saitama Medical Univ | 円偏光変換装置 |
| DE102010055889B4 (de) * | 2010-12-21 | 2014-04-30 | Ushio Denki Kabushiki Kaisha | Verfahren und Vorrichtung zur Erzeugung kurzwelliger Strahlung mittels einer gasentladungsbasierten Hochfrequenzhochstromentladung |
| CN103077875B (zh) * | 2012-12-29 | 2016-04-13 | 西北核技术研究所 | 一种强流小焦斑长寿命真空二极管 |
| CN109860011B (zh) * | 2018-12-06 | 2020-11-06 | 姚智伟 | 集成离子泵的x射线管 |
| KR102330120B1 (ko) * | 2021-01-28 | 2021-11-23 | 어썸레이 주식회사 | 식물에 전자기파를 조사하는 장치 및 그 방법 |
Family Cites Families (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3970884A (en) | 1973-07-09 | 1976-07-20 | Golden John P | Portable X-ray device |
| US3878394A (en) | 1973-07-09 | 1975-04-15 | John P Golden | Portable X-ray device |
| SU748926A1 (ru) | 1978-01-09 | 1980-07-15 | Предприятие П/Я В-8584 | Рентгеновский генератор |
| US4201921A (en) | 1978-07-24 | 1980-05-06 | International Business Machines Corporation | Electron beam-capillary plasma flash x-ray device |
| US4258262A (en) | 1979-05-03 | 1981-03-24 | Bell Telephone Laboratories, Incorporated | High-power X-ray source |
| US4238682A (en) | 1979-05-03 | 1980-12-09 | Bell Telephone Laboratories, Incorporated | High-power X-ray source |
| JPS5619855A (en) * | 1979-07-27 | 1981-02-24 | Nippon Hoso Kyokai <Nhk> | X-ray generator |
| US4368538A (en) | 1980-04-11 | 1983-01-11 | International Business Machines Corporation | Spot focus flash X-ray source |
| US4622687A (en) | 1981-04-02 | 1986-11-11 | Arthur H. Iversen | Liquid cooled anode x-ray tubes |
| US4577340A (en) | 1983-09-19 | 1986-03-18 | Technicare Corporation | High vacuum rotating anode X-ray tube |
| US4625324A (en) | 1983-09-19 | 1986-11-25 | Technicare Corporation | High vacuum rotating anode x-ray tube |
| US4612477A (en) | 1983-12-22 | 1986-09-16 | Yale University | Triggering device for a vacuum arc in a plasma centrifuge |
| US4618972A (en) | 1984-09-07 | 1986-10-21 | At&T Bell Laboratories | X-ray source comprising double-angle conical target |
| JPS61104599A (ja) | 1984-10-25 | 1986-05-22 | 工業技術院長 | プラズマ生成のための放電トリガ−方法 |
| JPS61138436A (ja) | 1984-12-10 | 1986-06-25 | Hitachi Ltd | プラズマ軟ｘ線発生装置 |
| JPS61173496A (ja) | 1985-01-28 | 1986-08-05 | Nippon Telegr & Teleph Corp <Ntt> | プラズマｘ線発生装置 |
| JPS61225798A (ja) | 1985-03-29 | 1986-10-07 | 三菱電機株式会社 | プラズマ発生装置 |
| JPS61233998A (ja) | 1985-03-29 | 1986-10-18 | 三菱電機株式会社 | プラズマ発生装置 |
| JPS62119844A (ja) * | 1985-11-20 | 1987-06-01 | Fujitsu Ltd | プラズマｘ線発生装置 |
| JPS63168942A (ja) * | 1986-12-27 | 1988-07-12 | Hitachi Ltd | プラズマｘ線源 |
| US4866743A (en) | 1987-04-29 | 1989-09-12 | Siemens Aktiengesellschaft | Computer tomography apparatus with a closed circulation cooling system |
| US5054046A (en) * | 1988-01-06 | 1991-10-01 | Jupiter Toy Company | Method of and apparatus for production and manipulation of high density charge |
| US4878235A (en) * | 1988-02-25 | 1989-10-31 | Varian Associates, Inc. | High intensity x-ray source using bellows |
| US4928296A (en) | 1988-04-04 | 1990-05-22 | General Electric Company | Apparatus for cooling an X-ray device |
