CA2600524C - Thin film production method and apparatus - Google Patents

Thin film production method and apparatus Download PDF

Info

Publication number
CA2600524C
CA2600524C CA2600524A CA2600524A CA2600524C CA 2600524 C CA2600524 C CA 2600524C CA 2600524 A CA2600524 A CA 2600524A CA 2600524 A CA2600524 A CA 2600524A CA 2600524 C CA2600524 C CA 2600524C
Authority
CA
Canada
Prior art keywords
particles
substrate
deposited
filter substrate
nanotube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA2600524A
Other languages
English (en)
French (fr)
Other versions
CA2600524A1 (en
Inventor
Raouf O. Loutfy
Alexander P. Moravsky
Charles N. Hassen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Materials and Electrochemical Research Corp
Original Assignee
Materials and Electrochemical Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Materials and Electrochemical Research Corp filed Critical Materials and Electrochemical Research Corp
Publication of CA2600524A1 publication Critical patent/CA2600524A1/en
Application granted granted Critical
Publication of CA2600524C publication Critical patent/CA2600524C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/168—After-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/24—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer not being coherent before laminating, e.g. made up from granular material sprinkled onto a substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Composite Materials (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Filtering Materials (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
CA2600524A 2005-03-10 2006-03-10 Thin film production method and apparatus Expired - Fee Related CA2600524C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US66041205P 2005-03-10 2005-03-10
US60/660,412 2005-03-10
PCT/US2006/008622 WO2006099156A2 (en) 2005-03-10 2006-03-10 Thin film production method and apparatus

Publications (2)

Publication Number Publication Date
CA2600524A1 CA2600524A1 (en) 2006-09-21
CA2600524C true CA2600524C (en) 2013-12-03

Family

ID=36992275

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2600524A Expired - Fee Related CA2600524C (en) 2005-03-10 2006-03-10 Thin film production method and apparatus

Country Status (6)