| US4945562A (en) | 1989-04-24 | 1990-07-31 | General Electric Company | X-ray target cooling |
| FR2703556B1 (fr) | 1993-03-30 | 1995-05-19 | Centre Nat Rech Scient | Générateur impulsionnel de rayons X. |
| US5442677A (en) | 1993-10-26 | 1995-08-15 | Golden; John | Cold-cathode x-ray emitter and tube therefor |
| US6031241A (en) | 1997-03-11 | 2000-02-29 | University Of Central Florida | Capillary discharge extreme ultraviolet lamp source for EUV microlithography and other related applications |
| DE19753696A1 (de) | 1997-12-03 | 1999-06-17 | Fraunhofer Ges Forschung | Vorrichtung und Verfahren zur Erzeugung von Extrem-Ultraviolettstrahlung und weicher Röntgenstrahlung aus einer Gasentladung |
| CA2241116C (en) | 1998-06-19 | 2009-08-25 | Liyan Zhang | Radiation (e.g. x-ray pulse) generator mechanisms |
| US6295332B1 (en) | 1999-06-12 | 2001-09-25 | Robert Allen Selzer | Method of improving x-ray lithography in the sub 100nm range to create high quality semiconductor devices |
| US6430260B1 (en) | 2000-12-29 | 2002-08-06 | General Electric Company | X-ray tube anode cooling device and systems incorporating same |
| JP2002208294A (ja) * | 2001-01-12 | 2002-07-26 | Toshiba Corp | リダンダンシーシステムを有する半導体記憶装置 |
| US6804327B2 (en) | 2001-04-03 | 2004-10-12 | Lambda Physik Ag | Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays |
| US7127035B2 (en) | 2001-08-29 | 2006-10-24 | Kabushiki Kaisha Toshiba | Rotary anode type X-ray tube |
| US6714624B2 (en) | 2001-09-18 | 2004-03-30 | Euv Llc | Discharge source with gas curtain for protecting optics from particles |
| DE10151080C1 (de) | 2001-10-10 | 2002-12-05 | Xtreme Tech Gmbh | Einrichtung und Verfahren zum Erzeugen von extrem ultravioletter (EUV-)Strahlung auf Basis einer Gasentladung |
| DE10260458B3 (de) | 2002-12-19 | 2004-07-22 | Xtreme Technologies Gmbh | Strahlungsquelle mit hoher durchschnittlicher EUV-Strahlungsleistung |
| DE10304936B3 (de) | 2003-02-06 | 2004-10-28 | Siemens Ag | Drehanode für eine Röntgenröhre mit einem Anodenkörper aus Faserwerkstoff sowie Verfahren zu deren Herstellung |
| DE10305701B4 (de) | 2003-02-07 | 2005-10-06 | Xtreme Technologies Gmbh | Anordnung zur Erzeugung von EUV-Strahlung mit hohen Repetitionsraten |
-
2006
- 2006-10-17 US US11/581,954 patent/US7502446B2/en not_active Expired - Fee Related
- 2006-10-18 EP EP06847280A patent/EP1938671A4/en not_active Withdrawn
- 2006-10-18 CA CA002626127A patent/CA2626127A1/en not_active Abandoned
- 2006-10-18 WO PCT/IB2006/004052 patent/WO2007066239A2/en not_active Ceased
- 2006-10-18 JP JP2008536156A patent/JP2009512173A/ja not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO2007066239A3 (en) | 2007-11-22 |
| EP1938671A4 (en) | 2012-05-23 |
| US7502446B2 (en) | 2009-03-10 |
| WO2007066239A2 (en) | 2007-06-14 |
| US20070086572A1 (en) | 2007-04-19 |
| EP1938671A2 (en) | 2008-07-02 |
| JP2009512173A (ja) | 2009-03-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Discontinued |
Effective date: 20131018 |