Country Link
US (1) US7771784B2 (https=)
EP (1) EP1877255A4 (https=)
JP (1) JP4993642B2 (https=)
KR (1) KR20070116866A (https=)
CA (1) CA2600524C (https=)
WO (1) WO2006099156A2 (https=)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4864093B2 (ja) 2005-07-28 2012-01-25 ナノコンプ テクノロジーズ インコーポレイテッド ナノ繊維質材料の形成および収穫に関するシステムおよび方法
CN100591412C (zh) * 2006-12-27 2010-02-24 清华大学 纳米薄膜的制备方法
US8951632B2 (en) 2007-01-03 2015-02-10 Applied Nanostructured Solutions, Llc CNT-infused carbon fiber materials and process therefor
US8951631B2 (en) 2007-01-03 2015-02-10 Applied Nanostructured Solutions, Llc CNT-infused metal fiber materials and process therefor
US9005755B2 (en) 2007-01-03 2015-04-14 Applied Nanostructured Solutions, Llc CNS-infused carbon nanomaterials and process therefor
JP5595737B2 (ja) * 2007-02-27 2014-09-24 ナノコンプ テクノロジーズ インコーポレイテッド 熱保護材料およびその製造方法
GB0708294D0 (en) * 2007-04-28 2007-06-06 Q Flo Ltd A continuous process for preparing and collecting nanotube films that are supporated by a substrate
CN101315974B (zh) * 2007-06-01 2010-05-26 清华大学 锂离子电池负极及其制备方法
US9061913B2 (en) 2007-06-15 2015-06-23 Nanocomp Technologies, Inc. Injector apparatus and methods for production of nanostructures
FI20075482A7 (fi) 2007-06-25 2008-12-26 Canatu Oy Kuituverkostot sekä menetelmä ja laite kuituverkostojen jatkuvasti tai erinä tapahtuvaan tuotantoon
JP4811690B2 (ja) * 2007-07-06 2011-11-09 独立行政法人産業技術総合研究所 カーボンナノチューブ成膜方法及び成膜装置
JP2011508364A (ja) 2007-08-07 2011-03-10 ナノコンプ テクノロジーズ インコーポレイテッド 非金属電気伝導性および熱伝導性ナノ構造体ベースアダプター
JP5205672B2 (ja) * 2007-08-29 2013-06-05 独立行政法人物質・材料研究機構 フラーレン細線付き基盤とその製造方法
CN101450288B (zh) * 2007-11-30 2012-08-29 清华大学 过滤膜及其制备方法
FI20085085A0 (fi) * 2008-01-31 2008-01-31 Jyrki Maekelae Rullalta rullalle -menetelmä ja pinnoituslaite
KR100922399B1 (ko) * 2008-02-29 2009-10-19 고려대학교 산학협력단 전자방출원, 이를 적용한 전자장치 및 전자방출원의제조방법
GB0805837D0 (en) * 2008-03-31 2008-06-04 Qinetiq Ltd Chemical Vapour Deposition Process
US10358535B2 (en) * 2008-04-25 2019-07-23 The University Of Kentucky Research Foundation Thermal interface material
WO2009137722A1 (en) 2008-05-07 2009-11-12 Nanocomp Technologies, Inc. Carbon nanotube-based coaxial electrical cables and wiring harness
JP5968621B2 (ja) 2008-05-07 2016-08-10 ナノコンプ テクノロジーズ インコーポレイテッド ナノ構造体ベースの加熱装置およびその使用方法
US20100235954A1 (en) * 2008-05-13 2010-09-16 Nanoink, Inc. Dual-tip cantilever
US7993524B2 (en) * 2008-06-30 2011-08-09 Nanoasis Technologies, Inc. Membranes with embedded nanotubes for selective permeability
KR100904218B1 (ko) 2008-09-16 2009-06-25 주식회사 나노베이스 탄소 나노튜브 코팅 장치 및 그 방법
KR101082831B1 (ko) * 2008-11-25 2011-11-11 금호석유화학 주식회사 탄소나노튜브 합성장치
KR101162686B1 (ko) 2008-12-01 2012-07-05 주식회사 나노베이스 탄소 나노튜브 코팅 장치 및 그 방법
FI124440B (fi) * 2009-01-28 2014-08-29 Canatu Oy Rakenteita, jotka käsittävät korkean aspektisuhteen omaavia molekyylirakenteita, ja valmistusmenetelmiä
US20100227134A1 (en) 2009-03-03 2010-09-09 Lockheed Martin Corporation Method for the prevention of nanoparticle agglomeration at high temperatures
BRPI1014162A2 (pt) * 2009-04-10 2016-04-26 Applied Nanostructured Sols método e aparelho para uso de um forno vertical para infundir nanotubos de carbono á fibra
JP2010254494A (ja) * 2009-04-22 2010-11-11 Nec Corp ナノチューブ状物質の分離方法、製造方法及び分離装置
CN101920955B (zh) * 2009-06-09 2012-09-19 清华大学 碳纳米管膜保护结构及其制备方法
TWI462838B (zh) * 2009-06-18 2014-12-01 Hon Hai Prec Ind Co Ltd 奈米碳管膜保護結構及其製備方法
EP2442681A1 (en) * 2009-06-19 2012-04-25 Under Armour, Inc. Nanoadhesion structures for sporting gear
KR20120036890A (ko) 2009-08-03 2012-04-18 어플라이드 나노스트럭처드 솔루션스, 엘엘씨. 복합재 섬유에 나노입자의 결합
AU2011302314A1 (en) 2010-09-14 2013-02-28 Applied Nanostructured Solutions, Llc Glass substrates having carbon nanotubes grown thereon and methods for production thereof
AU2011305809A1 (en) 2010-09-22 2013-02-28 Applied Nanostructured Solutions, Llc Carbon fiber substrates having carbon nanotubes grown thereon and processes for production thereof
JP6014603B2 (ja) 2011-01-04 2016-10-25 ナノコンプ テクノロジーズ インコーポレイテッド ナノチューブベースの絶縁体
TWI441940B (zh) * 2011-06-09 2014-06-21 識驊科技股份有限公司 圖案化導電元件的製備方法
CN102994980B (zh) * 2012-12-13 2015-01-14 苏州汉纳材料科技有限公司 高导电碳纳米管薄膜的制备方法及装置
US9718691B2 (en) 2013-06-17 2017-08-01 Nanocomp Technologies, Inc. Exfoliating-dispersing agents for nanotubes, bundles and fibers
WO2017136806A1 (en) 2016-02-04 2017-08-10 General Nano Llc Carbon nanotube sheet structure and method for its making
EP3174705B1 (en) 2014-07-30 2019-11-27 General Nano LLC Carbon nanotube sheet structure and method for its making
WO2016025532A1 (en) 2014-08-11 2016-02-18 The Arizona Board Of Regents On Behalf Of The University Of Arizona Aligned graphene-carbon nanotube porous carbon composite
WO2016126818A1 (en) 2015-02-03 2016-08-11 Nanocomp Technologies, Inc. Carbon nanotube structures and methods for production thereof
US10758936B2 (en) 2015-12-08 2020-09-01 The Boeing Company Carbon nanomaterial composite sheet and method for making the same
US10581082B2 (en) 2016-11-15 2020-03-03 Nanocomp Technologies, Inc. Systems and methods for making structures defined by CNT pulp networks
US11279836B2 (en) 2017-01-09 2022-03-22 Nanocomp Technologies, Inc. Intumescent nanostructured materials and methods of manufacturing same
CN109295451B (zh) * 2018-10-12 2021-04-09 哈尔滨工业大学 等离子体辅助气溶胶沉积成膜方法及气溶胶沉积装置
FI129565B (en) 2019-04-24 2022-04-29 Canatu Oy Apparatuses and method for oriented deposition

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6630772B1 (en) * 1998-09-21 2003-10-07 Agere Systems Inc. Device comprising carbon nanotube field emitter structure and process for forming device
AUPQ304199A0 (en) * 1999-09-23 1999-10-21 Commonwealth Scientific And Industrial Research Organisation Patterned carbon nanotubes
JP2005097003A (ja) * 2000-05-31 2005-04-14 Nec Corp カーボンナノチューブの固着方法
US7374730B2 (en) * 2001-03-26 2008-05-20 National Research Council Of Canada Process and apparatus for synthesis of nanotubes
JP2002361599A (ja) * 2001-06-07 2002-12-18 Sony Corp カーボン・ナノチューブ構造体及びその製造方法、冷陰極電界電子放出素子及びその製造方法、並びに、冷陰極電界電子放出表示装置及びその製造方法
US6835591B2 (en) * 2001-07-25 2004-12-28 Nantero, Inc. Methods of nanotube films and articles
US6749862B2 (en) * 2001-08-06 2004-06-15 Phillip G. Landers Method and composition of disrupting feeding patterns of woodpeckers
US7138100B2 (en) * 2001-11-21 2006-11-21 William Marsh Rice Univesity Process for making single-wall carbon nanotubes utilizing refractory particles
US6902658B2 (en) * 2001-12-18 2005-06-07 Motorola, Inc. FED cathode structure using electrophoretic deposition and method of fabrication
US6713519B2 (en) * 2001-12-21 2004-03-30 Battelle Memorial Institute Carbon nanotube-containing catalysts, methods of making, and reactions catalyzed over nanotube catalysts
GB2385864A (en) * 2002-02-28 2003-09-03 Qinetiq Ltd Production of nanocarbons
US7261852B2 (en) * 2002-07-19 2007-08-28 University Of Florida Research Foundation, Inc. Transparent electrodes from single wall carbon nanotubes
JP3998241B2 (ja) * 2002-10-18 2007-10-24 キヤノン株式会社 カーボンファイバーが固定された基体の製造方法
US7150801B2 (en) * 2003-02-26 2006-12-19 Mitsubishi Gas Chemical Company, Inc. Process for producing cold field-emission cathodes
JP3869394B2 (ja) * 2003-06-30 2007-01-17 富士通株式会社 微粒子の堆積方法及びカーボンナノチューブの形成方法
JP2007523822A (ja) * 2004-01-15 2007-08-23 ナノコンプ テクノロジーズ インコーポレイテッド 伸長した長さのナノ構造の合成のためのシステム及び方法
JP4864093B2 (ja) * 2005-07-28 2012-01-25 ナノコンプ テクノロジーズ インコーポレイテッド ナノ繊維質材料の形成および収穫に関するシステムおよび方法

Also Published As

Publication number Publication date
CA2600524A1 (en) 2006-09-21
EP1877255A2 (en) 2008-01-16
WO2006099156A3 (en) 2007-02-15
KR20070116866A (ko) 2007-12-11
JP4993642B2 (ja) 2012-08-08
JP2008535752A (ja) 2008-09-04
WO2006099156A2 (en) 2006-09-21
EP1877255A4 (en) 2011-03-30
US20080308209A1 (en) 2008-12-18
US7771784B2 (en) 2010-08-10

Similar Documents

Publication Publication Date Title
CA2600524C (en) Thin film production method and apparatus
KR101289256B1 (ko) 탄소 나노튜브의 성장 및 수득 방법
EP2024275B1 (en) Nanostructure-reinforced composite articles and methods
CN101959793B (zh) 碳纳米管的制造方法及碳纳米管的制造装置
EP2900595B1 (en) Method for making carbon nanostructures
EP2193097B1 (en) Nanostructure-reinforced composite articles and methods
KR102223303B1 (ko) 탄소 나노구조물 층의 제조 방법
CN100433251C (zh) 形成碳纳米管的方法及其形成半导体金属线和电感的方法
Zhu et al. Direct fabrication of single-walled carbon nanotube macro-films on flexible substrates
KR101254666B1 (ko) 탄소 섬유 표면에 대한 접착력이 향상된 탄소 섬유-탄소 나노튜브 복합체와 그 제조 방법
US7713577B2 (en) Preparation of graphitic articles
Zhou et al. Multi-directional growth of aligned carbon nanotubes over catalyst film prepared by atomic layer deposition
Kasi et al. Synthesis of carbon nanotube and carbon nanofiber in nanopore of anodic aluminum oxide template by chemical vapor deposition at atmospheric pressure
Ren et al. Technologies to achieve carbon nanotube alignment
Ikram et al. Synthesis Protocol
Pradhan et al. Synthesis of beaded and entwined carbon nanofibers in Ni: Al alloy catalyst
Wang et al. Formation of carbon capsules from an amorphous carbon film by Ga and Ni/Co catalysts in a transmission electron microscope
Komova et al. Nanosized carbon fibers located onto ceramics
MX2008000293A (en) Methods for growing and harvesting carbon nanotubes

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed

Effective date: 20150310